Nitric oxide tail gas absorption system

Abstract

The utility model discloses a nitric oxide tail gas absorption system, which belongs to the technical field of chemical industry and comprises a reaction device. The reaction device is connected with a tail gas treatment device; the tail gas treatment device comprises an air blower, a fan and an alkaline washing tower; the tail gas treatment device is connected with a leakage emergency treatment device; the leakage emergency treatment device comprises a universal joint and an air suction cover. The air blower inputs sufficient air into the tail gas treatment device, nitric oxide waste gas generated by the reaction device is sucked into the air blower, nitric oxide is rapidly oxidized to generate nitrogen dioxide, and the nitrogen dioxide flows into the alkaline washing tower through the one-way valve so as to be fully absorbed; when the reaction device accidentally leaks, the distance, the position and the angle of the air suction cover are adjusted through the universal joint, so that leaked gas is fully sucked into the tail gas treatment device to be oxidized and absorbed. Nitrogen dioxide enters the alkaline washing tower from the fan, alkali liquor is sprayed into the alkaline washing tower from the liquid inlet, and the alkali liquor is discharged from the liquid outlet after fully reacting with nitrogen dioxide gas.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical industry, and particularly relates to a nitric oxide tail gas absorption system. Background Art

[0002] High-purity nitric oxide is often used as a reaction gas and an oxidant in semiconductor production. However, if nitric oxide is directly discharged into the atmosphere, it will cause environmental pollution. Therefore, waste gas treatment of nitric oxide is required.

[0003] In the Chinese patent with the application number CN201811371367.9, the absorbent used is water. Nitrogen dioxide reacts with water to produce nitric oxide, which cannot achieve the purpose of effective removal and may even cause secondary pollution.

[0004] The tail gas treatment system should not only treat the tail gas generated by the reaction device, but also be able to perform effective and safe emergency treatment when the device leaks. In the nitric oxide tail gas absorption system adopted in the Chinese patent with the application number CN201821559987.0, when the reaction device leaks, spraying an oxidizing liquid at the leakage point will inevitably damage the equipment and affect subsequent safe production.

[0005] For example, Chinese patent CN114682067A proposes a device and process for removing nitric oxide in an air stream, belonging to the technical fields of air pollution control and environmental protection. The device consists of an absorption tower, a material storage tank, a regeneration reactor, a dehydration and air extraction unit, and related material conveying pipelines and valves. The function of the nitrogen oxide absorption tower is to absorb and remove nitric oxide gas in the air stream by using a ferric chloride absorbent slurry. The function of the regeneration reactor is to remove the absorbed nitric oxide in the absorbent slurry and regenerate the absorbent slurry. The function of the dehydration and air extraction unit is to dehydrate the absorbent for the regeneration reactor. The function of the material storage tank is to provide the absorbent slurry for the absorption tower to work.

[0006] However, when nitric oxide leaks accidentally, the above patent cannot absorb the accidentally leaked nitric oxide in a timely and sufficient manner, resulting in environmental pollution. In addition, the above patent requires dehydration and regeneration treatment of the absorbent during use, and the absorption efficiency needs to be improved.

[0007] Based on this, the utility model designs a nitric oxide tail gas absorption system to solve the above problems. Summary of the Utility Model

[0008] In view of the above-mentioned disadvantages existing in the prior art, the utility model provides a nitric oxide tail gas absorption system.

[0009] To achieve the above purposes, the utility model is realized through the following technical solutions:

[0010] A nitric oxide tail gas absorption system, comprising a reaction device;

[0011] A tail gas treatment device for fully converting nitric oxide waste gas is connected to the reaction device;

[0012] The tail gas treatment device includes a blower, a fan and an alkali scrubbing tower. The exhaust gas outlet end of the reaction device is fixedly connected to the intake end of the fan, and the blower is fixedly connected to the intake end of the fan through a one-way valve; the outlet end of the fan is connected to an alkali scrubbing tower for absorbing the nitrogen-containing waste gas after conversion;

[0013] A leakage emergency treatment device for facilitating the collection of accidentally leaked nitric oxide from the reaction device is connected to the tail gas treatment device;

[0014] The leakage emergency treatment device includes a universal joint and a suction hood. A universal joint is connected to the tail gas treatment device, and the universal joint is fixedly connected to the suction hood.

[0015] Furthermore, an exhaust port for discharging the treated waste gas is provided at the top of the alkali scrubbing tower.

[0016] Furthermore, a detection device for detecting the treated gas is fixedly connected to the lower end of the exhaust port.

[0017] Furthermore, a gas chromatograph is selected as the detection device.

[0018] Furthermore, a liquid inlet for spraying alkali liquor is provided at the top of the alkali scrubbing tower.

[0019] Furthermore, a liquid outlet for discharging the alkali liquor is provided at the bottom of the alkali scrubbing tower.

[0020] Furthermore, the interior of the alkali scrubbing tower is filled with packing.

[0021] Furthermore, the packing is selected from polypropylene, polyethylene, and polytetrafluoroethylene.

[0022] Furthermore, the blower and the fan are always in an on state.

[0023] The utility model has the following technical effects:

[0024] In the utility model, the blower inputs sufficient air into the tail gas treatment device. The nitric oxide waste gas generated by the reaction device is sucked into the tail gas treatment device, and nitric oxide is rapidly oxidized to form nitrogen dioxide. The nitrogen dioxide flows into the alkali scrubbing tower through the one-way valve. When the product gas in the production device is qualified, the one-way valve will close. When the reaction ends or the gas in the reaction device is unqualified, the one-way valve will open again, so that nitric oxide is fully absorbed; when the reaction device accidentally leaks, the distance, position and angle of the suction hood are adjusted through the universal joint, so that the leaked gas is fully sucked into the tail gas treatment device to be oxidized and absorbed.

[0025] When the nitric oxide waste gas is fully oxidized and converted into nitrogen dioxide, it enters the alkali scrubbing tower from the fan. The alkali solution is sprayed into the alkali scrubbing tower from the liquid inlet. After the alkali solution reacts fully with the nitrogen dioxide gas, it is discharged from the liquid outlet. The packing increases the contact area between the waste gas and the alkali solution, thereby enhancing the absorption effect of nitrogen dioxide and the alkali solution. Before the gas treated by the alkali scrubbing tower is discharged into the air, it needs to be detected by a detection device to ensure that the gas discharged into the air does not contain toxic and harmful substances. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 It is a schematic structural diagram of a nitric oxide tail gas absorption system of the present invention.

[0028] The reference numerals in the drawings respectively represent:

[0029] 1, reaction device; 2, tail gas treatment device; 21, blower; 22, fan; 23, alkali scrubbing tower; 3, leakage emergency treatment device; 31, universal joint; 32, air suction hood. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0031] The following further describes the present invention with reference to the embodiments.

[0032] In some embodiments, please refer to the accompanying specification Figure 1 , a nitric oxide tail gas absorption system, including a reaction device 1;

[0033] The reaction device 1 is connected with a tail gas treatment device 2 for fully converting nitric oxide waste gas;

[0034] The tail gas treatment device 2 includes a blower 21, a fan 22, and an alkali scrubber 23. The exhaust gas outlet end of the reaction device 1 is fixedly connected to the intake end of the fan 22, and the blower 21 is fixedly connected to the intake end of the fan 22 through a one-way valve; the outlet end of the fan 22 is connected to an alkali scrubber 23 for absorbing the converted nitrogen-containing exhaust gas;

[0035] The blower 21 and the fan 22 are always in an open state;

[0036] The tail gas treatment device 2 is connected with a leakage emergency treatment device 3 for conveniently collecting the accidentally leaked nitric oxide from the reaction device 1;

[0037] The leakage emergency treatment device 3 includes a universal joint 31 and an air suction hood 32. The tail gas treatment device 2 is connected with a universal joint 31, and the universal joint 31 is fixedly connected to the air suction hood 32;

[0038] The blower 21 inputs sufficient air into the tail gas treatment device 2. The nitric oxide exhaust gas generated by the reaction device 1 is sucked into the tail gas treatment device 2, and nitric oxide is rapidly oxidized to form nitrogen dioxide. The nitrogen dioxide flows to the alkali scrubber 23 through the one-way valve. When the product gas in the production device is qualified, the one-way valve will close. When the reaction ends or the gas in the reaction device is unqualified, the one-way valve will open again, so that nitric oxide is fully absorbed; when the reaction device 1 has an accidental leakage, the distance, position, and angle of the air suction hood are adjusted through the universal joint, so that the leaked gas is fully sucked into the tail gas treatment device 2 to be oxidized and absorbed.

[0039] In some embodiments, as Figure 1 shown, the outlet end of the fan 22 is fixedly connected to the intake end of the alkali scrubber 23;

[0040] The top of the alkali scrubber 23 is provided with an exhaust port for discharging the treated exhaust gas;

[0041] The lower end of the exhaust port is fixedly connected with a detection device for detecting the treated gas;

[0042] The top of the alkali scrubber 23 is provided with a liquid inlet for spraying alkali liquor;

[0043] The bottom of the alkali scrubber 23 is provided with a liquid outlet for discharging the alkali liquor;

[0044] The interior of the alkali scrubber 23 is filled with packing;

[0045] After the nitric oxide waste gas is fully oxidized and converted into nitrogen dioxide, it enters the alkali scrubber 23 from the fan 22. The alkali liquid is sprayed into the alkali scrubber 23 from the liquid inlet. After the alkali liquid reacts fully with the nitrogen dioxide gas, it is discharged through the liquid outlet. The packing increases the contact area between the waste gas and the alkali liquid, thereby enhancing the absorption effect of nitrogen dioxide and the alkali liquid. Before the gas treated by the alkali scrubber 23 is discharged into the air, it also needs to be detected using a detection device to ensure that the gas discharged into the air does not contain toxic and harmful substances.

[0046] In some embodiments, such as Figure 1 shown, the 1 is usually selected as a reaction kettle or a reaction tower, etc.; the detection device is selected as a gas chromatograph; the packing is made of polypropylene, polyethylene or polytetrafluoroethylene;

[0047] The reaction kettle, reaction tower, gas chromatograph, polypropylene, polyethylene, and polytetrafluoroethylene are all selected from existing commercially available structures.

[0048] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A nitric oxide tail gas absorption system, comprising a reaction device (1), characterized in that: The reaction device (1) is connected to a tail gas treatment device (2) for fully converting the nitrogen monoxide waste gas; The tail gas treatment device (2) comprises a blower (21), a fan (22) and an alkali washing tower (23); the exhaust gas outlet of the reaction device (1) is fixedly connected to the air inlet of the fan (22); the blower (21) is fixedly connected to the air inlet of the fan (22) via a one-way valve; the air outlet of the fan (22) is connected to the alkali washing tower (23) for absorbing the converted nitrogen-containing exhaust gas; The tail gas treatment device (2) is connected to a leakage emergency treatment device (3) for collecting nitrogen monoxide accidentally leaked from the reaction device (1); The leakage emergency treatment device (3) comprises a universal joint (31) and an air suction hood (32); the exhaust gas treatment device (2) is connected to the universal joint (31), and the universal joint (31) is fixedly connected to the air suction hood (32).

2. The nitric oxide tail gas absorption system according to claim 1, characterized in that: The top of the alkali washing tower (23) is provided with an exhaust port for discharging the treated waste gas.

3. The nitric oxide tail gas absorption system according to claim 2, characterized in that: A detection device for detecting the treated gas is fixedly connected to the lower end of the exhaust port.

4. The nitric oxide tail gas absorption system according to claim 3, characterized in that: The detection device is a gas chromatograph.

5. The nitric oxide tail gas absorption system according to claim 4, characterized in that: The top of the alkali washing tower (23) is provided with a liquid inlet for spraying alkali solution.

6. The nitric oxide tail gas absorption system according to claim 5, characterized in that: The bottom of the alkali washing tower (23) is provided with a liquid outlet for discharging alkali liquid.

7. The nitric oxide tail gas absorption system according to claim 6, characterized in that: The alkali washing tower (23) is filled with fillers.

8. The nitric oxide tail gas absorption system according to claim 7, characterized in that: The filler is made of polypropylene, polyethylene or polytetrafluoroethylene.

9. The nitric oxide tail gas absorption system according to claim 8, characterized in that: The blower (21) and the fan (22) are always in an on state.

Images