Probe row adjusting mechanism and testing device

By designing a probe row adjustment mechanism including a base, a mobile platform and a rotating platform, the problem of cumbersome position adjustment of the probe row is solved, convenient and efficient position adjustment is achieved, and testing efficiency is improved.

CN222965295UActive Publication Date: 2025-06-10TONGWEI SOLAR ENERGY (CHENGDU) CO LID
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Patent Information

Application Number
CN202421544723.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-02
Publication Date
2025-06-10
Estimated Expiration
2034-07-02

AI Technical Summary

Technical Problem

In the prior art, the position adjustment of the probe row is complicated and requires multiple adjustments and verifications. It takes a long time and is difficult to observe, which affects the testing efficiency.

Method used

A probe row adjustment mechanism is designed, including a base, a first moving platform, a second moving platform and a rotating platform. Through the movement and rotation of these platforms, the position of the probe row can be adjusted in the Y-axis, X-axis and Z-axis directions to ensure that the probe is aligned with the electrode on the back of the battery cell.

Benefits of technology

It realizes the convenience and quickness of probe position adjustment, saves downtime of the test device, improves testing efficiency, and reduces the time and energy of manual adjustment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a probe row adjusting mechanism and a testing device. The probe row adjusting mechanism comprises a base, a first moving platform, a second moving platform and a rotating platform. Wherein the first moving platform is movably arranged on the base, and the first moving platform can move relative to the base in the Y-axis direction. The second moving platform is movably arranged on the first moving platform, and the second moving platform can move in the X-axis direction relative to the first moving platform. The rotating platform is rotatably arranged on the second moving platform, the rotating platform can rotate around the Z-axis direction relative to the second moving platform, and the rotating platform is used for bearing the probe row; wherein the Y-axis direction, the X-axis direction and the Z-axis direction are perpendicular to one another, the probe row adjusting mechanism can adjust the positions of the probe row in the Y-axis direction, the X-axis direction and the circumferential direction around the Z-axis direction at a time under the condition that a battery piece is placed once, adjustment is more convenient and faster, the downtime of the testing device is saved, and the testing efficiency is improved.
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Description

Technical Field

[0001] The present application relates to the technical field of solar cell testing equipment, and particularly relates to a probe row adjusting mechanism and a testing device. Background Art

[0002] With the continuous development of the photovoltaic industry, the market has put forward higher requirements for the quality and conversion efficiency of solar cells. After the solar cell wafers are manufactured, they need to be tested. During the test, the wafers need to be placed on the testing equipment, with the front side of the wafers facing up for strong light irradiation, and the back side of the wafers will contact the probe row on the testing equipment to energize the entire wafer.

[0003] After the testing equipment has been used for a long time, the probe row needs to be replaced. When replacing the probe row, the position of the probe row needs to be readjusted to ensure that the probes on the probe row are aligned with the back electrodes of the wafers one by one. If the probes are not aligned with the back electrodes of the wafers, problems such as poor testing and abnormal EL imaging will occur. However, in the related art, the adjustment of the position of the probe row is relatively cumbersome. After each adjustment of the position of the probe row, the wafer needs to be placed on the testing device again to verify the adjustment result. If it is not aligned, the position of the probe row needs to be readjusted and the wafer needs to be placed again for verification until the probes are aligned with the back electrodes of the wafers. Moreover, since the probe row is below the wafer, it is difficult to observe, and a large amount of time and effort are required for adjustment. Summary of the Utility Model

[0004] Based on this, it is necessary to provide a probe row adjusting mechanism and a testing device for the problem of how to more conveniently and quickly adjust the position of the probe row.

[0005] On the one hand, the present application provides a probe row adjusting mechanism, including:

[0006] A base;

[0007] A first moving platform, which is movably arranged on the base, and the first moving platform can move relative to the base along the Y-axis direction;

[0008] A second moving platform, which is movably arranged on the first moving platform, and the second moving platform can move relative to the first moving platform along the X-axis direction;

[0009] A rotating platform, which is rotatably arranged on the second moving platform, and the rotating platform can rotate relative to the second moving platform around the Z-axis direction. The rotating platform is used to carry the probe row; wherein the Y-axis direction, the X-axis direction and the Z-axis direction are perpendicularly arranged to each other.

[0010] The technical solution is further described below:

[0011] In one embodiment, the probe row adjusting mechanism further includes:

[0012] A first driving member, which is disposed on the base and connected to the first moving platform, and is configured to drive the first moving platform to move along the Y-axis direction;

[0013] A second driving member, which is disposed on the first moving platform and connected to the second moving platform, and is configured to drive the second moving platform to move along the X-axis direction;

[0014] A rotation driving assembly, which is disposed on the second moving platform and connected to the rotating platform, and is configured to drive the rotating platform to rotate about the Z-axis direction.

[0015] In one embodiment, the base is convexly provided with a first convex portion, the first convex portion is provided with a first through hole penetrating along the Y-axis direction, the first driving member includes a first screw rod, the first screw rod is disposed through the first through hole, and one end of the first screw rod is threadedly connected to the first moving platform.

[0016] In one embodiment, the first moving platform is convexly provided with a second convex portion, the second convex portion is provided with a second through hole penetrating along the X-axis direction, the second driving member includes a second screw rod, the second screw rod is disposed through the second through hole, and one end of the second screw rod is threadedly connected to the second moving platform.

[0017] In one embodiment, the rotation driving assembly includes:

[0018] A worm gear, which is rotatably disposed on the second moving platform and connected to the rotating platform;

[0019] A worm, which is meshed and cooperated with the worm gear.

[0020] In one embodiment, the second moving platform is convexly provided with two third convex portions at intervals, each of the third convex portions is provided with a third through hole, and both ends of the worm are respectively rotatably disposed through the two third through holes.

[0021] In one embodiment, a first guide rail is disposed on the base, the first guide rail extends along the Y-axis direction, and the first moving platform is connected to the first guide rail and can move along the first guide rail.

[0022] In one embodiment, a second guide rail is provided on the first moving platform. The second guide rail extends along the X-axis direction. The second moving platform is connected to the second guide rail and can move along the second guide rail.

[0023] In one embodiment, the number of the first guide rails is at least two, and the first guide rails are arranged at intervals along the X-axis direction. The first moving platform is connected to all the first guide rails; and / or,

[0024] the number of the second guide rails is at least two, and the second guide rails are arranged at intervals along the Y-axis direction. The second moving platform is connected to all the second guide rails.

[0025] On the other hand, the present application further provides a testing device, including a probe row and the above-mentioned probe row adjusting mechanism. The probe row is detachably arranged on the rotating platform.

[0026] In the above-mentioned probe row adjusting mechanism and the testing device, the position of the probe row in the Y-axis direction can be adjusted through the first moving platform, the position of the probe row in the X-axis direction can be adjusted through the second moving platform, and the position of the probe row in the circumferential direction around the Z-axis can be adjusted through the rotating platform. In this way, the position of the probe row in the Y-axis direction, the X-axis direction, and the circumferential direction around the Z-axis can be adjusted at one time when the battery cell is placed once, so as to ensure that the probes on the probe row accurately align with the back electrode of the battery cell, without repeatedly adjusting the position of the probe row through the parameters of the testing device, making the position adjustment of the probe row more convenient and fast, saving the downtime of the testing device, and improving the testing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application.

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0029] In addition, the drawings are not drawn to a scale of 1:1, and the relative sizes of the respective elements are only schematically drawn in the drawings and not necessarily drawn according to the actual scale. In the drawings:

[0030] Figure 1 It is a schematic structural diagram of a probe row adjusting mechanism according to an embodiment.

[0031] Figure 2 For Figure 1 the structural explosion diagram of the probe row adjusting mechanism shown in Figure 1 .

[0032] Figure 3 For Figure 1 the structural explosion diagram of the probe row adjusting mechanism shown in Figure 2 .

[0033] Figure 4 For Figure 1 the schematic structural diagram of the probe row adjusting mechanism shown in another perspective.

[0034] Description of the reference numerals:

[0035] 10. Base; 11. First convex part; 12. First guide rail; 13. First screw; 20. First moving platform; 21. Second convex part; 22. Second guide rail; 23. Second screw; 30. Second moving platform; 31. Third convex part; 32. Rotary driving part; 321. Worm gear; 322. Worm; 40. Rotary platform; 50. Probe row; 60. Battery slice. Detailed implementation manners

[0036] To make the above objects, features, and advantages of the present application more obvious and understandable, the following will describe the detailed implementation manners of the present application with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0037] In the description of the present application, it should be understood that if there appear these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0038] In addition, if the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0039] In this application, unless otherwise clearly specified and defined, if terms such as "installed", "connected", "joined", "fixed", etc. appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the connection inside two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] In this application, unless otherwise clearly specified and defined, if there is a description such as a first feature being "on" or "under" a second feature, the meaning can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on top of" the second feature can mean that the first feature is directly above or obliquely above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. The first feature being "under", "beneath", and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0041] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there can also be an intermediate element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. If so, the terms "vertical", "horizontal", "up", "down", "left", "right", and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation.

[0042] As mentioned above, in traditional test equipment, the adjustment of the probe row 50 is relatively cumbersome. Specifically, the probe row 50 is currently fixed on the motion mechanism of the test equipment. To adjust the position of the probe row 50, the position of the probe row 50 can only be adjusted little by little by adjusting the corresponding parameters of the test equipment. This small amount and multiple adjustments are time-consuming and require the test equipment to be shut down for a long time. After each adjustment of the position of the probe row 50, the battery cell needs to be re-placed on the probe row 50 to verify the adjustment result. If the alignment criteria are not met, the probe needs to be readjusted and re-verified until the probe is aligned with the back electrode of the battery cell, which is cumbersome to operate. And because the probe row 50 is below the battery cell, it is difficult to observe and requires a lot of time and energy to adjust.

[0043] Based on this, an embodiment of the present application provides a probe row adjustment mechanism, specifically, see Figure 1 as well as Figure 2 , a probe row adjustment mechanism of an embodiment includes a base 10, a first movable platform 20, a second movable platform 30 and a rotating platform 40. The first movable platform 20 is movably arranged on the base 10, and the first movable platform 20 can move relative to the base 10 along the Y-axis direction. The second movable platform 30 is movably arranged on the first movable platform 20, and the second movable platform 30 can move relative to the first movable platform 20 along the X-axis direction. The rotating platform 40 is rotatably arranged on the second movable platform 30, and the rotating platform 40 can rotate around the Z-axis direction relative to the second movable platform 30, and the rotating platform 40 is used to carry the probe row 50; wherein the Y-axis direction, the X-axis direction and the Z-axis direction are arranged perpendicular to each other. It can be understood that the Y-axis direction, the X-axis direction and the Z-axis direction can be any three mutually perpendicular directions, and there is no limitation here.

[0044] In the above-mentioned probe row adjustment mechanism, the position of the probe row 50 in the Y-axis direction can be adjusted by the first movable platform 20, the position of the probe row 50 in the X-axis direction can be adjusted by the second movable platform 30, and the position of the probe row 50 in the circumferential direction around the Z-axis can be adjusted by the rotating platform 40. In this way, the position of the probe row 50 in the Y-axis direction, the X-axis direction and the circumferential direction around the Z-axis direction can be adjusted at one time when the battery cell is placed once, so as to ensure that the probes on the probe row 50 are accurately aligned with the back electrode of the battery cell, and there is no need to repeatedly adjust the position of the probe row 50 through the parameters of the test device, which makes the position adjustment of the probe row 50 more convenient and quick, saves the downtime of the test device, and improves the test efficiency.

[0045] Optionally, in one embodiment, the probe row adjusting mechanism further includes a first driving member, a second driving member, and a rotation driving assembly. The first driving member is disposed on the base 10 and connected to the first moving platform 20. The first driving member is used to drive the first moving platform 20 to move along the Y-axis direction. The second driving member is disposed on the first moving platform 20 and connected to the second moving platform 30. The second driving member is used to drive the second moving platform 30 to move along the X-axis direction. The rotation driving assembly is disposed on the second moving platform 30 and connected to the rotating platform 40. The rotation driving assembly is used to drive the rotating platform 40 to rotate about the Z-axis direction. In this way, by using the first driving member to drive the first moving platform 20 to move along the Y-axis direction, using the second driving member to drive the second moving platform 30 to move along the X-axis direction, and then using the rotation driving assembly to drive the rotating platform 40 to rotate about the Z-axis direction, the position of the probe row 50 can be adjusted more conveniently and labor-savingly. Understandably, in other embodiments, the first moving platform 20 and the second moving platform 30 can also be manually driven to move, and the rotating platform 40 can also be manually driven to rotate, thereby omitting the first driving member, the second driving member, and the rotation driving assembly.

[0046] See Figure 3 , in one embodiment, the base 10 is convexly provided with a first convex portion 11. The first convex portion 11 is provided with a first through hole penetrating along the Y-axis direction. The first driving member includes a first screw rod 13. The first screw rod 13 is disposed in the first through hole, and one end of the first screw rod 13 is threadedly connected to the first moving platform 20. In this way, by rotating the first screw rod 13 in different directions, the first moving platform 20 can be driven to move along the positive Y-axis direction or the negative Y-axis direction, thereby realizing the adjustment of the position of the first moving platform 20 in the Y-axis direction. And when the first screw rod 13 rotates one circle, the first moving platform 20 moves a distance of one pitch on the first screw rod 13, and the adjustment accuracy is high. Understandably, in other embodiments, the first driving member can also be a cylinder or an electric push rod, etc., so that the first moving platform 20 can also be driven to move along the Y-axis direction.

[0047] Similarly, see Figure 4 , in one embodiment, the base 10 is convexly provided with a second convex portion 21. The second convex portion 21 is provided with a second through hole penetrating along the X-axis direction. The second driving member includes a second screw rod 23. The second screw rod 23 is disposed in the second through hole, and one end of the second screw rod 23 is threadedly connected to the second moving platform 30. In this way, by rotating the second screw rod 23 in different directions, the second moving platform 30 can be driven to move along the positive X-axis direction or the negative X-axis direction, thereby realizing the adjustment of the position of the second moving platform 30 in the X-axis direction. And when the second screw rod 23 rotates one circle, the second moving platform 30 moves a distance of one pitch on the second screw rod 23, and the adjustment accuracy is high. Understandably, in other embodiments, the second driving member can also be a cylinder or an electric push rod, etc., so that the second moving platform 30 can also be driven to move along the X-axis direction.

[0048] See Figure 3 Figure 3 , optionally, in one embodiment, the rotation drive assembly includes a worm gear 321 and a worm 322. Among them, the worm gear 321 is rotatably arranged on the second moving platform 30 and connected to the rotating platform 40. For example, the worm gear 321 can be installed on the second moving platform 30 through a bearing and the worm gear 321 is fixedly connected to the rotating platform 40 to ensure that the rotating platform 40 rotates synchronously with the worm gear 321. The worm 322 is meshed with the worm gear 321. In this way, by rotating the worm 322, the worm gear 321 can be driven to rotate, and then the rotating platform 40 can be driven to rotate around the Z-axis direction. It can be understood that in other embodiments, the rotation drive assembly can also be a motor, and the motor can also be used to drive the rotating platform 40 to rotate around the Z-axis direction.

[0049] Further, two third protrusions 31 are convexly provided on the second moving platform 30 at intervals. Each third protrusion 31 is provided with a third through hole, and both ends of the worm 322 are rotatably passed through the two third through holes respectively, so as to support the worm 322 to maintain the meshing state between the worm 322 and the worm gear 321.

[0050] See Figure 3 Figure 3 , optionally, in one embodiment, a first guide rail 12 is provided on the base 10. The first guide rail 12 extends along the Y-axis direction. The first moving platform 20 is connected to the first guide rail 12 and can move along the first guide rail 12. Through the guiding action of the first guide rail 12, the moving stability of the first moving platform 20 can be improved. Specifically, a chute is provided on one side of the first moving platform 20 close to the base 10, and the first guide rail 12 is arranged in the chute, so as to improve the connection stability between the first moving platform 20 and the first guide rail 12, and at the same time, the overall height of the probe row adjusting mechanism can be effectively reduced. It can be understood that in other embodiments, the first moving platform 20 can also be connected to the first guide rail 12 through a slider.

[0051] Further, the number of the first guide rails 12 is at least two, such as two, three, four, five or more. The first guide rails 12 are arranged at intervals along the X-axis direction, and the first moving platform 20 is connected to all the first guide rails 12, so that the moving stability of the first moving platform 20 can be further improved, and the accuracy of the position adjustment of the probe row 50 can be improved.

[0052] See Figure 4, optionally, in one embodiment, a second guide rail 22 is provided on the first mobile platform 20. The second guide rail 22 extends along the X-axis direction. The second mobile platform 30 is connected to the second guide rail 22 and can move along the second guide rail 22. Through the guiding action of the second guide rail 22, the moving stability of the second mobile platform 30 can be improved. Specifically, a chute may also be provided on the side of the second mobile platform 30 close to the first mobile platform 20, and the second guide rail 22 is arranged in the chute, thereby improving the connection stability between the second mobile platform 30 and the second guide rail 22, and at the same time effectively reducing the overall height of the probe row adjusting mechanism. It can be understood that in other embodiments, the second mobile platform 30 may also be connected to the second guide rail 22 through a slider.

[0053] Furthermore, the number of the second guide rails 22 is at least two, such as two, three, four, five or more. Each second guide rail 22 is arranged at intervals along the X-axis direction, and the first mobile platform 20 is connected to all the first guide rails 12. In this way, the movement stability of the first mobile platform 20 can be further improved, and then the accuracy of adjusting the position of the probe row 50 can be improved.

[0054] On the other hand, an embodiment of the present application also provides a testing device for testing a battery cell. Specifically, the testing device of an embodiment includes a probe row 50 and the probe row adjusting mechanism of any of the above embodiments. The probe row 50 is detachably arranged on the rotating platform 40.

[0055] In the above testing device, the position of the probe row 50 in the Y-axis direction can be adjusted through the first mobile platform 20, the position of the probe row 50 in the X-axis direction can be adjusted through the second mobile platform 30, and the position of the probe row 50 in the circumferential direction around the Z-axis can be adjusted through the rotating platform 40. In this way, the position of the probe row 50 in the Y-axis direction, X-axis direction and circumferential direction around the Z-axis can be adjusted at one time when the battery cell is placed once, so as to ensure that the probes on the probe row 50 accurately align with the back electrode of the battery cell. There is no need to repeatedly adjust the position of the probe row 50 through the parameters of the testing device, which makes the position adjustment of the probe row 50 more convenient and fast, saves the downtime of the testing device, and improves the testing efficiency.

[0056] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0057] The above-described embodiments merely represent several implementation manners of the present application. The description thereof is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patented application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A probe row adjustment mechanism, characterized in that: include: Base (10); A first movable platform (20), the first movable platform (20) being movably arranged on the base (10), and the first movable platform (20) being movable along the Y-axis direction relative to the base (10); a second mobile platform (30), the second mobile platform (30) being movably arranged on the first mobile platform (20), and the second mobile platform (30) being movable along an X-axis direction relative to the first mobile platform (20); as well as, A rotating platform (40) is rotatably arranged on the second movable platform (30), and the rotating platform (40) can rotate around the Z-axis direction relative to the second movable platform (30). The rotating platform (40) is used to carry the probe row (50); wherein the Y-axis direction, the X-axis direction and the Z-axis direction are arranged perpendicular to each other.

2. The probe row adjustment mechanism according to claim 1, characterized in that: The probe row adjustment mechanism also includes: a first driving member, the first driving member being arranged on the base (10) and connected to the first movable platform (20), the first driving member being used for driving the first movable platform (20) to move along the Y-axis direction; a second driving member, the second driving member being arranged on the first movable platform (20) and connected to the second movable platform (30), the second driving member being used for driving the second movable platform (30) to move along the X-axis direction; and A rotation drive component is arranged on the second movable platform (30) and connected to the rotating platform (40), and the rotation drive component is used to drive the rotating platform (40) to rotate around the Z-axis direction.

3. The probe row adjustment mechanism according to claim 2, characterized in that: The base (10) is provided with a first protruding portion (11), and the first protruding portion (11) is provided with a first through hole extending along the Y-axis direction. The first driving member comprises a first screw rod (13), and the first screw rod (13) is passed through the first through hole, and one end of the first screw rod (13) is threadedly connected to the first moving platform (20).

4. The probe row adjustment mechanism according to claim 2, characterized in that: The first movable platform (20) is provided with a second protruding portion (21), and the second protruding portion (21) is provided with a second through hole extending along the X-axis direction. The second driving member comprises a second screw rod (23), and the second screw rod (23) is passed through the second through hole, and one end of the second screw rod (23) is threadedly connected to the second movable platform (30).

5. The probe row adjustment mechanism according to claim 2, characterized in that: The rotary drive assembly comprises: a worm gear (321), the worm gear (321) being rotatably disposed on the second movable platform (30) and connected to the rotating platform (40); A worm (322), wherein the worm (322) is meshed with the worm wheel (321).

6. The probe row adjustment mechanism according to claim 5, characterized in that: The second movable platform (30) is provided with two third protrusions (31) at intervals, each of the third protrusions (31) is provided with a third through hole, and the two ends of the worm (322) are respectively rotatably inserted into the two third through holes.

7. The probe row adjustment mechanism according to claim 1, characterized in that: The base (10) is provided with a first guide rail (12), the first guide rail (12) extends along the Y-axis direction, and the first movable platform (20) is connected to the first guide rail (12) and can move along the first guide rail (12).

8. The probe row adjustment mechanism according to claim 7, characterized in that: A second guide rail (22) is provided on the first movable platform (20), the second guide rail (22) extends along the X-axis direction, and the second movable platform (30) is connected to the second guide rail (22) and can move along the second guide rail (22).

9. The probe row adjustment mechanism according to claim 8, characterized in that: The number of the first guide rails (12) is at least two, the first guide rails (12) are arranged at intervals along the X-axis direction, and the first movable platform (20) is connected to all the first guide rails (12); and / or, The number of the second guide rails (22) is at least two, and the second guide rails (22) are arranged at intervals along the Y-axis direction, and the second movable platform (30) is connected to all the second guide rails (22).

10. A testing device, characterized in that: It comprises a probe row (50) and the probe row adjustment mechanism according to any one of claims 1 to 9, wherein the probe row (50) is detachably arranged on the rotating platform (40).