MOCVD (Metal Organic Chemical Vapor Deposition) filtering device

Abstract

The utility model discloses an MOCVD (Metal Organic Chemical Vapor Deposition) filtering device, which comprises a filtering device body and a cleaning component, the filtering device body comprises a shell, an air inlet is arranged on the left side wall of the shell, an air outlet is arranged on the right side wall of the shell, a first filter screen and a second filter screen are detachably arranged in the shell, and the cleaning component is arranged on the first filter screen and the second filter screen. The first filter screen is installed on the left side of the second filter screen, an electromagnet is further installed in the shell, and the electromagnet is installed on the left side of the first filter screen; the cleaning assembly comprises a flow dividing shell and a nozzle. According to the tail gas treatment device, metal particles in tail gas are adsorbed through the electromagnet, and non-metal particles in the tail gas are filtered through the filter screen, so that the metal particles and the non-metal particles are separated when the particles in the tail gas are treated; and meanwhile, the auxiliary assembly is arranged to provide blowing gas to clean the filter screen through backflushing, so that the filter screen is convenient to clean, and the tail gas treatment efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of gas filtration, and particularly relates to a MOCVD filtration device. Background Art

[0002] As a commonly used epitaxial production device, MOCVD equipment uses sources that are flammable, explosive, and highly toxic during growth. Moreover, when growing multi-component, large-area, thin-layer, and ultra-thin-layer heterogeneous materials, a large amount of reaction residue dust will be formed in a high-temperature, airtight, and low-pressure environment, resulting in a large amount of dust in the exhaust gas. Therefore, it is necessary to filter the exhaust gas.

[0003] The dust remaining in the MOCVD equipment contains a large amount of metal and non-metal particles. Existing devices for filtering exhaust gas cannot separate metal particles from non-metal particles. At the same time, the filter screen is prone to clogging, and it is inconvenient to clean during use, which affects the efficiency of exhaust gas filtration. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a MOCVD filtration device, which can solve the problems that metal particles and non-metal particles cannot be separated during the treatment of MOCVD exhaust gas, and the filter screen is clogged and inconvenient to clean, resulting in low filtration efficiency.

[0005] To achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0006] A MOCVD filtration device, comprising:

[0007] A filtration device body, including a housing. The exhaust gas generated by MOCVD is filtered through the housing. An air inlet is provided on the left side wall of the housing, and an air outlet is provided on the right side wall of the housing, so that the exhaust gas enters the housing through the air inlet for filtration, and the filtered exhaust gas is discharged from the housing through the air outlet. A first filter screen and a second filter screen are detachably installed in the housing, and non-metal particles in the exhaust gas are filtered by the first filter screen and the second filter screen. The first filter screen is installed on the left side of the second filter screen, and the pore size of the upper filter screen of the first filter screen is larger than that of the upper filter screen of the second filter screen. Therefore, the particulate matter in the exhaust gas is preliminarily filtered by the first filter screen, and then the particulate matter is filtered clean by the second filter screen. An electromagnet is also installed in the housing, and the metal particles in the exhaust gas can be adsorbed by the electromagnet to filter the metal particles in the exhaust gas. The electromagnet is installed on the left side of the first filter screen, so that the exhaust gas enters the housing and the metal particles are adsorbed by the electromagnet.

[0008] The cleaning component includes a shunt housing and a nozzle. The shunt housing is installed on the inner side wall of the air inlet of the housing, so that the tail gas entering through the air inlet of the housing will be shunted by the shunt housing, thereby diffusing the tail gas and increasing the contact area between the tail gas and the electromagnet when entering the housing, so as to improve the efficiency of the electromagnet in treating metal particles in the tail gas. A plurality of nozzles are provided, and the plurality of nozzles are uniformly installed in a ring around the air outlet of the housing. The nozzles are used to convey the backflush gas. By spraying the high-pressure gas into the housing through the nozzles, the blocked particles in the filter holes of the first filter screen and the second filter screen can be backflushed, so as to dredge the filter holes, thereby improving the filtering efficiency of the first filter screen and the second filter screen for the particles. At the same time, the plurality of nozzles can spray the backflush gas evenly and over a large area into the housing, thereby improving the cleaning efficiency of the filter holes.

[0009] In one or more embodiments of the present invention, a pair of mounting grooves are opened on the upper and lower side walls of the housing, and the first filter screen and the second filter screen are respectively slidably connected in the pair of mounting grooves. The mounting grooves facilitate the disassembly and assembly of the first filter screen and the second filter screen. When the filter holes cannot be cleaned by backflushing or when the first filter screen and the second filter screen need to be replaced, the disassembly and assembly of the first filter screen and the second filter screen are made convenient.

[0010] In one or more embodiments of the present invention, a pair of discharge ports are opened on the bottom wall plate of the housing, and the pair of discharge ports are respectively arranged on the left sides of the first filter screen and the second filter screen, so as to discharge the filtered particles through the discharge ports.

[0011] In one or more embodiments of the present invention, a first discharge port is installed at the lower end of the discharge port on the left side of the first filter screen. Through the first discharge port, the metal particles adsorbed by the electromagnet and the non-metal particles filtered by the first filter screen can be discharged. In order to discharge the metal particles and non-metal particles separately, after the particles of the first filter screen are discharged, the power supply of the electromagnet is cut off, so that the magnetism of the electromagnet disappears, so as to discharge the metal particles. A first discharge cover is covered on the first discharge port, and the first discharge cover is used to control the opening and closing of the first discharge port.

[0012] In one or more embodiments of the present invention, a second discharge port is installed at the lower end of the discharge port on the left side of the second filter screen. The particles intercepted by the first filter screen are discharged through the second discharge port. A second discharge cover is covered on the second discharge port, and the second discharge cover is used to control the opening and closing of the second discharge port.

[0013] In one or more embodiments of the present utility model, a front cover plate is connected to the front side of the housing. Through the front cover plate, the front side of the housing is facilitated to be opened, so as to facilitate the maintenance and replacement of the components inside the housing. A plurality of fixing screws are installed between the front cover plate and the housing, and the fixing screws facilitate the disassembly and assembly of the front cover plate.

[0014] In one or more embodiments of the present utility model, a plurality of diversion holes are formed in the side wall of the diversion housing away from the air inlet of the housing. The plurality of diversion holes are inclined in a manner of spreading outward, so that when the tail gas enters the diversion housing, through the diversion of the diversion holes, the tail gas can be distributed over a large area inside the housing, thereby increasing the contact area between the tail gas and the electromagnet. At the same time, there are residual particles in the diversion housing. Therefore, the diversion housing needs to be easily disassembled and assembled to regularly discharge the residual particles inside the diversion housing.

[0015] In one or more embodiments of the present utility model, the air inlet ends of the plurality of nozzles are all located outside the right side wall of the housing, and the air outlet ends of the nozzles are located inside the right side wall of the housing, so that the nozzles convey the purging gas into the housing for purging and clogging removal.

[0016] In one or more embodiments of the present utility model, an air delivery pipe is installed at the air inlet end of the nozzle, and a connecting pipe is installed on the air delivery pipe. The connecting pipe conveys the gas into the air delivery pipe and is conveyed to the nozzle through the air delivery pipe, so as to provide purging gas for the nozzle.

[0017] In one or more embodiments of the present utility model, an air inlet pipe is installed outside the air inlet of the housing, and the air inlet pipe introduces the tail gas generated by the MOCVD process into the housing. An air outlet pipe is installed outside the air outlet of the housing, and the tail gas is discharged through the air outlet pipe after being processed inside the housing.

[0018] Compared with the prior art, the present utility model adsorbs the metal particles in the tail gas through an electromagnet and filters the non-metal particulate matter in the tail gas through a filter screen, so as to separate the metal and non-metal particulate matter when treating the particulate matter in the tail gas; at the same time, an auxiliary component is provided to provide purging gas to clean the filter screen by backwashing, so that the cleaning of the filter screen is convenient, thereby improving the treatment efficiency of the tail gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments recorded in the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] Figure 1Front view of a MOCVD filtering device in an embodiment of the present utility model;

[0021] Figure 2 Stereogram of a MOCVD filtering device in an embodiment of the present utility model;

[0022] Figure 3 Cross-sectional view of a MOCVD filtering device in an embodiment of the present utility model;

[0023] Figure 4 Profile view of a MOCVD filtering device in an embodiment of the present utility model;

[0024] Figure 5 In an embodiment of the present utility model Figure 4 Enlarged view of part A.

[0025] Main reference numerals description:

[0026] 1 - Filtering device body, 11 - Housing, 12 - First filter screen, 13 - Second filter screen, 14 - Installation groove, 15 - Electromagnet, 16 - First discharge port, 17 - First discharge cover, 18 - Second discharge port, 19 - Second discharge cover, 110 - Front cover plate, 111 - Fixing screw, 2 - Cleaning assembly, 21 - Diverting housing, 22 - Diverting hole, 23 - Nozzle, 24 - Air delivery pipe, 25 - Connecting pipe, 26 - Air inlet pipe, 27 - Air outlet pipe. Detailed implementation manners

[0027] In order to enable those skilled in the art to better understand the technical solutions in the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0028] As Figures 1 to 4 shown, a MOCVD filtering device in an embodiment of the present utility model includes a filtering device body 1 and a cleaning assembly 2.

[0029] As Figures 1 to 4As shown in the figure, the filter device body 1 includes a housing 11, and the tail gas generated by MOCVD is filtered through the housing 11. An air inlet is provided on the left side wall of the housing 11, and an air outlet is provided on the right side wall of the housing 11, so that the tail gas enters the housing 11 through the air inlet for filtration, and the filtered tail gas is discharged from the housing 11 through the air outlet. A first filter screen 12 and a second filter screen 13 are detachably installed in the housing 11, and the non-metallic particles in the tail gas are filtered by the first filter screen 12 and the second filter screen 13. The first filter screen 12 is installed on the left side of the second filter screen 13, and the aperture of the filter screen on the first filter screen 12 is larger than that of the filter screen on the second filter screen 13. Therefore, the particulate matter in the tail gas is preliminarily filtered by the first filter screen 12, and then the particulate matter is filtered clean by the second filter screen 13. An electromagnet 15 is also installed in the housing 11, and the metal particles in the tail gas can be adsorbed by the electromagnet 15, so as to filter the metal particles in the tail gas. The electromagnet 15 is installed on the left side of the first filter screen 12, so that the tail gas entering the housing 11 adsorbs the metal particles through the electromagnet 15.

[0030] Preferably, in order to separate the metal particles and non-metallic particles in the tail gas, when the tail gas enters the housing 11, first, the metal particles in the tail gas are adsorbed by the electromagnet 15, so that the metal particles in the tail gas are filtered; then the tail gas will flow through the first filter screen 12 and the second filter screen 13, so that the non-metallic particles in the tail gas are filtered clean by the first filter screen 12 and the second filter screen 13. At the same time, when the electromagnet 15 is in use, it can have extremely strong magnetism when it is energized, so as to realize the filtration of metal impurities in the tail gas. After the power is cut off, the magnetism will disappear immediately, so that it is convenient to clean the metal particulate matter adsorbed by the electromagnet 15, and the treatment of metal impurities is convenient.

[0031] As Figure 3 shown in the figure, a pair of installation grooves 14 are opened on the upper and lower side walls of the housing 11, and the first filter screen 12 and the second filter screen 13 are respectively slidably connected in a pair of installation grooves 14. The installation grooves 14 make it convenient to disassemble and assemble the first filter screen 12 and the second filter screen 13. When the filter holes cannot be cleaned by back blowing, or when the first filter screen 12 and the second filter screen 13 are replaced, it is convenient to disassemble and assemble the first filter screen 12 and the second filter screen 13.

[0032] As Figure 3 and Figure 4 shown in the figure, a pair of discharge ports are opened on the bottom wall plate of the housing 11, and the pair of discharge ports are respectively arranged on the left sides of the first filter screen 12 and the second filter screen 13, so as to discharge the filtered particulate matter through the discharge ports.

[0033] As Figure 3 and Figure 4As shown in the figure, a first discharge port 16 is installed at the lower end of the discharge port on the left side of the first filter screen 12. Through the first discharge port 16, the metal particles adsorbed by the electromagnet 15 and the non-metal particles filtered by the first filter screen 12 can be discharged. In order to discharge the metal particles and non-metal particles separately, after the particulate matter on the first filter screen 12 is discharged, the power supply of the electromagnet 15 is cut off, so that the magnetism of the electromagnet 15 disappears, so that the metal particles can be discharged. A first discharge cover 17 is connected to the first discharge port 16, and the first discharge cover 17 is used to control the switch of the first discharge port 16.

[0034] As Figure 3 and Figure 4 shown in the figure, a second discharge port 18 is installed at the lower end of the discharge port on the left side of the second filter screen 13. The particulate matter intercepted by the first filter screen 12 is discharged through the second discharge port 18. A second discharge cover 19 is connected to the second discharge port 18, and the second discharge cover 19 is used to control the switch of the second discharge port 18.

[0035] As Figure 2 shown in the figure, a front cover plate 110 is connected to the front side of the housing 11. Through the front cover plate 110, the front side of the housing 11 is convenient to open, so as to facilitate the maintenance and replacement of the components inside the housing 11. A plurality of fixing screws 111 are installed between the front cover plate 110 and the housing 11, and the fixing screws 111 make it convenient to disassemble and assemble the front cover plate 110.

[0036] As Figure 3 and Figure 4 shown in the figure, the cleaning assembly 2 includes a shunt housing 21 and nozzles 23. The shunt housing 21 is installed on the inner side wall of the air inlet of the housing 11, so that the tail gas entering through the air inlet of the housing 11 will be shunted by the shunt housing 21, so that the tail gas diffuses, increasing the contact area between the tail gas entering the housing 11 and the electromagnet 15, thereby improving the efficiency of the electromagnet 15 in treating metal particles in the tail gas. A plurality of nozzles 23 are provided, and the plurality of nozzles 23 are uniformly installed in a ring around the air outlet of the housing 11. The nozzles 23 are used to convey the back blowing gas. By spraying the high-pressure gas into the housing 11 through the nozzles 23, the particulate matter blocked in the filter holes of the first filter screen 12 and the second filter screen 13 can be back blown, so as to dredge the filter holes, thereby improving the filtering efficiency of the first filter screen 12 and the second filter screen 13 for particulate matter. At the same time, the plurality of nozzles 23 can spray the back blowing gas evenly and over a large area into the housing 11, thereby improving the efficiency of cleaning the filter holes.

[0037] As Figure 5As shown in the figure, a plurality of diversion holes 22 are formed in the side wall of the diversion housing 21 away from the air inlet of the housing 11. The plurality of diversion holes 22 are inclined in a manner of spreading outward. When the tail gas enters the diversion housing 21, through the diversion of the diversion holes 22, the tail gas can be distributed over a large area in the housing 11, thereby increasing the contact area between the tail gas and the electromagnet 15. At the same time, there are residual particles in the diversion housing 21. Therefore, the diversion housing 21 needs to be easily disassembled and assembled to regularly discharge the residual particles in the diversion housing 21.

[0038] As Figure 4 shown in the figure, the air inlet ends of the plurality of nozzles 23 are all located outside the right side wall of the housing 11, and the air outlet ends of the nozzles 23 are located inside the right side wall of the housing 11, so that the nozzles 23 convey the purging gas into the housing 11 for purging and clogging removal.

[0039] As Figure 3 and Figure 4 shown in the figure, an air delivery pipe 24 is installed at the air inlet end of the nozzle 23, and a connecting pipe 25 is installed on the air delivery pipe 24. The connecting pipe 25 conveys the gas into the air delivery pipe 24 and is conveyed to the nozzle 23 through the air delivery pipe 24, thereby providing purging gas for the nozzle 23.

[0040] As Figure 3 and Figure 4 shown in the figure, an intake pipe 26 is installed outside the air inlet of the housing 11, and the intake pipe 26 introduces the tail gas generated by the MOCVD process into the housing 11. An outlet pipe 27 is installed outside the air outlet of the housing 11, and the tail gas is discharged through the outlet pipe 27 after being processed in the housing 11.

[0041] During use, the tail gas generated by the MOCVD process is introduced into the diversion housing 21 through the intake pipe 26. After the tail gas is diverted through the diversion holes 22 on the diversion housing 21, the tail gas passes through the electromagnet 15, and the electromagnet 15 can adsorb the metal particles in the tail gas. Then the tail gas flows through the first filter screen 12 and the second filter screen 13, and the non-metal particles in the tail gas are filtered through the first filter screen 12 and the second filter screen 13. Finally, the tail gas will be discharged from the housing 11 through the outlet pipe 27;

[0042] When the first filter screen 12 and the second filter screen 13 have low filtration efficiency due to the clogging of the filter holes by particulate matter, the purging gas is introduced into the air delivery pipe 24 through the connecting pipe 25, and the nozzles 23 can eject the purging gas. Through the reverse purging effect, the impurities in the filter holes are cleaned, thereby cleaning the impurities on the first filter screen 12 and the second filter screen 13, so that the first filter screen 12 and the second filter screen 13 can continue to filter the tail gas.

[0043] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above-mentioned exemplary embodiments, and the present utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present utility model. Any reference signs in the claims should not be construed as limiting the claims involved.

[0044] In addition, it should be understood that although this specification is described according to the embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A MOCVD filtering device, characterized in that: include: The filter device body comprises a shell, an air inlet is arranged on the left side wall of the shell, an air outlet is arranged on the right side wall of the shell, a first filter screen and a second filter screen are detachably installed in the shell, the first filter screen is installed on the left side of the second filter screen, and an electromagnet is also installed in the shell, and the electromagnet is installed on the left side of the first filter screen; The cleaning component comprises a flow dividing shell and a nozzle. The flow dividing shell is installed on the inner wall of the air inlet of the shell. A plurality of nozzles are arranged and evenly installed around the air outlet of the shell in a ring manner.

2. The MOCVD filtering device according to claim 1, characterized in that: A pair of mounting grooves are respectively formed on the upper and lower side walls of the shell, and the first filter screen and the second filter screen are respectively slidably connected in the pair of mounting grooves.

3. The MOCVD filtering device according to claim 1, characterized in that: A pair of discharge ports are provided on the bottom wall plate of the shell, and the pair of discharge ports are respectively arranged on the left sides of the first filter screen and the second filter screen.

4. The MOCVD filtering device according to claim 3, characterized in that: The first discharge port is installed at the lower end of the discharge port on the left side of the first filter screen, and the first discharge port upper cover is connected to the first discharge cover.

5. The MOCVD filtering device according to claim 4, characterized in that: A second discharge port is installed at the lower end of the discharge port located on the left side of the second filter screen, and a second discharge cover is connected to the upper cover of the second discharge port.

6. The MOCVD filtering device according to claim 1, characterized in that: The front side cover of the shell is connected with a front cover plate, and a plurality of fixing screws are installed between the front cover plate and the shell.

7. The MOCVD filtering device according to claim 1, characterized in that: A plurality of diversion holes are formed on the side wall of the diversion housing away from the air inlet of the housing, and the plurality of diversion holes are arranged in an inclined manner so as to diffuse outward.

8. The MOCVD filtering device according to claim 1, characterized in that: The air inlet ends of the plurality of nozzles are all placed on the outer side of the right side wall of the shell, and the air outlet ends of the nozzles are placed on the inner side of the right side wall of the shell.

9. The MOCVD filtering device according to claim 8, characterized in that: An air supply pipe is installed at the air inlet end of the nozzle, and a connecting pipe is installed on the air supply pipe.

10. The MOCVD filtering device according to claim 1, characterized in that: An air inlet pipe is installed on the outer side of the air inlet of the shell, and an air outlet pipe is installed on the outer side of the air outlet of the shell.

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