Super-hard abrasive dicing blade
By designing a double-layer working ring structure on the ultra-hard abrasive slash knife and adopting a V-shaped chip drainage groove, the existing blades are insufficient rigidity and difficult to discharge, and better chip removal and heat dissipation effects are achieved, extending service life and improving processing accuracy.
Patent Information
- Application Number
- CN202421917854.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-08
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-08-08
AI Technical Summary
During the use of existing ultra-hard abrasive slashing knives, the depth of the chip drain will reduce the rigidity of the blade, while the chip drain drain will cause the chip to be difficult to discharge and cannot be cooled quickly, which will affect the service life.
A superhard abrasive scribing knife is designed, adopting a double-layer working ring structure, with a V-shaped outer chip drainage groove on the outer working ring and a V-shaped inner chip drainage groove on the inner working ring. This structure achieves better chip drainage and heat dissipation effects.
It achieves more effective chip removal and heat dissipation, extends service life, improves processing accuracy, and reduces usage costs.
Smart Images
Figure CN222945300U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of grinding processing, in particular to a super-hard abrasive slicing knife. Background Art
[0002] Semiconductor silicon materials are widely used in the electronics industry due to their rich resources, low manufacturing costs, and good processability. They are important substrate materials for integrated circuits. The main production process of chips is divided into two major processes: wafer manufacturing and packaging and testing. A key step in the back-end packaging and testing is wafer dicing, which aims to divide the entire wafer into single grains. This process usually uses super-hard abrasive dicing knives for cutting, which is an important tool in the back-end packaging and testing process of semiconductor manufacturing.
[0003] For the wafer dicing process, the quality of the blade cutting seam is a key indicator for evaluating the quality of the dicing process. In addition to mechanical indicators such as coaxiality with the dicing machine, how to ensure the smooth discharge of chips during the cutting process and achieve effective heat dissipation is the key to ensuring the quality of the cutting seam. Existing dicing knives are all provided with a narrow and long chip groove with a certain depth extending along the radial direction of the blade on the outer peripheral side of the blade to assist the dicing knife in chip removal and cooling. However, if the depth of the chip groove of a dicing knife with this structure is too deep, the rigidity of the dicing knife will be reduced; if the depth of the chip groove is too shallow, after the dicing knife has been used for a period of time, the chip groove will be worn and it will not be able to continue cutting, and the cutting life of the dicing knife will be limited. In addition, the grinding chips of the dicing knife with this structure are not easy to discharge and cannot be cooled quickly, which can easily cause damage to the dicing knife and affect the service life of the dicing knife. Utility Model Content
[0004] In order to overcome the above-mentioned defects, the utility model provides a super-hard abrasive dicing knife, which has high strength and good rigidity, can achieve better chip removal and heat dissipation effects, and has a long service life.
[0005] The utility model adopts the following technical solution to solve its technical problems: a super-hard abrasive slicing knife, comprising an annular blade body, the inner hole of the blade body being a mounting hole, the blade body being formed with an annular outer working ring and an inner working ring in sequence along its radial direction from the outside to the inside, the outer working ring of the blade body being provided with an outer chip groove which penetrates the outer side surface of the blade body and has a V-shaped notch structure, a plurality of outer chip grooves being arranged at square intervals along the circumference of the outer working ring, the portion of the outer working ring located between adjacent outer chip grooves forming an outer cutting edge, the inner working ring of the blade body being provided with an inner chip groove which has a V-shaped hollow structure, the width of the inner chip groove on one side facing the center direction of the blade body being smaller than the width on one side facing the outer working ring, a plurality of inner chip grooves being arranged at square intervals along the circumference of the inner working ring, the portion of the inner working ring located between adjacent inner chip grooves forming an inner cutting edge, and when the radial wear amount of the outer cutting edge of the blade body reaches a set distance, the inner chip groove forms a penetrating V-shaped notch structure on the outer side surface of the blade body.
[0006] As a further improvement of the present invention, the outer chip removal groove is arranged opposite to the inner cutting edge, and the inner chip removal groove is arranged opposite to the outer cutting edge.
[0007] As a further improvement of the utility model, the V-shaped bottom of the outer chip removal groove and the V-shaped mouth of the inner chip removal groove are located on the same arc surface where the outer working ring and the inner working ring meet.
[0008] As a further improvement of the utility model, the vertical distance between the outer chip groove and the inner chip groove in the radial direction of the blade is 5mm to 8mm.
[0009] As a further improvement of the utility model, the outer chip groove includes a first straight face section, a second straight face section, a third straight face section, a first rounded corner section, a second rounded corner section, a third rounded corner section and a fourth rounded corner section, the first straight face section and the third straight face section respectively form two side walls of the V-shaped notch structure, the second straight face section forms the bottom surface of the V-shaped notch structure, the first straight face section is transitionally connected to the outer cylindrical surface of the outer layer working ring of the blade body through the first rounded corner section in a tangential state, the first straight face section and the second straight face section are transitionally connected to the tangential state through the second rounded corner section, the second straight face section and the third straight face section are transitionally connected to the tangential state through the third rounded corner section, and the third straight face section is transitionally connected to the outer cylindrical surface of the outer layer working ring of the blade body through the fourth rounded corner section;
[0010] The inner chip groove includes a fourth straight face segment, a fifth straight face segment, a sixth straight face segment, a fifth rounded corner segment, a sixth rounded corner segment, a seventh rounded corner segment and an eighth rounded corner segment. The fourth straight face segment and the sixth straight face segment respectively form the two side walls of the V-shaped hollow structure, the fifth straight face segment forms the bottom surface of the V-shaped hollow structure, the fourth straight face segment is transitionally connected to the outer cylindrical surface of the inner working ring of the blade body through the fifth rounded corner segment, the fourth straight face segment and the fifth straight face segment are transitionally connected to the outer cylindrical surface of the inner working ring of the blade body through the sixth rounded corner segment, the fifth straight face segment and the sixth straight face segment are transitionally connected to the outer cylindrical surface of the inner working ring of the blade body through the seventh rounded corner segment, and the sixth straight face segment is transitionally connected to the outer cylindrical surface of the inner working ring of the blade body through the eighth rounded corner segment.
[0011] As a further improvement of the present invention, the distance between the first and second straight face segments and the distance between the fourth and fifth straight face segments are both 1.5 mm to 3.5 mm.
[0012] As a further improvement of the present invention, the included angle of the vertical plane passing through the center of the circle of two adjacent second straight surface segments and the included angle of the vertical plane passing through the center of the circle of two adjacent fifth straight surface segments are both 60° to 70°.
[0013] As a further improvement of the present invention, the angle between the third straight surface segment and the vertical plane of the second straight surface segment passing through the center of the circle and the angle between the sixth straight surface segment and the vertical plane of the fifth straight surface segment passing through the center of the circle are both 30° to 60°.
[0014] As a further improvement of the present utility model, the fillet radii of the first and fifth fillet segments are both 1mm to 1.5mm, the fillet radii of the second and sixth fillet segments are both 1.5mm to 2mm, the fillet radii of the third and seventh fillet segments are both 1.5mm to 2mm, and the fillet radii of the fourth and eighth fillet segments are both 1mm to 1.5mm.
[0015] As a further improvement of the present utility model, the first straight surface segment is perpendicular to the second straight surface segment, and the fourth straight surface segment is perpendicular to the fifth straight surface segment.
[0016] The beneficial effects of the present invention are as follows: the present invention optimizes the shape and arrangement of the chip grooves of the abrasive layer of the super-hard abrasive dicing knife, and adopts a V-shaped chip groove to achieve chip holding and cooling, which is more conducive to the rapid discharge of abrasive chips and provides more effective heat dissipation conditions; at the same time, the present invention designs a double-layer working ring, and forms an outer chip groove and an inner chip groove on the outer working ring and the inner working ring respectively, thereby ensuring effective chip removal and heat dissipation throughout the life cycle of the super-hard abrasive dicing knife, improving machining accuracy, extending service life, and reducing the use cost of the super-hard abrasive dicing knife. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is the front view of the utility model;
[0018] Figure 2 for Figure 1 Enlarged view of part A in the middle;
[0019] Figure 3 This is a schematic diagram of the inner working ring of the super abrasive dicing knife. DETAILED DESCRIPTION
[0020] Embodiment: A superhard abrasive slicing knife comprises an annular blade body, the inner hole of the blade body is a mounting hole 4, the blade body is formed with an annular outer working ring and an inner working ring in sequence along its radial direction from the outside to the inside, the outer working ring of the blade body is provided with an outer chip groove 1 which penetrates the outer side surface of the blade body and has a V-shaped notch structure, a plurality of outer chip grooves 1 are arranged at square intervals along the circumference of the outer working ring, and the portion of the outer working ring located between adjacent outer chip grooves 1 forms an outer cutting edge 3, the inner working ring of the blade body is provided with an inner chip groove 2 with a V-shaped hollow structure, the width of the inner chip groove 2 on one side facing the center direction of the blade body is smaller than the width on the other side facing the outer working ring, a plurality of inner chip grooves 2 are arranged at square intervals along the circumference of the inner working ring, and the portion of the inner working ring located between adjacent inner chip grooves 2 forms an inner cutting edge 5, and when the radial wear of the outer cutting edge 3 of the blade body reaches a set distance, the inner chip groove 2 forms a penetrating V-shaped notch structure on the outer side surface of the circumference of the blade body.
[0021] Two layers of working rings are formed on the blade body, and an outer chip groove 1 and an inner chip groove 2 are formed in the two layers of working rings respectively. The blade body begins to be processed by the outer cutting edge 3 on the outer working ring. The grinding chips generated during the processing enter the outer chip groove 1 and are discharged from the outer chip groove 1 under the flushing of coolant. As the outer working ring is gradually worn away, the inner cutting edge 5 on the inner working ring of the blade body begins to enter the processing state. The grinding chips generated during the processing enter the inner chip groove 2 and are discharged from the inner chip groove 2 under the flushing of coolant.
[0022] By designing a double-layer working ring on the blade body, effective chip removal and heat dissipation are guaranteed throughout the life cycle of the dicing knife. The outer chip groove 1 and the inner chip groove 2 both adopt a V-shaped structure, which is more conducive to the rapid discharge of grinding chips and provides more effective heat dissipation conditions.
[0023] The outer chip groove 1 is arranged opposite to the inner cutting edge 5, and the inner chip groove 2 is arranged opposite to the outer cutting edge 3. The outer chip groove 1 and the inner chip groove 2 are staggered, which is beneficial to improve the rigidity of the dicing knife cutting process.
[0024] The V-shaped bottom of the outer chip groove 1 and the V-shaped mouth of the inner chip groove 2 are located on the same arc surface where the outer working ring and the inner working ring meet. When the outer cutting edge 3 of the outer working ring is worn out, the inner chip groove 2 is exposed for chip storage and heat dissipation, and at the same time, the inner cutting edge 5 on the inner working ring is exposed for cutting processing.
[0025] The vertical distance a between the outer chip groove 1 and the inner chip groove 2 in the radial direction of the blade is 5 mm to 8 mm. The best state is that the outer chip groove 1 runs through the entire outer working ring, the inner chip groove 2 runs through the inner working ring, and the vertical distance between the outer chip groove 1 and the inner chip groove 2 in the radial direction of the blade is the radial width of the outer working ring.
[0026] The outer chip groove 1 comprises a first straight surface section 11, a second straight surface section 12, a third straight surface section 13, a first rounded section 14, a second rounded section 15, a third rounded section 16 and a fourth rounded section 17, wherein the first straight surface section 11 and the third straight surface section 13 respectively form two side walls of a V-shaped notch structure, the second straight surface section 12 forms a bottom surface of the V-shaped notch structure, the first straight surface section 11 is tangentially transitionally connected to an outer circumferential surface of an outer layer working ring of a blade body through the first rounded section 14, the first straight surface section 11 and the second straight surface section 12 are tangentially transitionally connected through the second rounded section 15, the second straight surface section 12 and the third straight surface section 13 are tangentially transitionally connected through the third rounded section 16, and the third straight surface section 13 is tangentially transitionally connected to an outer circumferential surface of an outer layer working ring of a blade body through the fourth rounded section 17;
[0027] The inner chip groove 2 includes a fourth straight face segment 21, a fifth straight face segment 22, a sixth straight face segment 23, a fifth rounded corner segment 24, a sixth rounded corner segment 25, a seventh rounded corner segment 26 and an eighth rounded corner segment 27. The fourth straight face segment 21 and the sixth straight face segment 23 respectively form the two side walls of the V-shaped hollow structure, the fifth straight face segment 22 forms the bottom surface of the V-shaped hollow structure, the fourth straight face segment 21 is transitionally connected with the outer circular surface of the inner working ring of the blade body through the fifth rounded corner segment 24, the fourth straight face segment 21 and the fifth straight face segment 22 are transitionally connected with the tangent state through the sixth rounded corner segment 25, the fifth straight face segment 22 and the sixth straight face segment 23 are transitionally connected with the tangent state through the seventh rounded corner segment 26, and the sixth straight face segment 23 is transitionally connected with the outer circular surface of the inner working ring of the blade body through the eighth rounded corner segment 27.
[0028] The above structure ensures that the outer cutting edge 3 on the outer working ring will not produce burrs when working, thereby ensuring the cutting accuracy. After the outer working ring is used up and enters the inner working ring, the cutting edge on the inner working ring will not produce burrs when processing on the workpiece, thereby ensuring that the dicing knife maintains stable processing accuracy for a long time.
[0029] The distance b between the first straight surface segment 11 and the second straight surface segment 12 and the distance b between the fourth straight surface segment 21 and the fifth straight surface segment 22 are both 1.5 mm to 3.5 mm.
[0030] The included angle α of the vertical plane passing through the center of the circle of two adjacent second straight surface segments 12 and the included angle of the vertical plane passing through the center of the circle of two adjacent fifth straight surface segments 22 are both 60° to 70°.
[0031] The included angle β between the third straight surface segment 13 and the vertical plane of the second straight surface segment 12 passing through the center of the circle and the included angle between the sixth straight surface segment 23 and the vertical plane of the fifth straight surface segment 22 passing through the center of the circle are both 30° to 60°.
[0032] The fillet radius r2 of the first fillet segment 14 and the fifth fillet segment 24 are both 1mm~1.5mm, the fillet radius r3 of the second fillet segment 15 and the sixth fillet segment 25 are both 1.5mm~2mm, the fillet radius r1 of the third fillet segment 16 and the seventh fillet segment 26 are both 1.5mm~2mm, and the fillet radius r4 of the fourth fillet segment 17 and the eighth fillet segment 27 are both 1mm~1.5mm.
[0033] The first straight surface segment 11 is perpendicular to the second straight surface segment 12 , and the fourth straight surface segment 21 is perpendicular to the fifth straight surface segment 22 .
[0034] The above is a better solution, and the above parameters can be designed according to actual processing requirements.
Claims
1. A superabrasive dicing knife, comprising an annular blade body, the inner hole of the blade body being a mounting hole (4), characterized in that: The blade body is provided with an annular outer working ring and an inner working ring in sequence along its radial direction from the outside to the inside. The outer working ring of the blade body is provided with an outer chip groove (1) which penetrates the outer side surface of the blade body and has a V-shaped notch structure. A plurality of outer chip grooves are arranged at square intervals along the circumference of the outer working ring. The portion of the outer working ring located between adjacent outer chip grooves forms an outer cutting edge (3). The inner working ring of the blade body is provided with an inner chip groove (2) which has a V-shaped hollow structure. The width of the inner chip groove on one side facing the center direction of the blade body is smaller than the width on the other side facing the outer working ring. A plurality of inner chip grooves are arranged at square intervals along the circumference of the inner working ring. The portion of the inner working ring located between adjacent inner chip grooves forms an inner cutting edge (5). When the radial wear of the outer cutting edge of the blade body reaches a set distance, the inner chip groove forms a penetrating V-shaped notch structure on the outer side surface of the blade body.
2. The superabrasive dicing knife according to claim 1, characterized in that: The outer chip removal groove is arranged opposite to the inner cutting edge, and the inner chip removal groove is arranged opposite to the outer cutting edge.
3. The superabrasive dicing knife according to claim 2, characterized in that: The V-shaped bottom of the outer chip removal groove and the V-shaped mouth of the inner chip removal groove are located on the same arc surface where the outer working ring and the inner working ring meet.
4. The superabrasive dicing knife according to claim 1 or 3, characterized in that: The vertical distance (a) between the outer chip removal groove and the inner chip removal groove in the radial direction of the blade is 5mm to 8mm.
5. The superabrasive dicing knife according to claim 1, characterized in that: The outer chip groove comprises a first straight surface segment (11), a second straight surface segment (12), a third straight surface segment (13), a first rounded corner segment (14), a second rounded corner segment (15), a third rounded corner segment (16) and a fourth rounded corner segment (17); the first straight surface segment and the third straight surface segment respectively form two side walls of the V-shaped notch structure; the second straight surface segment forms the bottom surface of the V-shaped notch structure; the first straight surface segment is transitionally connected to the outer circumferential surface of the outer working ring of the blade body in a tangential state through the first rounded corner segment; the first straight surface segment and the second straight surface segment are transitionally connected to the outer circumferential surface of the outer working ring of the blade body in a tangential state through the second rounded corner segment; the second straight surface segment and the third straight surface segment are transitionally connected to the outer circumferential surface of the outer working ring of the blade body in a tangential state through the third rounded corner segment; and the third straight surface segment is transitionally connected to the outer circumferential surface of the outer working ring of the blade body in a tangential state through the fourth rounded corner segment; The inner chip removal groove comprises a fourth straight face segment (21), a fifth straight face segment (22), a sixth straight face segment (23), a fifth rounded corner segment (24), a sixth rounded corner segment (25), a seventh rounded corner segment (26) and an eighth rounded corner segment (27); the fourth straight face segment and the sixth straight face segment respectively form two side walls of the V-shaped hollow structure; the fifth straight face segment forms the bottom surface of the V-shaped hollow structure; the fourth straight face segment is transitionally connected to the outer circumferential surface of the inner working ring of the blade body in a tangential state through the fifth rounded corner segment; the fourth straight face segment and the fifth straight face segment are transitionally connected to the outer circumferential surface of the inner working ring of the blade body in a tangential state through the sixth rounded corner segment; the fifth straight face segment and the sixth straight face segment are transitionally connected to the outer circumferential surface of the inner working ring of the blade body in a tangential state through the seventh rounded corner segment; and the sixth straight face segment is transitionally connected to the outer circumferential surface of the inner working ring of the blade body in a tangential state through the eighth rounded corner segment.
6. The superabrasive dicing knife according to claim 5, characterized in that: The distance (b) between the first and second straight face segments and the vertical plane passing through the center of the blade body, and the distance between the fourth and fifth straight face segments and the vertical plane passing through the center of the blade body are both 1.5 mm to 3.5 mm.
7. The superabrasive dicing knife according to claim 5, characterized in that: The included angle (α) of the vertical plane passing through the center of the circle of two adjacent second straight surface segments and the included angle of the vertical plane passing through the center of the circle of two adjacent fifth straight surface segments are both 60° to 70°.
8. The superabrasive dicing knife according to claim 5, characterized in that: The included angle (β) between the third straight surface segment and the vertical plane of the second straight surface segment passing through the center of the circle, and the included angle between the sixth straight surface segment and the vertical plane of the fifth straight surface segment passing through the center of the circle are both 30° to 60°.
9. The superabrasive dicing knife according to claim 5, characterized in that: The fillet radii (r2) of the first and fifth fillet segments are both 1mm to 1.5mm, the fillet radii (r3) of the second and sixth fillet segments are both 1.5mm to 2mm, the fillet radii (r1) of the third and seventh fillet segments are both 1.5mm to 2mm, and the fillet radii (r4) of the fourth and eighth fillet segments are both 1mm to 1.5mm.
10. The superabrasive dicing knife according to claim 5, characterized in that: The first straight segment is perpendicular to the second straight segment, and the fourth straight segment is perpendicular to the fifth straight segment.