Fixing end plate for silicon wafer cutting and cleaning line

Abstract

The utility model discloses a fixing end plate for a silicon wafer cutting and cleaning line, which comprises a fixing assembly, a first end plate and a second end plate, the convenient assembly comprises a second end plate, second clamping teeth, a groove, a clamping groove, an insertion plate, an open groove, a first through hole, a second through hole, a U-shaped movable block, a connecting column and a spring. The groove is formed in the side edge of the first end plate, the clamping grooves are formed in the two sides of the interior of the groove, the inserting plate is fixed to one side of the second end plate and inserted into the groove, the second clamping teeth are fixed to the other side, away from the inserting plate, of the second end plate, the open grooves are formed in the two ends of the inserting plate, and the first through holes and the second through holes are formed in the sides of the interiors of the open grooves. The utility model discloses a silicon wafer cleaning fixing end plate, and aims to solve the problems that clamping grooves are formed in the two ends of an existing fixing end plate and used for containing silicon wafers to be cleaned, however, when clamping teeth on any side are damaged, the whole fixing end plate needs to be replaced, resources are wasted, the production cost is increased, and on the other hand, the production cost of enterprises is increased due to the fact that the thicknesses of the silicon wafers are different, and the requirements for the clamping teeth are different.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a fixed end plate for a silicon wafer cutting and cleaning line. Background Technique

[0002] The fixed end plate for a silicon wafer cutting and cleaning line is a device component used in a silicon wafer cutting and cleaning line. Its function is to fix and support the position of the silicon wafer during cutting and cleaning, ensuring the stability and accuracy of the silicon wafer during processing.

[0003] At present, clamping grooves are provided at both ends of the existing fixed end plate for placing silicon wafers to be cleaned. However, if any side of the clamping teeth is damaged, the whole needs to be replaced, resulting in waste of resources and increased production costs. On the other hand, due to different thicknesses of silicon wafers, different requirements are imposed on the clamping teeth, which also increases the production costs of enterprises. Therefore, a fixed end plate for a silicon wafer cutting and cleaning line is needed to solve the above problems. Content of the Utility Model

[0004] The purpose of the utility model is to provide a fixed end plate for a silicon wafer cutting and cleaning line to solve the problems mentioned in the above background technique, that is, clamping grooves are provided at both ends of the existing fixed end plate for placing silicon wafers to be cleaned. However, if any side of the clamping teeth is damaged, the whole needs to be replaced, resulting in waste of resources and increased production costs. On the other hand, due to different thicknesses of silicon wafers, different requirements are imposed on the clamping teeth, which also increases the production costs of enterprises.

[0005] To solve the above technical problems, the utility model is realized through the following technical solutions:

[0006] The utility model is a fixed end plate for a silicon wafer cutting and cleaning line, including:

[0007] A fixing component, the fixing component includes a first end plate;

[0008] A convenient component, the convenient component includes a second end plate, second clamping teeth, a groove, a clamping groove, an insertion plate, a slot, a first through hole, a second through hole, a U-shaped movable block, a connecting column and a spring;

[0009] The groove is opened on the side of the first end plate, the clamping grooves are opened on both sides inside the groove, the insertion plate is fixed on one side of the second end plate, and the insertion plate is inserted into the groove. The second clamping teeth are fixed on the other side of the second end plate away from the insertion plate. The slot is opened at both ends of the insertion plate, the first through hole and the second through hole are opened on one side inside the slot. The U-shaped movable block is movably connected in the slot. The connecting column is screwed on one end of the U-shaped movable block. One end of the spring is fixed on the other end of the U-shaped movable block away from the connecting column.

[0010] Further, the other end of the spring is fixed on the side inside the slot away from the second through hole.

[0011] Further, one end of the U-shaped movable block is arc-shaped, and the arc-shaped end is movably connected in the first through hole and the card slot.

[0012] Further, the end of the U-shaped movable block connected with the connecting column is movably connected in the second through hole.

[0013] Further, the fixing component further includes a first tooth and a bolt;

[0014] The first tooth is fixed at one end of the first end plate away from the groove, and the bolt is fixed on both sides of the first end plate.

[0015] Further, a strengthening component is further included;

[0016] The strengthening component includes a plug rod, a strengthening plate and a slot;

[0017] The plug rod is fixed inside the groove. There are three strengthening plates fixed on the side of the plug rod and evenly distributed. The slot is opened on the side of the plug plate, and the plug rod and the strengthening plate are inserted into the slot.

[0018] Compared with the prior art, the advantages of the present utility model are as follows:

[0019] First, in the present utility model, through the convenient component provided, when the tooth on any one side of the end plate is damaged, the connecting column can be pressed to drive the U-shaped movable block to move along the second through hole, the spring in the slot is compressed, driving the other end of the U-shaped movable block to move out of the card slot and into the first through hole, pulling out the second end plate outward to take out the plug plate from the groove, replacing the new first end plate or second end plate, holding the second end plate by hand, aligning the plug plate with the groove, and inserting it forcefully so that the plug plate is inserted into the groove and the U-shaped movable block is inserted into the card slot. This setting can, on the one hand, save the enterprise cost, and on the other hand, facilitate the quick replacement of the end plate.

[0020] Second, in the present utility model, through the strengthening component provided, align the slot on the plug plate with the plug rod and the strengthening plate and insert them, so that the plug plate is inserted into the groove and the plug rod and the strengthening plate are inserted into the slot. This setting can enhance the connection and stability between the first end plate and the second end plate, and reduce the deformation degree of the first end plate and the second end plate. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 It is a schematic diagram of the overall structure of the present utility model;

[0023] Figure 2Schematic diagram of the fixing component structure of the present utility model;

[0024] Figure 3 Schematic diagram of the second end plate structure of the present utility model;

[0025] Figure 4 Schematic diagram of the position of the U-shaped movable block of the present utility model;

[0026] Figure 5 For the present utility model's Figure 4 Enlarged view at A in;

[0027] Figure 6 Schematic diagram of the U-shaped movable block structure of the present utility model.

[0028] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0029] 10. First end plate; 11. First tooth; 12. Bolt;

[0030] 20. Second end plate; 21. Second tooth; 22. Groove; 220. Card slot; 23. Insertion plate; 24. Slot; 25. First through hole; 26. Second through hole; 27. U-shaped movable block; 28. Connecting column; 29. Spring;

[0031] 30. Insertion rod; 31. Reinforcing plate; 32. Slot. Detailed implementation manners

[0032] To make the above objects, features and advantages of the present utility model more obvious and understandable, the following will describe the detailed implementation manners of the present utility model in conjunction with the attached drawings.

[0033] In the following description, many specific details are set forth to fully understand the present utility model. However, the present utility model can also be implemented in other ways different from those described herein. Those skilled in the art can make similar promotions without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific implementation manners disclosed below.

[0034] To make the purpose, technical solutions and advantages of the present utility model clearer, the following will further describe the implementation manners of the present utility model in detail in conjunction with the attached drawings.

[0035] Please refer to Figures 1-6 As shown, this embodiment is a fixed end plate for a silicon wafer cutting and cleaning line, including:

[0036] Fixing component, the fixing component includes a first end plate 10;

[0037] The first end plate 10 plays a supporting role;

[0038] Convenient component, the convenient component includes a second end plate 20, a second tooth 21, a groove 22, a card slot 220, a plugboard 23, a slot 24, a first through hole 25, a second through hole 26, a U-shaped movable block 27, a connecting column 28 and a spring 29;

[0039] The groove 22 is opened on the side of the first end plate 10, the card slots 220 are opened on both sides inside the groove 22, the plugboard 23 is fixed on one side of the second end plate 20, and the plugboard 23 is inserted into the groove 22. The second tooth 21 is fixed on the other side of the second end plate 20 away from the plugboard 23. The slot 24 is opened at both ends of the plugboard 23. The first through hole 25 and the second through hole 26 are opened on one side inside the slot 24. The U-shaped movable block 27 is movably connected in the slot 24. The connecting column 28 is screwed on one end of the U-shaped movable block 27. One end of the spring 29 is fixed on the other end of the U-shaped movable block 27 away from the connecting column 28;

[0040] The second end plate 20 plays a supporting role, the second tooth 21 plays a limiting role, the groove 22 and the plugboard 23 play a connecting role, the card slot 220 plays a limiting role, the slot 24 plays a receiving role, the first through hole 25 and the second through hole 26 facilitate the movement of the U-shaped movable block 27, the U-shaped movable block 27 plays a limiting role, the connecting column 28 facilitates the operation of the U-shaped movable block 27, and the spring 29 has an extrusion function;

[0041] The other end of the spring 29 is fixed on the side inside the slot 24 away from the second through hole 26;

[0042] One end of the U-shaped movable block 27 is arc-shaped, and the arc-shaped end is movably connected in the first through hole 25 and the card slot 220;

[0043] One end of the U-shaped movable block 27 connected with the connecting column 28 is movably connected in the second through hole 26;

[0044] The fixing component further includes a first tooth 11 and a bolt 12;

[0045] The first tooth 11 is fixed at the end of the first end plate 10 away from the groove 22, and the bolts 12 are fixed on both sides of the first end plate 10;

[0046] The first tooth 11 plays a limiting role, and the bolt 12 plays a connecting role.

[0047] Working principle:

[0048] When the tooth on any one side of the end plate is damaged, the connecting column 28 can be pressed to drive the U-shaped movable block 27 to move along the second through hole 26. The spring 29 in the slot 24 is compressed, driving the other end of the U-shaped movable block 27 to move out of the card slot 220 and into the first through hole 25. Pull out the second end plate 20 outward to take the plugboard 23 out of the groove 22;

[0049] Replace the new first end plate 10 or the second end plate 20. Hold the second end plate 20, align the insertion plate 23 with the groove 22, and insert it forcefully so that the insertion plate 23 is inserted into the groove 22 and the U-shaped movable block 27 is inserted into the card slot 220.

[0050] This step can save the enterprise costs on the one hand and facilitate the quick replacement of the end plate on the other hand.

[0051] Please refer to Figures 2-3 , based on the above-mentioned embodiment, this embodiment further includes:

[0052] A strengthening component, which includes an insertion rod 30, a strengthening plate 31 and a slot 32;

[0053] The insertion rod 30 is fixed inside the groove 22. There are three strengthening plates 31 fixed on the side of the insertion rod 30 and evenly distributed. The slot 32 is opened on the side of the insertion plate 23, and the insertion rod 30 and the strengthening plate 31 are inserted into the slot 32;

[0054] The insertion rod 30 and the slot 32 play a limiting role, and the strengthening plate 31 can improve the strength of the insertion rod 30.

[0055] Working principle:

[0056] Align the slot 32 on the insertion plate 23 with the insertion rod 30 and the strengthening plate 31 and insert them so that the insertion plate 23 is inserted into the groove 22, and the insertion rod 30 and the strengthening plate 31 are inserted into the slot 32.

[0057] This step can enhance the connection and stability between the first end plate 10 and the second end plate 20, and reduce the deformation degree of the first end plate 10 and the second end plate 20.

[0058] In the description of the present utility model, it should also be noted that unless otherwise clearly defined and limited, the terms "set", "install", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0059] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A fixed end plate for a silicon wafer cutting and cleaning line, characterized in that: include: A fixing assembly, the fixing assembly comprising a first end plate (10); A convenient component, comprising a second end plate (20), a second latch tooth (21), a groove (22), a latch slot (220), an insert plate (23), a slot (24), a first through hole (25), a second through hole (26), a U-shaped movable block (27), a connecting column (28) and a spring (29); The groove (22) is provided on the side of the first end plate (10), the slots (220) are provided on both sides of the groove (22), the plug plate (23) is fixed on one side of the second end plate (20), and the plug plate (23) is plugged into the groove (22), the second latching tooth (21) is fixed on the other side of the second end plate (20) away from the plug plate (23), the slot (24) is provided at both ends of the plug plate (23), the first through hole (25) and the second through hole (26) are provided on one side of the slot (24), the U-shaped movable block (27) is movably connected in the slot (24), the connecting column (28) is screwed on one end of the U-shaped movable block (27), and one end of the spring (29) is fixed on the other end of the U-shaped movable block (27) away from the connecting column (28).

2. The fixed end plate for a silicon wafer cutting and cleaning line according to claim 1, characterized in that: The other end of the spring (29) is fixed to a side of the slot (24) away from the second through hole (26).

3. The fixed end plate for a silicon wafer cutting and cleaning line according to claim 1, characterized in that: One end of the U-shaped movable block (27) is arc-shaped, and the arc-shaped end is movably connected in the first through hole (25) and the clamping groove (220).

4. The fixed end plate for a silicon wafer cutting and cleaning line according to claim 1, characterized in that: The U-shaped movable block (27) is connected to one end of a connecting column (28) and is movably connected in the second through hole (26).

5. The fixed end plate for a silicon wafer cutting and cleaning line according to claim 1, characterized in that: The fixing assembly further comprises a first latch tooth (11) and a bolt (12); The first latching tooth (11) is fixed to an end of the first end plate (10) away from the groove (22), and the bolts (12) are fixed to both sides of the first end plate (10).

6. The fixed end plate for a silicon wafer cutting and cleaning line according to claim 1, characterized in that: Also included are reinforcement components; The reinforcement assembly comprises an insertion rod (30), a reinforcement plate (31) and a slot (32); The insertion rod (30) is fixed inside the groove (22); three reinforcement plates (31) are fixed on the side of the insertion rod (30) and are evenly distributed; a slot (32) is provided on the side of the insertion plate (23); the insertion rod (30) and the reinforcement plate (31) are inserted into the slot (32).

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