Measuring head rod fixing tool

Abstract

The utility model discloses a measuring head rod fixing tool. Comprising a base and an insert, the two inserts are oppositely arranged, and the two inserts are arranged on the base in an opening and closing mode; each insert comprises a seat body and a clamping part, the seat bodies are arranged on the base, the clamping parts are arranged on the seat bodies, and the clamping parts of the two inserts are oppositely arranged; a circumferential fixing block and a height positioning block are arranged on the outer side face of the clamping part, the circumferential fixing block is located above the height positioning block, the circumferential fixing block corresponds to an upper machining part of the measuring head rod, and the height positioning block positions the mounting position of the measuring head rod in the height direction; one circumferential fixing block and the height positioning block below the circumferential fixing block form a clamping and fixing unit, the two opposite clamping and fixing units on the two inserts form a group, and a gap between one group of clamping and fixing units forms a clamping and fixing station. According to the utility model, the mounting position of the measuring head rod is ensured, the fixing stability of the measuring head rod during processing is ensured, the processing error is reduced, and the processing precision is improved.

Description

Technical Field:

[0001] The utility model belongs to the technical field of semiconductor automatic processing equipment part processing, and particularly relates to a probe rod fixing tooling. Background Art:

[0002] The probe rod is an important component of semiconductor automatic processing equipment and is used to detect the parts processed by the equipment. During the production process of the probe rod, the processing accuracy requirements of the product are relatively high. Since the probe rod is a special-shaped part, how to ensure stable fixation during the processing of the probe rod and reduce the processing error is a problem to be solved.

[0003] The information disclosed in this background art section is only intended to enhance the overall understanding of the utility model and should not be regarded as an admission or any form of suggestion that this information constitutes prior art already known to those of ordinary skill in the art. Summary of the Utility Model:

[0004] The purpose of the utility model is to provide a probe rod fixing tooling, thereby overcoming the defects in the above-mentioned prior art.

[0005] To achieve the above purpose, the utility model provides a probe rod fixing tooling, which includes a base and inserts; the two inserts are arranged oppositely, and the two inserts are arranged on the base in an openable and closable manner; each insert includes a seat body and a clamping part, the seat body is arranged on the base, the clamping part is arranged on the seat body, and the clamping parts of the two inserts are arranged oppositely; circumferential fixing blocks and height positioning blocks are arranged on the outer side surfaces of the clamping parts, the circumferential fixing blocks are located above the height positioning blocks, the circumferential fixing blocks correspond to the upper part processing positions of the probe rod, and the height positioning blocks position the installation positions of the probe rod in the height direction; one circumferential fixing block and the height positioning block below it form a clamping and fixing unit, and the two opposite clamping and fixing units on the two inserts form a group, and the gap between a group of clamping and fixing units forms a clamping and fixing station; through the cooperation of the circumferential fixing blocks and height positioning blocks of the two inserts, the accuracy of the installation position of the probe rod and the stability of fixation are ensured.

[0006] Preferably, in the technical solution, the circumferential fixing block is of a cuboid structure, the outer side surface of the circumferential fixing block is used as a fixing surface, the fixing surface is of an arc-shaped groove structure, and the size of the fixing surface is matched with the upper part structure of the probe rod; the fixing surfaces of the two inserts cover the surfaces of the upper part of the probe rod except for the processing positions, preventing the probe rod from vibrating during the flat position processing of the upper part of the probe rod.

[0007] Preferably, in the technical solution, the height positioning block has a cube structure. The outer side surface of the height positioning block serves as the positioning surface, and an inverted T-shaped positioning groove is provided on the positioning surface. The width of the longitudinal groove of the T-shaped positioning groove is adapted to the width of the lower structure of the probe rod, and the height from the bottom surface of the transverse groove of the T-shaped positioning groove to the top of the clamping and fixing station is adapted to the probe rod. The top end of the probe rod protrudes from the clamping and fixing station to position the installation position of the probe rod in the height direction.

[0008] Preferably, in the technical solution, nine clamping and fixing stations are provided on the insert block, and nine probe rods can be clamped and processed each time, greatly improving the processing efficiency.

[0009] Preferably, in the technical solution, the base has a vise structure. One insert block is fixed at one end of the base, and the other insert block is movably arranged on the base, and the opening and closing between the two insert blocks is realized through the vise structure.

[0010] Compared with the prior art, the present utility model has the following beneficial effects:

[0011] Through a set of clamping and fixing units, the positioning, installation and fixing of the probe rod with a special-shaped structure can be realized, ensuring the installation position of the probe rod, ensuring the stability of the fixing during the processing of the probe rod, reducing the processing error and improving the processing accuracy. Nine probe rods can be clamped each time, greatly shortening the clamping time and improving the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS:

[0012] Figure 1 It is a schematic structural diagram of the probe rod fixing tooling of the present utility model;

[0013] Figure 2 It is a schematic structural diagram of the insert block of the present utility model;

[0014] Figure 3 It is a schematic structural diagram of the clamping and fixing unit of the present utility model. DETAILED DESCRIPTION OF THE INVENTION:

[0015] The following is a detailed description of the specific implementation manners of the present utility model, but it should be understood that the protection scope of the present utility model is not limited by the specific implementation manners.

[0016] Unless otherwise clearly stated, in the whole specification and claims, the term "comprise" or its variations such as "comprises" or "including" etc. will be understood to include the stated elements or components, without excluding other elements or other components.

[0017] Such as Figures 1-3As shown in the figure, a fixture for fixing a probe rod includes a base 1 and inserts 2. The two inserts 2 are arranged opposite to each other. The base 1 is a vise structure. One insert 2 is fixed at one end of the base 1, and the other insert 2 is movably arranged on the base 1. The opening and closing between the two inserts 2 are realized through the vise structure. The insert 2 includes a seat body 3 and a clamping part 4. The seat body 3 is arranged on the base 1, and the clamping part 4 is arranged on the seat body 3. The clamping parts 4 of the two inserts 2 are arranged opposite to each other. On the outer side surface of the clamping part 4, there are circumferential fixing blocks 5 and height positioning blocks 6. The circumferential fixing block 5 is located above the height positioning block 6. The circumferential fixing block 5 corresponds to the upper processing part of the probe rod 7, and the height positioning block 6 positions the installation position of the probe rod 7 in the height direction. One circumferential fixing block 5 and the height positioning block 6 below it form a clamping and fixing unit. The two opposite clamping and fixing units on the two inserts 2 form a group, and the gap between a group of clamping and fixing units forms a clamping and fixing station. There are nine clamping and fixing stations on the insert 2. Nine probe rods 7 can be clamped and processed each time, greatly improving the processing efficiency.

[0018] The circumferential fixing block 5 is of a cuboid structure. The outer side surface of the circumferential fixing block 5 is used as a fixing surface 8, and the fixing surface 8 is of an arc-shaped groove structure. The size of the fixing surface 8 is matched with the upper structure of the probe rod 7. The fixing surfaces 8 of the two inserts 2 cover the surface of the upper part of the probe rod 7 except for the processing part, preventing the upper part of the probe rod 7 from vibrating during the flat position processing.

[0019] The height positioning block 6 is of a cube structure. The outer side surface of the height positioning block 6 is used as a positioning surface. An inverted T-shaped positioning groove 9 is arranged on the positioning surface. The width of the longitudinal groove of the T-shaped positioning groove 9 is adapted to the width of the lower structure of the probe rod 7. The height from the bottom surface of the transverse groove of the T-shaped positioning groove 9 to the top of the clamping and fixing station is adapted to the probe rod 7. The top end of the probe rod 7 protrudes from the clamping and fixing station, positioning the installation position of the probe rod 7 in the height direction.

[0020] During use, the operator puts nine probe rods 7 into the nine clamping and fixing stations at one time, operates the vise, makes the two inserts 2 gradually approach each other, the gap between the inserts 2 gradually decreases, the fixing surfaces 8 of the two inserts 2 gradually cover the upper part of the probe rod 7, and the T-shaped positioning grooves 9 on the positioning surfaces of the two inserts 2 gradually cover the lower part of the probe rod 7. Through the cooperation of the circumferential fixing blocks 5 and height positioning blocks 6 of the two inserts 2, the accuracy of the installation position of the probe rod 7 and the stability of the fixation during the processing of the probe rod are ensured. After the clamping and fixing station completes the fixation of the probe rod 7, the flat position processing is carried out on the upper processing part of the probe rod 7, reducing the processing error and improving the processing accuracy.

[0021] The foregoing description of specific exemplary embodiments of the present invention is for purposes of illustration and exemplification. These descriptions are not intended to limit the present invention to the precise forms disclosed, and it is apparent that many modifications and variations are possible in light of the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical applications, so that those skilled in the art can implement and utilize the various different exemplary embodiments of the present invention, as well as various different selections and modifications. The scope of the present invention is intended to be defined by the claims and their equivalents.

Claims

1. A probe rod fixing tool, characterized in that: It includes a base and an insert; two inserts are arranged opposite to each other, and the two inserts can be arranged on the base in an openable and closable manner; the insert includes a seat body and a clamping part, the seat body is arranged on the base, and the seat body is provided with a clamping part, and the clamping parts of the two inserts are arranged opposite to each other; a circumferential fixing block and a height positioning block are arranged on the outer side of the clamping part, the circumferential fixing block is located above the height positioning block, the circumferential fixing block corresponds to the upper processing part of the probe rod, and the height positioning block locates the installation position of the probe rod in the height direction; a circumferential fixing block and the height positioning block below it form a clamping and fixing unit, two opposite clamping and fixing units on the two inserts form a group, and the gap between a group of clamping and fixing units forms a clamping and fixing station.

2. The probe rod fixing fixture according to claim 1, characterized in that: The circumferential fixing block is a rectangular parallelepiped structure, and the outer side surface of the circumferential fixing block serves as a fixing surface. The fixing surface is an arc-shaped groove structure, and the size of the fixing surface matches the upper structure of the probe rod. The fixing surfaces of the two inserts cover the surface of the upper part of the probe rod except the processed part.

3. The probe rod fixing fixture according to claim 2, characterized in that: The height positioning block is a cubic structure, and the outer side surface of the height positioning block serves as the positioning surface. An inverted T-shaped positioning slot is provided on the positioning surface. The width of the longitudinal slot of the T-shaped positioning slot is adapted to the width of the lower structure of the probe rod. The height from the bottom surface of the transverse slot of the T-shaped positioning slot to the top of the clamping and fixing station is adapted to the probe rod. The top end of the probe rod protrudes from the clamping and fixing station to locate the installation position of the probe rod in the height direction.

4. The probe rod fixing fixture according to claim 1, characterized in that: Nine clamping and fixing stations are arranged on the insert.

5. The probe rod fixing tool according to claim 1, characterized in that: The base is a vise structure, one insert is fixed at one end of the base, and the other insert is movably arranged on the base.

Images