Steel belt transmission pre-tightening mechanism and mechanical arm made of steel belt transmission pre-tightening mechanism

Abstract

The utility model provides a steel belt transmission pre-tightening mechanism and a mechanical arm made of the same, the steel belt transmission pre-tightening mechanism comprises a fixing piece, an elastic piece and a connecting piece, the fixing piece is provided with a fixing hole, a first spring hole and a spring window, the connecting piece is provided with a second spring hole, the elastic piece is arranged in the spring window, and the elastic piece is arranged in the second spring hole. The two ends of the connecting piece are connected with the first spring hole and the second spring hole respectively so that the fixing piece can be elastically connected with the connecting piece, and the tail end of the connecting piece is connected with the transmission steel belt. Therefore, the transmission steel belt is automatically tensioned by utilizing the elastic force of the elastic piece, and the tension of the steel belt is always in an allowable range for a long time, so that the transmission reliability of the steel belt is improved.

Description

Technical Field

[0001] The utility model relates to mechanical transmission technology, in particular to a steel belt transmission pre-tightening mechanism and a manipulator made thereof. Background Art

[0002] In recent years, with the rapid development of the semiconductor industry, domestic semiconductor equipment manufacturers have gradually expanded to the front-end process of wafers. As the demand for equipment such as etching, diffusion, deposition, and assembly in the industry increases year by year, the application fields of vacuum manipulators have also increased accordingly. However, due to the limited internal space of the vacuum chamber of semiconductor equipment, the vacuum manipulator has been designed to be miniaturized in this field in recent years.

[0003] In the existing design schemes of miniaturized vacuum manipulators, in order to meet the usage requirements of the vacuum environment, a steel belt transmission scheme is usually used. However, the conventional fastening method of the steel belt is to directly lock the steel belt with screws, and the steel belt tension needs to be controlled within the standard range. During the debugging process, it is necessary to repeatedly confirm the tightening and loosening of the adjustment screws and the tension value. Therefore, the entire debugging process is relatively cumbersome, time-consuming, and laborious.

[0004] The main reason is that when using screws for fastening, there is no adjustment margin. After the manipulator runs for a long time, the steel belt will have fatigue deformation. At the same time, long-term high-load operation will also cause the steel belt to be stretched, eventually resulting in the phenomenon of loosening of transmission parts. However, due to the design requirements of the miniaturization of the vacuum manipulator, if a traditional screw tightening mechanism is used, the steel belt transmission mechanism needs to be adjusted, which will obviously increase the internal size of the robotic arm and is not conducive to space utilization.

[0005] Therefore, how to design a steel belt transmission pre-tightening mechanism that does not depend on the internal space of the robotic arm and is not easily loosened during long-term operation is a difficult problem to be solved in this field. Summary of the Utility Model

[0006] Therefore, the main purpose of the present utility model is to provide a steel belt transmission pre-tightening mechanism and a manipulator made thereof to solve the problems mentioned in the background art.

[0007] To achieve the above object, according to one aspect of the present utility model, a steel belt transmission pre-tightening mechanism is provided, which includes: a fixing member, an elastic member, and a connecting member. The fixing member is provided with a fixing hole, a first spring hole, and a spring window. The connecting member is provided with a second spring hole. The elastic member is disposed in the spring window, and its two ends are respectively connected to the first spring hole and the second spring hole to elastically connect the fixing member and the connecting member. The tail end of the connecting member is connected to the transmission steel belt.

[0008] Preferably, the steel belt drive pre-tensioning mechanism further includes: a limiting member, wherein a limiting hole is further provided on the fixing member, a waist-shaped hole is further provided on the connecting member, and the limiting member passes through the waist-shaped hole and is engaged with the limiting hole to adjust the connecting member and the fixing member to be substantially in contact with each other.

[0009] Preferably, the steel belt drive pre-tensioning mechanism further includes: a limiting member, wherein a limiting platform is further provided on the fixing member, a limiting hole is provided on one side of the limiting platform, a waist-shaped hole is further provided on the connecting member, and the limiting member passes through the waist-shaped hole and is engaged with the limiting hole to adjust the connecting member and the fixing member to be substantially in contact with each other.

[0010] Preferably, a positioning hole is further provided on the fixing member.

[0011] Preferably, the length of the spring window is greater than the length allowed after the elastic member is tensioned and elastically deformed.

[0012] Preferably, the length of the waist-shaped hole of the connecting member corresponds to the distance of the elastic tensioning elastic deformation allowed by the elastic member.

[0013] Preferably, the elastic member is a helical spring.

[0014] To achieve the above object, according to another aspect of the present invention, a manipulator is further provided, which includes: a steel belt drive mechanism, a pre-tensioning mechanism, wherein the pre-tensioning mechanism is connected to the drive steel belt of the steel belt drive mechanism, and the pre-tensioning mechanism adopts the structure of any one of the above-mentioned steel belt drive pre-tensioning mechanisms.

[0015] Through the steel belt drive pre-tensioning mechanism provided by the present invention and the manipulator made thereof, a novel elastic tensioning scheme with a flat long strip structure is ingeniously designed, which is particularly suitable for being arranged in the outer side wall space of the robotic arm, so as not to additionally increase the requirements for the internal space of the robotic arm, and a part of the stress deformation of the drive steel belt can be converted into the deformation of the spring, thereby automatically adjusting the tension of the drive steel belt to always be within the allowable range. Therefore, it is not necessary to repeatedly adjust the tension manually, thereby saving the workload of manual debugging and improving the reliability of the steel belt drive. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings:

[0017] Figures 1 to 2 is a schematic structural diagram of the steel belt drive pre-tensioning mechanism of the present invention installed on the robotic arm and engaged with the steel belt drive mechanism;

[0018] Figures 3 to 4 is a side view and a top view structural diagram of the steel belt drive pre-tensioning mechanism of the present invention;

[0019] Figure 5 In the steel belt drive pre-tightening mechanism of the present utility model, it is a schematic structural diagram of a connecting member;

[0020] Figure 6 In the steel belt drive pre-tightening mechanism of the present utility model, it is a schematic structural diagram of a fixing member.

[0021] Description of reference numerals

[0022] Fixing member 1, elastic member 2, connecting member 3, limiting member 4, robotic arm 9, embedded groove 91, transmission steel belt 92, steel belt drive mechanism 93, steel belt drive pre-tightening mechanism 10, fixing hole 11, first spring hole 12, spring window 13, limiting hole 14, limiting platform 15, positioning hole 16, second spring hole 31, waist-shaped hole 32. Detailed implementation manners

[0023] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the present utility model claimed, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts fall within the scope of protection of the present utility model.

[0025] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0026] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, terms such as "first", "second", "third", etc. are only used for distinguishing descriptions and should not be construed as indicating or implying relative importance. The terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion.

[0027] In addition, terms such as "horizontal", "vertical", "hanging", etc. do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0028] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, terms such as "set", "arranged", "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances in combination with the prior art. In addition, without conflict, the embodiments and features in the embodiments of the present utility model can be combined with each other. And one or more of the components in the drawings can be necessary or unnecessary, and the relative positional relationship between the above-mentioned components in the drawings can be adjusted according to actual needs.

[0029] In order to be independent of the internal space of the robotic arm 9 and be able to automatically adjust the tension of the transmission steel belt 92 for a long time, as Figures 1 to 6 shown, the present utility model provides a steel belt transmission pre-tightening mechanism 10, which includes: a fixing member 1, an elastic member 2, and a connecting member 3, where as Figures 1 to 2As shown, the present example concept utilizes the space of the embedded groove 91 opened on the outer side wall of the robotic arm 9 to arrange the steel belt drive pre-tensioning mechanism 10, so as not to occupy the space of the steel belt drive mechanism 93 inside the robotic arm 9. For this purpose, in the present example, the fixing member 1 and the connecting member 3 are specifically designed to be flat strips. The fixing member 1 is provided with a fixing hole 11, a first spring hole 12, and a spring window 13. The fixing member 1 is fixedly connected to the screw hole in the embedded groove 91 on the outer side wall of the robotic arm 9 through the fixing hole 11 by bolts. The connecting member 3 is provided with a second spring hole 31. In this embodiment, the elastic member 2 is exemplified as a helical spring. The length of the spring window 13 is preferably greater than the length allowed after the tension elastic deformation of the helical spring. The helical spring is arranged in the spring window 13, and its two ends are respectively connected to the first spring hole 12 and the second spring hole 31 to elastically connect the fixing member 1 and the connecting member 3. The tail end of the connecting member 3 is connected to the transmission steel belt 92, so as to automatically tension the transmission steel belt 92 through the elastic force of the helical spring.

[0030] With this arrangement, since the structure for fixing the steel belt drive mechanism 93 on the robotic arm 9 becomes more compact after changing the traditional screw pre-tensioning structure, the installation process of the steel belt is also simplified. Workers no longer need to repeatedly loosen and tighten the screws to adjust the tension, thus reducing the workload of the workers. In addition, this design structure converts a part of the stress and deformation of the transmission steel belt 92 into the deformation of the spring, which can automatically ensure that the steel belt tension is always within the allowable range for a long time to improve the reliability of the steel belt drive of the robotic arm 9.

[0031] On the other hand, during the transmission process of the transmission steel belt 92, the helical spring will be repeatedly pulled, which is likely to cause the connecting member 3 to shake and form fluctuations in the tension force. Therefore, to avoid such problems, in an alternative embodiment, as Figures 3 to 6 shown, the steel belt drive pre-tensioning mechanism 10 further includes: a limiting member 4. In this embodiment, the limiting member 4 is exemplified as a limiting bolt. The fixing member 1 is further provided with a limiting hole 14, and the connecting member 3 is further provided with a waist-shaped hole 32. The length of the waist-shaped hole 32 is preferably corresponding to the tension elastic deformation distance allowed by the elastic member 2. The limiting bolt passes through the waist-shaped hole 32 and is mated with the limiting hole 14 to adjust the connecting member 3 to be basically in contact with the fixing member 1, so that the connecting member 3 can only move along the limiting guidance of the limiting bolt and the waist-shaped hole 32 during the tensioning process, thus avoiding the shaking of the connecting member 3 to ensure the stability of the tension force.

[0032] In addition, in order to prevent the fixing member 1 from displacing or deflecting during the tensioning process, in an alternative example, a limiting platform 15 may be provided on the fixing member 1, and the limiting hole 14 may be provided on the limiting platform 15. The protruding height of the limiting platform 15 may correspond to the adjustment stroke of the limiting bolt. Correspondingly, a positioning notch is further provided in the inner embedded groove 91 on the outer side wall of the robotic arm 9 to be adapted to the limiting platform 15, so that the fixing member 1 can be firmly positioned in the inner embedded groove 91 on the outer side wall of the robotic arm 9 through the fixing hole 11 and the limiting platform 15, without being interfered by the elastic force of the spring deformation, and maintain a stable elastic connection with the connecting member 3, thereby further ensuring that the tension of the steel belt remains stable.

[0033] On the other hand, as Figure 3 and Figure 6 shown, in order to facilitate the installation of the fixing member 1, in an alternative example, a positioning hole 16 is further provided on the fixing member 1, and a positioning post may be further provided in the inner embedded groove 91 on the outer side wall of the corresponding robotic arm 9. Thus, during the assembly process of the fixing member 1, the fixing member 1 is pre-positioned through the guidance of the positioning post, so as to facilitate the insertion of the bolt into the fixing hole 11 to be mated with the threaded hole in the inner embedded groove 91 on the outer side wall of the robotic arm 9.

[0034] On the other hand, corresponding to the above-mentioned steel belt transmission pre-tightening mechanism 10, the present invention further provides a robotic arm, which includes: a steel belt transmission mechanism 93 and a pre-tightening mechanism, wherein the pre-tightening mechanism is connected to the transmission steel belt 92 of the steel belt transmission mechanism 93, and the pre-tightening mechanism is made of the structure of any one of the above-mentioned steel belt transmission pre-tightening mechanisms 10.

[0035] In summary, through the steel belt transmission pre-tightening mechanism 10 provided by the present invention and the robotic arm made thereof, a flexible elastic tensioning scheme with a flat long strip structure is ingeniously designed, which is particularly suitable for being arranged in the space on the outer side wall of the robotic arm 9, so as not to additionally increase the requirements for the internal space of the robotic arm 9, and a part of the stress deformation of the transmission steel belt 92 can be converted into the deformation of the spring, thereby automatically adjusting the tension of the transmission steel belt 92 to be always within the allowable range. Therefore, it is not necessary to repeatedly adjust the tension manually. By doing so, while saving the manual debugging workload, the reliability of the steel belt transmission can be improved.

[0036] At the same time, the above-mentioned steel belt transmission pre-tightening mechanism 10 of the example can synchronously rotate with the steel belt to form an elastic flexible traction rotating shaft, can make the transmission action smoother, can buffer and absorb vibration, and has a low cost, low noise during operation, is easy to maintain, and is small in size.

[0037] In addition, since the elastic force of the elastic member 2 similar to a spiral spring is within a stress range, it only needs to ensure that the quality of the spring is qualified and the selection is appropriate. Then, the actual pre-tightening force after installation can be calculated, and the current pre-tightening force value can be obtained by recording the elongation of the spring. Therefore, it is more convenient to determine the qualification of the equipment after rechecking with the measuring instrument, thus having strong practicability.

[0038] The preferred embodiments of the present utility model disclosed above are only used to help illustrate the present utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the present utility model to the specific embodiments described. Obviously, many modifications and variations can be made according to the content of this specification. For example, the above examples can be specifically applied to vacuum robots, medical robots, industrial robots, etc. In addition to the above robotic arm 9, any motion structure and traction equipment used for steel belt transmission and steel belt fastening can be applied. These embodiments are selected and specifically described in this specification to better explain the principle and practical application of the present utility model, so that those skilled in the art can well understand and utilize the present utility model. The present utility model is only limited by the claims and their full scope and equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

[0039] In addition, any combination can be made between various different embodiments of the embodiments of the present utility model as long as it does not violate the idea of the embodiments of the present utility model, and it should also be regarded as the content disclosed in the embodiments of the present utility model.

Claims

1. A steel belt transmission pretensioning mechanism, characterized in that include: A fixing member, an elastic member, and a connecting member, wherein the fixing member is provided with a fixing hole, a first spring hole, and a spring window, and the connecting member is provided with a second spring hole, wherein the elastic member is arranged in the spring window, and its two ends are respectively connected to the first spring hole and the second spring hole to elastically connect the fixing member and the connecting member, and the tail end of the connecting member is connected to the transmission steel belt.

2. The steel belt transmission pretensioning mechanism according to claim 1, characterized in that: Also includes: The limiting member, wherein the fixing member is also provided with a limiting hole, the connecting member is also provided with a waist hole, the limiting member passes through the waist hole and is matched with the limiting hole to adjust the connecting member and the fixing member to be basically attached.

3. The steel belt transmission pretensioning mechanism according to claim 1, characterized in that: Also includes: A limiting member, wherein the fixing member is also provided with a limiting platform, a limiting hole is provided on one side of the limiting platform, and the connecting member is also provided with a waist hole, and the limiting member passes through the waist hole and is matched with the limiting hole to adjust the connecting member and the fixing member to be basically attached.

4. The steel belt transmission pretensioning mechanism according to claim 1, characterized in that: The fixing piece is also provided with a positioning hole.

5. The steel belt transmission pretensioning mechanism according to any one of claims 1 to 4, characterized in that: The length of the spring window is greater than the length allowed after the elastic member is elastically deformed during tensioning.

6. The steel belt transmission pretensioning mechanism according to any one of claims 2 to 3, characterized in that: The waist hole length of the connecting piece corresponds to the tension elastic deformation distance allowed by the elastic piece.

7. The steel belt transmission pretensioning mechanism according to any one of claims 1 to 4, characterized in that: The elastic member is a coil spring.

8. A manipulator comprising: A steel belt transmission mechanism and a pretensioning mechanism, wherein the pretensioning mechanism is connected to the transmission steel belt of the steel belt transmission mechanism, and is characterized in that the pretensioning mechanism adopts the structure of the steel belt transmission pretensioning mechanism as described in any one of claims 1 to 7.

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