Silane gas washing tower

Abstract

The utility model provides a silane gas washing tower, and aims to solve the technical problem that the wet washing load is large due to the fact that dry dust falling is not thorough in the existing dry and wet combined dust removal. The silane gas washing tower is provided with three stages of washing areas. The first-stage washing area is arranged between the second-stage washing area and the third-stage washing area, and all the stages of washing areas are mutually communicated. And a liquid outlet pipeline is arranged at the bottom end of the tower body. And the first-stage washing area is provided with a venturi scrubber. And silane gas is introduced into the top end of the venturi scrubber. And the second-stage washing area is provided with a hollow cylinder cover. An annular leaching pipe is arranged at the top end of the barrel cover. And the third-stage washing area is provided with a leaching pipe. Wherein the venturi scrubber, the annular leaching pipe and the leaching pipe are all connected with the leaching feeding pipeline. And the leaching feeding pipeline is arranged on the tower body. Silane gas is firstly introduced into the venturi scrubber to be washed and then flows to the second-stage washing area, and a large amount of silicon powder contained in the silane gas is discharged out of the tower body along with a leacheate water bath under the leaching of the annular leaching pipe and the flow guide of the barrel cover.

Description

Technical Field

[0001] The present application relates to a scrubbing tower, and in particular to a silane gas scrubbing tower. Background Art

[0002] The traditional hydrogenation furnace gas dust removal system is a combination of dry and wet methods, that is, the mixed gas containing silicon powder coming out of the top of the hydrogenation furnace, after heat exchange in a two-stage heat recovery heat exchanger, enters the cyclone separator and silicon powder filter to remove silicon powder of different particle sizes, and then enters the wet dust removal system for cooling and washing to remove metal chlorides, high boiling points and a small amount of silicon powder. However, in actual operation, the ceramic filter element of the silicon powder filter of the cyclone separator is used under harsh conditions, and it is very easy to cause the filter element to break due to the adjustment of the working conditions, thereby bringing a large amount of silane gas containing silicon powder to the wet dust removal system. Furthermore, the traditional wet dust removal system generally uses a washing tower for spray washing. If a large amount of silicon powder is introduced into the silane gas, it will diffuse freely in the tower body with the washing, which not only increases the dust removal load of the washing tower, but also the tower plate and the bottom slag discharge pipeline are very easy to be blocked. This not only affects the production efficiency, but also reduces the product quality. Utility Model Content

[0003] The utility model aims to provide a silane gas washing tower to solve the problems raised in the above background technology.

[0004] A silane gas scrubbing tower, comprising:

[0005] A tower body, wherein the top of the tower body is provided with a gas outlet, the bottom of the tower body is provided with a liquid outlet pipeline, and the middle of the tower body is provided with a silane gas feed pipeline;

[0006] The tower body has three levels of washing zones, the first level washing zone is arranged between the second level washing zone and the third level washing zone, and each level of washing zones is interconnected;

[0007] A venturi scrubber is provided in the primary scrubbing area, and the top of the venturi scrubber is connected to the silane gas feed pipeline;

[0008] A hollow cylinder cover is provided in the secondary washing area, and a ring-shaped elution pipe is provided on the top of the cylinder cover;

[0009] The three-stage washing area is provided with a leaching pipe;

[0010] Wherein, the Venturi scrubber, the annular elution pipe and the elution pipe are all connected to the elution feed pipeline, and the elution feed pipeline is arranged in the tower body.

[0011] Furthermore, the silane gas washing tower is provided with a silane gas feed pipe connected to the top of the venturi scrubber; the bottom of the barrel cover is provided with a thorn portion; a water bath space is reserved between the bottom of the barrel cover and the bottom of the tower body; and the liquid level height of the water bath space is set to match the bottom of the tower body.

[0012] Furthermore, the annular elution pipe is provided with a plurality of spray holes along its annular direction and on its inner wall.

[0013] Furthermore, the throat of the venturi scrubber is connected to a rinsing feed pipeline, and a plurality of spray ports are circumferentially arranged on the throat.

[0014] Furthermore, the tertiary washing zone also includes a demister; the demister is arranged between the top of the tower body and the leaching pipe.

[0015] Furthermore, the primary washing area also includes a first bracket assembly; the first bracket assembly has a first upper bracket and a first lower bracket; one end of each bracket is installed in the tower body; the top end of the Venturi scrubber is connected to the first upper bracket, and the bottom end is connected to the first lower bracket.

[0016] Furthermore, each bracket has a plurality of support parts; the plurality of support parts are arranged in the tower body along the circumference of the tower body, and one end of each support part is installed on the inner wall of the tower body, and the other end is installed on the Venturi scrubber.

[0017] Furthermore, the secondary washing area also includes a second bracket assembly; the second bracket assembly includes a second upper bracket and a second lower bracket; each bracket has a fixed portion and a plurality of supporting portions; the fixed portion is matched and sleeved and fixed to the outer wall of the barrel cover; a plurality of supporting portions are arranged in the tower body along the circumference of the tower body, and one end of each supporting portion is installed on the inner wall of the tower body, and the other end is connected to the fixed portion.

[0018] Furthermore, the tower side wall of the secondary washing zone is matched with a remote liquid level gauge; and the elution feed pipeline is provided with a regulating valve.

[0019] Furthermore, the number of the spray ports is 8 to 12; and the demister is a wire mesh demister.

[0020] Compared with the prior art, the beneficial effects of the utility model are:

[0021] (1) The silane gas is first passed into the Venturi scrubber for washing, and then the silane gas washed by the Venturi scrubber is directed to the secondary washing area. Under the elution of the annular elution pipe and the guidance of the cylinder cover, a large amount of silicon powder enters the eluent water bath and is discharged from the tower body. In this way, even if the silane gas contains a large amount of silicon powder, it will not diffuse arbitrarily in the tower body and cause the problem of easy blockage of the tower plates and pipelines.

[0022] (2) After the eluent water bath is bubbled and broken in sequence, a large amount of silane gas is generated, which flows along the gap between the outer wall of the cylinder cover and the inner wall of the tower body to the tertiary washing area for further washing and then discharged from the tower, thereby ensuring the dust removal effect of the silane gas; a small part of the silane gas after bubble breaking will flow back to the inner wall of the cylinder cover, and then be washed by the eluent in the cylinder cover and flow to the eluent water bath for further purification, further avoiding the diffusion of silicon powder contained in the silane gas in the tower. In addition, the part of the silane gas that flows toward the top of the tower after washing from the Venturi scrubber will be washed in the tertiary washing area to ensure the purification effect of the silane gas discharged from the tower. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 This is a schematic diagram of the structure of a silane gas washing tower according to an embodiment of the present application;

[0025] Figure 2 A schematic diagram of the structure of a venturi scrubber of a silane gas scrubbing tower according to an embodiment of the present application;

[0026] Figure 3 A schematic top view of a venturi scrubber according to an embodiment of the present application installed on a silane gas scrubbing tower through a first bracket assembly;

[0027] Figure 4 This is a top view schematic diagram of a barrel cover according to an embodiment of the present application installed on a silane gas washing tower through a second bracket assembly.

[0028] Reference numerals:

[0029] 10. Venturi scrubber; 102. first diffusion section; 100. spray port; 103. second diffusion section; 11. first upper bracket; 110. support portion; 12. first lower bracket;

[0030] 20, barrel cover; 21, annular elution pipe; 210, spray hole; 22, thorn part; 23, second lower bracket; 24, second upper bracket; 240, connecting part; 241, fixing part;

[0031] 3. Water bath space; 4. Eluent; 5. Defoamer;

[0032] 6. Tower body; 60. Gas outlet; 61. Liquid outlet pipeline; 63. Silane gas feed pipeline; 64. Leaching feed pipeline; 65. Cone section contraction structure; 66. Remote liquid level meter. DETAILED DESCRIPTION

[0033] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0034] In the description of the present invention, it should be understood that the terms "top", "bottom", "inside", "outside", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships conventionally placed when the product of the present invention is used, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0035] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0036] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0038] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0039] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0040] The utility model embodiment provides a silane gas washing tower, please refer to Figure 1-Figure 4 The silane gas washing tower has three washing zones. The first washing zone is arranged between the second washing zone and the third washing zone, and each washing zone is interconnected. A gas outlet 60 is arranged at the top of the tower body 6, and a liquid outlet pipe 61 is arranged at the bottom.

[0041] A venturi scrubber 10 is provided in the primary scrubbing area. Silane gas is passed through the top of the venturi scrubber 10. A hollow cylinder cover 20 is provided in the secondary scrubbing area. An annular leaching pipe 21 is provided at the top of the cylinder cover 20. A leaching pipe 4 is provided in the tertiary scrubbing area. The venturi scrubber 10, the annular leaching pipe 21 and the leaching pipe 4 are all connected to the leaching feed pipe 64. The leaching feed pipe 64 is provided in the tower body 6.

[0042] The silane gas passes through the venturi scrubber 10 in the primary scrubbing area in turn, and then is washed in the secondary scrubbing area and directed to the water bath space 3 by the barrel cover 20, which prevents the silicon powder contained in the silane gas from being widely diffused in the tower body 6. The silane gas purified in the secondary scrubbing area flows back to the elution pipe 4 in the tertiary scrubbing area for washing. The purified gas is discharged out of the tower, and the silane gas mixed with the elution liquid can flow to the secondary scrubbing area for washing, and through repeated washing between the secondary scrubbing area and the tertiary scrubbing area, the silane gas mixed with the elution liquid is fully purified.

[0043] Specifically,

[0044] The tower body 6 has a gas outlet 60 at the top and a liquid outlet pipe 61 at the bottom. The gas outlet 60 is used for discharging silane gas, and the liquid outlet pipe 61 is used for discharging elution mixed liquid. A 45°~60° conical section contraction structure 65 is provided at the bottom end of the tower body 6. The conical section contraction structure 65 is connected to the liquid outlet pipe 61. A silane gas feed pipe 63 is provided on the side wall of the tower body 6 for introducing silane gas into the tower body 6. Three groups of elution feed pipes 64 are arranged in sequence along the extension direction of the tower body 6 for introducing eluent into the tower body 6. Each group of elution feed pipes 64 is provided with a regulating valve. According to the layout positions of the three groups of elution feed pipes, the interior of the tower body 6 is divided into three-level washing areas. Among them, the first-level washing area is arranged between the second-level washing area and the third-level washing area, that is to say, in terms of spatial orientation, the second-level washing area is located in the lower section of the tower body 6, the third-level washing area is located in the upper section of the tower body 6, and the first-level washing area is located in the middle section of the tower body 6, and each level of washing area is interconnected.

[0045] The first-stage washing area is provided with a venturi washing unit. The venturi washing unit includes a venturi scrubber 10 and a first bracket assembly. The venturi scrubber 10 is stably installed in the tower body 6 through the first bracket assembly.

[0046] The venturi scrubber 10 has a plurality of spray ports 100 circumferentially arranged at the throat, preferably 8 to 12. The throat of the venturi scrubber is connected to the leaching feed pipe 64. The top of the venturi scrubber 10 is connected to the silane gas feed pipe 63. Silane gas is introduced from the top of the venturi scrubber 10 through the silane gas feed pipe 63, and enters the throat through the first diffusion section 102. When the eluent is sprayed into the throat from the spray port 100, the silane gas is washed, and the resulting eluent mixed with silane gas flows out of the venturi scrubber 10 after passing through the second diffusion section 103 and flows toward the bottom of the tower, and in the process of the eluent flowing to the bottom of the tower, part of the silane gas will flow toward the top of the tower.

[0047] The first bracket assembly is connected to the venturi scrubber 10 to increase the washing stability of the venturi scrubber 10 in the tower body 6. The first bracket assembly includes a first upper bracket 11 and a first lower bracket 12. Each bracket has a plurality of support portions 110. The plurality of support portions 110 are arranged in the tower body 6 along the circumferential direction of the cross section of the tower body 6, and one end of each support portion 110 is mounted on the inner wall of the tower body 6, and the other end is mounted on the venturi scrubber 10.

[0048] The secondary washing area is arranged below the primary washing area. A barrel cover unit is arranged in the secondary washing area. The barrel cover unit comprises a barrel cover 20 and a second bracket assembly. The barrel cover 20 is stably installed in the tower body 6 through the second bracket assembly.

[0049] The barrel cover 20 is a hollow structure as a whole. An annular elution pipe 21 is provided at the top of the barrel cover 20, and the annular elution pipe 21 is connected to the elution feed pipe 64. The annular elution pipe 21 is provided with a plurality of spray holes 210 along its annular direction and on its inner wall, so that the eluent passing through the annular spray pipe 21 can be sprayed toward the center of the tube ring. When the silane gas washed in the primary washing area flows to the secondary washing area, it is washed and dusted again through the annular spray pipe 21, and the eluent is mixed with silane gas and guided to the bottom of the tower by the barrel cover 20. The bottom end of the barrel cover 20 is provided with a plurality of serrated thorns 22 arranged along its circumference, and a water bath space 3 is reserved between the bottom end of the barrel cover 20 and the bottom end of the tower body 6. The water bath space 3 can not only make the eluents mix and converge, but also has a washing and purification effect on the silane gas mixed in the eluent. The flow rate of the eluent entering the tower body 6 is controlled by the regulating valve to control the liquid level after the eluent is mixed and converged in the water bath space 3, close to the top height of the thorn portion 22, so that the thorn portion 22 can fully pierce the bubbles generated by the rise of the silane gas in the eluent water bath, thereby breaking the bubbles and emitting the silane gas. In order to better control the liquid level height of the water bath space 3, a remote level meter 66 is matched on the side wall of the tower body 6 in the secondary washing area.

[0050] When the silane gas after washing in the primary washing area flows to the secondary washing area, after washing through the annular spray pipe 21, it is guided by the barrel cover 20 and converged to the water bath space 3 for purification, and the silicon powder can be discharged from the tower with the eluent, which greatly avoids the large-scale arbitrary diffusion of silicon powder mixed with silane gas in the tower body 6. At the same time, the eluent water bath in the water bath space 3 is bubbled and broken in turn to make the silane gas therein break the bubble out. At this time, a large amount of silane gas will flow toward the top of the tower along the gap between the outer wall of the barrel cover 20 and the inner wall of the tower body 6; some silane gas will also flow back to the inner wall of the barrel cover 20, and will be eluted by the eluent in the barrel cover 20 and converge to the water bath space 3 for purification again.

[0051] The second bracket assembly is connected to the drum cover 20 to increase the washing stability of the drum cover 20 in the tower body 6. The second bracket assembly includes a second upper bracket 24 and a second lower bracket 23. Each bracket has a fixing portion 241 and a plurality of connecting portions 240. The fixing portion 241 is matched and sleeved and fixed to the outer wall of the drum cover 20. The plurality of connecting portions 240 are arranged in the tower body 6 along the circumference of the tower body 6, and one end of each connecting portion 240 is installed on the inner wall of the tower body 6, and the other end is connected to the fixing portion 241.

[0052] The third-stage washing area is provided with a rinsing pipe 4 and a demister 5. The third-stage washing area is arranged above the first-stage washing area. When the silane gas flows to the third-stage washing area, it is sprayed through the rinsing pipe 4 for washing, and then the silane gas is removed by the demister 5 and discharged out of the tower.

[0053] The elution pipe 4 is connected to the elution feed pipe 64. The elution agent is delivered to the elution pipe 4 through the elution feed pipe 64. The elution pipe can be a ring-shaped elution pipe. The silane gas flowing to the tertiary washing area can come from: the silane gas washed in the secondary washing area, and the silane gas washed in the primary washing area.

[0054] The silane gas washed in the secondary washing area flows to the tertiary washing area along the gap between the outer wall of the barrel cover 20 and the inner wall of the tower body 6, flows toward the top of the tower after being sprayed and washed by the elution pipe 4; the silane gas washed in the primary washing area flows to the tertiary washing area, flows toward the top of the tower after being sprayed and washed by the elution pipe 4. A part of the silane gas washed in the tertiary washing area may be mixed with the eluent and flow to the secondary washing area, and the silane gas mixed with the eluent is fully purified through repeated washing between the secondary washing area and the tertiary washing area.

[0055] The demister 5 is disposed between the top of the tower body 6 and the elution pipe 4. The silane gas rising toward the top of the tower is defoamed by the demister 5 and then flows out from the gas outlet 60. The demister 5 may be a wire mesh demister.

[0056] Based on the above embodiments, the working method of this application is as follows:

[0057] Silane gas enters the venturi scrubber 10 through the silane gas feed pipe 63, and is washed by the throat through the eluent. The washed silane gas will be mixed with the eluent and flow to the secondary washing area, and after being sprayed by the annular spray pipe 21, it will be guided to the water bath space 3 for purification by the barrel cover 20. The eluent water bath converged by the water bath space 3 is bubbled and broken in turn to make the silane gas break the bubble out, so that a large amount of silane gas flows back to the tertiary washing area along the gap between the outer wall of the barrel cover 20 and the inner wall of the tower body 6 for washing. After purification, a large amount of silane gas is defoamed by the demister 5 and flows outside the tower; a small part of the silane gas obtained by breaking the bubble may flow back to the inner wall of the barrel cover 20, and after being eluted by the eluent in the barrel cover 20, it will converge to the water bath space 3 for purification again.

[0058] In addition, the silane gas refluxed to the tertiary scrubbing zone may also come from the silane gas scrubbed by the venturi scrubber 10 .

[0059] Based on the above embodiments, the advantages of this application are:

[0060] (1) The silane gas is first passed into the venturi scrubber 10 for washing, and then flows to the secondary washing area after washing through the venturi scrubber 10. Under the elution of the annular elution pipe 21 and the guidance of the cylinder cover 20, a large amount of silicon powder enters the eluent water bath and is discharged out of the tower. In this way, even if the silane gas contains a large amount of silicon powder, it will not diffuse arbitrarily in the tower body and cause the problem of easy blockage of the tower plate and pipeline.

[0061] (2) After the eluent water bath is bubbled and broken in sequence, a large amount of silane gas is generated, which flows along the gap between the outer wall of the cylinder cover and the inner wall of the tower body to the tertiary washing area for further washing and then discharged from the tower, thereby ensuring the dust removal effect of the silane gas; a small part of the silane gas after bubble breaking will flow back to the inner wall of the cylinder cover, and then be washed by the eluent in the cylinder cover and flow to the eluent water bath for further purification, further avoiding the diffusion of silicon powder contained in the silane gas in the tower. In addition, the part of the silane gas that flows toward the top of the tower after washing from the Venturi scrubber will be washed in the tertiary washing area to ensure the purification effect of the silane gas discharged from the tower.

Claims

1. A silane gas scrubbing tower, comprising: A tower body, wherein the top of the tower body is provided with a gas outlet, the bottom of the tower body is provided with a liquid outlet pipeline, and the middle of the tower body is provided with a silane gas feed pipeline; It is characterized in that The tower body has three levels of washing zones, the first level washing zone is arranged between the second level washing zone and the third level washing zone, and each level of washing zones is interconnected; A venturi scrubber is provided in the primary scrubbing area, and the top of the venturi scrubber is connected to the silane gas feed pipeline; A hollow cylinder cover is provided in the secondary washing area, and a ring-shaped elution pipe is provided on the top of the cylinder cover; The three-stage washing area is provided with a leaching pipe; Wherein, the Venturi scrubber, the annular elution pipe and the elution pipe are all connected to the elution feed pipeline, and the elution feed pipeline is arranged on the tower body.

2. The silane gas scrubbing tower according to claim 1, characterized in that: The bottom end of the tube cover is provided with a thorn portion; A water bath space is reserved between the bottom end of the barrel cover and the bottom end of the tower body, and the liquid level height of the water bath space is set to match the bottom end of the tower body.

3. The silane gas scrubbing tower according to any of claims 1 or 2, characterized in that: The annular shower pipe is provided with a plurality of spray holes along its annular direction and on its inner wall.

4. The silane gas scrubbing tower according to claim 1, characterized in that: The throat of the venturi scrubber is connected to the elution feed pipeline, and a plurality of spray ports are circumferentially arranged on the throat.

5. The silane gas scrubbing tower according to claim 1, characterized in that: The three-stage washing area also includes a demister, which is arranged between the top of the tower body and the elution pipe.

6. The silane gas scrubbing tower according to claim 1, characterized in that: The primary washing zone further comprises a first bracket assembly, the first bracket assembly comprising a first upper bracket and a first lower bracket, one end of each bracket being mounted in the tower body; The top end of the venturi scrubber is connected to the first upper bracket, and the bottom end is connected to the first lower bracket.

7. The silane gas scrubbing tower according to claim 6, characterized in that: Each bracket has a plurality of support portions; A plurality of the support parts are arranged in the tower body along the circumferential direction of the tower body, and one end of each of the support parts is installed on the inner wall of the tower body, and the other end is installed on the venturi scrubber.

8. The silane gas scrubbing tower according to claim 1, characterized in that: The secondary washing area further comprises a second bracket assembly, the second bracket assembly comprising a second upper bracket and a second lower bracket, each bracket having a fixing portion and a plurality of supporting portions; The fixing portion is matched and sleeved and fixed to the outer wall of the barrel cover; a plurality of the supporting portions are arranged in the tower body along the circumference of the tower body, and one end of each of the supporting portions is installed on the inner wall of the tower body, and the other end is connected to the fixing portion.

9. The silane gas scrubbing tower according to claim 1, characterized in that: The tower side wall of the secondary washing zone is matched with a remote liquid level meter; the elution feed pipeline is provided with a regulating valve.

10. The silane gas scrubbing tower according to claim 5, characterized in that: The demister is a metal wire mesh demister.

Images