Device capable of changing orientation of sample in molecular beam epitaxy system

Abstract

The utility model provides a device capable of changing the orientation of a sample in a molecular beam epitaxy system. The device comprises a sample support, a sample support supporting table and a conveying rod, the sample support comprises a bottom plate, a supporting plate and a cover plate, the bottom plate, the supporting plate and the cover plate are detachably connected in sequence from bottom to top, the bottom plate, the supporting plate and the cover plate are all in a circular ring shape, the bottom end of the bottom plate is detachably connected with the sample support table, a sample is clamped between the supporting plate and the cover plate, and the sample support table is welded to the conveying rod; and the conveying rod rotates to drive the sample support to rotate so as to change the orientation of the sample. The device capable of changing the orientation of the sample in the molecular beam epitaxy system solves the problems that an existing sample loading device cannot change the orientation of the sample, the sample needs to be taken out, the operation process time is long, the sample loading device only has the function of containing the sample, the sample cannot be fixed, and the sample loading device cannot change the orientation of the sample. Therefore, the risk that the sample is vibrated out of the sample groove exists in the sample conveying process.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a device capable of changing the orientation of a sample in a molecular beam epitaxy system. Background Art

[0002] A molecular beam epitaxy system is an ultra-high vacuum device that evaporates raw materials onto the surface of a sample in the form of a molecular beam or an atomic beam by heating an evaporation source, thereby growing materials and achieving atomic-level precision epitaxy of the materials. The relative positional relationship between the position of the evaporation source and the sample holder determines that the surface of the sample faces downward, and the device for loading the sample cannot be rotated to change the orientation of the sample. Therefore, after the sample growth is completed, the sample needs to be taken out of the cavity to observe the surface, which takes a relatively long time. Moreover, the device for loading the sample only has the function of holding the sample and cannot fix the sample to prevent displacement. Therefore, there is a risk that the sample will be shaken out of the sample slot during the process of transporting the sample. Usually, the growth surface facing downward meets the normal growth requirements; however, for abnormal situations during the growth process, it is sometimes necessary to check the surface condition of the sample (substrate) in a timely manner, and it is best to complete it in the vacuum chamber to prevent oxidation.

[0003] In summary, the existing device for loading samples has the problems that the orientation of the sample cannot be changed, the sample needs to be taken out, the operation process takes a long time, and the device for loading the sample only has the function of holding the sample and cannot fix the sample to prevent displacement. Therefore, there is a risk that the sample will be shaken out of the sample slot during the process of transporting the sample. Summary of the Utility Model

[0004] In order to solve the above problems, the utility model provides a device capable of changing the orientation of a sample in a molecular beam epitaxy system to solve the above problems existing in the prior art.

[0005] According to the first aspect of the utility model, a device capable of changing the orientation of a sample in a molecular beam epitaxy system is provided, including: a sample holder, a sample holder support platform, and a transfer rod;

[0006] The sample holder includes a bottom plate, a support plate, and a cover plate. The bottom plate, the support plate, and the cover plate are detachably connected in sequence from bottom to top. The bottom plate, the support plate, and the cover plate are all annular. The bottom end of the bottom plate is detachably connected to the sample holder support platform. A sample is clamped between the support plate and the cover plate. The sample holder support platform is welded to the transfer rod so that the rotation of the transfer rod drives the rotation of the sample holder to change the orientation of the sample.

[0007] Optionally, the outer diameter and the inner diameter of the support plate are the same as the outer diameter and the inner diameter of the cover plate; a first annular step is provided at the inner circle of the upper end surface of the support plate, and a second annular step is provided at the inner circle of the lower end surface of the cover plate. The sample is located at the first annular step and the second annular step.

[0008] Optionally, three pedestals are provided on the upper end surface of the bottom plate, which are distributed in an equilateral triangle centered on the center of the bottom plate. Each pedestal is provided with a threaded hole with an upward opening. Round holes corresponding to the positions of the three threaded holes are provided on both the support plate and the cover plate. Screws are sequentially passed through the round holes on the cover plate and the support plate and screwed into the corresponding threaded holes to fix the bottom plate, the support plate, and the cover plate.

[0009] Optionally, the shape of the pedestal is a cuboid or a cube.

[0010] Optionally, a first gripper limiting arm is provided on the outer side surface of each pedestal along the radial direction.

[0011] Optionally, a plurality of second gripper limiting arms are provided on the outer side surface of the bottom plate along the radial direction.

[0012] Optionally, two mounting parts are provided on both sides of the bottom end surface of the bottom plate, and the two mounting parts are arranged in parallel. Both mounting parts are hollow structures. The sample support platform has two mounting rods, and the two mounting rods are respectively arranged in one-to-one correspondence with the two mounting parts. Each mounting rod is inserted into the corresponding mounting part.

[0013] Optionally, the shape of the mounting rod is a cuboid.

[0014] With the device for changing the orientation of a sample in a molecular beam epitaxy system of the present utility model, the bottom plate, the support plate, and the cover plate are detachably connected in sequence from bottom to top. The bottom plate, the support plate, and the cover plate are all circular rings. The bottom end of the bottom plate is detachably connected to the sample support platform. A sample is clamped between the support plate and the cover plate. The sample support platform is welded to the transfer rod, so that the rotation of the transfer rod drives the rotation of the sample support to change the orientation of the sample. This application can change the orientation of the sample in situ, that is, turn the surface of the sample to the appropriate position of the glass window in an ultra-high vacuum environment, so as to observe the surface of the sample and make a preliminary judgment on the surface condition of the sample. In addition, this application is beneficial for taking and placing the sample, and can avoid the phenomenon that the relative position between the sample and the sample support changes due to vibration or collision during the sample transfer process. Therefore, the present utility model solves the defects of the existing device for loading samples, which cannot change the orientation of the sample, requires the sample to be taken out, the operation process takes a long time, and the device for loading samples only has the function of holding the sample and cannot fix the sample in place. Therefore, there is a risk that the sample will be shaken out of the sample slot during the sample transfer process. Description of the Drawings

[0015] Figure 1 It is an exploded view of the overall structure of a device for changing the orientation of a sample in a molecular beam epitaxy system provided by the present utility model;

[0016] Figure 2A three-dimensional structural schematic diagram of the first perspective of the bottom plate of a device for changing the orientation of a sample in a molecular beam epitaxy system according to the present utility model;

[0017] Figure 3 A three-dimensional structural schematic diagram of the second perspective of the bottom plate of a device for changing the orientation of a sample in a molecular beam epitaxy system according to the present utility model;

[0018] Figure 4 A three-dimensional structural schematic diagram of the support plate of a device for changing the orientation of a sample in a molecular beam epitaxy system according to the present utility model;

[0019] Figure 5 A sectional view of the support plate of a device for changing the orientation of a sample in a molecular beam epitaxy system according to the present utility model;

[0020] Figure 6 A three-dimensional structural schematic diagram of the cover plate of a device for changing the orientation of a sample in a molecular beam epitaxy system according to the present utility model;

[0021] Figure 7 A structural schematic diagram of the combination of the sample support platform and the transfer rod of a device for changing the orientation of a sample in a molecular beam epitaxy system according to the present utility model.

[0022] List of reference numerals:

[0023] 1. Sample holder; 1-1. Bottom plate; 1-1-1. Base; 1-1-2. Threaded hole; 1-1-3. First gripper limiting arm; 1-1-4. Second gripper limiting arm; 1-1-5. Mounting part; 1-2. Support plate; 1-2-1. First annular step; 1-3. Cover plate; 1-3-1. Second annular step; 2. Sample support platform; 2-1. Mounting rod; 3. Transfer rod; 4. Screw. Detailed implementation manners

[0024] To make the objectives, technical solutions, and advantages of the present utility model clearer, the following will further describe the implementation manners of the present utility model in detail with reference to the accompanying drawings.

[0025] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0026] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0027] Referring to Figures 1 to 7 , a device for changing the orientation of a sample in a molecular beam epitaxy system provided by the present utility model includes: a sample holder 1, a sample holder support 2, and a transfer rod 3;

[0028] The sample holder 1 includes a bottom plate 1-1, a support plate 1-2, and a cover plate 1-3. The bottom plate 1-1, the support plate 1-2, and the cover plate 1-3 are detachably connected in sequence from bottom to top. The bottom plate 1-1, the support plate 1-2, and the cover plate 1-3 are all annular. The bottom end of the bottom plate 1-1 is detachably connected to the sample holder support 2. A sample is clamped between the support plate 1-2 and the cover plate 1-3. The sample holder support 2 is welded to the transfer rod 3 so that the rotation of the transfer rod 3 drives the rotation of the sample holder 1 to change the orientation of the sample.

[0029] Among them, the support plate 1-2 and the cover plate 1-3 are used to fix the sample, which can ensure that the sample does not fall off when the sample is rotated. Moreover, during the sample transfer process, the sample will not change its relative position with respect to the support plate 1-2 and the cover plate 1-3 even if it is vibrated or collided. The sample holder support 2 is mainly used to connect and fix to the transfer rod 3, thereby driving the rotation of the sample holder. In this application, the transfer rod 3 belongs to the prior art and is usually composed of an external protective cover and an internal connecting rod. In order to meet the normal transfer and rotation of the sample holder of this patent, the transfer rod needs to be designed for matching, and this patent does not make special explanations and restrictions.

[0030] In this application, the inner circle radius of the bottom plate 1-1 is 5.5 cm, the outer circle radius is 8 cm, and the thickness is 0.25 cm; the above specifications and dimensions can also be determined according to the actual situation, and the above dimensions are preferred dimensions; the outer diameter of the cover plate 1-3 is smaller than the outer diameter of the bottom plate 1-1.

[0031] A device provided by the present utility model for changing the orientation of a sample in a molecular beam epitaxy system. The bottom plate 1-1, the support plate 1-2, and the cover plate 1-3 are all annular. The bottom end of the bottom plate 1-1 is detachably connected to the sample support platform 2. A sample is clamped between the support plate 1-2 and the cover plate 1-3. The sample support platform 2 is welded to the transfer rod 3, so that the rotation of the transfer rod 3 drives the rotation of the sample support 1 to change the orientation of the sample. This application can change the orientation of the sample in-situ, that is, turn the surface of the sample to the appropriate position of the glass window in an ultra-high vacuum environment, so as to observe the surface of the sample and make a preliminary judgment on the surface condition of the sample. In addition, this application is conducive to the loading and unloading of the sample and can avoid the phenomenon that the relative position of the sample and the sample support 1 changes due to vibration or collision during the transfer of the sample. Therefore, the present utility model solves the defects of the existing device for loading samples, which cannot change the orientation of the sample, requires the sample to be taken out, the operation process takes a long time, and the device for loading samples only has the function of holding the sample and cannot keep the sample fixed, so there is a risk that the sample will be shaken out of the sample slot during the transfer of the sample.

[0032] Referring to Figures 4 to 5 , optionally, the outer diameter and inner diameter of the support plate 1-2 are the same as the outer diameter and inner diameter of the cover plate 1-3; a first annular step 1-2-1 is provided at the inner circle of the upper end surface of the support plate 1-2, and a second annular step 1-3-1 is provided at the inner circle of the lower end surface of the cover plate 1-3. The sample is located at the first annular step 1-2-1 and the second annular step 1-3-1.

[0033] Among them, the specification sizes of the first annular step 1-2-1 and the second annular step 1-3-1 can be designed with different sizes according to the size of the sample. Taking a two-inch sample as an example, the inner diameter of the first annular step 1-2-1 and the second annular step 1-3-1 is 4.9 cm (slightly less than 2 inches), the outer diameter is 5.15 cm (slightly larger than two inches), the thickness of the step is 0.1 cm, and the thickness of the cover plate 1-3 is 0.2 cm;

[0034] In addition, the first annular step 1-2-1 and the second annular step 1-3-1 can also be set to specifications suitable for placing three-inch and four-inch samples. Specifically, the sizes of the first annular step 1-2-1 and the second annular step 1-3-1 are determined according to the size of the sample.

[0035] Referring to Figures 1 to 2, optionally, three pedestals 1-1-1 are provided on the upper end surface of the bottom plate 1-1, which are distributed in an equilateral triangle with the center of the bottom plate 1-1 as the center. Each pedestal 1-1-1 is provided with a threaded hole 1-1-2 with an upward opening. The support plate 1-2 and the cover plate 1-3 are both provided with circular holes corresponding to the positions of the three threaded holes 1-1-2. The bottom plate 1-1, the support plate 1-2 and the cover plate 1-3 are fixed by sequentially passing screws 4 through the circular holes on the cover plate 1-3 and the support plate 1-2 and screwing them into the corresponding threaded holes 1-1-2.

[0036] Among them, the screw 4 is an existing screw 4, and the screw 4 is used to fix the bottom plate 1-1, the support plate 1-2 and the cover plate 1-3.

[0037] Optionally, the shape of the pedestal 1-1-1 is a cuboid or a cube.

[0038] Among them, when the shape of the pedestal 1-1-1 is a cube, its side length is 1 cm.

[0039] Refer to Figures 1 to 2 , optionally, a first gripper limiting arm 1-1-3 is provided on the outer side surface of each pedestal 1-1-1 along the radial direction.

[0040] Among them, the setting of the first gripper limiting arm 1-1-3 is used for the sample rack to pick up, place and fix the sample holder 1.

[0041] Refer to Figures 1 to 2 , optionally, a plurality of second gripper limiting arms 1-1-4 are provided on the outer side surface of the bottom plate 1-1 along the radial direction.

[0042] Among them, the setting of the second gripper limiting arm 1-1-4 is used for the transfer of the sample holder 1.

[0043] Refer to Figure 1 , optionally, two installation parts 1-1-5 arranged in parallel are provided on both sides of the bottom end surface of the bottom plate 1-1. The two installation parts 1-1-5 are both hollow structures. The sample holder support 2 has two installation rods 2-1. The two installation rods 2-1 are respectively arranged in one-to-one correspondence with the two installation parts 1-1-5. Each installation rod 2-1 is inserted into the corresponding installation part 1-1-5.

[0044] Among them, the outer diameter dimensions of the two installation rods 2-1 are slightly smaller than the inner diameter dimensions of the hollow structures in the two installation parts 1-1-. The two installation rods 2-1 are used to fix it on the sample holder support 2.

[0045] Optionally, the shape of the installation rod 2-1 is a cuboid.

[0046] Among them, when the shape of the installation rod 2-1 is a cuboid, the hollow structure of the installation part 1-1-5 is a cuboid channel, and thus it is adapted to the shape of the cuboid installation rod 2-1.

[0047] In this application, a glass window can be opened at a suitable position in the cavity according to specific needs, and then the sample surface can be observed by rotating the transfer rod 3.

[0048] It should be noted that not all steps and modules in the above-mentioned processes and system structure diagrams are necessary, and some steps or modules can be ignored according to actual needs. The execution order of each step is not fixed and can be adjusted according to needs. The system structure described in the above-mentioned embodiments can be a physical structure or a logical structure, that is, some modules may be implemented by the same physical entity, or some modules may be implemented by multiple physical entities separately, or some components in multiple independent devices may be jointly implemented.

[0049] In the above embodiments, the hardware modules can be implemented mechanically or electrically. The present invention has been described in detail through the drawings and preferred embodiments above. However, the present invention is not limited to these disclosed embodiments. Based on the above-mentioned multiple embodiments, those skilled in the art can know that the code review means in different above-mentioned embodiments can be combined to obtain more embodiments of the present invention, and these embodiments are also within the protection scope of the present invention.

Claims

1. A device for changing the orientation of a sample in a molecular beam epitaxy system, characterized in that: include: A sample holder (1), a sample holder support (2) and a transmission rod (3); The sample holder (1) comprises a base plate (1-1), a support plate (1-2) and a cover plate (1-3); the base plate (1-1), the support plate (1-2) and the cover plate (1-3) are detachably connected in sequence from bottom to top; the base plate (1-1), the support plate (1-2) and the cover plate (1-3) are all in annular shape; the bottom end of the base plate (1-1) is detachably connected to the sample holder support (2); a sample is clamped between the support plate (1-2) and the cover plate (1-3); the sample holder support (2) is welded to the transmission rod (3) so that the transmission rod (3) rotates to drive the sample holder (1) to rotate so as to change the orientation of the sample.

2. A device for changing the orientation of a sample in a molecular beam epitaxy system according to claim 1, characterized in that: The outer diameter and inner diameter of the support plate (1-2) are the same as the outer diameter and inner diameter of the cover plate (1-3); a first circular step (1-2-1) is provided at the inner circle of the upper end surface of the support plate (1-2), and a second circular step (1-3-1) is provided at the inner circle of the lower end surface of the cover plate (1-3); the sample is located at the first circular step (1-2-1) and the second circular step (1-3-1).

3. A device for changing the orientation of a sample in a molecular beam epitaxy system according to claim 2, characterized in that: The upper end surface of the bottom plate (1-1) is provided with three bases (1-1-1) distributed in an equilateral triangle with the center of the bottom plate (1-1) as the center, each of the bases (1-1-1) is provided with a threaded hole (1-1-2) with an opening facing upward, the support plate (1-2) and the cover plate (1-3) are provided with circular holes corresponding to the positions of the three threaded holes (1-1-2), and screws (4) are passed through the circular holes on the cover plate (1-3) and the support plate (1-2) in sequence and screwed on the corresponding threaded holes (1-1-2) to achieve the fixation between the bottom plate (1-1), the support plate (1-2) and the cover plate (1-3).

4. The device for changing the sample orientation in a molecular beam epitaxy system according to claim 3, characterized in that: The base (1-1-1) is in the shape of a cuboid or a cube.

5. The device for changing the sample orientation in a molecular beam epitaxy system according to claim 4, characterized in that: The outer side surface of each base (1-1-1) is provided with a No. 1 gripper limiting arm (1-1-3) arranged in the radial direction.

6. The device for changing the orientation of a sample in a molecular beam epitaxy system according to claim 5, characterized in that: A plurality of No. 2 gripper limiting arms (1-1-4) arranged in a radial direction are provided on the outer side surface of the bottom plate (1-1).

7. The device for changing the sample orientation in a molecular beam epitaxy system according to claim 6, characterized in that: Two mounting parts (1-1-5) arranged in parallel with each other are provided on both sides of the bottom end surface of the bottom plate (1-1), and the two mounting parts (1-1-5) are both hollow structures. The sample holder support (2) has two mounting rods (2-1), and the two mounting rods (2-1) are respectively arranged in one-to-one correspondence with the two mounting parts (1-1-5), and each mounting rod (2-1) is inserted into the corresponding mounting part (1-1-5).

8. The device for changing the orientation of a sample in a molecular beam epitaxy system according to claim 7, characterized in that: The mounting rod (2-1) is in the shape of a rectangular parallelepiped.

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