Large-size mask plate cleaning device
By setting a bristle-with-cover outside the nozzle of the large-sized mask cleaning device, and combining a moving arm and a rotating stage, the problem of difficult removal of foreign objects on the masking plate and sputtering is solved, achieving efficient cleaning effect.
Patent Information
- Application Number
- CN202421751766.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-23
- Publication Date
- 2025-05-23
- Estimated Expiration
- 2034-07-23
AI Technical Summary
During the cleaning process, it is difficult to remove foreign matter adhered to the surface, and water mist is prone to splashing to other areas, affecting the cleaning effect.
A large-size mask plate cleaning device is designed, using a cover with bristles to set up outside the nozzle, combining a mobile arm and a rotating stage, and cleaning with high-pressure water and bristles to prevent water mist from sputtering and scratching the mask plate.
It effectively avoids water mist sputtering to other areas, prevents scratches on the mask plate surface, and improves the cleaning effect of the mask plate surface through the combination of high-pressure water and bristles.
Smart Images
Figure CN222896343U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of mask cleaning, in particular to a large-size mask cleaning device. Background Art
[0002] The mask, also known as the photomask, is made of quartz glass as the substrate. First, a layer of metal chromium is plated on the quartz glass substrate, and then photoresist is coated on the chromium layer to make it a photosensitive material. The designed circuit pattern is exposed to the photoresist through electronic laser equipment, and the exposed area is developed, etched, and demolded to form a circuit pattern on the metal chromium, becoming a photomask master similar to the exposed film. When the mask is undergoing the glue coating and photolithography process, the back of the mask is in full contact with the stage of the machine, which will cause a large amount of foreign matter to adhere to the mask, increasing the difficulty of cleaning. Therefore, how to wash the large particle contaminants on the surface of the mask has become a problem that needs to be solved at present. Utility Model Content
[0003] 1. Technical issues to be resolved
[0004] In view of the deficiencies in the prior art, the utility model provides a large-size mask cleaning device, which solves the problem that it is inconvenient to clean foreign matter adhered to the surface of the mask during daily cleaning of the existing large-size mask, and the water mist during the flushing process is easy to splash on the surface of the mask to other areas.
[0005] (II) Technical solution
[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: a large-size mask cleaning device, comprising a mask cleaning platform and a mask detachably mounted on the mask cleaning platform, the mask cleaning platform can drive the mask to rotate, a nozzle is installed above the mask through a movable arm, the nozzle is connected to a water inlet pipe through a water spray valve, a connecting shell is fixedly provided on the outside of the water spray valve, the connecting shell is installed together with one end of the movable arm, an outer cover is detachably installed on the lower part of the connecting shell, bristles are evenly arranged on the end surface of the outer cover, a slit nozzle is arranged inside the nozzle, a fan-shaped water curtain is sprayed, and during the flushing process, the fan-shaped water curtain is sprayed within the range of the outer cover.
[0007] Preferably, one end of the movable arm close to the mask is fixedly connected with a connecting head, the connecting head is detachably connected to the connecting shell, and the connecting shell is fixedly connected to the outer cover by fixing screws.
[0008] Preferably, the connecting shell is provided with a countersunk hole matching the fixing screw, and the outer cover is arranged with a threaded hole matching the fixing screw.
[0009] Preferably, the water spray valve is fixedly arranged in the inner cavity of the connecting shell via a fixed shaft, a pipeline notch is provided on the outer cover, and the water inlet pipe passes through the pipeline notch.
[0010] Preferably, the outer cover is made of PP material, and the bristles are nylon brushes.
[0011] (III) Beneficial effects
[0012] The utility model has the following beneficial effects:
[0013] This large-size mask cleaning device, by providing an outer cover with bristles on the outside of the nozzle, can effectively prevent the nozzle from splashing water mist to other areas during the rinsing process when the brush contacts the mask. At the same time, the contact between the brush and the mask can prevent the mask surface from being scratched. The moving arm drives the nozzle to swing above the mask to start rinsing. As the mask cleaning stage drives the mask to rotate, the mist-like high-pressure water sprayed from the nozzle can clean the dirt on the mask. During the rotation of the mask, the bristles can brush the adhesion on its surface with high-pressure water to improve the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0015] Figure 2 This is a schematic diagram of the installation layout of the water spray valve and nozzle of the utility model;
[0016] Figure 3 It is a schematic diagram of the overall structure of the outer cover of the utility model.
[0017] In the figure: 1. mask cleaning stage; 2. mask; 3. moving arm; 4. connecting head; 5. connecting shell; 6. fixing screw; 7. water spray valve; 8. fixed axis; 9. nozzle; 10. water inlet pipe; 11. outer cover; 12. bristles; 13. pipe slot. DETAILED DESCRIPTION
[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0019] See also Figure 1The utility model provides a technical solution: a large-size mask cleaning device, comprising a mask cleaning platform 1 and a mask 2 detachably mounted on the mask cleaning platform 1, the mask cleaning platform 1 can drive the mask 2 to rotate, a nozzle 9 is mounted above the mask 2 through a movable arm 3, the nozzle 9 is connected to a water inlet pipe 10 through a water spray valve 7, a connecting shell 5 is fixedly arranged on the outside of the water spray valve 7, the connecting shell 5 is mounted together with one end of the movable arm 3, an outer cover 11 is detachably mounted on the lower part of the connecting shell 5, bristles 12 are evenly arranged on the end surface of the outer cover 11, a slit nozzle is arranged inside the nozzle 9, a fan-shaped water curtain is sprayed, and during the flushing process, the fan-shaped water curtain is sprayed within the range of the outer cover 11.
[0020] The utility model provides an outer cover 11 with bristles 12 on the outside of the nozzle 9, which can effectively prevent the nozzle 9 from splashing water mist to other areas during the flushing process when the brush contacts the mask 2. At the same time, the contact between the brush and the mask 2 can prevent the surface of the mask 2 from being scratched. The movable arm 3 drives the nozzle 9 to swing to the top of the mask 2 to start flushing. As the mask cleaning stage 1 drives the mask 2 to rotate, the mist-like high-pressure water sprayed from the nozzle 9 can clean the dirt on the mask 2. During the rotation of the mask 2, the bristles 12 can brush the adhesion on its surface with high-pressure water to improve the cleaning effect.
[0021] Reference Figure 1 and 2 As shown, in this embodiment, one end of the movable arm 3 close to the mask 2 is fixedly connected with a connector 4, the connector 4 is detachably connected to the connecting shell 5, and the connecting shell 5 is fixedly connected to the outer cover 11 by fixing screws 6. In daily use, the outer cover 11 and the connecting shell 5, the connecting shell 5 and the movable arm 3 can be conveniently and quickly disassembled and assembled, thereby facilitating daily disassembly, replacement and maintenance operations.
[0022] Reference Figure 2 As shown, in this embodiment, the connection shell 5 is provided with a countersunk hole matching the fixing screw 6, and the outer cover 11 is provided with a threaded hole matching the fixing screw 6. The countersunk hole is provided to help ensure the beauty of the overall installation and avoid the large head of the fixing screw 6 being exposed to affect the overall aesthetic performance.
[0023] Reference Figure 2 and 3 As shown, in this embodiment, the water spray valve 7 is fixedly arranged in the inner cavity of the connecting shell 5 through the fixed shaft 8, and a pipe slot 13 is provided on the outer cover 11, and the water inlet pipe 10 passes through the pipe slot 13. The provided pipe slot 13 can facilitate the passing of the water inlet pipe 10 and ensure the stability of the installation of the water inlet pipe 10, avoiding the traditional way of installing the water inlet pipe 10 from above or below the nozzle 9, which interferes with the daily flushing operation of the nozzle 9.
[0024] Reference Figure 3 As shown, in this embodiment, the outer cover 11 is made of PP material, and the bristles 12 are nylon brushes. By using the outer cover 11 made of PP material, it is easy to reduce the overall production cost and easy to process and shape. By using nylon brushes as bristles 12, when the bristles 12 contact the surface of the mask 2, scratches can be effectively prevented.
[0025] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".
[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A large-size mask cleaning device, comprising a mask cleaning stage and a mask detachably mounted on the mask cleaning stage, wherein the mask cleaning stage can drive the mask to rotate, and a nozzle is mounted above the mask through a movable arm, characterized in that: The nozzle is connected to a water inlet pipe through a water spray valve, a connecting shell is fixedly provided on the outside of the water spray valve, the connecting shell is installed together with one end of the movable arm, an outer cover is detachably installed on the lower part of the connecting shell, bristles are evenly arranged on the end surface of the outer cover, a slit nozzle is provided inside the nozzle to spray a fan-shaped water curtain, and during the flushing process, the fan-shaped water curtain is sprayed within the range of the outer cover.
2. The large-size mask cleaning device according to claim 1, characterized in that: One end of the movable arm close to the mask is fixedly connected with a connecting head, the connecting head is detachably connected to the connecting shell, and the connecting shell is fixedly connected to the outer cover by fixing screws.
3. The large-size mask cleaning device according to claim 2, characterized in that: The connection shell is provided with a countersunk hole matching the fixing screw, and the outer cover is arranged with a threaded hole matching the fixing screw.
4. A large-size mask cleaning device according to claim 1 or 2, characterized in that: The water spray valve is fixedly arranged in the inner cavity of the connecting shell through a fixed shaft, a pipeline notch is opened on the outer cover, and the water inlet pipe passes through the pipeline notch.
5. The large-size mask cleaning device according to claim 4, characterized in that: The outer cover is made of PP material, and the bristles are nylon bristles.