Liquid leakage monitoring system and cabinet

Abstract

According to the liquid leakage monitoring system and the cabinet, the liquid leakage monitoring system is used for monitoring liquid leakage in the cabinet, a liquid accumulation disc of the liquid leakage monitoring system is arranged at the bottom of each radio frequency power supply, a confluence hole is formed in the bottom of each liquid accumulation disc, and when liquid leakage occurs in a cooling pipeline, the leaked liquid can flow to the confluence hole in the liquid accumulation disc, so that the leakage of the cooling pipeline is avoided. The lower liquid accumulation disc in the adjacent liquid accumulation discs can receive the leaked liquid flowing out from the confluence holes of the upper liquid accumulation disc, so that the leaked liquid is transmitted layer by layer under the action of gravity and finally flows into the liquid accumulation disc at the bottommost end, and when the leaked liquid exists in the liquid accumulation disc at the bottommost end, the leaked liquid detector can monitor the leaked liquid. In the cabinet provided by the utility model, the leaked liquid in the upper liquid accumulation disc finally flows to the liquid accumulation disc at the bottommost end, so that only the liquid leakage detector needs to be arranged in the liquid accumulation disc at the bottommost end, the complexity of traditional multi-point liquid leakage monitoring is avoided, the installation process of the liquid leakage detector is simplified, and meanwhile, the cost of liquid leakage monitoring is also reduced.

Description

Technical Field

[0001] Embodiments of the present utility model relate to the field of semiconductor equipment, and particularly to a liquid leakage monitoring system and a cabinet. Background Art

[0002] A radio frequency power supply (RF Generator), as a device capable of generating a sinusoidal voltage with a fixed frequency, has an operating frequency covering a wide radio frequency range (about 3 KHz to 300 GHz) and has a certain power output. Such a power supply plays a core role in the semiconductor manufacturing industry and is widely used in the production of semiconductor devices such as chips and processors, as well as in the processing of thin-film solar cells and flat panel displays such as liquid crystals. A radio frequency power supply is necessary for generating plasma, and it consists of a radio frequency power source, an impedance matcher, and an impedance power meter, and is applied in processes such as radio frequency sputtering, chemical vapor deposition process, and reactive ion etching.

[0003] In modern semiconductor manufacturing facilities, multiple radio frequency power supplies are usually configured for different production modules (PMs) to meet various process requirements. Given the relatively large size of the radio frequency power supply itself and the need to integrate a cooling water circuit to keep the device operating at a safe temperature, these power supplies often need to be placed remotely. Therefore, a dedicated cabinet (Rack) needs to be designed to install multiple radio frequency power supplies to ensure their stable operation and facilitate monitoring.

[0004] The existing liquid leakage monitoring for radio frequency power supplies still has significant defects. Traditional liquid leakage monitoring methods rely on winding liquid leakage detection tapes around water pipe joints and installing multiple liquid leakage sensors. This method not only has complex installation and wiring, but also has a relatively high cost due to its high dependence on manual operation. Summary of the Utility Model

[0005] The problem solved by the embodiments of the present utility model is to provide a liquid leakage monitoring system and a cabinet for simplifying the liquid leakage monitoring method of radio frequency power supplies and reducing the cost of liquid leakage monitoring.

[0006] To solve the above problems, embodiments of the present utility model provide a liquid leakage monitoring system for monitoring liquid leakage in a cabinet. The cabinet includes: a cabinet body; a plurality of radio frequency power supplies arranged at intervals in the vertical direction in the cabinet body, and the radio frequency power supplies include cooling pipelines; the liquid leakage monitoring system includes: a liquid accumulation tray disposed at the bottom of each radio frequency power supply, the liquid accumulation tray being used to receive the liquid leakage of the cooling pipeline, and a liquid confluence hole is provided at the bottom of the liquid accumulation tray located above among two adjacent liquid accumulation trays, and the liquid accumulation tray located below receives the liquid leakage flowing out of the liquid confluence hole in the liquid accumulation tray above; a liquid leakage detector disposed in the lowermost liquid accumulation tray.

[0007] Optionally, in two adjacent liquid accumulation trays, the converging holes are provided at the lowest position of the bottom of the upper liquid accumulation tray.

[0008] Optionally, the liquid accumulation tray includes: a bottom surface, the converging holes penetrate through the bottom surface; a side wall, extending upward from the edge of the bottom surface, and the side wall and the bottom surface form a space for accommodating leaked liquid; a clamping portion, located on two opposite side walls.

[0009] Optionally, the bottom surface includes a plurality of sheet metal parts, each sheet metal part has an inclined angle, and the converging holes are provided at the lowermost ends of the plurality of sheet metal parts.

[0010] Optionally, the liquid accumulation tray is in a funnel shape.

[0011] Optionally, the liquid leakage detector includes a liquid leakage detection belt, and the liquid leakage detection belt is laid flat in the lowermost liquid accumulation tray.

[0012] Optionally, the liquid leakage monitoring system further includes: a liquid leakage sensor, the liquid leakage sensor is connected to the liquid leakage detector; a controller, the controller is simultaneously connected to the radio frequency power supply and the liquid leakage sensor.

[0013] The embodiment of the present utility model further provides a cabinet, including the aforementioned liquid leakage monitoring system.

[0014] Optionally, the cabinet further includes: positioning members, disposed in the cabinet body, the number of the positioning members is multiple and spaced apart in the vertical direction, and the liquid accumulation tray is disposed in the cabinet body through the positioning members.

[0015] Optionally, the number of the positioning members between adjacent radio frequency power supplies is multiple.

[0016] Compared with the prior art, the technical solution of the embodiment of the present utility model has the following advantages:

[0017] The liquid leakage monitoring system provided by the embodiment of the present utility model is used to monitor liquid leakage in a cabinet. The cabinet includes a cabinet body, and a plurality of radio frequency power supplies are arranged at intervals in the vertical direction in the cabinet body. The radio frequency power supply includes a cooling pipeline, and a liquid accumulation tray is arranged at the bottom of each radio frequency power supply to receive the liquid leakage of the cooling pipeline. A confluence hole is arranged at the bottom of each liquid accumulation tray. When liquid leakage occurs in the cooling pipeline, the liquid leakage will flow in the liquid accumulation tray towards the confluence hole, and the liquid accumulation tray located below among adjacent liquid accumulation trays will receive the liquid leakage flowing out from the confluence hole of the liquid accumulation tray above. Thus, under the action of gravity, the liquid leakage is transferred layer by layer and finally flows into the liquid accumulation tray at the bottommost end. Since the liquid leakage detector is arranged in the liquid accumulation tray at the bottommost end, when there is liquid leakage in the liquid accumulation tray at the bottommost end, the liquid leakage detector can monitor the liquid leakage. In the cabinet of the present utility model, since the liquid leakage in the upper liquid accumulation tray will finally flow into the liquid accumulation tray at the bottommost end, it is only necessary to arrange the liquid leakage detector in the liquid accumulation tray at the bottommost end, avoiding the complexity of traditional multi-point monitoring of liquid leakage, simplifying the installation process of the liquid leakage detector, and at the same time reducing the cost of using the cabinet for liquid leakage monitoring. Description of the Drawings

[0018] Figure 1 is a schematic structural diagram between the liquid leakage detector and each liquid accumulation tray in the cabinet according to an embodiment of the present utility model;

[0019] Figure 2 is a schematic structural diagram of the upper liquid accumulation tray among two adjacent liquid accumulation trays in the cabinet according to an embodiment of the present utility model;

[0020] Figure 3 is a schematic connection diagram among the radio frequency power supply, the liquid accumulation tray, the liquid leakage detector, the liquid leakage sensor and the controller in the cabinet according to an embodiment of the present utility model;

[0021] Figure 4 is a schematic structural diagram of the cabinet according to an embodiment of the present utility model;

[0022] Figure 5 is a schematic structural diagram of the flow splitting block in the cabinet according to an embodiment of the present utility model. Detailed Embodiment

[0023] As can be seen from the background art, there are still significant defects in the current liquid leakage monitoring for radio frequency power supplies. The traditional liquid leakage monitoring method relies on winding liquid leakage detection tapes around water pipe joints and installing multiple liquid leakage sensors. This method not only has a complex installation and wiring process, but also has a relatively high cost due to its high dependence on manual operations.

[0024] To solve the above technical problems, an embodiment of the present utility model provides a liquid leakage monitoring system for monitoring liquid leakage in a cabinet. The cabinet includes a cabinet body, and a plurality of radio frequency power supplies are arranged at intervals in the vertical direction in the cabinet body. The radio frequency power supply includes a cooling pipeline, and a liquid collecting tray is arranged at the bottom of each radio frequency power supply to receive the liquid leakage from the cooling pipeline. A confluence hole is arranged at the bottom of each liquid collecting tray. When liquid leakage occurs in the cooling pipeline, the leaked liquid will flow towards the confluence hole in the liquid collecting tray, and the lower liquid collecting tray among adjacent liquid collecting trays will receive the leaked liquid flowing out from the confluence hole of the upper liquid collecting tray. Thus, under the action of gravity, the leaked liquid is transmitted layer by layer and finally flows into the bottommost liquid collecting tray. Since the liquid leakage detector is arranged in the bottommost liquid collecting tray, when there is liquid leakage in the bottommost liquid collecting tray, the liquid leakage detector can monitor the liquid leakage. In the cabinet of the present utility model, since the liquid leakage in the upper liquid collecting tray will finally flow into the bottommost liquid collecting tray, only a liquid leakage detector needs to be arranged in the bottommost liquid collecting tray, avoiding the complexity of traditional multi-point monitoring of liquid leakage, simplifying the installation process of the liquid leakage detector, and at the same time reducing the cost of using the cabinet for liquid leakage monitoring.

[0025] To make the above objects, features, and advantages of the embodiments of the present utility model more obvious and understandable, the following detailed description of the specific embodiments of the present utility model will be given with reference to the accompanying drawings.

[0026] Figure 1 It is a schematic structural diagram between the liquid leakage sensor and each liquid collecting tray in a cabinet according to an embodiment of the present utility model; Figure 2 It is a schematic structural diagram of the upper liquid collecting tray among two adjacent liquid collecting trays in a cabinet according to an embodiment of the present utility model; Figure 3 It is a schematic connection diagram among the radio frequency power supply, the liquid collecting tray, the liquid leakage sensor, and the controller in a cabinet according to an embodiment of the present utility model; Figure 4 It is a schematic structural diagram of a cabinet according to an embodiment of the present utility model.

[0027] Reference Figures 1 to 4 , a liquid leakage monitoring system is used to monitor liquid leakage in a cabinet 100 (as Figure 4 shown), and the cabinet 100 includes: a cabinet body 101 (as Figure 4 shown); a plurality of radio frequency power supplies 102 (as Figure 4As shown in the figure, they are arranged at intervals in the vertical direction in the cabinet 101. The radio frequency power supply 102 includes a cooling pipeline. The liquid leakage monitoring system includes: a liquid collecting tray 103, which is arranged at the bottom of each radio frequency power supply 102. The liquid collecting tray 103 is used to receive the liquid leakage of the cooling pipeline. A liquid collecting hole 1031 is arranged at the bottom of the upper liquid collecting tray 103 among two adjacent liquid collecting trays. The lower liquid collecting tray 103 receives the liquid leakage flowing out of the liquid collecting hole 1031 in the upper liquid collecting tray 103; a liquid leakage detector 104 is arranged in the lowermost liquid collecting tray 103.

[0028] The liquid leakage monitoring system provided by the embodiment of the present utility model has a liquid leakage monitoring function. The cabinet 100 includes a cabinet body 101. A plurality of radio frequency power supplies 102 are arranged at intervals in the vertical direction in the cabinet body 101. The radio frequency power supply 102 includes a cooling pipeline. A liquid collecting tray 103 is arranged at the bottom of each radio frequency power supply 102 to receive the liquid leakage of the cooling pipeline. A liquid collecting hole 1031 is arranged at the bottom of each liquid collecting tray 103. After the cooling pipeline leaks, the liquid leakage will flow to the liquid collecting hole 1031 in the liquid collecting tray 103. Moreover, the lower liquid collecting tray 103 will receive the liquid leakage flowing out of the liquid collecting hole 1031 in the upper liquid collecting tray 103. Thus, under the action of gravity, the liquid leakage is transmitted layer by layer and finally flows into the lowermost liquid collecting tray 103. Since the liquid leakage detector 104 is arranged in the lowermost liquid collecting tray 103, when there is liquid leakage in the lowermost liquid collecting tray 103, the liquid leakage detector 104 can monitor the liquid leakage. In the cabinet 100 of the present utility model, since the liquid leakage in the upper liquid collecting tray 103 will finally flow into the lowermost liquid collecting tray 103, only the liquid leakage detector 104 needs to be arranged in the lowermost liquid collecting tray 103, avoiding the complexity of traditional multi-point liquid leakage monitoring, simplifying the installation process of the liquid leakage detector 104, and at the same time reducing the cost of using the cabinet 100 for liquid leakage monitoring.

[0029] The cooling pipeline of the radio frequency power supply 102 is used to transport a coolant (such as water) to cool down the radio frequency power supply 102 so that the radio frequency power supply 102 operates at an appropriate temperature.

[0030] In this embodiment, the cooling pipeline includes an input end for the coolant to flow in; the cooling pipeline further includes an output end for the coolant to flow out.

[0031] In this embodiment, the number of radio frequency power supplies 102 is nine. In other embodiments, the number of radio frequency power supplies 102 is not limited to nine.

[0032] Figure 1 and Figure 3They are all simple diagrams in the front view direction. It should be noted that the lower RF power supply is not directly below the upper current collecting hole. That is to say, during the process of the leakage from the upper liquid collecting tray flowing to the lower liquid collecting tray, the leakage will not be blocked by the RF power supply. In other embodiments, the current collecting hole of the upper liquid collecting tray can also flow the leakage to the lower liquid collecting tray through a pipeline.

[0033] The liquid collecting tray 103 is arranged at the bottom of each RF power supply 102 for receiving the leakage of the cooling pipeline. A current collecting hole 1031 is arranged at the bottom of the liquid collecting tray 103, and the lower one of the adjacent two liquid collecting trays 103 receives the leakage flowing out from the current collecting hole 1031 in the upper liquid collecting tray 103.

[0034] In this embodiment, among the adjacent two liquid collecting trays 103, the current collecting hole 1031 is arranged at the lowest position at the bottom of the upper liquid collecting tray 103. The current collecting hole 1031 enables the leakage to flow smoothly from the upper liquid collecting tray 103 to the lower liquid collecting tray 103 and finally gather in the bottommost liquid collecting tray 103. This top-down flow path enables the leakage detector 104 to be arranged only in the bottommost liquid collecting tray 103 to monitor whether there is leakage in multiple RF power supplies 102 in the entire cabinet 100, simplifies the structure of the leakage monitoring system, reduces the installation quantity of the leakage detector 104, and thus reduces the overall cost and maintenance difficulty of the system.

[0035] Specifically, as Figure 2 shown, the liquid collecting tray 103 includes: a bottom surface 1032, and the current collecting hole 1031 penetrates through the bottom surface 1032; a side wall 1033 extending upward from the edge of the bottom surface 1032, and the side wall 1033 and the bottom surface 1032 form a space for accommodating the leakage; a clamping portion 1034 located on two opposite side walls 1033.

[0036] The side wall 1033 extends upward from the edge of the bottom surface 1032. The side wall 1033 and the bottom surface 1032 together form a space for accommodating the leakage. The side wall 1033 increases the leakage capacity of the liquid collecting tray 103 and also prevents the leakage from overflowing, ensuring that the leakage can be led to the current collecting hole 1031. The clamping portion 1034 is located on the side wall 1033, enabling the liquid collecting tray 103 to be conveniently installed in the cabinet body 101.

[0037] In this embodiment, the bottom surface 1032 includes a plurality of sheet metal parts, each of which has an inclination angle, and the current collecting hole 1031 is arranged at the lowest end of the plurality of sheet metal parts. When there is leakage in the liquid collecting tray 103, it promotes the natural flow of the leakage to the current collecting hole 1031 to enhance the fluidity of the leakage and enable the leakage to be quickly transferred to the bottommost liquid collecting tray 103.

[0038] It should be noted that there is no confluence hole 1031 in the bottommost liquid accumulation tray.

[0039] In this embodiment, the clamping portion 1034 has a through hole for setting the liquid accumulation tray 103 on the cabinet body 101.

[0040] In other embodiments, the liquid accumulation tray may also be in a funnel shape. The funnel-shaped liquid accumulation tray enables the liquid leaked from the cooling pipeline to quickly converge into the lower liquid accumulation tray through the confluence hole.

[0041] The liquid leakage detector 104 is used to detect whether there is liquid leakage through physical contact. When the liquid leakage detector 104 comes into contact with the leaked liquid, the built-in sensing element (usually a conductive material) will change its resistance or conductivity.

[0042] In this embodiment, the liquid leakage detector 104 includes a liquid leakage detection belt, and the liquid leakage detection belt is laid flat in the lowermost liquid accumulation tray 103. Specifically, the liquid leakage detection belt is laid flat on the entire bottom of the liquid accumulation tray 103 to ensure that the bottom surface 1032 of the entire liquid accumulation tray 103 is covered, which can quickly capture any minute liquid leakage and is beneficial to improving the sensitivity and real-time response ability of liquid leakage monitoring.

[0043] As Figure 3 shown, the liquid leakage monitoring system further includes: a liquid leakage sensor 107, the liquid leakage sensor 107 is connected to the liquid leakage detector 104; a controller 106, the controller 106 is simultaneously connected to the radio frequency power supply 102 and the liquid leakage sensor 107.

[0044] The controller 106 is simultaneously connected to the liquid leakage sensor 107 and the radio frequency power supply 102. The controller 106 can immediately receive the signal from the liquid leakage sensor 107 and automatically adjust or turn off the radio frequency power supply 102 according to the monitored liquid leakage state to prevent possible damage or safety risks.

[0045] During the operation of the radio frequency power supply 102, the liquid leakage detector 104 monitors any possible liquid leakage situation in the cabinet 100 in real time. When the liquid leakage detector 104 detects liquid leakage, the liquid leakage sensor 107 will monitor that the resistance or conductivity of the built-in sensing element in the liquid leakage detector 104 changes, and the liquid leakage sensor 107 will send a signal to the controller 106; the controller 106 responds to the signal sent by the liquid leakage sensor 107 and will execute a preset safety protocol, that is, send a command to cut off the power supply to the electric control interlock point of the radio frequency power supply 102, which will cause the interlock point to lose the activation state, thereby simultaneously interrupting the power output of multiple radio frequency power supplies 102.

[0046] The embodiment of the present utility model also provides a cabinet 100 (such as Figure 4As shown in the figure, it includes the aforementioned liquid leakage monitoring system. The cabinet 100 includes: a cabinet body 101; a plurality of radio frequency power supplies 102, which are arranged at intervals in the vertical direction in the cabinet body 101, and the radio frequency power supply 102 includes a cooling pipeline.

[0047] The cabinet body 101, as the main structure of the entire cabinet 100, provides necessary support and protection. The cabinet body 101 is used to install components such as a plurality of radio frequency power supplies 102, a liquid accumulation tray 103, and a liquid leakage detector 104.

[0048] In this embodiment, the interior of the cabinet body 101 is designed as a multi-layer structure, and each layer is installed with a radio frequency power supply 102.

[0049] The radio frequency power supply 102 is used to provide stable and controllable radio frequency energy during various semiconductor manufacturing processes such as reactive ion etching (RIE) and chemical vapor deposition (CVD).

[0050] In this embodiment, a plurality of radio frequency power supplies 102 are arranged at intervals in the vertical direction in the cabinet body 101. The plurality of radio frequency power supplies 102 are vertically spaced apart, which can effectively disperse heat generation, prevent the radio frequency power supply 102 from overheating, and thus improve the cooling efficiency of the cabinet 100; in addition, each radio frequency power supply 102 is vertically spaced apart, providing a space position for arranging the liquid accumulation tray 103 at the bottom of the radio frequency power supply 102.

[0051] As Figure 5 shown, the cabinet 100 further includes a flow dividing block 105, the flow dividing block 105 includes a total liquid inlet interface 1051 and a total liquid return interface 1052, which are respectively used to introduce and discharge cooling water into and out of the cabinet 100; the cooling pipeline further includes a plurality of parallel circulating cooling circuits, the circulating cooling circuits are connected to the total liquid inlet interface 1051 and the total liquid return interface 1052, and each circulating cooling circuit includes a liquid inlet pipe and a liquid outlet pipe, the liquid inlet pipe is connected to the input end of the cooling pipeline in the radio frequency power supply 102, and the liquid outlet pipe is connected to the output end of the cooling pipeline.

[0052] When the cabinet 100 is operating, an external cooling system (such as a cooling tower or a cooling circulation system) provides coolant. The coolant first enters the main inlet interface 1051 of the flow dividing block 105. The main inlet interface 1051 is the main entrance for the cabinet 100 to receive the coolant. The coolant flows from the main inlet interface 1051 into multiple parallel circulating cooling loops, and these parallel circulating cooling loops distribute the coolant to each radio frequency power supply 102 in the cabinet 100 to ensure that each radio frequency power supply 102 can obtain sufficient coolant to maintain an appropriate operating temperature. The inlet pipe of the circulating cooling loop is directly connected to the input end of the cooling pipeline in the radio frequency power supply 102, so that the coolant can flow from the main inlet interface 1051 into the cooling pipeline of each radio frequency power supply 102. The coolant flows out from the output end of the cooling pipeline of the radio frequency power supply 102, carries away the absorbed heat, and returns to the main return interface 1052 of the flow dividing block 105 through the outlet pipe. The coolant returns to the channel of the external cooling system through the main return interface 1052 to complete the coolant circulation. The main return interface 1052 plays a key role in this process. It not only allows the hot-loaded coolant to be discharged from the cabinet 100, but also resets the temperature of the coolant through the external cooling system and re-enters the flow dividing block 105 through the main inlet interface 1051 to form a closed cooling cycle.

[0053] In this embodiment, the flow dividing block 105 further includes an inlet 1053 connected to the inlet pipe and an outlet 1054 connected to the outlet pipe.

[0054] In this embodiment, the cabinet 100 further includes: positioning members (not shown in the figure), which are arranged in the cabinet body 101. The number of the positioning members is multiple and they are spaced apart in the vertical direction. The liquid collecting tray 103 is arranged in the cabinet body 101 through the positioning members.

[0055] The multiple positioning members are spaced apart in the vertical direction, providing multiple positions for the installation of the liquid collecting tray 103 and allowing the liquid collecting tray 103 to be installed at different heights. Such a layout increases the flexibility and adjustability of the liquid collecting tray 103 inside the cabinet 100.

[0056] In this embodiment, the number of the positioning members between adjacent radio frequency power supplies 102 is multiple, so that there are multiple installation positions for the liquid collecting tray 103 at the bottom of the radio frequency power supply 102.

[0057] In this embodiment, the positioning member is made of a material with high corrosion resistance and mechanical strength, such as stainless steel or hardened plastic, to ensure durability and stability for long-term use. The positioning member can be of a slot type, a threaded type or a snap type to facilitate the quick installation and positioning of the liquid collecting tray 103. The position of each positioning member is precisely calculated to ensure that all the liquid collecting trays 103 are evenly distributed in the vertical direction, and each liquid collecting tray 103 can be adjusted or replaced through simple manual operations when needed.

[0058] In this embodiment, the positioning member is a screw for cooperating with the through hole on the clamping portion 1034.

[0059] Although the present utility model is disclosed as above, the present utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the scope defined by the claims.

Claims

1. A liquid leakage monitoring system, characterized in that: Used to monitor the leakage of a radio frequency power supply in a cabinet, the cabinet comprising: a cabinet body; a plurality of radio frequency power supplies arranged in the cabinet body at intervals in a vertical direction, the radio frequency power supply comprising a cooling pipeline; The leakage monitoring system includes: A liquid accumulation tray is arranged at the bottom of each of the RF power supplies, and the liquid accumulation tray is used to receive the leakage of the cooling pipeline, and the bottom of the upper liquid accumulation tray of the two adjacent liquid accumulation trays is provided with a confluence hole, and the lower liquid accumulation tray receives the leakage flowing out of the confluence hole in the upper liquid accumulation tray; The liquid leakage detector is arranged in the liquid accumulation tray at the bottom.

2. The liquid leakage monitoring system according to claim 1, characterized in that: In two adjacent liquid collection trays, the confluence hole is arranged at the lowest position of the bottom of the upper liquid collection tray.

3. The liquid leakage monitoring system according to claim 1, characterized in that: The liquid collection tray comprises: A bottom surface, wherein the confluence hole passes through the bottom surface; A side wall extending upward from the edge of the bottom surface, wherein the side wall and the bottom surface form a space for accommodating leaked liquid; The clamping portion is located on the two opposite side walls.

4. The liquid leakage monitoring system according to claim 3, characterized in that: The bottom surface includes a plurality of sheet metal parts, each of the sheet metal parts has an inclined angle, and the conduit hole is arranged at the bottom end of the plurality of sheet metal parts.

5. The liquid leakage monitoring system according to claim 1, characterized in that: The liquid collection tray is funnel-shaped.

6. The liquid leakage monitoring system according to claim 1, characterized in that: The liquid leakage detector comprises a liquid leakage detection belt, and the liquid leakage detection belt is laid flat in the liquid accumulation tray at the bottom.

7. The liquid leakage monitoring system according to claim 6, characterized in that: The liquid leakage monitoring system further comprises: a liquid leakage sensor, wherein the liquid leakage sensor is connected to the liquid leakage detector; A controller is connected to the radio frequency power supply and the liquid leakage sensor at the same time.

8. A cabinet, characterized in that: Comprising a liquid leakage monitoring system as described in any one of claims 1 to 7.

9. The cabinet according to claim 8, characterized in that: The cabinet also includes: A positioning member is arranged in the cabinet. There are a plurality of positioning members which are spaced apart in the vertical direction. The liquid accumulation tray is arranged in the cabinet through the positioning member.

10. The cabinet according to claim 9, characterized in that: There are multiple positioning members between adjacent RF power sources.

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