Furnace body electric heating equipment
By designing the furnace body electric heating equipment and controlling the movement and swing of the arc heater by using the driving mechanism, the problem of poor heat dissipation effect of the diffusion furnace electric heating equipment is solved, rapid heat dissipation and uniform heating are achieved, and the practicality of the equipment is improved.
Patent Information
- Application Number
- CN202421936732.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-12
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-08-12
AI Technical Summary
The electric heating equipment of the existing diffusion furnace is located in a closed space, resulting in a long heat dissipation time, poor heat dissipation effect, and low practicality.
An electric heating equipment for furnace body is designed. By setting up multiple arc heaters in the furnace body and controlling the movement of the sealing part by using a driving mechanism, the arc heater is moved out of the furnace body, and the external fan is used to achieve rapid heat dissipation. At the same time, the uniform swing of the arc heater is achieved through the swing mechanism, which improves the heating effect.
It realizes rapid heat dissipation and convenient disassembly and assembly and maintenance of arc heaters, and improves the heat dissipation efficiency and practicality of the diffusion furnace.
Smart Images
Figure CN222912337U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a furnace body electric heating device. Background Art
[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.
[0003] At present, when a diffusion furnace needs to dissipate heat, since the electric heating device of the diffusion furnace is located inside the diffusion furnace, which is in a relatively closed space, the heat dissipation time is long, the heat dissipation effect is poor, and the practicality is low.
[0004] Therefore, we make improvements to this and propose a furnace electric heating device. Summary of the invention
[0005] The purpose of the utility model is to solve the problem that when the existing diffusion furnace needs to dissipate heat, since the electric heating device of the diffusion furnace is located inside the diffusion furnace, which is in a relatively closed space, the heat dissipation time is long, the heat dissipation effect is poor, and the practicality is low.
[0006] In order to achieve the above-mentioned purpose of the invention, the utility model provides a furnace electric heating device to improve the above-mentioned problem.
[0007] The specific application is as follows:
[0008] It includes a furnace body, wherein a plurality of arc heaters are equidistantly arranged on both sides of the furnace body, a plurality of slots are equidistantly provided on both sides of the furnace body, a sealing part is provided in the slot, a swing mechanism is provided between the sealing part and the arc heater, a transmission groove is provided at the bottom end of the furnace body, a driving mechanism is provided in the transmission groove, and a displacement part for driving the swing mechanism to operate is provided between the plurality of sealing parts and the driving mechanism.
[0009] As a preferred technical solution of the present application, the sealing portion includes a sealing plate matching the slot, and a high temperature resistant rubber layer is embedded on the inner side of the sealing plate.
[0010] As a preferred technical solution of the present application, the swing mechanism consists of a swing part and a positioning part.
[0011] As a preferred technical solution of the present application, the swinging part includes a positioning rod, one end of which is fixedly connected to the middle part of the inner side of the sealing plate, and the other end of the positioning rod is rotatably connected to a rotating shaft.
[0012] As a preferred technical solution of the present application, the swinging part also includes a gear, which is fixedly mounted on the bottom end of the rotating shaft. A connecting block is fixedly provided in the middle of one side of the rotating shaft, and one side of the connecting block is fixedly connected to the arc heater.
[0013] As a preferred technical solution of the present application, the positioning part includes a positioning column, which is also fixedly mounted on the other end of the positioning rod. A magnet block is embedded in the top of the connecting block, and the magnet block is magnetically connected to the positioning column.
[0014] As a preferred technical solution of the present application, the driving mechanism includes a stepper motor, which is fixedly installed in the middle part of the transmission groove. A first bevel gear is fixedly provided on the output shaft of the stepper motor, and the first bevel gear is meshingly connected with a second bevel gear. A threaded rod is fixedly provided on the second bevel gear, and the thread directions at both ends of the threaded rod are opposite.
[0015] As a preferred technical solution of the present application, the driving mechanism also includes a limit rod, the middle part of the limit rod is rotatably connected to the threaded rod, and the limit rod is fixedly installed in the transmission groove, both ends of the threaded rod are threadedly connected with T-shaped rods, and a sliding groove is opened at the top of the transmission groove, which is slidably connected to the top of the T-shaped rod, and a connecting plate is fixedly provided at one end of the T-shaped rod passing through the transmission groove.
[0016] As a preferred technical solution of the present application, the displacement part includes a limit column, which is interlaced and connected with the middle part of the sealing plate, a connecting rod is fixedly provided at one end of the limit column, and the bottom end of the connecting rod is fixedly connected to the top end of the connecting plate, and a spring is fixedly provided between the limit column and the connecting rod.
[0017] As a preferred technical solution of the present application, the displacement portion also includes a high-temperature resistant rubber ring, which is sleeved on the other end of the limiting column, and one side of the high-temperature resistant rubber ring is fixedly connected to the inner side of the sealing plate, and a rack matching the gear is also fixedly provided on the other end of the limiting column.
[0018] Compared with the prior art, the utility model has the following beneficial effects:
[0019] In the scheme of this application:
[0020] 1. In order to solve the problem in the prior art that when the diffusion furnace needs to dissipate heat, the electric heating device of the diffusion furnace is located inside the diffusion furnace, which is in a relatively closed space, so the heat dissipation time is long, the heat dissipation effect is poor, and the practicality is low, the present application sets a driving mechanism to enable the shifting part to operate, and then control the movement of the sealing part. With the movement of the sealing part, the arc heater can be moved out of the furnace body, so that the arc heater is in an open environment. With the external fan, the arc heater can be quickly cooled, and the arc heater is easy to disassemble and repair;
[0021] 2. Through the provided driving mechanism, the swing mechanism can be driven to operate when the sealing part and the furnace body are sealed. Under the action of the swing mechanism, multiple arc heaters located on both sides of the furnace body repeatedly swing at a certain angle, thereby achieving uniform heating in the furnace body and improving practicality. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 A schematic diagram of the structure of the furnace electric heating device provided for this application;
[0023] Figure 2 A schematic diagram of the cross-sectional structure of the furnace electric heating device provided in this application;
[0024] Figure 3 A schematic cross-sectional structure diagram of a driving mechanism of a furnace electric heating device provided in this application;
[0025] Figure 4 A schematic cross-sectional structure diagram of the swing mechanism and displacement portion of the furnace body electric heating device provided in the present application;
[0026] Figure 5 This is a schematic diagram of the partial connection structure between the swing mechanism, the displacement part and the arc heater of the furnace body electric heating equipment provided in this application.
[0027] Indicated in the figure:
[0028] 1. Furnace body;
[0029] 2. Arc heater;
[0030] 3. Sealing part; 301. Sealing plate; 302. High temperature resistant rubber layer;
[0031] 4. Swing mechanism; 401. Positioning rod; 402. Rotating shaft; 403. Gear; 404. Connecting block; 405. Positioning column; 406. Magnet block;
[0032] 5. Driving mechanism; 501. Stepping motor; 502. First bevel gear; 503. Second bevel gear; 504. Threaded rod; 505. Limit rod; 506. T-shaped rod; 507. Connecting plate;
[0033] 6. Displacement part; 601. Limiting column; 602. Connecting rod; 603. Spring; 604. High temperature resistant rubber ring; 605. Rack. DETAILED DESCRIPTION
[0034] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.
[0035] As described in the background art, when a diffusion furnace needs to dissipate heat, since the electric heating device of the diffusion furnace is located inside the diffusion furnace, which is in a relatively closed space, the heat dissipation time is long, the heat dissipation effect is poor, and the practicality is low.
[0036] In order to solve this technical problem, the utility model provides a furnace body electric heating device, which is applied to a diffusion furnace.
[0037] Specifically, please refer to Figure 1-5 , the furnace electric heating equipment specifically includes:
[0038] A furnace body 1 is provided with a plurality of arc heaters 2 equidistantly arranged on both sides of the furnace body 1, a plurality of slots are equidistantly provided on both sides of the furnace body 1, a sealing portion 3 is provided in the slot, a swing mechanism 4 is provided between the sealing portion 3 and the arc heater 2, a transmission slot is provided at the bottom end of the furnace body 1, a driving mechanism 5 is provided in the transmission slot, and a displacement portion 6 for driving the swing mechanism 4 to operate is provided between the plurality of sealing portions 3 and the driving mechanism 5.
[0039] The furnace body electric heating device provided by the utility model can operate the displacement part through the arranged driving mechanism, and then control the movement of the sealing part. With the movement of the sealing part, the arc heater can be moved out of the furnace body, so that the arc heater is in an open environment. In combination with an external fan, the arc heater can dissipate heat quickly, and the arc heater can be easily disassembled, assembled and repaired.
[0040] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiments of the utility model will be clearly and completely described below in conjunction with the accompanying drawings.
[0041] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.
[0042] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0043] Example 1, please refer to Figure 1-4, a furnace body electric heating device, wherein the sealing portion 3 includes a sealing plate 301 matching the groove, and a high temperature resistant rubber layer 302 is embedded inside the sealing plate 301.
[0044] Please refer to Figure 2 , Figure 4 and Figure 5 , a furnace electric heating device, whose swing mechanism 4 is composed of a swing part and a positioning part.
[0045] Example 2, further optimizes the furnace electric heating device provided in Example 1, specifically, as follows Figure 2 , Figure 4 and Figure 5 As shown, the swinging part includes a positioning rod 401 , one end of which is fixedly connected to the middle part of the inner side of the sealing plate 301 , and the other end of the positioning rod 401 is rotatably connected to a rotating shaft 402 .
[0046] Further, such as Figure 2 , Figure 4 and Figure 5 As shown, the swinging part also includes a gear 403, which is fixedly mounted on the bottom end of the rotating shaft 402, a connecting block 404 is fixedly provided in the middle of one side of the rotating shaft 402, and one side of the connecting block 404 is fixedly connected to the arc heater 2.
[0047] Embodiment 3 further optimizes the furnace electric heating device provided in Embodiment 1 or 2. Specifically, Figure 2 , Figure 4 and Figure 5 As shown, the positioning part includes a positioning column 405, which is also fixedly mounted on the other end of the positioning rod 401. A magnet block 406 is embedded in the top of the connecting block 404, and the magnet block 406 is magnetically connected to the positioning column 405. Through the magnet block 406 and the positioning column 405, the arc heater 2 can be positioned when it is reset.
[0048] Further, such as Figure 1-3 As shown, the driving mechanism 5 includes a stepper motor 501, which is fixedly installed in the middle of the transmission groove. A first bevel gear 502 is fixedly provided on the output shaft of the stepper motor 501, and the first bevel gear 502 is meshedly connected with a second bevel gear 503. A threaded rod 504 is fixedly provided on the second bevel gear 503, and the threads at both ends of the threaded rod 504 are in opposite directions.
[0049] Further, such as Figure 1-3As shown, the driving mechanism 5 also includes a limit rod 505, the middle part of which is rotatably connected to the threaded rod 504, and the limit rod 505 is fixedly installed in the transmission groove, both ends of the threaded rod 504 are threadedly connected with T-shaped rods 506, and a sliding groove is provided at the top of the transmission groove, which is slidably connected to the top of the T-shaped rod 506, and a connecting plate 507 is fixedly provided at one end of the T-shaped rod 506 that passes through the transmission groove.
[0050] Embodiment 4: The furnace electric heating device provided in the above embodiments is further optimized, such as Figure 1-5 As shown, the displacement portion 6 includes a limiting column 601, which is interlaced and connected with the middle part of the sealing plate 301, a connecting rod 602 is fixedly provided at one end of the limiting column 601, and the bottom end of the connecting rod 602 is fixedly connected to the top end of the connecting plate 507, and a spring 603 is fixedly provided between the limiting column 601 and the connecting rod 602.
[0051] Further, such as Figure 1-5 As shown, the displacement portion 6 also includes a high temperature resistant rubber ring 604, which is sleeved on the other end of the limiting column 601, and one side of the high temperature resistant rubber ring 604 is fixedly connected to the inner side of the sealing plate 301, and a rack 605 matching the gear 403 is also fixedly provided on the other end of the limiting column 601.
[0052] The use process of the furnace electric heating device provided by the utility model is as follows:
[0053] When heat dissipation is needed, the stepper motor 501 is controlled to work, and the output shaft of the stepper motor 501 drives the first bevel gear 502 to rotate, and the first bevel gear 502 drives the second bevel gear 503 to rotate. In cooperation with the limit rod 505, the second bevel gear 503 can drive the threaded rod 504 to rotate. As the threaded rod 504 rotates, due to the opposite directions of the threads at both ends of the threaded rod 504, the two T-shaped rods 506 move in opposite directions, thereby causing the two connecting plates 507 to move, and the connecting plate 507 drives the connecting rod 602 to move, so that the sealing plate 301 moves, and the sealing plate 301 drives the arc heater 2 to move out of the furnace body 1. In cooperation with the external fan, the arc heater 2 can achieve rapid heat dissipation. After the heat dissipation is completed, the stepper motor 501 is controlled to work, and the output shaft of the stepper motor 501 rotates in the opposite direction, so that the arc heater 2 moves into the furnace body 1, the sealing plate 301 moves into the slot, the high temperature resistant rubber layer 302 squeezes the furnace body 1, and the spring 603 is compressed to achieve the sealing between the sealing plate 301 and the furnace body 1. When heating is needed, the arc heater 2 works, and the stepper motor 501 is controlled to work at the same time, so that the connecting rod 602 drives the limiting column 601 to continue to move until the rack 605 is meshed with the gear 403, and the rack 605 continues to move, so that the gear 403 drives the rotating shaft 402 to rotate, and the spring 603 is further compressed, and the rotating shaft 402 drives the connecting block 404 to rotate, and the connecting block 404 drives the arc heater 2 to rotate a certain angle, and then the output shaft of the stepper motor 501 is controlled to rotate in the opposite direction, and the limiting column 601 drives the rack 605 to move in the opposite direction, and cooperates with the gear 403 to reset the arc heater 2. At the same time, under the action of the elastic force of the spring 603, the sealing plate 301 and the furnace body 1 are always in a sealed state. Through this arrangement, multiple arc heaters 2 can be repeatedly swung during operation, thereby achieving uniform heating in the furnace body 1 and improving practicality.
[0054] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0055] Obviously, the embodiments described above are only some embodiments of the utility model, rather than all embodiments. The preferred embodiments of the utility model are given in the accompanying drawings, but they do not limit the patent scope of the utility model. The utility model can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive. Although the utility model is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific implementation methods, or to replace some of the technical features therein with equivalents. Any equivalent structure made using the contents of the utility model specification and the accompanying drawings, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the utility model.
Claims
1. A furnace electric heating device, characterized in that: The invention comprises a furnace body (1), wherein a plurality of arc-shaped heaters (2) are arranged at equal intervals on both sides of the furnace body (1), a plurality of slots are opened at equal intervals on both sides of the furnace body (1), a sealing portion (3) is arranged in the slot, a swing mechanism (4) is arranged between the sealing portion (3) and the arc-shaped heater (2), a transmission slot is opened at the bottom end of the furnace body (1), a driving mechanism (5) is arranged in the transmission slot, and a displacement portion (6) for driving the swing mechanism (4) to operate is arranged between the plurality of sealing portions (3) and the driving mechanism (5).
2. A furnace electric heating device according to claim 1, characterized in that: The sealing portion (3) comprises a sealing plate (301) matching the slot, and a high temperature resistant rubber layer (302) is embedded on the inner side of the sealing plate (301).
3. A furnace electric heating device according to claim 2, characterized in that: The swing mechanism (4) consists of a swing part and a positioning part.
4. A furnace electric heating device according to claim 3, characterized in that: The swinging portion comprises a positioning rod (401), one end of the positioning rod (401) is fixedly connected to the middle portion of the inner side of the sealing plate (301), and the other end of the positioning rod (401) is rotatably connected to a rotating shaft (402).
5. The furnace electric heating device according to claim 4, characterized in that: The swinging part further comprises a gear (403), wherein the gear (403) is fixedly mounted on the bottom end of the rotating shaft (402), a connecting block (404) is fixedly provided in the middle of one side of the rotating shaft (402), and one side of the connecting block (404) is fixedly connected to the arc heater (2).
6. The furnace electric heating device according to claim 5, characterized in that: The positioning portion comprises a positioning column (405), and the positioning column (405) is also fixedly mounted on the other end of the positioning rod (401). A magnet block (406) is embedded at the top end of the connecting block (404), and the magnet block (406) is magnetically connected to the positioning column (405).
7. The furnace electric heating device according to claim 6, characterized in that: The driving mechanism (5) comprises a stepping motor (501), the stepping motor (501) being fixedly mounted in the middle of the transmission slot, a first bevel gear (502) being fixedly mounted on the output shaft of the stepping motor (501), the first bevel gear (502) being meshingly connected with a second bevel gear (503), a threaded rod (504) being fixedly mounted on the second bevel gear (503), and the threads at both ends of the threaded rod (504) being in opposite directions.
8. The furnace electric heating device according to claim 7, characterized in that: The driving mechanism (5) further comprises a limit rod (505), the middle portion of which is rotatably connected to the threaded rod (504), and the limit rod (505) is fixedly mounted in the transmission groove, both ends of the threaded rod (504) are threadedly connected to T-shaped rods (506), a sliding groove is provided at the top end of the transmission groove and is slidably connected to the top of the T-shaped rod (506), and a connecting plate (507) is fixedly provided at one end of the T-shaped rod (506) that passes through the transmission groove.
9. The furnace electric heating device according to claim 8, characterized in that: The displacement portion (6) comprises a limiting column (601), the limiting column (601) is connected to the middle part of the sealing plate (301) through insertion, a connecting rod (602) is fixedly provided at one end of the limiting column (601), and the bottom end of the connecting rod (602) is fixedly connected to the top end of the connecting plate (507), and a spring (603) is fixedly provided between the limiting column (601) and the connecting rod (602).
10. The furnace electric heating device according to claim 9, characterized in that: The displacement portion (6) further comprises a high temperature resistant rubber ring (604), the high temperature resistant rubber ring (604) being sleeved on the other end of the limiting column (601), and one side of the high temperature resistant rubber ring (604) being fixedly connected to the inner side of the sealing plate (301), and a rack (605) matching the gear (403) is also fixedly provided on the other end of the limiting column (601).