Automatic silicon wafer inserting protection device

Abstract

The utility model discloses an automatic silicon wafer inserting protection device, which comprises a basket connected with a lifting mechanism. The rotating piece is connected to the lifting mechanism; and the protection mechanism is connected with the rotating piece so as to enable the rotating piece to rotate to the front side of the bottom of the flower basket to abut against the silicon wafer. According to the utility model, the problem that the state of the silicon wafer is inconvenient to observe due to improper position of the buffer mechanism in the prior art is solved, and the protective mechanism is driven to rotate through the rotating piece to rotate to the front side of the bottom of the basket to abut against the silicon wafer to realize the buffer effect; and meanwhile, the protection mechanism can be moved to one side of the lifting mechanism, so that a worker can conveniently observe the state of the silicon wafer in the basket from the rear side. The placement position of the movable protection mechanism is controlled through the rotating piece, and therefore operation and observation of workers are facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to an automatic inserting silicon wafer protection device. Background Art

[0002] After the silicon wafers are sliced ​​by the slicer, they are inserted into the wafer basket by the inserter. In the previous insertion process, there was no silicon wafer buffer device, which made it easy for the silicon wafers to touch the inner wall of the wafer basket when inserted into the wafer basket, causing wafer breakage, slicing, etc., causing irreversible damage to the silicon wafers, greatly reducing the qualified rate of the silicon wafers, causing time and property losses, and there are deficiencies.

[0003] A Chinese patent (Announcement No.: CN207719228U) discloses a silicon wafer buffer device for silicon wafer inserting. A silicon wafer conveyor belt is installed on one side of the inserting machine frame. A lifting module is provided on one side of the silicon wafer conveyor belt. The lifting module is fixed on the inserting machine frame. The lifting module is composed of a lifting motor, a screw drive module, and a lifting platform. This device adopts the method of adding a silicon wafer buffer device, so that the silicon wafer is inserted into the wafer basket and first contacts with the rubber pad in the buffer device. The rubber pad can well absorb the kinetic energy when the silicon wafer is inserted into the wafer basket, effectively protecting the silicon wafer and improving the qualified rate of the silicon wafer.

[0004] The above solution extends the cylinder to drive the rubber pad to move, and when the silicon wafer is inserted into the wafer basket, it first contacts the rubber pad of the buffer device to reduce the risk of silicon wafer breakage and dicing. However, after the wafer is inserted, the buffer device is always fixed at the back of the wafer basket, occupying a large space, making it inconvenient for the staff to observe the state of the silicon wafers in the wafer basket from the back, and it is also inconvenient for the basket full of silicon wafers to slide out from the back for replacement. Utility Model Content

[0005] The technical problem to be solved by the utility model is that the improper position of the buffer mechanism makes it inconvenient to observe the state of the silicon wafer. The purpose is to provide an automatic inserting silicon wafer protection device to solve the problem of the improper position of the buffer mechanism in the prior art, which makes it inconvenient to observe the state of the silicon wafer and replace the flower basket.

[0006] The utility model is realized by the following technical solutions:

[0007] An automatic silicon wafer protection device comprising:

[0008] A flower basket, wherein the flower basket is connected to a lifting mechanism;

[0009] A rotating member connected to the lifting mechanism;

[0010] The protection mechanism is connected to the rotating member so as to rotate the rotating member to the front side of the bottom of the flower basket so as to abut against the silicon wafer.

[0011] Further optimized, the rotating member includes a connecting block installed on the lifting mechanism, the connecting block is connected to the rotating cylinder, and the rotating cylinder is connected to the protective mechanism.

[0012] Further optimized, the protection mechanism includes a push rod connected to the rotating cylinder, and a buffer part is connected to the push rod.

[0013] Further optimization, in order to ensure the stable connection between the push rod and the rotating cylinder, is set as follows: a rotating frame is connected between the push rod and the rotating cylinder.

[0014] According to further optimization, the buffer portion includes a sponge cushion, which is bonded to the side of the abutment rod that abuts against the silicon wafer.

[0015] Further optimization, the buffer part includes a baffle, a telescopic rod is connected between the baffle and the support rod, and a spring is sleeved on the telescopic rod.

[0016] Further optimization, in order to ensure that the support rod can normally extend into the interior of the flower basket, the length of the support rod is smaller than the length of the bottom of the flower basket.

[0017] Further optimization, in order to facilitate the observation of the real-time status of the rotating cylinder, a magnetic switch is connected to the rotating cylinder, and the magnetic switch is electrically connected to the rotating cylinder.

[0018] Further optimization, in order to ensure the normal operation of the lifting mechanism, the lifting mechanism includes a vertically rotatable screw rod, the screw rod is threadedly connected to a lifting platform, the lifting platform is slidably connected to a limit rod, and the lifting platform is connected to both the flower basket and the connecting block.

[0019] Further optimization, one end of the screw rod is connected to a servo motor.

[0020] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0021] 1. The protective mechanism is driven to rotate by the rotating part, so that the protective mechanism can be rotated to the front side of the bottom of the basket to abut against the silicon wafer to achieve a buffering effect. At the same time, the protective mechanism can be moved to the side of the lifting mechanism so that the staff can observe the state of the silicon wafer in the basket from the back. The placement of the mobile protective mechanism is controlled by the rotating part, which is convenient for the staff to operate and observe.

[0022] 2. The protective mechanism is movable, so that the flower basket can be easily slid out from the back for replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the embodiments of the present utility model, constitute a part of this application, and do not constitute a limitation of the embodiments of the present utility model. In the drawings:

[0024] Figure 1It is a schematic diagram of the structure of an embodiment of the utility model;

[0025] Figure 2 This is a structural schematic diagram of the lifting mechanism of the utility model;

[0026] Figure 3 It is a structural schematic diagram of the protection mechanism of the utility model;

[0027] Figure 4 It is a structural schematic diagram of another embodiment of the protection mechanism of the utility model.

[0028] Marks and corresponding parts names in the attached drawings:

[0029] 1-flower basket, 2-lifting mechanism, 21-screw rod, 22-limit rod, 23-lifting platform, 24-servo motor, 3-rotating part, 31-connecting block, 32-rotating cylinder, 321-magnetic switch, 33-rotating frame, 4-protective mechanism, 41-retaining rod, 42-buffer part, 421-sponge cushion, 422-baffle, 423-spring, 424-telescopic rod. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solutions and advantages of the utility model more clearly understood, the utility model is further described in detail below in conjunction with embodiments and drawings. The schematic implementation manner of the utility model and its description are only used to explain the utility model and are not intended to limit the utility model.

[0031] Example 1

[0032] This embodiment 1 provides an automatic inserting silicon wafer protection device, such as Figure 1-Figure 2 As shown, including:

[0033] A flower basket 1, wherein the flower basket 1 is connected to a lifting mechanism 2;

[0034] A rotating member 3, wherein the rotating member 3 is connected to the lifting mechanism 2;

[0035] The protection mechanism 4 is connected to the rotating member 3 to rotate it to the front side of the bottom of the flower basket 1 to abut against the silicon wafer.

[0036] In the prior art, the rubber pad is moved by extending the cylinder, and when the silicon wafer is inserted into the wafer basket, it first contacts the rubber pad of the buffer device to reduce the risk of silicon wafer breakage and dicing. However, during the wafer insertion process, the buffer device is always fixed at the rear side of the wafer basket, occupying a large space, making it inconvenient for the staff to observe the state of the silicon wafer in the wafer basket from the rear side.

[0037] In order to solve the above problems, a rotating part 3 and a protective mechanism 4 are provided in the present embodiment. When inserting the wafer, the protective mechanism 4 is driven by the rotating part 3 to rotate to the front side of the bottom of the flower basket 1 to abut against the silicon wafer. After the insertion, the rotating part 3 drives the protective mechanism 4 to rotate to the side of the lifting mechanism 2 to facilitate observation and operation by the staff from the rear side, and it is not convenient for the flower basket full of silicon wafers to slide out from the rear side for replacement.

[0038] Specifically, the specific working process of this embodiment is:

[0039] Before inserting the slices, the rotating member 3 controls the protective mechanism 4 to rotate to the front side of the bottom of the flower basket 1 .

[0040] When inserting the wafers, the basket 1 and the protection mechanism 4 are driven by the lifting mechanism 2 to rise or fall simultaneously. When the silicon wafers enter the basket 1 one by one, they first contact with the protection mechanism 4 for buffering.

[0041] After the end, the rotating member 3 controls the protection mechanism 4 to leave the flower basket 1 and move to the side of the lifting mechanism 2 so that the staff can observe and operate from the rear side at a close distance. And before the next insertion, the rotating member 3 enters the front side of the bottom of the flower basket 1.

[0042] Further optimized, the rotating member 3 includes a connecting block 31 installed on the lifting mechanism 2, the connecting block 31 is connected to the rotating cylinder 32, and the rotating cylinder 32 is connected to the protective mechanism 4. In this embodiment, the connecting block 31 supports the rotating cylinder 32, and the protective mechanism 4 is driven to rotate by the rotating cylinder 32, which is simple to operate and can perform subsequent protective work normally.

[0043] like Figure 3 As shown, further optimized, the protection mechanism 4 includes a push rod 41 connected to the rotating cylinder 32, and a buffer part 42 is connected to the push rod 41. The buffer part 42 includes a sponge cushion 421, and the sponge cushion 421 is bonded to the side of the push rod 41 that abuts against the silicon wafer.

[0044] In order to ensure the stable connection between the push rod 41 and the rotating cylinder 32, it is configured as follows: a rotating frame 33 is connected between the push rod 41 and the rotating cylinder 32. In this embodiment, the rotating frame 33 includes two symmetrically arranged L-shaped rods, and the push rod 41 is connected to one end of the two L-shaped rods to provide stable support for the push rod 41 so as to facilitate the stable movement of the push rod 41.

[0045] In a specific implementation, the area of ​​the rubber pad is too small and cannot be moved, and the silicon wafer needs to always hit the same position of the rubber pad when inserting the silicon wafer. The rubber pad is easily worn, resulting in poor subsequent buffering performance and a short service life.

[0046] In this embodiment, a stopper 41 is provided. In this embodiment, the stopper 41 is a vertically arranged square rod, and to ensure that the stopper 41 can normally extend into the interior of the flower basket 1, the length of the stopper 41 is less than the length of the bottom of the flower basket 1. It should be noted that the size of the stopper 41 in this embodiment should be within a suitable range and matched with the size of the flower basket 1, so as to ensure that the silicon wafer can always contact and collide with the stopper 41 for buffering when inserted into the flower basket 1.

[0047] In addition, a sponge pad 421 is bonded to the side of the abutting rod 41 that abuts against the silicon wafer. When inserting the wafer, the silicon wafer can directly abut against the sponge pad 421 for buffering, thereby avoiding the risk of chipping or fragmentation caused by direct contact between the silicon wafer and the bottom of the flower basket 1. It should be understood that the sponge pad 421 in this embodiment can also be replaced by a rubber pad, a silicone pad or other soft pad with elastic buffering properties. This ensures that the impact of the silicon wafer when inserting the wafer is buffered to a certain extent.

[0048] In addition, the connection between the support rod 41 and the sponge pad 421 in this embodiment can also be in the form of sleeve connection, bolt connection, etc., so as to achieve a tight connection between the support rod 41 and the sponge pad 421 and facilitate replacement.

[0049] Compared with the prior art, the support rod 41 has a certain length and rises and falls together with the flower basket 1. When the silicon wafer enters the flower basket 1, it can ensure that the silicon wafer and the sponge pads 421 at different positions of the support rod 41 are in contact and collide with each other for buffering. On the one hand, it can increase the durability of the sponge pads 421 on the support rod 41, and on the other hand, it can achieve buffering of the silicon wafer to reduce the risk of chipping and fragmentation.

[0050] Further optimization, in order to facilitate observation of the real-time state of the rotating cylinder 32, the rotating cylinder 32 is connected with a magnetic switch 321, and the magnetic switch 321 is electrically connected to the rotating cylinder 32. The magnetic switch 321 is used to observe the state of the rotating cylinder 32 to control its repeated movement.

[0051] Example 2

[0052] This embodiment 2 provides another embodiment, such as Figure 4 As shown, the buffer portion 42 includes a baffle plate 422 , a telescopic rod 424 is connected between the baffle plate 422 and the support rod 41 , and a spring 423 is sleeved on the telescopic rod 424 .

[0053] In the first embodiment, a sponge cushion 421 is provided to contact with the silicon wafer to cushion the silicon wafer and reduce the risk of silicon wafer chipping. This embodiment provides another implementation form, which is to achieve the implementation through the cushioning performance of the spring 423.

[0054] When inserting the wafer, the baffle 422 collides with the silicon wafer, and then generates pressure on the spring 423. While receiving the pressure, the telescopic rod 424 contracts and the spring 423 is compressed to buffer the collision force of the silicon wafer, thereby reducing the risk of silicon wafer breakage.

[0055] Example 3

[0056] This embodiment 3 provides another embodiment, the lifting mechanism 2 includes a column and a screw rod 21 vertically rotatably arranged on the column, wherein one end of the screw rod 21 is connected to a servo motor 24; the screw rod 21 is threadedly connected to a lifting platform 23, the lifting platform 23 is slidably connected to a limit rod 22, and the lifting platform 23 is connected to both the flower basket 1 and the connecting block 31.

[0057] In this embodiment, the lifting platform 23 is used to carry the flower basket 1, and at the same time extends to the side of the column to connect with the connecting block 31 and drive the connecting block 31 to finally drive the rotating member 3 and the protective mechanism 4 to rise or fall together.

[0058] Specifically, the working process of the lifting mechanism 2 is:

[0059] The servo motor 24 is started, the screw rod 21 rotates, and the lifting platform 23 threadably connected to the screw rod 21 is driven to move upward under the limit of the limit rod 22. The upward movement of the lifting platform 23 drives the flower basket 1 and the connecting block 31 to move upward, thereby ensuring that the protection mechanism 4 and the flower basket 1 rise synchronously.

[0060] The servo motor 24 is started to reverse, and the screw rod 21 rotates in the opposite direction. Under the limit of the limit rod 22, the lifting platform 23 connected to the screw rod 21 is driven to move downward. The downward movement of the lifting platform 23 drives the flower basket 1 and the connecting block 31 to move downward, thereby ensuring the synchronous descent of the protection mechanism 4 and the flower basket 1.

[0061] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the utility model in detail. It should be understood that the above description is only the specific implementation method of the utility model and is not used to limit the protection scope of the utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. An automatic silicon wafer protection device, characterized in that: include: A flower basket (1), wherein the flower basket (1) is connected to a lifting mechanism (2); A rotating member (3), wherein the rotating member (3) is connected to the lifting mechanism (2); A protection mechanism (4) is connected to the rotating member (3) so as to rotate it to the front side of the bottom of the flower basket (1) to abut against the silicon wafer.

2. The automatic wafer protection device for inserting silicon wafers according to claim 1, characterized in that: The rotating member (3) comprises a connecting block (31) mounted on the lifting mechanism (2), the connecting block (31) is connected to a rotating cylinder (32), and the rotating cylinder (32) is connected to the protection mechanism (4).

3. The automatic wafer protection device for inserting silicon wafers according to claim 2, characterized in that: The protection mechanism (4) comprises a stopper rod (41) connected to the rotary cylinder (32), and a buffer portion (42) is connected to the stopper rod (41).

4. The automatic wafer protection device for inserting silicon wafers according to claim 3, characterized in that: A rotating frame (33) is connected between the stop rod (41) and the rotating cylinder (32).

5. The automatic wafer inserting protection device according to claim 3, characterized in that: The buffer portion (42) comprises a sponge cushion (421), and the sponge cushion (421) is bonded to a side of the abutting rod (41) that abuts against the silicon wafer.

6. The automatic wafer protection device for inserting silicon wafers according to claim 3, characterized in that: The buffer portion (42) comprises a baffle (422), a telescopic rod (424) is connected between the baffle (422) and the support rod (41), and a spring (423) is sleeved on the telescopic rod (424).

7. The automatic wafer inserting protection device according to claim 3 is characterized in that: The length of the support rod (41) is smaller than the length of the bottom of the flower basket (1).

8. The automatic wafer inserting protection device according to claim 2, characterized in that: The rotary cylinder (32) is connected to a magnetic switch (321), and the magnetic switch (321) is electrically connected to the rotary cylinder (32).

9. The automatic wafer inserting protection device according to claim 1, characterized in that: The lifting mechanism (2) comprises a column and a screw rod (21) arranged on the column for vertical rotation, the screw rod (21) is threadedly connected to a lifting platform (23), the lifting platform (23) is slidably connected to a limit rod (22), and the lifting platform (23) is connected to both the flower basket (1) and the connecting block (31).

10. The automatic wafer inserting protection device according to claim 9, characterized in that: One end of the screw rod (21) is connected to a servo motor (24).

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