Partition plate structure for improving falling of diffused dust

Abstract

The utility model discloses a partition plate structure for improving falling of diffused dust. The partition plate structure comprises a plurality of partition plate bodies which are arranged between upper and lower adjacent quartz boats at intervals, the two sides, parallel to the length direction of the quartz boat, of the partition plate body incline downwards, collecting grooves are formed in the bottoms of the two inclined sides of the partition plate body, and the two ends, in the length direction, of the collecting grooves are closed. The collecting grooves are bent upwards from the bottoms of the two sides of the partition plate body to form arc-shaped grooves. According to the utility model, the partition plate structure is arranged between the quartz boats, particulate matters falling from the upper quartz boat can be well blocked, the particulate matters are prevented from falling into the lower quartz boat to influence the performance of a battery piece, the partition plate body is provided with the horizontal plate structure and the inclined plate structure, and the bottom of the inclined plate structure is provided with the arc-shaped collecting groove which is formed by bending upwards; when ground powder particles in the quartz boat fall off, the ground powder particles firstly fall on the horizontal plate of the partition plate body to play a role in preliminary buffering, and then the particles slide into the bottom collecting groove along the inclined plate to be collected and stored, so that subsequent centralized treatment is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of the partition structure of a tube diffusion machine, and specifically, to a partition structure for improving the falling of diffusion dust. Background Art

[0002] The high-temperature sintering process is a relatively core step in the process flow of TOPCon solar cell manufacturing. The high-temperature sintering has high requirements for the cleanliness of the process flow, and it is necessary to avoid impurities and dust from entering the sintering equipment.

[0003] However, with the cyclic progress of the process, the abrasive powder particles in the quartz boat will fall downward under the influence of gravity. Therefore, the particles will fall into the lower quartz boat, resulting in a poor process environment in the lower quartz boat. After the high-temperature process, the solar cells inside the lower quartz boat with fallen particles are prone to problems such as star-shaped cracks and black spots, which seriously affect the yield of the solar cells.

[0004] In view of this, the present application is specifically proposed. Content of the Utility Model

[0005] The technical problem to be solved by the utility model is that the abrasive powder particles in the upper quartz boat will fall downward under the influence of gravity. Therefore, the particles will fall into the lower quartz boat, resulting in a poor process environment in the lower quartz boat. After the high-temperature process, the solar cells inside the lower quartz boat with fallen particles are prone to problems such as star-shaped cracks and black spots. The purpose is to provide a partition structure for improving the falling of diffusion dust. By setting a partition structure between the upper and lower quartz boats, it can have a good blocking effect on the particles falling from the upper quartz boat, avoiding them from falling into the lower quartz boat and silicon wafers and affecting the performance of the solar cells, and effectively improving the yield of the solar cells.

[0006] The utility model is realized by the following technical solutions:

[0007] A partition structure for improving the falling of diffusion dust, including a plurality of partition bodies spaced between two adjacent upper and lower quartz boats;

[0008] The two sides of the partition body parallel to the length direction of the quartz boat are inclined downward, and collecting grooves are arranged at the bottoms of the inclined sides of the partition body, and both ends of the collecting groove in the length direction are closed;

[0009] The collecting groove is an arc-shaped groove formed by bending the bottoms of both sides of the partition body upward.

[0010] By setting a partition structure between the upper and lower quartz boats, the utility model can have a good blocking effect on the particles falling from the upper quartz boat, avoiding them from falling into the lower quartz boat and silicon wafers and affecting the performance of the solar cells, and effectively improving the yield of the solar cells.

[0011] The partition body of the present utility model has a horizontal plate structure and an inclined plate structure, and an arc-shaped collection groove formed by bending upward is provided at the bottom of the inclined plate structure. When abrasive particles fall from the quartz boat above, they first fall on the horizontal plate of the partition body to play a preliminary buffering role, and then the particles slide down along the inclined plate to the bottom collection groove for collection and storage for subsequent centralized treatment. Through the combination of the horizontal plate and the inclined plate, the impact force generated by the particles due to gravity can be released well. The collection groove is formed by bending the bottom of the partition body upward to form an arc-shaped groove, that is, the outer side of the collection groove has a blocking structure, and the particles can be limited in the collection groove after sliding down.

[0012] In a specific embodiment, the cross-section of the end face of the partition body is in an isosceles trapezoid structure.

[0013] In a specific embodiment, the surface of the horizontal plate of the partition body is in a corrugated structure, and the corrugations of the corrugated structure are distributed along the direction parallel to the length of the quartz boat. Through the design of the corrugated structure, the particles falling on the horizontal plate will not produce excessive rebound, avoiding popping out of the range of the partition.

[0014] In a specific embodiment, the two sides of the bottom of the partition body are bent to the directly above the collection groove, which not only ensures the size of the notch between the collection groove and the inclined plate, but also ensures the limit of the particles in the collection groove, avoiding them from rushing out of the partition body after sliding into the collection groove.

[0015] In a specific embodiment, the inclination angle of the inclined plate of the partition body is 45-55°. At this angle, it can ensure that the particles can slowly slide into the collection groove, and can also minimize the width occupied by the inclined plate in the horizontal direction, avoiding the excessive width of the partition body from affecting the transfer of the air flow temperature between the upper and lower quartz boats.

[0016] In a specific embodiment, the width of the horizontal plate of the partition body is greater than the width of the quartz boat, and the edge of the horizontal plate of the partition body is fixedly connected to the horizontal plate of the upper partition body through a connecting rod. Preferably, the connecting rod is detachably connected to the partition body. The connecting rod connects multiple partition bodies into an integrated structure to improve the overall stability.

[0017] In a specific embodiment, a grid structure is provided in the collection groove. By dividing the internal space of the collection groove into grids, it can further prevent the particles from bouncing up after falling into the collection groove.

[0018] In a specific embodiment, the partition body is made of the same material as the quartz boat, which can avoid the partition body blocking the vision of the quartz boat and also ensure that the partition body can adapt to the temperature environment in the furnace.

[0019] In a specific embodiment, the spacing distance between the partition body and the bottom of the quartz boat is 1 / 3 of the spacing between two adjacent quartz boats above and below.

[0020] In a specific embodiment, the width occupied by the inclined plate of the partition body in the horizontal direction is 1 / 2 of the width of the horizontal plate.

[0021] Compared with the prior art, the present utility model has the following advantages and beneficial effects:

[0022] 1. A partition structure for improving the falling of diffusion dust provided by an embodiment of the present utility model can play a good blocking effect on the particulate matter falling from the upper quartz boat by arranging a partition structure between the upper and lower quartz boats, avoiding it from falling onto the lower quartz boat and silicon wafers and affecting the performance of the battery chips, and can effectively improve the yield of the battery chips;

[0023] 2. A partition structure for improving the falling of diffusion dust provided by an embodiment of the present utility model, the partition body has a horizontal plate structure and an inclined plate structure, and an arc-shaped collection groove formed by bending upward is arranged at the bottom of the inclined plate structure. When the upper quartz boat has abrasive powder particulate matter falling, it first falls on the horizontal plate of the partition body to play a preliminary buffering role, and then the particulate matter slides down along the inclined plate to the bottom collection groove for collection and storage for subsequent centralized treatment. Through the combination of the horizontal plate and the inclined plate, the impact force generated by the particulate matter due to gravity can be released well;

[0024] 3. A partition structure for improving the falling of diffusion dust provided by an embodiment of the present utility model, the collection groove is formed into an arc-shaped groove by bending upward from the bottom of the partition body, that is, the outer side of the collection groove has a blocking structure, and the particulate matter can be limited in the collection groove after sliding down;

[0025] 4. A partition structure for improving the falling of diffusion dust provided by an embodiment of the present utility model, the surface of the horizontal plate of the partition body is in a corrugated structure, and the corrugations of the corrugated structure are distributed along the direction parallel to the length of the quartz boat. Through the design of the corrugated structure, the particulate matter falling on the horizontal plate will not generate too large a rebound and avoid popping out of the range of the partition;

[0026] 5. A partition structure for improving the falling of diffusion dust provided by an embodiment of the present utility model, the inclination angle of the inclined plate of the partition body is 45-55°. At this angle, it can ensure that the particulate matter can slowly slide into the collection groove, and can also minimize the width occupied by the inclined plate in the horizontal direction, avoiding the over-wide width of the partition body from affecting the transfer of the air flow temperature between the upper and lower quartz boats. Description of the Drawings

[0027] To more clearly illustrate the technical solutions of the exemplary embodiments of the present utility model, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0028] Figure 1 Schematic diagram of the setting structure of the partition plate and the quartz boat provided by the embodiment of the present utility model;

[0029] Figure 2 Front view schematic diagram of the partition plate body provided by the embodiment of the present utility model;

[0030] Figure 3 Schematic three-dimensional structure diagram provided by the embodiment of the present utility model;

[0031] Figure 4 Schematic three-dimensional structure provided by the embodiment of the present utility model.

[0032] Reference numerals in the drawings and corresponding component names:

[0033] 1 - Quartz boat, 2 - Partition plate body, 3 - Collection groove, 4 - Connecting rod, 5 - Grid structure. Specific embodiments

[0034] To make the objectives, technical solutions and advantages of the present utility model more clear and understandable, the following will further elaborate on the present utility model in combination with the embodiments and the drawings. The illustrative embodiments of the present utility model and their descriptions are only used to explain the present utility model and do not limit the present utility model.

[0035] In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present utility model. However, it is obvious to those of ordinary skill in the art that: it is not necessary to adopt these specific details to implement the present utility model. In other embodiments, well-known structures are not specifically described to avoid confusing the present utility model.

[0036] Throughout the specification, references to "an embodiment", "embodiments", "an example" or "examples" mean that a particular feature, structure, or characteristic described in connection with the embodiment or example is included in at least one embodiment of the present utility model. Thus, the phrases "an embodiment", "embodiments", "an example" or "examples" appearing throughout the specification do not necessarily all refer to the same embodiment or example. In addition, the particular features, structures, or characteristics may be combined in any suitable combination and / or sub-combination in one or more embodiments or examples. Furthermore, those of ordinary skill in the art should understand that the drawings provided herein are for illustrative purposes only and are not necessarily drawn to scale. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0037] In the description of the present utility model, the orientation or positional relationship indicated by terms such as "front", "rear", "left", "right", "upper", "lower", "vertical", "horizontal", "high", "low", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the protection scope of the present utility model.

[0038] Embodiment

[0039] As Figures 1-4 shown, a partition structure for improving the falling of diffused dust provided by an embodiment of the present utility model includes a plurality of partition bodies 2 arranged at intervals between two adjacent quartz boats 1 up and down;

[0040] Both sides of the partition body 2 parallel to the length direction of the quartz boat 1 are inclined downward, and collecting grooves 3 are arranged at the bottoms of the inclined sides of the partition body 2, and both ends of the collecting grooves 3 in the length direction are closed;

[0041] The collecting groove 3 is an arc-shaped groove formed by bending the bottoms of both sides of the partition body 2 upward.

[0042] By providing a partition structure between the upper and lower quartz boats, the present utility model can have a good blocking effect on the particulate matter falling from the upper quartz boat, avoiding it from falling onto the lower quartz boat and the silicon wafer and affecting the performance of the battery chip, and can effectively improve the yield of the battery chip.

[0043] The partition body of the utility model has a horizontal plate structure and an inclined plate structure, and an arc-shaped collection groove formed by bending upward is arranged at the bottom of the inclined plate structure. When abrasive particles fall from the quartz boat above, they first fall on the horizontal plate of the partition body to play a preliminary buffering role, and then the particles slide down along the inclined plate to the bottom collection groove for collection and storage for subsequent centralized treatment. Through the combination of the horizontal plate and the inclined plate, the impact force generated by the particles due to gravity can be released well. The collection groove is formed by bending the bottom of the partition body upward to form an arc-shaped groove, that is, the outer side of the collection groove has a blocking structure, and the particles can be confined in the collection groove after sliding down.

[0044] In a specific embodiment, the cross-section of the end face of the partition body 2 is in an isosceles trapezoid structure.

[0045] In a specific embodiment, the surface of the horizontal plate of the partition body 2 is in a corrugated structure, and the corrugations of the corrugated structure are distributed along the direction parallel to the length of the quartz boat 1. Through the design of the corrugated structure, the particles falling on the horizontal plate will not produce too large a rebound, avoiding popping out of the range of the partition.

[0046] In a specific embodiment, the two sides of the bottom of the partition body 2 are bent to the directly above the collection groove 3, which not only ensures the size of the notch between the collection groove and the inclined plate, but also ensures the limit of the particles in the collection groove, avoiding them rushing out of the partition body after sliding into the collection groove.

[0047] In a specific embodiment, the inclination angle of the inclined plate of the partition body 2 is 45-55°. At this angle, it can ensure that the particles can slowly slide into the collection groove, and can also minimize the width occupied by the inclined plate in the horizontal direction, avoiding the excessive width of the partition body affecting the transfer of the air flow temperature between the upper and lower quartz boats.

[0048] In a specific embodiment, the width of the horizontal plate of the partition body 2 is greater than the width of the quartz boat, and the edge of the horizontal plate of the partition body 2 is fixedly connected to the horizontal plate of the upper partition body 2 through a connecting rod 4. Preferably, the connecting rod is detachably connected to the partition body. The connecting rod connects multiple partition bodies into an integrated structure to improve the overall stability.

[0049] In a specific embodiment, a grid structure 5 is arranged in the collection groove 3. By dividing the internal space of the collection groove into grids, it can further prevent the particles from bouncing up after falling into the collection groove.

[0050] In a specific embodiment, the partition body 2 is made of the same material as the quartz boat 1, which can avoid the partition body blocking the vision of the quartz boat and also ensure that the partition body can adapt to the temperature environment in the furnace.

[0051] In a specific embodiment, the spacing distance between the partition body 2 and the bottom of the quartz boat 1 is 1 / 3 of the spacing between two adjacent quartz boats 1 above and below.

[0052] In a specific embodiment, the width occupied by the inclined plate of the partition body 2 in the horizontal direction is 1 / 2 of the width of the horizontal plate.

[0053] The specific embodiments described above have further elaborated on the purpose, technical solutions, and beneficial effects of the present utility model. It should be understood that the above description is only for the specific embodiments of the present utility model and is not used to limit the protection scope of the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A partition structure for improving the falling of diffused dust, characterized in that: It comprises a plurality of partition bodies (2) arranged at intervals between two upper and lower adjacent quartz boats (1); The two sides of the partition body (2) parallel to the length direction of the quartz boat (1) are inclined downwards, and the bottoms of the two inclined sides of the partition body (2) are provided with collecting grooves (3), and the two ends of the collecting grooves (3) along the length direction are closed; The collecting groove (3) is an arc-shaped groove formed by bending the bottoms of both sides of the partition body (2) upward.

2. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The end surface of the partition body (2) is in an isosceles trapezoidal structure.

3. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The surface of the horizontal plate of the partition body (2) is in a corrugated structure, and the corrugations of the corrugated structure are distributed along a direction parallel to the length of the quartz boat (1).

4. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The bottoms of both sides of the partition body (2) are bent to just above the collecting tank (3).

5. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The inclined angle of the inclined plate of the partition body (2) is 45 to 55 degrees.

6. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The width of the horizontal plate of the partition body (2) is greater than the width of the quartz boat, and the edge of the horizontal plate of the partition body (2) is fixedly connected to the horizontal plate of the upper partition body (2) through a connecting rod (4).

7. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: A grid structure (5) is provided in the collecting tank (3).

8. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The partition body (2) is made of the same material as the quartz boat (1).

9. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The spacing distance between the partition body (2) and the bottom of the quartz boat (1) is 1 / 3 of the spacing between two adjacent quartz boats (1) above and below.

10. A partition structure for improving the falling of diffused dust according to claim 1, characterized in that: The width of the inclined plate of the partition body (2) in the horizontal direction is 1 / 2 of the width of the horizontal plate.

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