Substrate conveying mechanical arm

Abstract

The utility model provides a substrate conveying mechanical arm which comprises a body, at least one arm, a first flange and a second flange, wherein the body and the at least one arm are pivoted one by one, and the first flange and the second flange are located at at least one pivoting position. The first flange and the second flange are overlapped with each other and pivot relative to each other through a pivot shaft at the pivot joint. The first inclined plane of the first flange is in contact with the second inclined plane of the second flange, so that the overlapping thickness and inclination of the first flange and the second flange are changed along with relative pivoting, and the substrate conveying mechanical arm can provide stable support at the movable joint and overcome the situation that the arm structure droops.

Description

Technical Field

[0001] The utility model relates to a substrate transfer device, and particularly to a substrate transfer robotic arm. Background Art

[0002] Using a computer-controlled robotic arm for substrate handling is a common means in modern factories. Whether in the semiconductor industry or the display industry, scenes where robotic arms carry and transfer glass plates, liquid crystal panels, or wafers can be frequently seen.

[0003] As the object pick-and-place stroke increases, the robotic arm can adopt multi-section arms to cope with the required stroke. However, as the arm unfolds, the weight of the object increases the moment at the fulcrum of the robotic arm, thereby causing the end of the arm (or the last section of the arm) to easily sag. Therefore, the existing solution to avoid the aforementioned sagging situation is to provide a set screw at the joint of the multi-section arm to jack up the section of the arm through the set screw to avoid arm sagging.

[0004] However, the function of the set screw is to jack up the structure by singly abutting against the arm structure, which is not conducive to the stability of the arm during movement. Moreover, the set screw is only suitable for being applied at the joint where one side is fixed and the other side moves. In other words, when applied to multi-section arms, the set screw can mostly only be set between the base and the first section of the arm. Once the set screw is at the joint between two arms that will move independently (i.e., the joints of the remaining arms other than the aforementioned first section of the arm), the moment generated by the set screw on the arm it abuts against is in a changing state, which instead causes instability during the operation of the arm. Summary of the Utility Model

[0005] The utility model provides a substrate transfer robotic arm, which can provide stable support at the movable joint and overcome the sagging situation of the arm structure.

[0006] A substrate transfer robotic arm of the utility model includes a body and at least one arm that are sequentially pivotally connected, and a first flange and a second flange located at at least one pivotal connection. The first flange and the second flange are stacked on each other and relatively pivot around the pivot axis at the pivotal connection. The first inclined surface of the first flange contacts the second inclined surface of the second flange, so that the stacked thickness and inclination of the first flange and the second flange change with the relative pivot.

[0007] In an embodiment of the utility model, the above-mentioned first flange has a first notch, the second flange has a second notch, the thickness of the first flange decreases as it moves away from the first notch to form a first inclined surface, and the thickness of the second flange decreases as it moves away from the second notch to form a second inclined surface.

[0008] In an embodiment of the present utility model, the above-mentioned first flange and the second flange respectively have a circular contour. The first notch is located on the circumference of the first flange, and the second notch is located on the circumference of the second flange.

[0009] In an embodiment of the present utility model, the thickness of the above-mentioned first flange is the largest at the first notch and the smallest at the opposite side of the first notch. The central angle difference between the first notch and the opposite side of the first notch is 180 degrees.

[0010] In an embodiment of the present utility model, the thickness of the above-mentioned first flange decreases from the first notch along the circumference of the first flange towards the opposite side of the first notch to form the above-mentioned first inclined surface.

[0011] In an embodiment of the present utility model, the thickness of the above-mentioned second flange is the largest at the second notch and the smallest at the opposite side of the second notch. The central angle difference between the second notch and the opposite side of the second notch is 180 degrees.

[0012] In an embodiment of the present utility model, the thickness of the above-mentioned second flange decreases from the second notch along the circumference of the second flange towards the opposite side of the second notch to form the second inclined surface.

[0013] In an embodiment of the present utility model, the lifting axis of the above-mentioned body is consistent with the axis of the above-mentioned pivot connection.

[0014] Based on the above, the substrate transfer robotic arm is formed by pivotally connecting the body and at least one arm one by one, and the first flange and the second flange are provided at at least one pivot connection. Furthermore, the first flange and the second flange at the pivot connection are stacked on top of each other, and in particular, they are in contact with each other through their inclined surfaces. In this way, when the flanges move relative to each other (i.e., pivot relative to the pivot axis), the first flange and the second flange, which are in surface contact with each other, will change their stacked thickness and inclination. In this way, the aforementioned sagging problem can be overcome, and at the same time, the stability during the pivoting of the arm can be taken into account.

[0015] To make the above features and advantages of the present utility model more obvious and understandable, specific embodiments are hereinafter given and described in detail in conjunction with the accompanying drawings as follows. Brief Description of the Drawings

[0016] Figure 1 is a schematic diagram of a robotic arm according to an embodiment of the present invention;

[0017] Figure 2A is an exploded view of a partial arm;

[0018] Figure 2B is an exploded view of the first flange and the second flange;

[0019] Figure 2CIt is a side view of the first flange and the second flange when they are stacked;

[0020] Figure 3A It is Figure 2A a schematic diagram of the first flange and the second flange of in another state;

[0021] Figure 3B It is Figure 3A a side view of the first flange and the second flange of ;

[0022] Figure 4A It is Figure 3A a schematic diagram of the first flange and the second flange of in another state;

[0023] Figure 4B It is Figure 4A a side view of the first flange and the second flange of ;

[0024] Figure 5 , Figure 6 and Figure 7 are respectively Figure 1 partial enlarged cross-sectional views of different parts of the robotic arm of . Detailed implementation mode

[0025] Figure 1 It is a schematic diagram of a robotic arm according to an embodiment of the present invention. Please refer to Figure 1 , in this embodiment, the substrate transfer robotic arm 100 (hereinafter referred to as the robotic arm 100) includes a body 110 and at least one arm (here, the arms 120, 130, and 140 are taken as examples, but not limited thereto) that are pivotally connected one by one. As Figure 1 shown, the body 110 is pivotally connected to the arm 120, and relative pivoting occurs at the pivot connection with the pivot axis AX3. One end of the arm 120 away from the body 110 is pivotally connected to the arm 130, and relative pivoting occurs at the pivot connection with the pivot axis AX2. One end of the arm 130 away from the pivot connection with the arm 120 is pivotally connected to the arm 140, and relative pivoting occurs at the pivot connection with the pivot axis AX1. Here, the pivot axis AX1, the pivot axis AX2, and the pivot axis AX3 are parallel to each other. Accordingly, for the overall mechanism of the robotic arm 100, the aforementioned multiple pivot connections are regarded as multiple joints J1, J2, and J3 of the robotic arm 100. The arm 140 also has a fork-shaped carrying part for carrying the substrate 200. In this embodiment, the substrate 200 is drawn in the form of a wafer.

[0026] Figure 2A It is a disassembled schematic diagram of part of the arm. Figure 2B It is an exploded schematic diagram of the first flange and the second flange. Please refer to Figure 2A and Figure 2B, shown is a further component composition at joint J1 (the pivoting joint of arms 130 and 140). In this embodiment, the robotic arm 100 further includes a first flange 151 and a second flange 152. The first flange 151 and the second flange 152 are stacked on top of each other and pivot relative to each other about the pivot axis AX1 of the pivoting joint (joint J1). Among them, the first flange 151 has a first inclined surface 151b, the second flange 152 has a second inclined surface 152b, and when the first flange 151 and the second flange 152 are stacked on top of each other, they are presented in a state where the first inclined surface 151b contacts the second inclined surface 152b.

[0027] Furthermore, as Figure 2A shown, taking joint J1 as an example here, screws C1, C2, and C3 respectively pass through the first flange 151 and the second flange 152 to lock the arms 130 and 140 together. When the arms 130 and 140 pivot relative to each other about the pivot axis AX1, they also drive the first flange 151 and the second flange 152 to pivot relative to each other. In addition, as Figure 2A and Figure 2B shown, the first flange 151 and the second flange 152 respectively have circular contours. The first flange 151 has annular enlarged holes SL1, SL2, and SL3, and the second flange 152 has annular enlarged holes SL4, SL5, and SL6. In this embodiment, by staggering (partially corresponding) these annular enlarged holes SL1 - SL6, openings h1, h2, and h3 for the aforementioned screws C1 - C3 to pass through are formed, so that they can be used for positioning and stopping when the first flange 151 and the second flange 152 pivot relative to each other.

[0028] Figure 2C is a side view of the first flange and the second flange when stacked. Please also refer to Figure 2A and Figure 2C , in this embodiment, the first flange 151 has a first notch 151a located on the circumference of the first flange 151. The second flange 152 has a second notch 152a located on the circumference of the second flange 152. Furthermore, the thickness of the first flange 151 decreases as it moves away from the first notch 151a to form the first inclined surface 151b, and the thickness of the second flange 152 decreases as it moves away from the second notch 152a to form the second inclined surface 152b. In this way, when the first flange 151 and the second flange 152 are stacked together, since Figure 2C shown, the first notch 151a is aligned with the second notch 152a, so it is equivalent to the first flange 151 and the second flange 152 after stacking presenting the maximum thickness on the Figure 2C left side and the minimum thickness on the Figure 2C right side.

[0029] From Figure 2B and Figure 2CIt can be seen that the thickness of the first flange 151 is the largest at the first notch 151a, the thickness of the first flange 151 is the smallest at the position opposite to the first notch 151a, and the central angle difference between the position of the first notch 151a and the position opposite to the first notch 151a is 180 degrees. The thickness of the first flange 151 decreases from the position of the first notch 151a along the circumference of the first flange 151 towards the position opposite to the first notch 151a to form a first inclined surface 151b. Similarly, the thickness of the second flange 152 is the largest at the second notch 152a, the thickness of the second flange 152 is the smallest at the position opposite to the second notch 152a, the central angle difference between the position of the second notch 152a and the position opposite to the second notch 152a is 180 degrees, and the thickness of the second flange 152 decreases from the position of the second notch 152a along the circumference of the second flange 152 towards the position opposite to the second notch 152a to form a second inclined surface 152b. In other words, the first flange 151 and the second flange 152 have the same surface profile.

[0030] Figure 3A is Figure 2A a schematic diagram of the first flange and the second flange in another state. Figure 3B is Figure 3A a side view of the first flange and the second flange. Figure 4A is Figure 3A a schematic diagram of the first flange and the second flange in another state. Figure 4B is Figure 4A a side view of the first flange and the second flange. It should be noted that because there is relative pivoting between the first flange 151 and the second flange 152, and at the same time, because of the thickness change of the first flange 151 and the second flange 152 to form inclined surfaces, when pivoting relatively, the stacked thickness and inclination of the first flange 151 and the second flange 152 can change with the relative pivoting, which is described in detail as follows.

[0031] Please first refer to Figure 2B 、 Figure 3A and Figure 4A . In this embodiment, the notch structure is used as a reference, so that the first flange 151 and the second flange 152 have the same thickness change trend. Therefore, when the first flange 151 and the second flange 152 pivot relatively around the pivot axis AX1 and change from the state shown in Figure 2B to the state shown in Figure 3A , it is equivalent to generating a relative pivot angle of 90 degrees. Therefore, when observing the stacked thickness and inclination from the side view perspective, it is like changing from Figure 2C to Figure 3B . Among them, there is a stacked thickness (T1 + B) in Figure 2C , and there is a stacked thickness (T1 + A) in Figure 3B , and the stacked thickness (T1 + B) is significantly greater than the stacked thickness (T1 + A), and Figure 2CThe shown inclination is significantly greater than Figure 3B the shown inclination.

[0032] Furthermore, please compare Figure 4A with Figure 2B . If taking Figure 2B as the reference, then Figure 4A the shown one is equivalent to generating a relative pivot angle of 180 degrees. That is, at this time, from the comparison between Figure 2C and Figure 4B , it can be clearly known that the stacked thickness (T1 + B) of Figure 2C is greater than the stacked thickness T1 of Figure 4B . Wherein, the first notch 151a and the second notch 152a shown in Figure 4 are in a state facing each other, which is equivalent to a 180-degree relative pivot between the first flange 151 and the second flange 152. Therefore, Figure 4B the shown stacked thickness is substantially evenly distributed in thickness, and at this time the inclination is substantially zero, that is, the upper surface of the first flange 151 (the opposite side of the first inclined surface 151b) is parallel to the lower surface of the second flange 152 (the opposite side of the second inclined surface 152b).

[0033] Through the above two paragraphs, the first flange 151 and the second flange 152 can change the stacked thickness and inclination due to relative pivoting, and maintain a surface contact state between the two during the conversion process. In this way, it means that the relative pivoting of the arms 130 and 140 at the joint J1 can ensure its stability. The changes shown in the above Figure 3A or Figure 4A are for reference only. This case does not limit the changing trend of the stacked thickness and inclination reflected by the first flange 151 and the second flange 152 due to the change of the pivot angle, and it can be appropriately adjusted according to the operation requirements of the arms 120, 130, 140 and the load generated by the substrate 200 on them, so as to avoid the situation of the arms 120 - 140 sagging.

[0034] Figure 5 , Figure 6 and Figure 7 are respectively partial enlarged cross-sectional views of different parts of the robotic arm of Figure 1 . Among them, Figure 5 the shown one is the local structure of the robotic arm 100 at the joint J1. Please first refer to Figure 5 and compare Figure 2C with Figure 1 . The first flange 151 and the second flange 152 are in the state as Figure 2C . The change in the inclination generated by them can be reflected in the arm 140 in real time, that is, it is equivalent to a state of being lifted up. As shown in Figure 1 Figure 1 , the arm 140 being lifted up can effectively overcome the load on the arm 140 caused by the substrate 200 being carried on the fork-shaped structure of the arm 140.

[0035] Please refer to Figure 6 and compare with Figure 1 , the first flange 251 and the second flange 252 are located in the pivot mechanism of the joint J2, which is responsible for the relative pivoting (pivot axis AX2) between the arms 120 and 130. The first flange 251 and the second flange 252 are the same as the first flange 151 and the second flange 152 as described above, so they will not be elaborated here.

[0036] Similarly, please refer to Figure 7 and compare with Figure 1 , the first flange 351 and the second flange 352 are located in the pivot mechanism of the joint J3, which is responsible for the relative pivoting (pivot axis AX3) between the arm 120 and the body 110. The first flange 351 and the second flange 352 are the same as the first flange 151 and the second flange 152 (or the first flange 251 and the second flange 252) as described above, so they will not be elaborated here. Another difference from the aforementioned joints J1 and J2 is that the body 110 of this embodiment further has a lifting mechanism (such as a ball screw) for the body 110 to lift along the pivot axis AX3, and the aforementioned arm 120 is pivotally provided on the body 110, wherein the lifting axis is significantly consistent with the pivoting axis (i.e., the pivot axis AX3).

[0037] In other words, through the corresponding relationship between the first flanges 151, 251, 351 and the second flanges 152, 252, 352 of this case, the above flange members can be provided at any joint of the robotic arm 100, so that the robotic arm 100 can overcome the structural deformation (sagging) caused by the load of the substrate 200, and at the same time ensure the stability of the robotic arm 100 during operation.

[0038] To sum up, in the above embodiment of the present invention, the substrate transfer robotic arm is formed by pivotally connecting the body and at least one arm one by one, and a first flange and a second flange are provided at at least one pivoting portion, so that the first flange and the second flange at the pivoting portion are stacked on top of each other, and in particular, they are in contact with each other on their inclined surfaces. In this way, when the flanges generate relative movement (i.e., relative pivoting around the pivot axis), the first flange and the second flange that are in surface contact with each other will change their stacked thickness and inclination, so as to overcome the aforementioned sagging problem and at the same time take into account the stability during the pivoting of the arm.

[0039] Furthermore, since the first flange and the second flange remain in a surface contact state during their relative pivoting process, they have sufficient stability to be applicable to any joint of the robotic arm. Therefore, the robotic arm of this case also has greater applicability, so that designers or users can select the joints where the flange members need to be provided according to the operating conditions and requirements of the robotic arm.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A substrate transfer robot arm, characterized in that: It includes a main body and at least one arm pivotally connected one by one, and a first flange and a second flange located at at least one pivot point, the first flange and the second flange are overlapped with each other and generate relative pivoting about the pivot axis of the pivot point, and the first inclined surface of the first flange contacts the second inclined surface of the second flange so that the overlapping thickness and inclination of the first flange and the second flange change with the relative pivoting.

2. The substrate transfer robot according to claim 1, characterized in that: The first flange has a first notch, the second flange has a second notch, the thickness of the first flange decreases as it moves away from the first notch to form the first inclined surface, and the thickness of the second flange decreases as it moves away from the second notch to form the second inclined surface.

3. The substrate transfer robot according to claim 2, characterized in that: The first flange and the second flange have circular contours respectively. The first notch is located on the circumference of the first flange, and the second notch is located on the circumference of the second flange.

4. The substrate transfer robot according to claim 3, characterized in that: The thickness of the first flange is the largest at the first notch, and the thickness of the first flange is the smallest at a position opposite to the first notch. The central angle difference between the first notch and the position opposite to the first notch is 180 degrees.

5. The substrate transfer robot according to claim 4, characterized in that: The thickness of the first flange decreases gradually from the first notch along the circumference of the first flange toward a position opposite to the first notch to form the first inclined surface.

6. The substrate transfer robot according to claim 3, characterized in that: The thickness of the second flange is the largest at the second notch, and the thickness of the second flange is the smallest at a position opposite to the second notch. The difference in central angle between the second notch and the position opposite to the second notch is 180 degrees.

7. The substrate transfer robot according to claim 6, characterized in that: The thickness of the second flange decreases gradually from the second notch along the circumference of the second flange toward the opposite side of the second notch to form the second inclined surface.

8. The substrate transfer robot according to claim 1, characterized in that: The lifting axis of the main body is consistent with the axis of the pivot connection.

Images