Flatness detection device
By designing a planarity detection device including tooling table and interferometer, and using components such as positioning fixtures and pressing parts for stable positioning, the problems of inconvenience, high limitations and insufficient accuracy of the existing planarity testing methods are solved, and efficient and accurate planarity detection is achieved.
Patent Information
- Application Number
- CN202421991903.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-16
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-08-16
AI Technical Summary
The existing planarity testing methods have problems such as inconvenience in detection, high limitations and insufficient accuracy, and the three-coordinate detection cost and low efficiency.
A planarity detection device is designed, including a tooling table and an interferometer. Through the positioning fixture, pressing parts, positioning support blocks and positioning pins, stable positioning and accurate detection of the block to be tested is achieved.
The convenience, high accuracy and low cost of planarity detection are achieved, the limitations of three-coordinate detection are avoided, and the detection efficiency and accuracy are improved.
Smart Images
Figure CN222912672U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of planar detection, and particularly relates to a flatness detection device. Background Art
[0002] An interferometer is an instrument made based on the principle of light interference. Two beams of the same light source are completely separated, each passing through different optical paths, and then recombined to show interference fringes. In spectroscopy, by using a precise Michelson interferometer or Fabry - Perot interferometer, the wavelength of spectral lines and their fine structures can be accurately and detailedly measured.
[0003] In the field of optical assembly, high requirements are placed on the flatness of glass lenses and mechanical parts. If the flatness of the assembly surface does not meet the standard, it will directly affect the product performance.
[0004] Currently, the commonly used flatness test method is to form a plane with three dial indicators to test the surface of the object to be tested. This method is limited by the size of the dial indicators and cannot be used to detect small - sized products. At the same time, the common display accuracy of dial indicators is 1 micron, the test accuracy is limited, and the dial indicators are point measurements with large limitations and cannot comprehensively test the overall plane.
[0005] Another flatness test method is to use a coordinate measuring machine for detection. However, its detection efficiency is relatively slow and the equipment cost is high, so it is generally not used.
[0006] The problems of the prior art are that flatness testing is inconvenient, with large limitations and insufficient accuracy; using a coordinate measuring machine for detection has a high test cost and low detection efficiency. Summary of the Invention
[0007] The purpose of the utility model is to address the problems existing in the prior art and provide a flatness detection device with the advantages of convenient testing, high accuracy, and low cost.
[0008] To achieve the above - mentioned purpose, the technical solution adopted by the utility model is: a flatness detection device, including a tooling table and an interferometer. A number of positioning jigs are detachably arranged on the tooling table through fasteners one. A pressing member for pressing the outer circle of the block to be tested is arranged on the positioning jig. A number of positioning support blocks are arranged on the bottom surface of the block to be tested, and the positioning support blocks are installed on the top surface of the tooling table. The positioning support blocks correspond to the positions of the pressing members. A number of positioning pins for cooperating with the side surface of the block to be tested are arranged on the tooling table, and the objective lens of the interferometer faces the block to be tested.
[0009] In the above solution, a positioning fixture on the tooling table is used to connect the pressing member. The outer ring of the test block to be tested is pressed and positioned by the pressing member to prevent the test block to be tested from moving during the detection process. A positioning support block is arranged on the bottom surface of the test block to be tested to reduce the contact area between the test block to be tested and the tooling table, improve the positioning accuracy, and reduce the influence of dust and impurities on the test result. The positions of the pressing member and the positioning support block correspond to each other to prevent the test block to be tested from bending and deforming. A positioning pin is arranged to perform preliminary positioning on the side surface of the test block to be tested.
[0010] Further, the positioning fixture includes a lower flat plate and an upper flat plate. A connecting plate is arranged between the lower flat plate and the upper flat plate, and mounting holes for connecting a first fastener are formed in the lower flat plate.
[0011] The lower flat plate and the upper flat plate are connected through the connecting plate, and the structure is simple. The mounting holes are formed to facilitate the connection of the first fastener.
[0012] Further, the pressing member includes a guide rod. A flexible pressing portion is arranged at the bottom end of the guide rod. The guide rod is slidably arranged at the upper flat plate, and a spring for pressing down the flexible pressing portion is sleeved outside the guide rod.
[0013] The guide rod is slidably connected to the upper flat plate through the upper flat plate, so that the flexible pressing portion at the bottom of the guide rod can move up and down. The spring is used to press down the bottom of the guide rod, so that the flexible pressing portion elastically presses the test block to be tested. The applicability is good and the excessive pressure is avoided.
[0014] Further, a lateral protrusion is arranged at the top end of the guide rod, a limiting sleeve is arranged on the upper flat plate, and a protrusion sliding groove for the lateral protrusion to slide is formed in the limiting sleeve.
[0015] The lateral protrusion is arranged at the top end of the guide rod to cooperate with the limiting sleeve. When the test block to be tested needs to be installed or disassembled, the guide rod can be lifted up and rotated, so that the lateral protrusion is located on the limiting sleeve to prevent the guide rod from rebounding downward; the guide rod can be rotated to make the lateral protrusion correspond to the protrusion sliding groove, so that the guide rod rebounds downward under the action of the spring.
[0016] Further, a base is arranged at the bottom of the interferometer, and the tooling table is arranged on the base.
[0017] The interferometer is connected to the tooling table through the base, and the integral structure is convenient for detection.
[0018] Further, a plurality of connecting sliding grooves are arranged on the tooling table, and the first fastener is connected at the connecting sliding grooves.
[0019] The first fastener and the positioning fixture are connected by arranging the connecting sliding grooves, which is convenient for adjusting the distance between the positioning fixtures according to the size of the test block to be tested, and is convenient to use with good applicability.
[0020] Further, the cross-section of the block to be tested is rectangular. There are three positioning and supporting blocks arranged along an isosceles triangle, and the positioning jigs are oppositely arranged on the front and back sides of the block to be tested.
[0021] The block to be tested is rectangular. The positioning and supporting blocks arranged in a triangular shape ensure positioning stability. The structure is simple, and the positioning jigs are oppositely arranged to stably position the block to be tested.
[0022] Further, there are three positioning pins arranged on the tooling table for cooperating with the adjacent side surfaces of the block to be tested, and the tooling table is connected to the base through fasteners II.
[0023] The adjacent side surfaces of the block to be tested are positioned by the three positioning pins, which is convenient for improving the installation efficiency of the test piece, ensuring the positioning and detection effects. The tooling table is connected to the base through fasteners II, which is convenient for disassembly, installation and maintenance.
[0024] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0025] 1. By arranging the positioning jigs in cooperation with the positioning pins to position the block to be tested, and clamping the block to be tested through the cooperation of the positioning and supporting blocks and the pressing members, it is convenient for the interferometer to perform planar detection, ensuring the test accuracy, capable of performing planar tests, and the tests are convenient;
[0026] 2. By arranging the spring and guide rod structures on the positioning furniture to position and clamp the block to be tested, the installation and disassembly of the test piece are convenient and the test efficiency is high. The position of the positioning jig can be adjusted according to the size of the test piece through the connecting chute, and the applicability is good;
[0027] 3. By using the interferometer in cooperation with the positioning tooling to perform flatness tests, there is no need to purchase a three-coordinate measuring instrument, the cost is low, and the test efficiency is high. Description of the Drawings
[0028] Figure 1 It is a three-dimensional structure diagram of a flatness detection device according to Embodiment 1 of the present utility model;
[0029] Figure 2 It is a connection schematic diagram of the spring in Embodiment 1 of the present utility model;
[0030] In the figure: 1. Tooling table; 2. Interferometer; 3. Fastener I; 4. Lower flat plate; 5. Connecting plate; 6. Upper flat plate; 7. Guide rod; 8. Flexible pressing part; 9. Spring; 10. Positioning and supporting block; 11. Positioning pin; 12. Objective lens; 13. Transverse protrusion; 14. Limit sleeve; 15. Protrusion chute; 16. Base; 17. Connecting chute. Detailed Embodiments
[0031] Next, in combination with the accompanying drawings in the present utility model, the technical solutions of the present utility model will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work belong to the scope of protection of the present utility model. In the description of the present utility model, it should be noted that the terms front, rear, left, right, etc. indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this utility model is usually placed during use. It is only for the convenience of describing the present utility model or simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed or operated in a specific orientation, and therefore cannot be construed as a limitation to the present utility model.
[0032] Embodiment 1
[0033] As Figure 1-2 shown, a flatness detection device includes a tooling table 1 and an interferometer 2. A plurality of positioning jigs are detachably arranged on the tooling table 1 through a first fastener 3. A pressing member for pressing the outer circle of the to-be-tested block is arranged on the positioning jig. A plurality of positioning support blocks 10 are arranged on the bottom surface of the to-be-tested block. The positioning support blocks 10 are installed on the top surface of the tooling table 1. The positioning support blocks 10 correspond to the positions of the pressing members. A plurality of positioning pins 11 for cooperating with the side surface of the to-be-tested block are arranged on the tooling table 1. The objective lens 12 of the interferometer 2 faces the to-be-tested block.
[0034] In the above solution, the pressing member is connected through the positioning jig on the tooling table 1, and the outer circle of the to-be-tested block is pressed and positioned through the pressing member to prevent the to-be-tested block from moving during the detection process. The positioning support blocks 10 are arranged on the bottom surface of the to-be-tested block to reduce the contact area between the to-be-tested block and the tooling table 1, improve the positioning accuracy, and reduce the influence of dust and impurities on the test results. The pressing member corresponds to the position of the positioning support block 10 to prevent the to-be-tested block from being bent and deformed. The positioning pins 11 are provided to preliminarily position the side surface of the to-be-tested block.
[0035] Further, the positioning jig includes a lower flat plate 4 and an upper flat plate 6. A connecting plate 5 is arranged between the lower flat plate 4 and the upper flat plate 6. Mounting holes for connecting the first fastener 3 are opened on the lower flat plate 4.
[0036] The lower flat plate 4 and the upper flat plate 6 are connected through the connecting plate 5, and the structure is simple. The opening of the mounting holes facilitates the connection of the first fastener 3.
[0037] Threaded holes are opened on the tooling table 1 for screwing the first fastener 3. The first fastener 3 includes a bolt. In some embodiments, the pressing member includes a rubber pressing block fixed on the positioning jig.
[0038] Further, the pressing member includes a guide rod 7, a flexible pressing portion 8 is provided at the bottom end of the guide rod 7, the guide rod 7 is slidably disposed on the upper flat plate 6, and a spring 9 for pressing down the flexible pressing portion 8 is sleeved outside the guide rod 7.
[0039] By slidably connecting the guide rod 7 to the upper flat plate 6, the flexible pressing portion 8 at the bottom of the guide rod 7 can move up and down. The spring 9 is used to press down the bottom of the guide rod 7, so that the flexible pressing portion 8 elastically presses the to-be-tested block, with good applicability and avoiding excessive pressure.
[0040] In some embodiments, a limiting portion is provided at the top end of the guide rod 7 to prevent the guide rod 7 from falling off. The limiting portion can be a metal structure screwed or fixed to the top end of the guide rod 7.
[0041] Further, a lateral protrusion 13 is provided at the top end of the guide rod 7, a limiting sleeve 14 is provided on the upper flat plate 6, and a protrusion sliding groove 15 for the lateral protrusion 13 to slide is provided on the limiting sleeve 14.
[0042] A lateral protrusion 13 is provided at the top end of the guide rod 7 to cooperate with the limiting sleeve 14. When installing or disassembling the to-be-tested block, the guide rod 7 can be lifted up and rotated, so that the lateral protrusion 13 is located on the limiting sleeve 14 to prevent the guide rod 7 from rebounding downward; the guide rod 7 can be rotated to make the lateral protrusion 13 correspond to the protrusion sliding groove 15, so that the guide rod 7 rebounds downward under the action of the spring 9.
[0043] Further, a base 16 is provided at the bottom of the interferometer 2, and the tooling table 1 is disposed on the base 16.
[0044] The interferometer 2 is connected to the tooling table 1 through the base 16, with an integrated structure and convenient detection.
[0045] The interferometer 2 uses a white light interferometer 2.
[0046] Further, a plurality of connecting sliding grooves 17 are provided on the tooling table 1, and the first fastener 3 is connected at the connecting sliding grooves 17.
[0047] By providing the connecting sliding grooves 17 to connect the first fastener 3 and the positioning fixture, it is convenient to adjust the distance between the positioning fixtures according to the size of the to-be-tested block, with convenient use and good applicability.
[0048] The first fastener 3 includes a bolt-nut assembly.
[0049] Further, the cross-section of the to-be-tested block is rectangular, three positioning support blocks 10 are arranged along an isosceles triangle, and the positioning fixtures are oppositely arranged on the front and back sides of the to-be-tested block.
[0050] The block to be tested is rectangular. The positioning support block 10 arranged in a triangle ensures the positioning stability. The structure is simple. Relatively, a positioning fixture is set to stably position the block to be tested.
[0051] The block to be tested includes a plane mirror.
[0052] Furthermore, three positioning pins 11 for cooperating with the adjacent side surfaces of the block to be tested are arranged on the tooling table 1. The tooling table 1 is connected to the base 16 through the second fastener.
[0053] The adjacent side surfaces of the block to be tested are positioned by the three positioning pins 11, which is convenient for improving the installation efficiency of the test piece and ensuring the positioning and detection effects. The tooling table 1 is connected to the base 16 through the second fastener, which is convenient for disassembly, installation and maintenance.
[0054] The device test process is as follows: Build a standard block to be tested, which is a plane glass. After processing 3 bosses on one side of the plane glass and then finishing the polishing of 2 sides, the surface shape after polishing can reach λ / 4. Measure the specific value A of the initial surface shape of the back surface. Prepare a batch of standard templates with known flatness indexes (the flatness can be 1 micron, 2 microns, 3 microns up to 10 microns). Build the test tooling table 1. First, place the standard template, then place the standard block with the boss surface facing down. The standard template and the standard block are of the same size, which is convenient for testing. Fix them with the limit pins. Then apply a certain pressure on the back surface of the boss and measure the surface shape of the standard test block again, with the value B. Statistically analyze the data and establish a standard database. For subsequent test results, refer to the database. For example, when the flatness is 1 micron, the surface shape change is 1λ; when the flatness is 2 microns, the surface shape change is 2λ; there are also surface shape values for 3 microns - 10 microns. Establish a database (the flatness of the standard template is different, and the surface shape reflected by the glass standard test block is different. The worse the flatness, the greater the surface shape change). Take out the standard template and then put in the object to be measured. Repeat the detection steps. According to the surface shape change, obtain the flatness index of the object to be measured.
[0055] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A flatness detection device, characterized in that: It includes a workbench and an interferometer, wherein the workbench is detachably provided with a plurality of positioning fixtures through a fastener, the positioning fixture is provided with a clamping piece for clamping the outer ring of the block to be tested, the bottom surface of the block to be tested is provided with a plurality of positioning support blocks, the positioning support blocks are installed on the top surface of the workbench, the positioning support blocks correspond to the positions of the clamping piece, the workbench is provided with a plurality of positioning pins for cooperating with the side surface of the block to be tested, and the objective lens of the interferometer is facing the block to be tested.
2. The flatness detection device according to claim 1, characterized in that: The positioning fixture comprises a lower flat plate and an upper flat plate, a connecting plate is arranged between the lower flat plate and the upper flat plate, and a mounting hole for connecting with a fastener is opened on the lower flat plate.
3. The flatness detection device according to claim 1, characterized in that: The pressing member comprises a guide rod, a flexible pressing portion is arranged at the bottom end of the guide rod, the guide rod is slidably arranged on the upper flat plate, and an outer ring sleeve of the guide rod is provided with a spring for pressing down the flexible pressing portion.
4. The flatness detection device according to claim 3, characterized in that: The top end of the guide rod is provided with a transverse protrusion, and the upper flat plate is provided with a limiting sleeve, and the limiting sleeve is provided with a protrusion sliding groove for the sliding of the transverse protrusion.
5. The flatness detection device according to claim 1, characterized in that: A base is arranged at the bottom of the interferometer, and the tooling table is arranged on the base.
6. The flatness detection device according to claim 1, characterized in that: The workbench is provided with a plurality of connecting slide grooves, and the fastener 1 is connected to the connecting slide grooves.
7. The flatness detection device according to claim 1, characterized in that: The cross section of the block to be tested is a rectangle, three positioning support blocks are arranged along an isosceles triangle, and the positioning fixtures are arranged relatively at the front and rear sides of the block to be tested.
8. The flatness detection device according to claim 5, characterized in that: The tooling table is provided with three positioning pins for cooperating with adjacent side surfaces of the block to be tested, and the tooling table is connected to the base through fastener 2.