Auxiliary device for disassembling and assembling molecular pump of dry etching equipment

Abstract

The utility model provides an auxiliary device for disassembling and assembling a molecular pump of dry etching equipment. The auxiliary device comprises a telescopic piece, a lifting disc, a guide rail and a bearing disc, the telescopic piece is vertically arranged in a mounting space of a molecular pump in the dry etching equipment, and the telescopic piece can be automatically telescopically adjusted; the lifting disc is arranged above the telescopic piece and is positioned below the pressure controller in the mounting space; the bearing disc is arranged on the lifting disc and can be movably adjusted in the front-back direction, the bearing disc is used for containing the molecular pump, the bearing disc is pushed into or pulled out of the installation space by pushing and pulling the bearing disc, and therefore the molecular pump placed on the bearing disc is moved into or out of the installation space. According to the utility model, a push-pull mode and automatic telescopic adjustment of the telescopic piece are adopted, the operation is more convenient and labor-saving, the molecular pump and the pressure controller can be ensured to be tightly attached under the jacking of the telescopic piece, and the air tightness of the joint of the molecular pump and the pressure controller is ensured. The molecular pump can be disassembled and assembled by one person without cooperation of two persons, so that manpower and time are saved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to an auxiliary device for disassembling and assembling a molecular pump of dry etching equipment. Background Art

[0002] In the field of integrated circuit manufacturing, dry etching is a common etching process. Dry etching is to pass a specific etching gas into the surface of the wafer placed in the reaction chamber. Under specific conditions, the etching gas reacts chemically with the substances on the surface of the wafer to achieve the purpose of etching. During the etching process, the chamber must maintain a high vacuum or even ultra-high vacuum state. If the vacuum degree is affected, it will affect the etching rate and changes in other key parameters of the equipment, thereby affecting the stability of the etching process.

[0003] During dry etching, the vacuum environment in the etching chamber is usually controlled by the turbomolecular pump and dry pump on the etcher, and high vacuum and ultra-high vacuum states require the operation of the turbomolecular pump. In daily production, this device needs to be replaced and maintained regularly due to the deposition of products during the production process.

[0004] Because the molecular pump is heavy (about 40Kg) and the installation space is relatively small. In the prior art, when disassembling and assembling a turbomolecular pump (TMP), two people are required to lift the TMP into the narrow installation space and place it under the adaptive pressure controller (APC), and then use a wrench to rotate the height adjustment screws under the TMP so that the top of the TMP fits the APC. Due to the small operating space, it is difficult for the operator to adjust the height adjustment screws to maintain a consistent height, and height inconsistencies often occur. However, during the installation process, the screws are fixed with torque requirements (13 to 15N.M), which easily causes the TMP and APC to not fit well enough and cause air leakage. Therefore, the existing molecular pump disassembly and assembly method consumes manpower and time, and is also prone to air leakage problems.

[0005] In view of this, it is necessary to propose an auxiliary device for disassembling and assembling a molecular pump of a dry etching device to solve the above problems. Utility Model Content

[0006] The utility model aims to provide an auxiliary device for disassembling and assembling a molecular pump of a dry etching device, so as to improve the problem that the existing molecular pump disassembly and assembly method consumes manpower and time and is prone to air leakage.

[0007] The utility model provides an auxiliary device for disassembling and assembling a molecular pump of a dry etching device, comprising: a telescopic member, a lifting plate, a guide rail and a supporting tray;

[0008] The telescopic member is vertically placed in the installation space of the molecular pump in the dry etching equipment, and the telescopic member can be automatically telescoped and adjusted;

[0009] The lifting plate is arranged on the telescopic member and is located below the pressure controller in the installation space;

[0010] The tray is arranged on the lifting plate and can be moved and adjusted in the front-rear direction. The tray is used to place the molecular pump. The tray is pushed and pulled to push the tray into or pull it out of the installation space, thereby moving the molecular pump placed on the tray into or out of the installation space.

[0011] In a possible embodiment, a first positioning mark for locating the placement position of the molecular pump is provided on the top surface of the supporting tray.

[0012] In a possible embodiment, the base of the molecular pump is provided with a first fastener;

[0013] The top surface of the receiving tray is provided with a second positioning mark for locating the position of the first fastener.

[0014] In a possible embodiment, a third positioning mark for locating a connection position of an exhaust pipe of the molecular pump is provided on the top surface of the supporting tray; and / or,

[0015] A fourth positioning mark for locating a wire connection position of the molecular pump is provided on the top surface of the supporting tray.

[0016] In a possible embodiment, the pressure controller is provided with a plurality of first mounting holes, and the top of the molecular pump is provided with a plurality of second mounting holes, and the second mounting holes are arranged in a one-to-one correspondence with the first mounting holes;

[0017] A plurality of fifth positioning marks are provided on the top surface of the tray, and the fifth positioning marks are arranged in one-to-one correspondence with the first mounting holes. When the tray is folded, the corresponding fifth positioning marks are aligned with the first mounting holes in the vertical direction. The fifth positioning marks are used to assist in aligning the second mounting holes with the corresponding first mounting holes. A second fastener is passed through the second mounting holes and the first mounting holes to install and fix the molecular pump and the pressure controller.

[0018] In a possible embodiment, the auxiliary device further includes a guide rail provided on the lifting plate and arranged along the front-to-back direction, and the supporting tray is slidably provided on the guide rail.

[0019] In a possible embodiment, the guide rails are a pair and are respectively located on both sides of the lifting plate. The guide rails are in an inverted L shape. A slide groove is formed between the guide rails and the lifting plate. The two side portions of the supporting tray are respectively slidably disposed in the corresponding slide grooves.

[0020] In a possible embodiment, a guide wheel is provided in the slide groove, and a wheel surface of the guide wheel is in contact with a side portion of the supporting tray.

[0021] In a possible embodiment, the auxiliary device further includes a support rod vertically arranged on the lifting plate and located in the sliding groove, the guide wheel is rotatably mounted on the support rod, and a gap is provided between the guide wheel and the lifting plate.

[0022] In a possible embodiment, the auxiliary device further includes a plurality of legs disposed on the bottom surface of the lifting plate;

[0023] A surface opposite to the pressure controller in the installation space is a storage surface, and the storage surface is provided with a plurality of sixth positioning marks or a plurality of positioning grooves for positioning the position of the supporting legs, so that the auxiliary device is positioned at a preset position.

[0024] The beneficial effect of the auxiliary device for disassembling and assembling the molecular pump of the dry etching equipment provided by the utility model is that by pushing and pulling the support tray, the molecular pump placed on the support tray can be moved into or out of the installation space, which is more convenient and labor-saving. The height of the lifting plate is adjusted by the automatic telescopic adjustment of the telescopic member to adjust the height of the lifting plate, thereby realizing the height adjustment of the molecular pump. The automatic adjustment method is not only more labor-saving, but also can ensure that the molecular pump and the pressure controller are closely attached to each other, and ensure the air tightness of the connection between the molecular pump and the pressure controller. Since the molecular pump is supported by the lifting plate, it is convenient to dock and install the molecular pump and the pressure controller. No two people need to cooperate, and one person can complete the disassembly and assembly of the molecular pump, saving manpower and time. In a further scheme, by setting a plurality of positioning marks, it is ensured that the molecular pump and the pressure controller can be quickly and accurately aligned to increase the installation speed. In a further scheme, by setting the cooperation of the slide groove and the guide rail or the cooperation of the guide groove and the guide rail, it is made smoother and more labor-saving to push and pull the support tray. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a state diagram of the auxiliary device for disassembling and assembling the molecular pump of the dry etching equipment of the utility model when the molecular pump is moved to the bottom of the pressure controller.

[0026] Figure 2 This is a front view of the auxiliary device for disassembling and assembling the molecular pump of dry etching equipment of the utility model when the molecular pump is placed.

[0027] Figure 3It is a side view of the auxiliary device for disassembling and assembling the molecular pump of dry etching equipment of the present invention when placing the molecular pump.

[0028] Figure 4 It is a schematic diagram of a lifting plate and the first to fifth positioning marks thereon in the auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to the utility model.

[0029] Figure 5 The utility model is a state diagram of the supporting tray in the auxiliary device for disassembling and assembling the molecular pump of the dry etching equipment before and after the advancement.

[0030] Figure 6 This is a state diagram of the molecular pump and the pressure controller being installed and connected after the telescopic part in the auxiliary device for disassembling and assembling the molecular pump of the dry etching equipment of the utility model is extended.

[0031] Figure 7 The utility model is a state diagram of the auxiliary device for disassembling and assembling the molecular pump of the dry etching equipment before and after the support tray is pulled out.

[0032] Figure 8 This is a state diagram of the auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to the utility model when the telescopic member is shortened after the second fastener is disassembled.

[0033] Explanation of the reference numerals in the accompanying drawings: 110, telescopic member; 120, lifting plate; 130, guide rail; 131, side plate; 132, top plate; 133, guide groove; 140, slide groove; 150, guide wheel; 160, support rod; 170, support tray; 171, first positioning mark; 172, second positioning mark; 173, third positioning mark; 174, fourth positioning mark; 175, fifth positioning mark; 180, support leg; 200, molecular pump; 210, second fastener; 300, pressure controller. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In view of the problems existing in the prior art, the embodiment of the utility model provides an auxiliary device for disassembling and assembling a molecular pump of a dry etching device, see Figure 1The auxiliary device includes a telescopic member 110, a lifting plate 120, a guide rail 130 and a tray 170. The telescopic member 110 is vertically placed in the installation space of the molecular pump 200 in the dry etching equipment. The telescopic member 110 can be automatically extended and adjusted. The lifting plate 120 is arranged on the telescopic member 110 and below the pressure controller 300 in the installation space. The tray 170 is arranged on the lifting plate 120 and can be moved and adjusted in the front and rear directions. The tray 170 is used to place the molecular pump 200, see Figure 3 The tray 170 is pushed or pulled to push the tray 170 into or pull it out of the installation space, thereby moving the molecular pump 200 placed on the tray 170 into or out of the installation space.

[0036] In this embodiment, in a narrow installation space, by pulling the tray 170, the tray 170 can be pulled out of the installation space, and the molecular pump 200 can be placed on the tray 170. By pushing the tray 170, the tray 170 with the molecular pump 200 can be pushed into the installation space, and the operator does not need to manually move and adjust the position of the molecular pump 200, which greatly reduces the labor intensity. Through the automatic telescopic adjustment of the telescopic member 110, the height of the lifting plate 120 is adjusted by lifting and lowering, and then the height adjustment of the molecular pump 200 is realized to cooperate with the installation and removal of the molecular pump 200. The entire operation process is simple, and can be operated by one person without the need for two people to work together, saving manpower and time.

[0037] After the molecular pump 200 and the pressure controller 300 are aligned, the telescopic member 110 is automatically extended by adjusting the height on the tray 170, thereby raising the molecular pump 200 placed on the tray 170. Under the supporting effect of the telescopic member 110, the molecular pump 200 can be closely attached to the pressure controller 300, avoiding the risk of air leakage due to loose fitting, and ensuring the sealing between the molecular pump 200 and the pressure controller 300. After the molecular pump 200 and the pressure controller 300 are unlocked, the telescopic member 110 is automatically shortened by adjusting the height on the tray 170, thereby lowering the molecular pump 200 placed on the tray 170, and separating the molecular pump 200 from the pressure controller 300.

[0038] It should be noted that there are a plurality of telescopic members 110, and the plurality of telescopic members 110 can be arranged in a matrix or an annular array, etc., to enhance the stability of the support of the lifting plate 120. The telescopic member 110 can be a telescopic device such as a cylinder, a hydraulic cylinder or an electric telescopic rod, and the arrangement and specific type of the telescopic member 110 can be flexibly selected according to actual conditions, and are not limited here.

[0039] In one embodiment, in combination Figure 4 and Figure 7The top surface of the tray 170 is provided with a first positioning mark 171 for locating the placement position of the molecular pump 200. Figure 1 As shown, the first positioning mark 171 is a circular mark. When the tray 170 is pulled out, the molecular pump 200 is placed within the range of the circular first positioning mark 171 according to the position of the first positioning mark 171 on the tray 170 to quickly place the molecular pump 200 at a preset position.

[0040] In a preferred embodiment, the combination Figure 4 and Figure 7 The base of the molecular pump 200 is provided with a first fastener, and the top surface of the tray 170 is provided with a second positioning mark 172 for locating the position of the first fastener, and the second positioning mark 172 is located within the first positioning mark 171. Specifically, the first fastener is a bolt, a screw, etc. In this embodiment, since the molecular pump 200 is cylindrical and it is difficult to distinguish the direction, a second positioning mark 172 is set on the tray 170 according to the first fastener of the base of the molecular pump 200. The molecular pump 200 is rotated according to the position of the second positioning mark 172 so that the first fastener is located within the range of the second positioning mark 172, and the directional positioning of the molecular pump 200 can be easily achieved, so as to reduce the subsequent repeated adjustment of the alignment of the molecular pump 200 and the mounting holes on the pressure controller 300.

[0041] In some possible embodiments, combined Figure 4 and Figure 7 , the top surface of the tray 170 is provided with a third positioning mark 173 for locating the exhaust pipe connection position of the molecular pump 200; and / or, the top surface of the tray 170 is provided with a fourth positioning mark 174 for locating the wire connection position of the molecular pump 200. In this embodiment, the exhaust pipe and the wire need to be connected to the opposite sides of the molecular pump 200, respectively, and the third positioning mark 173 and the fourth positioning mark 174 are respectively located on the opposite sides of the first positioning mark 171. According to the position of the third positioning mark 173 and the position of the fourth positioning mark 174, the molecular pump 200 is rotated and adjusted so that the exhaust pipe connection position on the side of the molecular pump 200 is aligned with the third positioning mark 173, and the wire connection position on the side of the molecular pump 200 is aligned with the fourth positioning mark 174, so as to improve the accuracy of the directional positioning of the molecular pump 200, thereby reducing the number and difficulty of later adjustments.

[0042] In yet another embodiment, in combination Figure 4 and Figure 7, the pressure controller 300 is provided with a plurality of first mounting holes, and the top of the molecular pump 200 is provided with a plurality of second mounting holes, and the second mounting holes are arranged in a one-to-one correspondence with the first mounting holes. The top surface of the support tray 170 is provided with a plurality of fifth positioning marks 175, and the fifth positioning marks 175 are arranged in a one-to-one correspondence with the first mounting holes. When the support tray 170 is folded, the corresponding fifth positioning marks 175 and the first mounting holes are aligned in the vertical direction, and the fifth positioning marks 175 are used to assist the second mounting holes to be aligned with the corresponding first mounting holes, and the second fasteners 210 are passed through the second mounting holes and the first mounting holes to install and fix the molecular pump 200 and the pressure controller 300. Specifically, the second fasteners 210 are bolts, screws, etc.

[0043] In this embodiment, when installing and connecting the molecular pump 200 and the pressure controller 300, the first mounting hole on the pressure controller 300 needs to be aligned one by one with the second mounting hole on the molecular pump 200. In the narrow installation space, the pressure controller 300 is located above the molecular pump 200 and the distance between the two is very close, so it is difficult to observe whether the first mounting hole and the second mounting hole are aligned one by one. Conventional operation is to repeatedly rotate and adjust the position of the molecular pump 200 after the molecular pump 200 and the pressure controller 300 are basically aligned to ensure that the holes are aligned one by one. The entire adjustment and alignment process is cumbersome and time-consuming. In this solution, by setting the fifth positioning mark 175 on the support tray 170, by checking whether the second mounting hole is aligned one by one with the fifth positioning mark 175, it can be determined whether the first mounting hole is aligned one by one with the second mounting hole. If there is a deviation, according to the position of the fifth positioning mark 175, the position of the molecular pump 200 can be fine-tuned to achieve one-to-one alignment of the holes, thereby greatly improving the adjustment efficiency of the hole alignment of the molecular pump 200 and the pressure controller 300.

[0044] In one embodiment, see Figure 3 The auxiliary device further includes a guide rail 130 disposed on the lifting plate 120 and arranged in the front-rear direction, and a tray 170 is slidably disposed on the guide rail 130. The tray 170 is disposed on the guide rail 130 in a sliding manner, and the guide rail 130 guides the tray 170 thereon. Under the action of an external force, the tray 170 can move on the guide rail 130 along the extension direction of the guide rail 130, while ensuring the stability of the movement of the tray 170 when the tray 170 is pushed or pulled. Specifically, the guide rail 130 and the tray 170 are made of steel.

[0045] In a preferred embodiment, see Figure 2, the guide rails 130 are a pair and are respectively located on both sides of the lifting plate 120, the guide rails 130 are in an inverted L shape, and a slide groove 140 is formed between the guide rails 130 and the lifting plate 120, and the two sides of the support tray 170 are respectively slidably arranged in the corresponding slide groove 140. In this embodiment, the guide rails 130 in an inverted L shape located on both sides of the lifting plate 120 can limit the support tray 170 in the left and right directions and the vertical direction, so that the support tray 170 can only move in the front and back directions. Under the action of external force, the support tray 170 is pulled out of the lifting plate 120 to realize the expansion of the support tray 170, or, under the action of external force, the support tray 170 is pushed into the lifting plate 120 to realize the folding of the support tray 170.

[0046] For details, see Figure 2 The guide rail 130 includes a side plate 131 and a top plate 132 vertically arranged on the top of the side plate 131. The side plates 131 of the pair of guide rails 130 play a role in limiting the supporting tray 170 in the left and right directions, and the top plate 132 of the guide rail 130 and the lifting plate 120 play a role in limiting the supporting tray 170 in the vertical direction.

[0047] In a specific embodiment, see Figure 2 , a guide wheel 150 is provided in the chute 140, and the wheel surface of the guide wheel 150 is in contact with the side of the tray 170. In this embodiment, the guide wheel 150 is used as a sliding component, and its wheel surface is in contact with the side of the tray 170. Compared with the tray 170 directly contacting the guide rail 130, the friction resistance can be significantly reduced, so that the tray 170 can slide more smoothly in the chute 140, avoiding the problem of pushing and pulling due to blockage. The guide wheel 150 also plays a role in protecting the guide rail 130 and the tray 170, avoiding wear and damage to the guide rail 130 and the tray 170 caused by direct friction and impact between the guide rail 130 and the tray 170.

[0048] For further information, see Figure 2 The auxiliary device further includes a support rod 160 vertically disposed on the lifting plate 120 and located in the slide groove 140, and the guide wheel 150 is rotatably sleeved on the support rod 160, and there is a gap between the guide wheel 150 and the lifting plate 120. In this embodiment, the guide wheel 150 is suspended in the slide groove 140 by the support rod 160, so as to avoid friction caused by contact between the guide wheel 150 and the lifting plate 120, reduce resistance, and enable the guide wheel 150 to rotate more smoothly. At the same time, it also avoids wear of the guide wheel 150 caused by contact between the guide wheel 150 and the lifting plate 120, and avoids affecting the service life of the guide wheel 150.

[0049] For further information, see Figure 5, there are at least two guide wheels 150 in each slide groove 140 and they are spaced apart along the extension direction of the slide groove 140. In this embodiment, the multiple guide wheels 150 are spaced apart along the extension direction of the slide groove 140, providing multi-point support for the tray 170, thereby forming a continuous guide path, which can more effectively guide the tray 170 to slide smoothly in the slide groove 140, reduce the deviation or shaking that may be caused by single-point support, ensure that the tray 170 slides along a predetermined track in the slide groove 140, and avoid the phenomenon that the tray 170 slides poorly or gets stuck due to the deviation or shaking of the tray 170, thereby improving the stability of pushing and pulling the tray 170.

[0050] In a specific embodiment, see Figure 1 , the auxiliary device also includes a plurality of legs 180 arranged on the bottom surface of the lifting plate 120, and the side opposite to the pressure controller 300 in the installation space is a storage surface, and the storage surface is provided with a plurality of sixth positioning marks or a plurality of positioning grooves for positioning the position of the legs 180, so that the auxiliary device is positioned at a preset position. In this embodiment, the design of the legs 180 provides an additional support point for the lifting plate 120, effectively enhancing the stability of the entire auxiliary device during operation. This stable support helps to prevent the auxiliary device from shaking due to external forces. The sixth positioning mark or positioning groove provided on the storage surface provides guidance for the installation of the legs 180. By aligning each leg 180 with the corresponding sixth positioning mark, or inserting each leg 180 into the corresponding positioning groove, each leg 180 can be quickly and accurately positioned to the predetermined position, and the positioning of the legs 180 is achieved to achieve the positioning of the auxiliary device in the horizontal direction.

[0051] For further information, see Figure 1 There are a plurality of legs 180 located at the edge of the lifting plate 120 , and the telescopic member 110 is located between the plurality of legs 180 .

[0052] The specific operation process of the auxiliary device for disassembling and assembling the molecular pump 200 of the dry etching equipment of the utility model is explained in detail below.

[0053] When installing the molecular pump 200, combine Figure 4 and Figure 7, place the molecular pump 200 on the tray 170 according to the first positioning mark 171 and within the range of the first positioning mark 171, rotate and adjust the direction of the molecular pump 200 according to the second positioning mark 172, the third positioning mark 173, and the fourth positioning mark 174, so that the first fastener of the molecular pump 200 base is within the range of the second positioning mark 172, the exhaust pipe connection position on the side of the molecular pump 200 is aligned with the third positioning mark 173, and the wire connection position on the side of the molecular pump 200 is aligned with the fourth positioning mark 174. Check whether the second mounting hole is aligned with the fifth positioning mark 175 one by one. If there is a deviation, fine-tune the position of the molecular pump 200 according to the position of the fifth positioning mark 175 to complete the position adjustment of the molecular pump 200. See Figure 5 By pushing the tray 170, the tray 170 with the molecular pump 200 placed thereon can be pushed into the installation space. The telescopic member 110 is activated to extend the telescopic member 110 so as to raise the molecular pump 200 placed on the tray 170 and fit it with the pressure controller 300. Figure 6 The second fastener 210 is passed through the second mounting hole and the first mounting hole to fix the molecular pump 200 and the pressure controller 300. The exhaust pipe, the wire and other pipelines are respectively connected to the corresponding interfaces on the molecular pump 200.

[0054] When disassembling the molecular pump 200, remove the exhaust pipe, wires and other pipes connected to the molecular pump 200, and remove the second fastener 210. Figure 8 , start the telescopic member 110 to shorten the telescopic member 110 so as to lower the molecular pump 200 placed on the support tray 170 and separate it from the pressure controller 300. Figure 7 By pulling the tray 170 , the tray 170 and the molecular pump 200 thereon can be pulled out of the installation space, and the molecular pump 200 can be moved out of the tray 170 .

[0055] The technical effect of the auxiliary device for disassembling and assembling the molecular pump of dry etching equipment of the present invention is explained below.

[0056] 1. The traditional disassembly and assembly method requires two people to lift the molecular pump 200 into a small space and manually adjust the height screws to ensure that it fits the pressure controller 300, which not only consumes manpower, but also increases the complexity and difficulty of the operation. The utility model can move the molecular pump 200 placed on the support tray 170 into or out of the installation space by pushing and pulling the support tray 170, without the need to lift the molecular pump 200 in a small space, which is more convenient and labor-saving. Through the automatic telescopic adjustment of the telescopic member 110, the height of the lifting plate 120 is adjusted by lifting and lowering, thereby achieving the height adjustment of the molecular pump 200, without the need to manually adjust and screw the screws one by one, which is easier and more labor-saving. No need for two people to work together, one person can complete the disassembly and assembly of the molecular pump 200, saving their working time and manpower, reducing the equipment recovery time, improving the equipment utilization rate, saving labor costs, and improving equipment production capacity.

[0057] 2. The traditional disassembly and assembly method raises the molecular pump 200 by adjusting the height adjustment screw at the bottom of the molecular pump 200. However, it is difficult to ensure that multiple height adjustment screws maintain the same height when manually adjusting the height adjustment screws, which causes the molecular pump 200 and the pressure controller 300 to not fit together and cause air leakage. The utility model adjusts multiple telescopic parts 110 to extend to the same length. Under the supporting effect of the telescopic parts 110, the molecular pump 200 can fit closely with the pressure controller 300, avoiding the risk of air leakage caused by loose fit, and ensuring the sealing of the installation between the molecular pump 200 and the pressure controller 300.

[0058] 3. According to the first positioning mark 171, place the molecular pump 200 within the range of the first positioning mark 171 to preliminarily position the molecular pump 200. Then, according to the second positioning mark 172, the third positioning mark 173, and the fourth positioning mark 174, rotate the molecular pump 200 so that the first fastener is located within the range of the second positioning mark 172, the exhaust pipe connection position on the side of the molecular pump 200 is aligned with the third positioning mark 173, and the wire connection position on the side of the molecular pump 200 is aligned with the fourth positioning mark 174. The direction of the molecular pump 200 is further adjusted from the bottom and opposite sides of the molecular pump 200. Then, if the second mounting hole cannot be aligned one-to-one with the fifth positioning mark 175 at this time, and there is a deviation, the position of the molecular pump 200 is fine-tuned according to the position of the fifth positioning mark 175. When the second mounting hole is aligned one-to-one with the fifth positioning mark 175, the second mounting hole is aligned one-to-one with the first mounting hole. Therefore, the molecular pump 200 can be quickly and accurately positioned and oriented according to these positioning marks, avoiding repeated position adjustment of the molecular pump 200 after the molecular pump 200 enters the installation space, which greatly shortens the installation time and improves the installation efficiency.

[0059] 4. By aligning each leg 180 with the corresponding sixth positioning mark, or inserting each leg 180 into the corresponding positioning groove, when the position of the leg 180 is correct, the position of the lifting plate 120 and the supporting plate 170 is correct, that is, the auxiliary device is positioned quickly and accurately, thereby ensuring the accuracy of the positioning of the molecular pump 200.

[0060] 5. Through the cooperation between the slide groove 140 and the guide rail 130 , and the cooperation between the guide groove 133 and the guide rail 130 , the support tray 170 can slide smoothly and steadily along the extension direction of the guide rail 130 .

[0061] Although the embodiments of the utility model are described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the utility model in the claims. Moreover, the utility model described herein may have other embodiments and may be implemented or realized in a variety of ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with ordinary skills in the field to which the utility model belongs. The words "including" and the like used herein mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

Claims

1. An auxiliary device for disassembling and assembling a molecular pump of a dry etching device, characterized in that: include: Telescopic parts, lifting plates, guide rails and supporting trays; The telescopic member is vertically placed in the installation space of the molecular pump in the dry etching equipment, and the telescopic member can be automatically telescoped and adjusted; The lifting plate is arranged on the telescopic member and is located below the pressure controller in the installation space; The tray is arranged on the lifting plate and can be moved and adjusted in the front-rear direction. The tray is used to place the molecular pump. The tray is pushed and pulled to push the tray into or pull it out of the installation space, thereby moving the molecular pump placed on the tray into or out of the installation space.

2. The auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to claim 1, characterized in that: The top surface of the tray is provided with a first positioning mark for locating the placement position of the molecular pump.

3. The auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to claim 1, characterized in that: The base of the molecular pump is provided with a first fastener; The top surface of the receiving tray is provided with a second positioning mark for locating the position of the first fastener.

4. The auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to claim 1, characterized in that: The top surface of the tray is provided with a third positioning mark for locating the exhaust pipe connection position of the molecular pump; and / or, A fourth positioning mark for locating a wire connection position of the molecular pump is provided on the top surface of the supporting tray.

5. The auxiliary device for disassembling and assembling a molecular pump of dry etching equipment according to claim 1, characterized in that: The pressure controller is provided with a plurality of first mounting holes, and the top of the molecular pump is provided with a plurality of second mounting holes, and the second mounting holes are arranged in a one-to-one correspondence with the first mounting holes; A plurality of fifth positioning marks are provided on the top surface of the tray, and the fifth positioning marks are arranged in one-to-one correspondence with the first mounting holes. When the tray is folded, the corresponding fifth positioning marks are aligned with the first mounting holes in the vertical direction. The fifth positioning marks are used to assist in aligning the second mounting holes with the corresponding first mounting holes. A second fastener is passed through the second mounting holes and the first mounting holes to install and fix the molecular pump and the pressure controller.

6. The auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to claim 1, characterized in that: It also includes a guide rail which is arranged on the lifting plate and along the front-rear direction, and the supporting tray is slidably arranged on the guide rail.

7. The auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to claim 6, characterized in that: The guide rails are a pair and are respectively located on both sides of the lifting plate. The guide rails are in an inverted L shape. A slide groove is formed between the guide rails and the lifting plate. The two sides of the supporting tray are respectively slidably arranged in the corresponding slide grooves.

8. The auxiliary device for disassembling and assembling a molecular pump of dry etching equipment according to claim 7, characterized in that: A guide wheel is arranged in the slide groove, and a wheel surface of the guide wheel is in contact with the side of the supporting tray.

9. The auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to claim 8, characterized in that: It also includes a support rod which is vertically arranged on the lifting plate and located in the sliding groove. The guide wheel is rotatably sleeved on the support rod, and there is a gap between the guide wheel and the lifting plate.

10. The auxiliary device for disassembling and assembling a molecular pump of a dry etching device according to any one of claims 1 to 9, characterized in that: It also includes a plurality of legs arranged on the bottom surface of the lifting plate; A surface opposite to the pressure controller in the installation space is a storage surface, and the storage surface is provided with a plurality of sixth positioning marks or a plurality of positioning grooves for positioning the position of the supporting legs, so that the auxiliary device is positioned at a preset position.

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