Pick-and-place device and planet pot pick-and-place device
By designing an alignment structure in the pick-and-place member of the pick-and-place device, the fourth end size is larger than the opening size, the problem of difficulty in aligning the pick-and-place member with the base is solved, and the accuracy of the placement of the planetary pot is achieved.
Patent Information
- Application Number
- CN202421998422.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-16
- Publication Date
- 2025-06-03
- Estimated Expiration
- 2034-08-16
AI Technical Summary
During the metallization process, the picking and placement members are difficult to align with the base, resulting in inaccurate position of the planetary pot when placed on the base.
A pick-up device is designed, including a support seat and a pick-up member. The pick-and-place member consists of a sleeve and an alignment structure. The fourth end dimension of the alignment structure is larger than the opening dimension. Using this design, the position of the support rod can be quickly determined when the sleeve is sleeved on the support rod.
Through the design of the alignment structure, the support rod can be better placed in the sleeve from the opening, solving the problem of difficulty in aligning the pick-up and placement members with the base, and improving the accuracy of the placement of the planetary pot.
Smart Images
Figure CN222939895U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and particularly to a picking and placing device and a planetary pot picking and placing device. Background Art
[0002] Metallization is an important part in the wafer processing. After metallization, the planetary pot needs to be taken out of the cavity by a picking and placing member and placed on a base. However, it is very difficult for the picking and placing member to be aligned with the base during the placement on the base. Utility Model Content
[0003] An embodiment of this application provides a picking and placing device, which enables the picking and placing member to be better aligned with the support base to at least partially solve the above technical problems.
[0004] To achieve the above object, according to the first aspect of this application, there is provided a picking and placing device, including:
[0005] A support base, including a base and a support rod. The support rod has a first end and a second end opposite to each other along a first direction. The first end is connected to the base, and the first direction is perpendicular to the surface of the base;
[0006] A picking and placing member, including a sleeve and an alignment structure. The sleeve is used to be sleeved on the support rod. The sleeve has an opening. The alignment structure has a third end and a fourth end opposite to each other. The third end is connected to the opening, and the dimension of the fourth end along a second direction is greater than the dimension of the opening along the second direction. The second direction is parallel to the surface of the base.
[0007] In some embodiments, an included angle is formed between the outer wall of the third end and the outer wall of the opening. The included angle is greater than 90° and less than 180°.
[0008] In some embodiments, the included angle is greater than 90° and less than 145°.
[0009] In some embodiments, the dimension of the alignment structure along the second direction gradually increases from the third end to the fourth end.
[0010] In some embodiments, the third end of the alignment structure is disposed around the edge of the opening, and the dimension of the opening along the second direction is less than or equal to the dimension of the third end along the second direction.
[0011] In some embodiments, the alignment structure includes a first baffle and a second baffle, and the first baffle and the second baffle are spaced apart from each other on the edge of the opening.
[0012] In some embodiments, the sleeve further has an abutting portion, and the abutting portion is used to abut against the second end.
[0013] In some embodiments, the abutting portion includes a first surface and a second surface that are oppositely disposed, and the first surface is used to abut against the second end;
[0014] The picking and placing device further includes a clamping member, and the clamping member is fixed to the second surface.
[0015] In some embodiments, the size of the alignment structure along the first direction is smaller than the size of the fourth end along the second direction.
[0016] According to a second aspect of the present application, there is provided a planetary pot picking and placing device, including:
[0017] The picking and placing device provided in any of the above embodiments;
[0018] A planetary pot, which is placed on the support base through the picking and placing member.
[0019] In some embodiments, the picking and placing device further includes a clamping member; the planetary pot includes:
[0020] A pot body, and the pot body includes a vapor deposition surface;
[0021] A fixing member, which is fixed to the vapor deposition surface, and the fixing member is cooperatively connected with the clamping member.
[0022] In some embodiments, the clamping member includes a limiting groove and a connecting groove communicating with the limiting groove; the fixing member includes a limiting portion and a connecting portion connected to the limiting portion, the limiting portion is fitted and connected with the limiting groove, and the connecting portion is fitted and connected with the connecting groove.
[0023] In some embodiments, the maximum depth of the pot body along the first direction is smaller than the size of the sleeve along the first direction.
[0024] The embodiments of the present application provide a picking and placing device and a planetary pot picking and placing device. The picking and placing device includes a support base and a picking and placing member. The support base includes a base and a support rod. The support rod has a first end and a second end that are opposite to each other along a first direction. The first end is connected to the base, and the first direction is perpendicular to the surface of the base. The picking and placing member includes a sleeve and an alignment structure. The sleeve is used to be sleeved on the support rod. The sleeve has an opening. The alignment structure has an opposite third end and a fourth end. The third end is connected to the opening, and the size of the fourth end along a second direction is larger than the size of the opening along the second direction. The second direction is parallel to the surface of the base. Since the size of the fourth end of the alignment structure is larger than the size of the opening, during the process of sleeving the sleeve on the support rod, the position of the support rod can be quickly determined by using the alignment structure, so as to better sleeve the support rod into the sleeve from the opening.
[0025] Other features and advantages of the present application will be described in detail in the following specific implementation section. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative efforts.
[0027] In order to more fully understand the present application and its beneficial effects, the following will be described in conjunction with the drawings, where the same reference numerals in the following description represent the same parts.
[0028] Figure 1 is a schematic structural diagram of a pick-and-place member in a pick-and-place device provided by some embodiments of the present application;
[0029] Figure 2 is a schematic structural diagram of a pick-and-place device provided by some embodiments of the present application;
[0030] Figure 3 is a schematic structural diagram of a planetary pot pick-and-place device provided by some embodiments of the present application;
[0031] Figure 4 is provided by some embodiments of the present application Figure 3 The enlarged structural diagram of area B in. SPECIFIC IMPLEMENTATION MANNER
[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, rather than all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the protection scope of the present application.
[0033] According to the first aspect of the present application, the present application provides a pick-and-place device. Please refer to Figure 1 and Figure 2 , Figure 1 is a schematic structural diagram of a pick-and-place member in a pick-and-place device provided by some embodiments of the present application, Figure 2 is a schematic structural diagram of a pick-and-place device provided by some embodiments of the present application. It should be noted that Figure 1 shows the state where the pick-and-place member has not been placed on the support base, Figure 2 shows the state where the pick-and-place device is placed on the support base.
[0034] The pick-and-place device 100 includes a support base 10 and a pick-and-place member 20. The support base 10 includes a base 11 and a support rod 12. The support rod 12 has a first end 121 and a second end 122 opposite to each other in a first direction (X). The first end 121 is connected to the base 11, and the first direction (X) is perpendicular to the surface of the base 11. The pick-and-place member 20 includes a sleeve 21 and an alignment structure 22. The sleeve 21 is used to be sleeved on the support rod 12. The sleeve 21 has an opening 211. The alignment structure 22 has an opposite third end 221 and a fourth end 222. The third end 221 is connected to the opening 211, and the dimension L1 of the fourth end 222 in a second direction (Y) is greater than the dimension L2 of the opening 211 in the second direction (Y). The second direction (Y) is parallel to the surface of the base 11. Since the dimension L1 of the fourth end 222 of the alignment structure 22 is greater than the dimension L2 of the opening 211, it is equivalent to enlarging the opening size at the bottom of the sleeve 21. Therefore, in the process of sleeving the sleeve 21 on the support rod 12, the position of the support rod 12 can be quickly determined by using the alignment structure 22, so that the support rod 12 can be better sleeved into the sleeve 21 from the opening 211.
[0035] Wherein, the support rod 12 extends in the first direction (X) and is perpendicular to the base 11.
[0036] In some embodiments, the dimension of the alignment structure 22 in the second direction (Y) gradually increases from the third end 221 to the fourth end 222, which is beneficial for the support rod 12 to move from the fourth end 222 or a position close to the fourth end 222 to the third end 221, so as to reach the opening 211 and insert into the sleeve 21.
[0037] In some embodiments, an angle A is formed between the outer wall of the third end 221 and the outer wall of the opening 211. The angle A is greater than 90° and less than 180°. The alignment structure 22 extends from the third end 221 along the direction of this angle A to the fourth end 222, which can make the dimension of the fourth end 222 greater than that of the third end 221, and the dimension of the alignment structure 22 gradually increases.
[0038] In some examples, the angle A is greater than 90° and less than 145°, which is more beneficial for increasing the dimension of the fourth end 222, thereby increasing the coverage area of the alignment structure 22 and being more beneficial for the positioning of the support rod 12.
[0039] In some embodiments, at least a portion of the support rod 12 is sleeved inside the sleeve 21, and the dimension of the sleeve 21 along the first direction (X) is smaller than the dimension of the support rod 12 along the first direction (X), so as to reserve space for the alignment structure 22. The dimension of the support rod 12 along the first direction (X) can be greater than the sum of the dimension of the alignment structure 22 along the first direction (X) and the dimension of the sleeve 21 along the first direction (X), so as to reserve a certain space between the alignment structure 22 and the base 11 and avoid friction between the alignment structure 22 and the base 11.
[0040] In some embodiments, the dimension L3 of the alignment structure 22 along the first direction (X) is smaller than the dimension L1 of the fourth end 222 along the second direction (Y). Such a design can increase the dimension of the fourth end 222 while reducing the occupied space of the alignment structure 22 in the first direction (X). The larger the dimension of the fourth end 222 is, the larger the covered area is, which is beneficial to more quickly positioning the support rod 12 during the alignment process, and further enabling the support rod 12 to be aligned with the opening 211 more quickly.
[0041] The shape of the cross-section of the sleeve 21 parallel to the surface of the base 11 can be circular or square. The cross-sectional shape of the support rod 12 corresponds to that of the sleeve 21, that is, when the cross-sectional shape of the sleeve 21 is circular, the cross-sectional shape of the support rod 12 is also circular; when the cross-sectional shape of the sleeve 21 is square, the cross-sectional shape of the support rod 12 is also square. When the cross-sectional shape of the sleeve 21 is circular, the inner diameter of the sleeve 21 is greater than or equal to the outer diameter of the support rod 12.
[0042] Specifically, the shape of the alignment structure 22 can be the side wall of a frustum of a cone, the third end 221 is the edge contour of the top surface of the frustum of the cone, and the fourth end 222 is the edge contour of the bottom surface of the frustum of the cone.
[0043] In some embodiments, the third end 221 of the alignment structure 22 is disposed around the edge of the opening 211. That is to say, when the opening 211 is circular, the third end 221 is also circular; when the opening 211 is square, the third end 221 is also square. And, the dimension of the opening 211 along the second direction (Y) is less than or equal to the dimension of the third end 221 along the second direction (Y), so that the support rod 12 can move from the position of the third end 221 to the opening 211 and then be inserted into the sleeve 21.
[0044] Specifically, as Figure 2 shown, the dimension of the opening 211 along the second direction (Y) is equal to the dimension of the third end 221 along the second direction (Y).
[0045] In some embodiments, the alignment structure 22 includes a first baffle and a second baffle, and the first baffle and the second baffle are spaced apart and disposed at the edge of the opening 211. Therefore, the support rod 12 can be positioned by using the first baffle or the second baffle, and then the support rod 12 can be inserted into the opening 211. The present application does not limit the number of baffles in the alignment structure 22. It can be understood that Figure 2 The portions of the alignment structure 22 shown on both sides of the support rod 12 in
[0046] The sleeve 21 may further have an abutting portion 212, and the abutting portion 212 is used to abut against the second end 122 of the support rod 12. Wherein, the abutting portion 212 may cover one end of the sleeve 21 away from the alignment structure 22, so that the second end 122 is located inside the sleeve 21.
[0047] In some embodiments, the abutting portion 212 includes a first surface and a second surface disposed opposite to each other, and the first surface is used to abut against the second end 122. The picking and placing device 100 further includes a clamping member 30, and the clamping member 30 is fixed to the second surface. During the process of picking an object (such as a planetary pot), the sleeve 21 can be held by hand, and the clamping member 30 can be used to clamp the object, and then the sleeve 21 can be sleeved on the support rod 12, so as to place the object on the base 11. During this process, since the dimension of the fourth end 222 of the alignment structure 22 along the second direction (Y) is larger than that of the opening 211, the support rod 12 can be quickly positioned, which is beneficial to the alignment of the sleeve 21 and the support rod 12.
[0048] If during the process of picking and placing the planetary pot, since the planetary pot will block the view of people and it is difficult for the human eye to see the connection between the support rod 12 and the sleeve 21, it is difficult for the support rod 12 to be inserted into the sleeve 21. The alignment structure 22 in the present application can solve this problem. Since the alignment structure 22 is equivalent to increasing the opening size at the bottom of the sleeve 21, the support rod 12 can be quickly positioned, and thus the support rod 12 can be inserted into the sleeve 21 along the alignment structure 22.
[0049] According to the second aspect of the present application, the present application provides a planetary pot picking and placing device. Please refer to Figure 3 and Figure 4 , Figure 3 is a schematic structural diagram of a planetary pot picking and placing device provided by some embodiments of the present application, Figure 4 is provided by some embodiments of the present application Figure 3 The enlarged structural schematic diagram of area B in Figure 3 shows a schematic structural diagram of the planetary pot 110 placed on the picking and placing device 100, and Figure 3It is a perspective view to show the position of the sleeve 21 inside the planetary pot 110. Actually, the part of the sleeve 21 inside the planetary pot 110 is blocked.
[0050] The planetary pot picking and placing device 200 includes the picking and placing device 100 provided in any of the above embodiments and the planetary pot 110. The planetary pot 110 is placed on the support base 10 through the picking and placing member 20.
[0051] In some embodiments, the picking and placing device 100 further includes a clamping member 30. The planetary pot 110 includes a pot body 111 and a fixing member 112. The pot body 111 includes a vapor deposition surface M. The fixing member 112 is fixed to the vapor deposition surface M, and the fixing member 112 is cooperatively connected with the clamping member 30.
[0052] Wherein, the vapor deposition surface M is the inner surface of the pot body 111, that is, the surface on which the vapor deposition machine performs vapor deposition.
[0053] As Figure 4 shown, the fixing member 112 can be fixed on the vapor deposition surface M through an external fixing structure 140. The external fixing structure 140 can be located on the outer surface of the pot body 111, that is, the surface opposite to the vapor deposition surface M. After the clamping member 30 is cooperatively connected with the fixing member 112, the vapor deposition surface M of the pot body 111 is placed and fixed facing the support base 10.
[0054] In some embodiments, as Figure 3 shown, the fixing member 112 is fixed at the central position of the pot body 111, then the sleeve 21 is arranged along the central axis of the pot body 111, which is beneficial to the stable placement of the pot body 111. The maximum depth of the pot body 111 along the first direction (X) is less than the dimension of the sleeve 21 along the first direction (X). In this way, the alignment structure 22 is outside the pot body 111 and will not affect the pot body 111.
[0055] In some embodiments, in combination with Figure 1 , the clamping member 30 includes a limiting groove 31 and a connecting groove 32 communicating with the limiting groove 31. As Figure 4 shown, the fixing member 112 includes a limiting portion 1121 and a connecting portion 1122 connected to the limiting portion 1121. The limiting portion 1121 is fitted and connected with the limiting groove 31, and the connecting portion 1122 is fitted and connected with the connecting groove 32.
[0056] The embodiments of the present application provide a picking and placing device 100 and a planetary pot picking and placing device 200. The picking and placing device 100 includes a support base 10 and a picking and placing member 20. The support base 10 includes a base 11 and a support rod 12. The support rod 12 has a first end 121 and a second end 122 opposite to each other in a first direction (X). The first end 121 is connected to the base 11, and the first direction (X) is perpendicular to the surface of the base 11. The picking and placing member 20 includes a sleeve 21 and an alignment structure 22. The sleeve 21 is used to be sleeved on the support rod 12. The sleeve 21 has an opening 211. The alignment structure 22 has an opposite third end 221 and a fourth end 222. The third end 221 is connected to the opening 211, and the dimension L1 of the fourth end 222 of the alignment structure 22 in a second direction (Y) is greater than the dimension L2 of the opening 211 in the second direction (Y). The second direction (Y) is parallel to the surface of the base 11. Since the dimension L1 of the fourth end 222 of the alignment structure 22 is greater than the dimension L2 of the opening 211, during the process of sleeving the sleeve 21 on the support rod 12, the position of the support rod 12 can be quickly determined by using the alignment structure 22, so as to better sleeve the support rod 12 into the sleeve 21 from the opening 211.
[0057] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of the present application, the meaning of "a plurality" is two or more, unless otherwise specifically defined.
[0058] In the above embodiments, the descriptions of the respective embodiments have their own emphases. For the parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.
[0059] Among the embodiments, embodiments, and related technical features of the present application, they can be combined and replaced with each other without conflict.
[0060] The above are only the preferred embodiments of the present application, and do not impose any form of limitation on the present application. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still fall within the scope of the technical solution of the present application.
Claims
1. A pick-and-place device, characterized in that: include: A support seat, comprising a base and a support rod, wherein the support rod has a first end and a second end opposite to each other along a first direction, the first end is connected to the base, and the first direction is perpendicular to a surface of the base; The picking and placing component includes a sleeve and an alignment structure, wherein the sleeve is used to be sleeved on the support rod, the sleeve has an opening portion, and the alignment structure has a third end and a fourth end opposite to each other, the third end is connected to the opening portion, and the size of the fourth end along a second direction is larger than the size of the opening portion along the second direction, and the second direction is parallel to the surface of the base.
2. The pick-and-place device according to claim 1, characterized in that: An angle is formed between the outer wall of the third end and the outer wall of the opening, and the angle is greater than 90° and less than 180°.
3. The pick-and-place device according to claim 2, characterized in that: The angle is greater than 90° and less than 145°.
4. The pick-and-place device according to claim 1, characterized in that: The size of the alignment structure along the second direction gradually increases from the third end to the fourth end.
5. The pick-and-place device according to claim 1, characterized in that: The third end of the alignment structure is disposed around the edge of the opening, and a dimension of the opening in the second direction is smaller than or equal to a dimension of the third end along the second direction.
6. The pick-and-place device according to claim 1, characterized in that: The alignment structure includes a first baffle and a second baffle, and the first baffle and the second baffle are spaced apart and arranged at the edge of the opening.
7. The pick-and-place device according to claim 1, characterized in that: The sleeve further has an abutment portion, and the abutment portion is used to abut against the second end.
8. The pick-and-place device according to claim 7, characterized in that: The abutting portion includes a first surface and a second surface arranged opposite to each other, wherein the first surface is used for abutting against the second end; The taking and placing device further comprises a clamping member, and the clamping member is fixed to the second surface.
9. The pick-and-place device according to claim 1, characterized in that: A dimension of the alignment structure along the first direction is smaller than a dimension of the fourth end along the second direction.
10. A planetary pot taking and placing device, characterized in that: include: The pick-and-place device according to any one of claims 1 to 9; The planetary pot is placed on the support seat through the taking and placing component.
11. The planetary pot taking and placing device according to claim 10, characterized in that: The pick-and-place device also includes a clamping member; the planetary pot includes: A pot body, the pot body comprising a vapor deposition surface; A fixing member is fixed to the evaporation surface, and the fixing member is cooperatively connected with the clamping member.
12. The planetary pot taking and placing device according to claim 11, characterized in that: The clamping member includes a limiting groove and a connecting groove connected to the limiting groove; the fixing member includes a limiting portion and a connecting portion connected to the limiting portion, the limiting portion is engaged with the limiting groove, and the connecting portion is engaged with the connecting groove.
13. The planetary pot taking and placing device according to claim 11, characterized in that: The maximum depth of the pot body along the first direction is smaller than the dimension of the sleeve along the first direction.