Multifunctional scanning electron microscope sample table

Abstract

The utility model relates to a multifunctional scanning electron microscope sample table, which comprises a sample table body and an electron gun arranged on the sample table body, the upper end of the sample table body is in transition connection with a first horizontal part, an inclined part and a second horizontal part in sequence along the horizontal direction, the inclined part is arranged obliquely downwards, and the second horizontal part is arranged obliquely downwards. The tail end of the first horizontal part is connected with the head end of the inclined part, and the head end of the second horizontal part is connected with the tail end of the inclined part; the utility model solves the technical problems that the quantity of samples which can be placed at one time is limited, and the state of the samples is also limited, that is to say, solid sample blocks and powder samples are not prepared on a sample table base at the same time as much as possible, and the risk of touching an electronic gun is possibly caused if the sample table is moved.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning electron microscope sample stages, in particular to a multifunctional scanning electron microscope sample stage. Background Art

[0002] The scanning electron microscope sample stage base can generally hold 9 single sample stages. Each single sample stage can only prepare one sample, and when preparing samples, care must be taken to ensure that the height of the prepared samples is consistent to prevent the electron gun from touching the sample stage when moving it.

[0003] However, during actual use, the inventor found that there is a limit to the number of samples that can be placed at one time, and secondly, there are restrictions on the state of the samples, that is, solid samples should not be prepared on the same sample table base at the same time as powder samples, otherwise there may be a risk of touching the electron gun when moving the sample table. Utility Model Content

[0004] The purpose of the utility model is to address the deficiencies of the prior art. By setting a multifunctional scanning electron microscope sample stage, the sample stage is divided into three areas: a first horizontal part, an inclined part and a second horizontal part. The first horizontal part is used to place powders, the second horizontal part is used to place regular block samples, and the inclined part is used to place irregular block samples, thereby solving the technical problem that there is a limit on the number of samples that can be placed at one time, and secondly, there is a limit on the state of the samples, that is, solid samples should not be prepared on the same sample stage base at the same time as powder samples, otherwise there may be a risk of touching the electron gun when moving the sample stage.

[0005] In response to the above technical problems, the following technical solutions are adopted: a multifunctional scanning electron microscope sample stage, including a sample stage body and an electron gun arranged on the sample stage body, characterized in that the upper end of the sample stage body is sequentially transitionally connected with a first horizontal portion, an inclined portion and a second horizontal portion along the horizontal direction.

[0006] Preferably, the inclined portion is arranged to be inclined downward, the tail end of the first horizontal portion is connected to the head end of the inclined portion, and the head end of the second horizontal portion is connected to the tail end of the inclined portion.

[0007] Preferably, a positioning structure for positioning irregular samples is provided on the inclined portion.

[0008] Preferably, the positioning structure includes a groove 1 opened on the inclined portion, a screw 1 slidingly arranged in the groove 1 and threadedly connected to the groove 1, and a limit block rotatably connected to the upper end of the screw 1 and matchingly slidably arranged in the groove 1.

[0009] Preferably, the surface of the inclined portion has a diamond-shaped texture structure.

[0010] Preferably, both the first horizontal portion and the second horizontal portion are provided with adjustment structures.

[0011] Preferably, the adjustment structure includes a second groove opened on the sample stage body, a second screw rod slidingly arranged in the second groove and threadedly connected to the second groove, and a bottom plate rotatably connected to the upper end of the second screw rod and matchingly slidably arranged in the second groove.

[0012] Preferably, the groove one and the groove two are staggered.

[0013] Preferably, the limit block is arranged perpendicular to the horizontal plane of the sample stage body.

[0014] As another preferred embodiment, the sample stage body is made of aluminum alloy material.

[0015] Beneficial effects of the utility model:

[0016] (1) In the utility model, a multifunctional scanning electron microscope sample stage is provided, and the sample stage is divided into three areas: a first horizontal part, an inclined part, and a second horizontal part. The first horizontal part is used to place powder, the second horizontal part is used to place regular block samples, and the inclined part is used to place irregular block samples. Thus, three different samples can be prepared on the sample stage at one time, and they can also be samples in different states, which not only increases the efficiency of scanning electron microscope detection, but also enriches its diversity.

[0017] (2) In the utility model, by providing a positioning structure and an adjusting structure, it is possible to ensure that when three types of powder, regular block samples, and irregular block samples are detected simultaneously or when more than one state of samples are detected, their upper ends are located on the same horizontal plane, which facilitates the detection work while ensuring that the samples are not easily exposed to the electron gun as much as possible, and has a high safety factor.

[0018] In summary, the device has the advantages of simple structure and wide applicability, and is particularly suitable for the field of scanning electron microscope sample stage technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 A schematic diagram of the multifunctional SEM sample stage. Figure 1 .

[0021] Figure 2 Schematic diagram of the structure of a multifunctional SEM sample stageFigure 1 .

[0022] Figure 3 Schematic diagram of the structure of a multi-functional scanning electron microscope sample stage Figure 2 .

[0023] Figure 4 Schematic diagram of the structure of a multi-functional scanning electron microscope sample stage Figure 3 .

[0024] Figure 5 Front view schematic diagram of a multi-functional scanning electron microscope sample stage Figure 2 .

[0025] Figure 6 Cross-sectional schematic diagram of a multi-functional scanning electron microscope sample stage. Detailed implementation manners

[0026] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0027] Embodiment 1

[0028] As Figure 1 shown, a multi-functional scanning electron microscope sample stage includes a sample stage body 1 and an electron gun disposed on the sample stage body 1. A first horizontal portion 2, an inclined portion 3, and a second horizontal portion 4 are sequentially and transitionally connected along the horizontal direction at the upper end of the sample stage body 1.

[0029] In the multi-functional scanning electron microscope sample stage of this embodiment, the sample stage is divided into three regions: a first horizontal portion 2, an inclined portion 3, and a second horizontal portion 4. Powder 200 is placed on the first horizontal portion 2, a regular block sample 300 is placed on the second horizontal portion 4, and an irregular block sample 100 is placed on the inclined portion 3. Thus, three different samples or samples in different states can be prepared on the sample stage at one time, which not only increases the efficiency during the scanning electron microscope detection but also enriches its diversity.

[0030] That is, the sample stage can hold a large number of samples and can accommodate samples in different forms, which not only improves the efficiency but also increases the diversity of detection.

[0031] First, from the perspective of detection efficiency: The modified sample stage can theoretically hold 3 samples at the same time, which is 3 times that of the original sample stage, greatly improving the efficiency. At the same time, the number of times of replacing the sample stage in the middle is reduced. Each time the sample stage is replaced, it takes 10 - 15 minutes. Therefore, the time cost is greatly shortened.

[0032] Second, from the perspective of detection diversity: The modified sample stage can hold samples in different forms. The powder sample and the block sample can be placed on the same sample stage using the height difference of the sample stage, avoiding the risk of touching the electron gun when moving the sample stage, and having a high safety factor.

[0033] Further, as Figure 1 shown, the inclined portion 3 is disposed obliquely downward, the tail end of the first horizontal portion 2 is connected to the head end of the inclined portion 3, and the head end of the second horizontal portion 4 is connected to the tail end of the inclined portion 3.

[0034] Further, as Figure 3 、 Figure 6 shown, a positioning structure 5 for positioning the irregular sample 100 is provided on the inclined portion 3;

[0035] The positioning structure 5 includes a first groove 31 formed in the inclined portion 3, a first screw 32 slidably disposed through the first groove 31 and threadedly connected to the first groove 31, and a limiting block 33 rotatably connected to the upper end of the first screw 32 and slidably disposed in the first groove 31 in a matching manner.

[0036] It should be noted that by moving the limiting block 33, the support for the irregular block-shaped samples 100 of different specifications and sizes can be completed. Even if the bottom of the irregular block-shaped sample 100 is uneven, resulting in poor adhesion to the inclined portion 3, the support for the irregular block-shaped sample 100 can still be completed, improving the accuracy of detection.

[0037] Specifically, place the irregular block-shaped sample 100 in the first groove 31, manually turn the first screw 32 according to the size of the irregular block-shaped sample 100, and then adjust the position of the limiting block 33 while adjusting the height of the sample accommodated in the first groove 31.

[0038] Further, as Figure 3 、 Figure 6 shown, adjusting structures 6 are provided on both the first horizontal portion 2 and the second horizontal portion 4;

[0039] The adjusting structure 6 includes a second groove 61 formed in the sample table body 1, a second screw 62 slidably disposed through the second groove 61 and threadedly connected to the second groove 61, and a bottom plate 63 rotatably connected to the upper end of the second screw 62 and slidably disposed in the second groove 61 in a matching manner.

[0040] In this embodiment, by providing the positioning structure 5 and the adjusting structure 6, when detecting three types of samples including the powder 200, the regular block-shaped sample 300, and the irregular block-shaped sample 100 simultaneously or detecting more than one type of sample, their upper ends can be basically located on the same horizontal plane, that is, the height difference between different samples falls within the allowable error range, facilitating the detection work and ensuring that the samples are not easily in contact with the electron gun as much as possible.

[0041] Specifically, the powder 200 and the bulk sample 300 are placed in the corresponding groove two 61. According to the heights of the powder 200 and the bulk sample 300, the height of the base plate 63 is manually adjusted by turning the screw two 62, thereby adjusting the height of the sample accommodated on the base plate 63. Its working principle is the same as that of the positioning structure 5.

[0042] Further, as Figures 5 to 6 shown, the groove one 31 and the groove two 61 are arranged in a staggered manner.

[0043] It should be noted that the purpose of arranging the groove one 31 and the groove two 61 in a staggered manner is to avoid interference between the screw one 32 and the screw two 62 during installation and manual adjustment.

[0044] Further, as Figure 6 shown, the limiting block 33 is arranged perpendicular to the horizontal plane of the sample table body 1.

[0045] In this embodiment, the irregular sample 100 is not limited to the triangular state in the drawings, and the contact surface between the irregular sample 100 and the inclined portion 3 is not necessarily completely flat. Therefore, by arranging the limiting block 33 perpendicular to the horizontal plane of the sample table body 1, the irregular sample 100 is supported, the stability of the irregular sample 100 during detection is improved, and the accuracy of detecting the irregular sample 100 is further improved.

[0046] Further, the sample table body 1 adopts an aluminum alloy material structure.

[0047] Embodiment Two

[0048] As Figure 2 shown, the same or corresponding components as those in Embodiment One adopt the corresponding reference numerals in Embodiment One. For the sake of simplicity, only the differences from Embodiment One will be described below. The differences between this Embodiment Two and Embodiment One are as follows:

[0049] Further, as Figure 2 shown, the surface of the inclined portion 3 is a diamond pattern structure.

[0050] In this embodiment, due to the surface of the inclined portion 3 being a diamond pattern structure, the contact area between the irregular sample 100 and the groove one 31 is reduced. When the inclined portion 3 is a flat surface, when the irregular sample 100 is adhered to the surface of the inclined portion 3 with conductive adhesive, it will not easily slide and fall during the detection process.

[0051] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "front and back", "left and right", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the utility model.

[0052] Of course, in this technical solution, those skilled in the art should understand that the term "one" should be understood as "at least one" or "one or more". That is, in one embodiment, the number of an element can be one, while in other embodiments, the number of this element can be multiple. The term "one" should not be construed as a limitation to the number.

[0053] The above is only a preferred specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art in the technical disclosure of the present utility model should be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the protection scope of the claims.

Claims

1. A multifunctional scanning electron microscope sample stage, comprising a sample stage body (1) and an electron gun arranged on the sample stage body (1), characterized in that: The upper end of the sample stage body (1) is transitionally connected in sequence along the horizontal direction with a first horizontal portion (2), an inclined portion (3) and a second horizontal portion (4); The positioning structure (5) comprises a groove (31) formed on the inclined portion (3), a screw (32) slidably disposed in the groove (31) and threadedly connected to the groove (31), and a limit block (33) rotatably connected to the upper end of the screw (32) and slidably disposed in the groove (31).

2. The multifunctional scanning electron microscope sample stage according to claim 1, characterized in that: The inclined portion (3) is arranged to be inclined downward, the tail end of the first horizontal portion (2) is connected to the head end of the inclined portion (3), and the head end of the second horizontal portion (4) is connected to the tail end of the inclined portion (3).

3. The multifunctional scanning electron microscope sample stage according to claim 1, characterized in that: The inclined portion (3) is provided with a positioning structure (5) for positioning the irregular sample (100).

4. The multifunctional scanning electron microscope sample stage according to claim 1, characterized in that: The surface of the inclined portion (3) has a diamond-shaped texture structure.

5. The multifunctional scanning electron microscope sample stage according to claim 3, characterized in that: The first horizontal portion (2) and the second horizontal portion (4) are both provided with adjustment structures (6).

6. The multifunctional scanning electron microscope sample stage according to claim 5, characterized in that: The adjustment structure (6) comprises a second groove (61) provided on the sample stage body (1), a second screw rod (62) slidably disposed in the second groove (61) and threadedly connected to the second groove (61), and a bottom plate (63) rotatably connected to the upper end of the second screw rod (62) and slidably disposed in the second groove (61).

7. The multifunctional scanning electron microscope sample stage according to claim 6, characterized in that: The groove one (31) and the groove two (61) are arranged in a staggered manner.

8. The multifunctional scanning electron microscope sample stage according to claim 1, characterized in that: The sample stage body (1) is made of an aluminum alloy material structure.

9. The multifunctional scanning electron microscope sample stage according to claim 3, characterized in that: The limit block (33) is arranged perpendicular to the horizontal plane of the sample stage body (1).

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