Crystal ring driving device and die bonder

Abstract

The utility model is applicable to the technical field of die bonding equipment, and provides a crystal ring driving device and a die bonder, the crystal ring driving device comprises a base, a first sliding seat and a second sliding seat, the base is provided with a first magnetic member arranged along a first direction, the first sliding seat is connected with a first coil assembly, and the second sliding seat is connected with a second coil assembly. The first sliding seat is provided with a second magnetic part arranged in the second direction, an included angle is formed between the second direction and the first direction, and the second sliding seat is connected with a second coil assembly. The situation that the first sliding seat and the second sliding seat may shake or shake due to the fact that the screw driving structure has an assembling gap is avoided, and sliding of the first sliding seat and the second sliding seat can be smoother and more stable at the same time. In addition, the current passing through the first coil assembly and the second coil assembly can be controlled, so that the motion states of the first sliding seat and the second sliding seat are adjusted, and the motion precision of the crystal ring driving device is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of die bonding equipment, and particularly relates to a wafer ring driving device and a die bonder. Background Art

[0002] A die bonder is one of the devices used in semiconductor device manufacturing, and its function is to connect a semiconductor wafer to other components. During the operation of the die bonder, the wafer ring is usually supported by a wafer supply platform, and then the die bonding nozzle sucks the chips on the wafer ring, and firmly connects the solder joints between the chips and the packaging substrate to achieve die bonding. During the process of the die bonding nozzle sucking the chips, a wafer ring driving device is usually required to drive the wafer supply platform to move, so as to cooperate with the die bonding nozzle to make the sucking of the chips more convenient. However, most of the existing wafer ring driving devices have the problem of poor movement stability during use, which seriously affects the die sucking accuracy and efficiency. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a wafer ring driving device and a die bonder, aiming to solve the technical problem of poor movement stability of the existing wafer ring driving device during use.

[0004] The utility model is implemented as follows. In the first aspect, a wafer ring driving device is provided. The wafer ring driving device includes a base, a first sliding seat and a second sliding seat. The first sliding seat is slidably arranged on the base, and the second sliding seat is slidably arranged on the first sliding seat. The base is provided with a first magnetic member arranged along a first direction. A first coil assembly is connected to the first sliding seat. The first coil assembly is slidably connected to the first magnetic member. The first coil assembly is used for generating a magnetic field when energized and interacting with the first magnetic member to push the first coil assembly to slide along the first magnetic member. The first sliding seat is provided with a second magnetic member arranged along a second direction. The second direction is arranged at an angle to the first direction. A second coil assembly is connected to the second sliding seat. The second coil assembly is used for generating a magnetic field when energized and interacting with the second magnetic member to push the second coil assembly to slide along the second magnetic member.

[0005] In an optional embodiment, the first magnetic member includes a first magnetic rod. The first coil assembly has a first hole portion. The first magnetic rod passes through the first hole portion. The first magnetic rod can slide relative to the inner wall of the first hole portion. The second magnetic member includes a second magnetic rod. The second coil assembly has a second hole portion. The second magnetic rod passes through the second hole portion. The second magnetic rod can slide relative to the inner wall of the second hole portion.

[0006] In an alternative embodiment, a first fixing component is provided on the top surface of the base, and both ends of the first magnetic rod are fixed to the base through the first fixing component. A second fixing component is provided on the top surface of the first sliding seat, and both ends of the second magnetic rod are fixed to the first sliding seat through the second fixing component.

[0007] In an alternative embodiment, both the first magnetic rod and the second magnetic rod include a main cylinder body and magnetic blocks. The number of magnetic blocks is multiple, and a channel is formed in the main cylinder body. The multiple magnetic blocks are arranged in the channel along the length direction of the main cylinder body.

[0008] In an alternative embodiment, a spacer block is arranged between two adjacent magnetic blocks, and the spacer block is used to space two adjacent magnetic blocks apart.

[0009] In an alternative embodiment, a first sliding group is arranged between the base and the first sliding seat. The first sliding seat is slidably connected to the base through the first sliding group. A second sliding group is arranged between the first sliding seat and the second sliding seat. The second measuring part and the second sliding seat are slidably connected to the first sliding seat through the second sliding group.

[0010] In an alternative embodiment, the first sliding group includes a first slide rail and a first slider. The first slide rail is arranged along the first direction, and the first slider can slide along the first slide rail. The first slide rail is arranged on the base, and the first slider is connected to the first sliding seat. The second sliding group includes a second slide rail and a second slider. The second slide rail is arranged along the second direction, and the second slider can slide along the length direction of the second slide rail. The second slide rail is arranged on the first sliding seat, and the second slider is connected to the second sliding seat.

[0011] In an alternative embodiment, a first measuring part is arranged between the base and the first sliding seat. The first measuring part is used to detect the displacement of the first sliding seat relative to the base. A second measuring part is arranged between the first sliding seat and the second sliding seat, and is used to detect the displacement of the second sliding seat relative to the first sliding seat.

[0012] In an alternative embodiment, the number of the first magnetic members is multiple, and the multiple first magnetic members are arranged at intervals along the second direction. The number and positions of the first coil components match those of the first magnetic members. The number of the second magnetic members is multiple, and the multiple second magnetic members are arranged at intervals along the first direction. The number and positions of the second coil components match those of the second magnetic members.

[0013] In a second aspect, a die bonder is provided, including the wafer ring driving device described in any one of the above.

[0014] The technical effect of the present utility model relative to the prior art is as follows: The first sliding seat is slidably arranged on the base, and the second sliding seat is slidably arranged on the first sliding seat. At the same time, a first magnetic member is provided on the base along a first direction, and a first coil assembly is connected to the first sliding seat. The first coil assembly is slidably connected to the first magnetic member. When the first coil assembly is energized, a magnetic field is generated and interacts with the first magnetic member to push the first coil assembly to slide along the first magnetic member. A second magnetic member is provided on the first sliding seat along a second direction, and the second direction is arranged at an angle with the first direction. A second coil assembly is connected to the second sliding seat. When the second coil assembly is energized, a magnetic field is generated and interacts with the second magnetic member to push the second coil assembly to slide along the second magnetic member. During use, the crystal supply platform can be arranged on the second sliding seat. Through the interaction between the first coil assembly and the first magnetic member after being energized, the first sliding seat is driven to slide along the first direction, and through the interaction between the second coil assembly and the second magnetic member after being energized, the second sliding seat is driven to slide along the second direction, ultimately realizing the position adjustment of the crystal supply platform in the horizontal direction. Compared with the screw drive method in the prior art, it avoids the situation that the first sliding seat and the second sliding seat may shake or vibrate due to the assembly gap existing in the screw drive structure, and can make the sliding of the first sliding seat and the second sliding seat smoother and more stable. In addition, the current flowing through the first coil assembly and the second coil assembly can also be controlled to realize the adjustment of the state and position of the first sliding seat and the second sliding seat, improving the movement accuracy of the wafer ring driving device.

[0015] It can be understood that the beneficial effects of the above second aspect can refer to the relevant descriptions in the above first aspect, and will not be elaborated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for use in the embodiments of the present utility model or the description of the prior art will be briefly introduced below. Obviously, the following described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0017] Figure 1 is a schematic structural diagram of the wafer ring driving device provided by the embodiment of the present utility model Figure 1 ;

[0018] Figure 2 is a schematic structural diagram of the wafer ring driving device provided by the embodiment of the present utility model Figure 2 ;

[0019] Figure 3 is a schematic structural view of the first magnetic member adopted in the embodiment of the present utility model;

[0020] Figure 4 is a sectional structural view of the first magnetic member adopted in the embodiment of the present utility model.

[0021] Explanation of reference numerals:

[0022] 1. Base; 2. First sliding seat; 3. Second sliding seat; 4. First magnetic member; 41. Main cylinder body; 42. Magnetic block; 43. Spacer block; 5. Second magnetic member; 6. First coil assembly; 7. Second coil assembly; 8. First sliding group; 81. First slide rail; 82. First slider; 9. Second sliding group; 91. Second slide rail; 92. Second slider; 10. First fixing assembly; 11. Second fixing assembly; 12. First measuring part; 13. Second measuring part; 14. First buffer member; 15. Second buffer member. Detailed implementation manners

[0023] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present utility model, and should not be construed as a limitation to the present utility model.

[0024] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0025] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more unless otherwise specifically defined.

[0026] In the present utility model, unless otherwise clearly defined and limited, terms such as "installation", "connection", "linkage", "fixation" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral one; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0027] In order to make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0028] Please refer to Figures 1 to 4 As shown in the figure, in an embodiment of the present utility model, in a first aspect, a crystal ring driving device is provided. The crystal ring driving device includes a base 1, a first sliding seat 2 and a second sliding seat 3. The first sliding seat 2 is slidably arranged on the base 1, and the second sliding seat 3 is slidably arranged on the first sliding seat 2. The base 1 is provided with a first magnetic member 4 arranged along a first direction X. A first coil assembly 6 is connected to the first sliding seat 2. The first coil assembly 6 is slidably connected to the first magnetic member 4. The first coil assembly 6 is configured to generate a magnetic field when energized and interact with the first magnetic member 4 to push the first coil assembly 6 to slide along the first magnetic member 4. The first sliding seat 2 is provided with a second magnetic member 5 arranged along a second direction Y. The second direction Y is arranged at an angle with the first direction X. A second coil assembly 7 is connected to the second sliding seat 3. The second coil assembly 7 is configured to generate a magnetic field when energized and interact with the second magnetic member 5 through the magnetic field to push the second coil assembly 7 to slide along the second magnetic member 5.

[0029] Specifically, the base 1 refers to a supporting component with a certain volume. The base 1 can be in a block shape, a plate shape or a combination of various shapes. A plane for supporting an object can be provided on the top of the base 1. The first sliding seat 2 refers to a supporting component with a certain volume. The first sliding seat 2 can be in a block shape, a plate shape or a combination of various shapes. The first sliding seat 2 can be slidably connected to the base 1 through a sliding structure, where the sliding structure can be a slide rail-slider structure, and the sliding structure can also be a roller-slide rail structure, etc. The second sliding seat 3 refers to a supporting component with a certain volume. The second sliding seat 3 can be in a block shape, a plate shape or a combination of various shapes. The second sliding seat 3 can be slidably connected to the first sliding seat 2 through a sliding structure, where the sliding structure can be a slide rail-slider structure, and the sliding structure can also be a roller-slide rail structure, etc.

[0030] The first magnetic component 4 refers to a component that can generate a magnetic field and has a certain length. The first magnetic component 4 can be at least partially composed of a magnetic material to generate a magnetic field through the magnetic material. The first magnetic component 4 can also be at least partially a coil structure, and a magnetic field is generated according to the principle of electromagnetic induction when the coil structure is energized. The first coil assembly 6 refers to a component that is at least partially a coil structure. When the coil structure in the first coil assembly 6 is energized, a magnetic field can be generated according to the principle of electromagnetic induction. The first coil assembly 6 and the first magnetic component 4 can, through the interaction of their magnetic fields, cause the first coil assembly 6 to generate a driving force to slide along the first magnetic component 4, and the direction and magnitude of the magnetic field can be controlled by controlling the direction and magnitude of the current on the coil structure, so as to realize the adjustment of the movement direction and movement speed of the first coil assembly 6. The first magnetic component 4 and the first coil assembly 6 can be two independent components or a complete set of components, such as adopting a tubular linear motor and other structures. The second magnetic component 5 refers to a component that can generate a magnetic field and has a certain length. The second magnetic component 5 can be at least partially composed of a magnetic material to generate a magnetic field through the magnetic material. The second magnetic component 5 can also be at least partially a coil structure, and a magnetic field is generated according to the principle of electromagnetic induction when the coil structure is energized. The second coil assembly 7 refers to a component that is at least partially a coil structure. When the coil structure in the second coil assembly 7 is energized, a magnetic field can be generated according to the principle of electromagnetic induction. The second coil assembly 7 and the second magnetic component 5 can, through the interaction of their magnetic fields, cause the second coil assembly 7 to generate a driving force to slide along the second magnetic component 5, and the direction and magnitude of the magnetic field can be controlled by controlling the direction and magnitude of the current on the coil structure to realize the adjustment of the movement direction and movement speed of the second coil assembly 7. The second magnetic component 5 and the second coil assembly 7 can be assembled from two independent components, or the second magnetic component 5 and the second coil assembly 7 can also be a complete set of components, such as adopting a tubular linear motor and the like.

[0031] The crystal ring driving device provided by the embodiment of the present utility model slides the first sliding seat 2 on the base 1, and slides the second sliding seat 3 on the first sliding seat 2. At the same time, a first magnetic member 4 arranged along the first direction X is provided on the base 1, and a first coil assembly 6 is connected to the first sliding seat 2. The first coil assembly 6 is slidably connected to the first magnetic member 4. When the first coil assembly 6 is energized, a magnetic field is generated and interacts with the first magnetic member 4 to push the first coil assembly 6 to slide along the first magnetic member 4. A second magnetic member 5 arranged along the second direction Y is provided on the first sliding seat 2. The second direction Y is arranged at an angle to the first direction X. A second coil assembly 7 is connected to the second sliding seat 3. When the second coil assembly 7 is energized, a magnetic field is generated and interacts with the second magnetic member 5 to push the second coil assembly 7 to slide along the second magnetic member 5. Compared with the screw drive method in the prior art, when in use, the crystal supply platform can be arranged on the second sliding seat 3. Through the interaction between the first coil assembly 6 and the first magnetic member 4 after being energized, the first sliding seat 2 is driven to slide along the first direction X, and through the interaction between the second coil assembly 7 and the second magnetic member 5 after being energized, the second sliding seat 3 is driven to slide along the second direction Y, finally realizing the position adjustment of the crystal supply platform in the horizontal direction. It avoids the situation that the first sliding seat 2 and the second sliding seat 3 may shake or vibrate due to the assembly gap existing in the screw drive structure, and can make the movement of the first sliding seat 2 and the second sliding seat 3 smoother and more stable. In addition, the state and position of the first sliding seat 2 and the second sliding seat 3 can be adjusted by controlling the current input into the first coil assembly 6 and the second coil assembly 7, improving the control accuracy of the crystal ring driving device, and further increasing the crystal suction accuracy and speed, and increasing the overall production capacity of the die bonder. In one embodiment, please refer to Figure 3 and Figure 4, the first magnetic member 4 includes a first magnetic rod. The first coil assembly 6 has a first hole portion, and the first magnetic rod is inserted into the first hole portion. The first magnetic rod can slide relative to the inner wall of the first hole portion. The second magnetic member 5 includes a second magnetic rod. The second coil assembly 7 has a second hole portion, and the second magnetic rod is inserted into the second hole portion. The second magnetic rod can slide relative to the inner wall of the second hole portion. Specifically, the first magnetic rod refers to a magnetic component with a certain length. The cross-section of the first magnetic rod can be circular, rectangular, or other polygons. The cross-section of the first magnetic rod refers to the section intercepted by a plane perpendicular to the axis of the first magnetic rod. The first hole portion refers to a hole structure penetrating the first coil assembly 6, and the shape of the first hole portion can match the cross-section of the first magnetic rod. When in use, the first magnetic rod can be inserted into the first hole portion, which can make the installation of the first coil assembly 6 and the first magnetic rod more stable, and also make the installation and sliding of the first sliding seat 2 more stable. The second magnetic rod refers to a magnetic component with a certain length. The cross-section of the second magnetic rod can be circular, rectangular, or other polygons. The cross-section of the second magnetic rod refers to the section intercepted by a plane perpendicular to the axis of the second magnetic rod. The second hole portion refers to a hole structure penetrating the second coil assembly 7, and the shape of the second hole portion can match the cross-section of the second magnetic rod. When in use, the second magnetic rod can be inserted into the second hole portion, which can make the installation of the second coil assembly 7 and the second magnetic rod more stable, and also make the installation and sliding of the second sliding seat 3 more stable, thereby improving the overall stability of the driving device.

[0032] It should be noted that, please refer to Figure 4 , the outer wall of the first magnetic rod is spaced from the inner wall of the first hole portion, and the outer wall of the second magnetic rod is also spaced from the inner wall of the second hole portion. Specifically, by spacing the outer wall of the first magnetic rod from the inner wall of the first hole portion, and through the interaction of the magnetic fields between the first magnetic rod and the first coil assembly 6, it can be achieved that when working, there is a gap between the outer wall of the first magnetic rod and the inner wall of the first hole portion, that is, the first coil assembly 6 can be in a suspended or nearly suspended state relative to the first magnetic rod, so that the first coil assembly 6 slides along the first magnetic rod more smoothly and stably. At the same time, by spacing the outer wall of the second magnetic rod from the inner wall of the second hole portion, and through the interaction of the magnetic fields between the second magnetic rod and the second coil assembly 7, it can be achieved that when working, there is a gap between the outer wall of the second magnetic rod and the inner wall of the second hole portion, that is, the second coil assembly 7 can be in a suspended or nearly suspended state, so that the second coil assembly 7 can also slide along the second magnetic rod more smoothly and stably, thereby making the second sliding seat 3 slide more smoothly and stably.

[0033] In one embodiment, please refer to Figure 1 and Figure 2, a first fixing component 10 is provided on the top surface of the base 1, and both ends of the first magnetic rod are fixed to the base 1 through the first fixing component 10. A second fixing component 11 is provided on the top surface of the first sliding seat 2, and both ends of the second magnetic rod are fixed to the first sliding seat 2 through the second fixing component 11. Specifically, both the first fixing component 10 and the second fixing component 11 refer to components that can support and fix an object. By fixing both ends of the first magnetic rod to the base 1 through the first fixing component 10, the middle region of the first magnetic rod can be spaced from the base 1. On the premise of keeping the first magnetic rod stably installed, space can be left for the sliding of the first coil assembly 6, making the sliding of the first coil assembly 6 more convenient. In addition, by fixing both ends of the second magnetic rod to the first sliding seat 2 through the second fixing component 11, the middle region of the second magnetic rod can be spaced from the first sliding seat 2. On the premise of keeping the second magnetic rod stably installed, space can be left for the sliding of the second coil assembly 7, making the sliding of the second coil assembly 7 more convenient, and thus making the sliding of the second sliding seat 3 more convenient and stable.

[0034] In an alternative embodiment, please refer to Figure 3 , the first fixing component 10 includes a support block and a pressing block. The support block can be fixedly arranged on the base 1 and support the first magnetic rod below through fasteners, clamping or welding, etc. The pressing block presses on the top of the first magnetic rod, and the pressing block can be connected to the support block through fasteners, clamping or welding, etc. The support and fixation of the end of the first magnetic rod can be realized through the cooperation of the support block and the pressing block, making the installation of the first magnetic rod more firm.

[0035] In addition, in order to make the fixation of the first magnetic rod more convenient and firm, groove structures adapted to the shapes of the ends of the first magnetic rod are provided on the top of the support block and the bottom of the pressing block. The structure of the second fixing component 11 can be the same as that of the first fixing component 10, which will not be elaborated here.

[0036] In an alternative embodiment, please refer to Figure 1 and Figure 3, first buffer members 14 are further provided at both ends of the first magnetic rod, and the two first buffer members 14 respectively abut against the sides of the first fixing assembly 10. Second buffer members 15 are further provided at both ends of the second magnetic rod, and the two second buffer members 15 respectively abut against the sides of the second fixing assembly 11. Specifically, the first buffer member 14 refers to a member with a certain elasticity. The first buffer member 14 can be a rubber sheet, a spring, an air-filled bag, etc. By providing the first buffer member 14, it can be avoided that the first coil assembly 6 collides with the first fixing assembly 10 during the movement process, and the first sliding seat 2 can slide more smoothly. The second buffer member 15 refers to a member with a certain elasticity. The second buffer member 15 can be a rubber sheet, a spring, an air-filled bag, etc. By providing the second buffer member 15, it can be avoided that the second coil assembly 7 collides with the second fixing member 11 during the movement process, and the second sliding seat 3 can slide more smoothly and safely.

[0037] In one embodiment, please refer to Figure 4 , both the first magnetic rod and the second magnetic rod include a main cylinder body 41 and magnetic blocks 42. The number of magnetic blocks 42 is multiple. There is a channel inside the main cylinder body 41, and the multiple magnetic blocks 42 are arranged in the channel along the length direction of the main cylinder body 41. Specifically, the main cylinder body 41 refers to a cylindrical structure with a certain length. There is a channel provided along the length direction of the main cylinder body 41 inside the main cylinder body 41. Both ends of the main cylinder body 41 can be open structures, or only one end of the main cylinder body 41 can be open. The magnetic block 42 refers to a member made of magnetic material, and the magnetic block 42 can generate a magnetic field by itself. The shape of the magnetic block 42 can be block-shaped, columnar, plate-shaped, etc. During use, the multiple magnetic blocks 42 can be arranged in the channel along the length direction of the main cylinder body 41, and then the openings at the ends of the main cylinder body 41 can be blocked. The main cylinder body 41 can be made of a material with higher strength or wear resistance, such as high-strength steel. By combining the magnetic block 42 and the main cylinder body 41 to form the first magnetic rod or the second magnetic rod, the strength of the first magnetic rod and / or the second magnetic rod itself can be improved while ensuring that the first magnetic rod and / or the second magnetic rod has magnetism.

[0038] Based on the above-mentioned characteristic magnetic block 42, please refer to Figure 4, a spacer block 43 is provided between two adjacent magnetic blocks 42, and the spacer block 43 is used to space the two adjacent magnetic blocks 42. Specifically, the spacer block 43 refers to a component with a certain volume, and the spacer block 43 is usually made of non-magnetic material, and the spacer block 43 can be made of metal material, or the spacer block 43 can also be made of non-metallic material. The shape of the spacer block 43 can be columnar, block-shaped, or plate-shaped. By providing a spacer block 43 between two adjacent magnetic blocks 42, the magnetic blocks 42 can be supported and separated while ensuring that the number of magnetic blocks 42 in the main cylinder 41 is sufficient, so that the magnetic blocks 42 can be evenly arranged along the main cylinder 41, thereby reducing the manufacturing cost of the first magnetic rod and the second magnetic rod. The distance between the two adjacent magnetic blocks 42 can also be adjusted by adjusting the size of the spacer block 43 to achieve the purpose of adjusting the overall magnetic field strength of the first magnetic rod or the second magnetic rod.

[0039] It should be noted that in order to keep the overall magnetic field of the first magnetic rod or the second magnetic rod uniform, the spacer blocks 43 need to be evenly arranged along the length direction of the main cylinder 41, that is, the number of magnetic blocks 42 between the two spacer blocks 43 remains consistent, which can maintain the uniformity of the magnetic field and make the sliding more stable and smooth.

[0040] In one embodiment, see Figure 1 or Figure 2 A first sliding group 8 is provided between the base 1 and the first sliding seat 2, and the first sliding seat 2 is slidably connected to the base 1 through the first sliding group 8. A second sliding group 9 is provided between the first sliding seat 2 and the second sliding seat 3, and the second sliding seat 3 is slidably connected to the first sliding seat 2 through the second sliding group 9. Specifically, the first sliding group 8 refers to a component that allows two objects to slide relative to each other, and the first sliding group 8 can be a slider rail structure, or a roller rail structure. For example, when the first sliding group 8 is a slider rail structure, the rail can be set on the base 1, and the slider can be set on the first sliding seat 2. The second sliding group 9 refers to a component that allows two objects to slide relative to each other, and the second sliding group 9 can be a slider rail structure, or a roller rail structure. For example, when the second sliding group 9 is a slider rail structure, the rail can be set on the first sliding seat 2, and the slider can be set on the second sliding seat 3. The first sliding group 8 is provided between the base 1 and the first sliding seat 2, which can make the sliding of the first sliding seat 2 more convenient. A second sliding group 9 is provided between the first sliding seat 2 and the second sliding seat 3 to facilitate the sliding of the second sliding seat 3 .

[0041] In one embodiment, see Figure 1 and Figure 2, the first sliding group 8 includes a first slide rail 81 and a first slider 82. The first slide rail 81 is arranged along the first direction X, and the first slider 82 is slidable along the first slide rail 81. The first slide rail 81 is arranged on the base 1, and the first slider 82 is connected to the first sliding seat 2. The second sliding group 9 includes a second slide rail 91 and a second slider 92. The second slide rail 91 is arranged along the second direction Y, and the second slider 92 is slidable along the length direction of the second slide rail 91. The second slide rail 91 is arranged on the first sliding seat 2, and the second slider 92 is connected to the second sliding seat 3. Specifically, the first slide rail 81 refers to a slide rail component with a certain length, and the first slide rail 81 can be fixed on the base 1 by means of fasteners, snap connections or welding. The first slider 82 refers to a block-shaped component with a certain volume, and the first slider 82 can be fixed on the first sliding seat 2 by means of fasteners, snap connections or welding, and the first slider 82 is slidable along the length direction of the first slide rail 81, so that the first sliding seat 2 can slide more stably and conveniently along the first direction X. The second slide rail 91 refers to a slide rail component with a certain length, and the second slide rail 91 can be fixed on the first sliding seat 2 by means of fasteners, snap connections or welding. The second slider 92 refers to a block-shaped component with a certain volume, and the second slider 92 can be fixed on the second sliding seat 3 by means of fasteners, snap connections or welding, and the second slider 92 is slidable along the length direction of the second slide rail 91, so that the second sliding seat 3 can slide more stably and conveniently along the second direction Y, and the movement of the second sliding seat 3 is more convenient.

[0042] In one embodiment, please refer to Figure 1 and Figure 2, a first measuring portion 12 is provided between the base 1 and the first sliding seat 2. The first measuring portion 12 is used to detect the displacement of the first sliding seat 2 relative to the base 1. A second measuring portion 13 is provided between the first sliding seat 2 and the second sliding seat 3. The second measuring portion 13 is used to detect the displacement of the second sliding seat 3 relative to the first sliding seat 2. Specifically, the first measuring portion 12 refers to a component or assembly that can measure the displacement of an object. The first measuring portion 12 can be a physical measurement structure, such as the way of cooperation between a scale and an indicating portion. The first measuring portion 12 can also adopt the way of an inductor. The second measuring portion 13 refers to a component or assembly that can measure the displacement of an object. The second measuring portion 13 can be a physical measurement structure, such as the way of cooperation between a scale and an indicating portion. The second measuring portion 13 can also adopt the way of an inductor. By setting the first measuring portion 12, the displacement of the first sliding seat 2 relative to the base 1 can be measured. During operation, the measurement result of the first measuring portion 12 can be used to determine whether the sliding position of the first coil assembly 6 on the first magnetic member 4 is accurate, so as to ensure the accuracy of the movement of the first sliding seat 2. Similarly, by setting the second measuring portion 13, the displacement of the second sliding seat 3 relative to the first sliding seat 2 can be measured. During operation, the measurement result of the second measuring portion 13 can be used to determine whether the sliding displacement of the second coil assembly 7 on the second magnetic member 5 is accurate, so as to ensure the accuracy of the movement of the second sliding seat 3 and make the movement of the driving device more precise.

[0043] In an alternative embodiment, please refer to Figure 1 , both the first measuring portion 12 and the second measuring portion 13 can include a read head assembly and a grating scale. When in use, the read head assembly and the grating scale can be respectively installed on two relatively moving components. For example, when installing the first measuring portion 12, the read head assembly can be installed on the first sliding seat 2 so that the read head assembly can move together with the first sliding seat 2. The grating scale is installed on the base 1 and the grating scale can be arranged along the first direction X. During the working process, the read head assembly can read the value on the grating scale while the first sliding seat 2 slides, so as to realize the real-time measurement of the moving displacement of the first sliding seat 2. Similarly, when installing the second measuring portion 13, the read head assembly can be installed on the second sliding seat 3 so that the read head assembly can move together with the second sliding seat 3. The grating scale is installed on the first sliding seat 2 and the grating scale can be arranged along the second direction Y. During the working process, the read head assembly can read the value on the grating scale while the second sliding seat 3 slides, so as to realize the real-time measurement of the moving displacement of the second sliding seat 3. By adopting the way of cooperation between the read head assembly and the grating scale, the use of the first measuring portion 12 and the second measuring portion 13 can be more convenient and the measurement result can be more accurate.

[0044] It should be noted that the read head assembly of the first measuring unit 12 can be arranged near the first coil assembly 6, matching the position of the first coil assembly 6, and the grating scale of the first measuring unit 12 is arranged near the first magnetic member. The read head assembly of the second measuring unit 13 is arranged near the second coil assembly 7, matching the position of the second coil assembly 7, and the grating scale of the second measuring unit 13 is arranged near the first magnetic member.

[0045] In one embodiment, please refer to Figure 1 and Figure 2 , the number of the first magnetic members 4 is multiple, and the multiple first magnetic members 4 are arranged at intervals along the second direction Y. The number and position of the first coil assemblies 6 match the number and position of the first magnetic members 4. The number of the second magnetic members 5 is multiple, and the multiple second magnetic members 5 are arranged at intervals along the first direction X. The number and position of the second coil assemblies 7 match the number and position of the second magnetic members 5. Specifically, when the number of the first magnetic members 4 is multiple, the multiple first magnetic members 4 are parallel to each other. By arranging multiple spaced-apart first magnetic members 4 and arranging multiple first coil assemblies 6 to cooperate with the first magnetic members 4, the force on the first sliding seat 2 can be made more uniform, the movement of the first sliding seat 2 is more stable, the jitter is reduced accordingly, and the service life of the first sliding group 8 between the base 1 and the first sliding seat 2 is also increased. When the number of the second magnetic members 5 is multiple, the multiple second magnetic members 5 are parallel to each other. By arranging multiple spaced-apart second magnetic members 5 and arranging multiple second coil assemblies 7 to cooperate with the second magnetic members 5, the force on the second sliding seat 3 can be made more uniform, the movement of the second sliding seat 3 is more stable, the jitter is reduced accordingly, and the service life of the second sliding group 9 between the second sliding seat 3 and the first sliding seat 2 is also increased.

[0046] Based on the above feature that the number of both the first magnetic member 4 and the second magnetic member 5 is multiple, please refer to Figure 1 or Figure 2, the number of the first measuring units 12 is also multiple, and the number of the first measuring units 12 matches the number of the first magnetic members 4. The number of the second measuring units 13 is also multiple, and the number of the second measuring units 13 matches the number of the second magnetic members 5. The grating rulers of the multiple first measuring units 12 and the multiple first magnetic members 4 can be arranged in one-to-one correspondence, and the read head assemblies of the multiple first measuring units 12 and the multiple first coil assemblies 6 can be arranged in one-to-one correspondence, ensuring that there is a first measuring unit 12 at each set of the first magnetic members 4 and the first coil assemblies 6 to measure the displacement of the first coil assemblies 6, which can ensure that the displacement of the first sliding seat 2 at each first magnetic member 4 is accurate, improving the accuracy of the movement of the first sliding seat 2. Similarly, by arranging the grating rulers of the multiple second measuring units 13 and the multiple second magnetic members 5 in one-to-one correspondence, and arranging the read head assemblies of the multiple second measuring units 13 and the multiple second coil assemblies 7 in one-to-one correspondence, ensuring that there is a second measuring unit 13 at each set of the second magnetic members 5 and the second coil assemblies 7 to measure the displacement of the second coil assemblies 7, which can ensure that the displacement of the second sliding seat 3 at each second magnetic member 4 is accurate, improving the accuracy of the movement of the second sliding seat 3.

[0047] In a specific embodiment, please refer to Figure 1 and Figure 2 . The number of the first magnetic members 4 is two, and the two first magnetic members 4 are respectively evenly arranged at both ends close to the base 1, which can make the force on the first sliding seat 2 more uniform, and the movement of the first sliding seat 2 is more stable, the jitter is reduced accordingly, and the service life of the first sliding group 8 between the base 1 and the first sliding seat 2 is also increased. At the same time, the number of the second magnetic members 5 is also two, and the two second magnetic members 5 are respectively evenly arranged at both ends close to the first sliding seat 2. By arranging two second magnetic members 5, the force on the second sliding seat 3 can be made more uniform, and the movement of the second sliding seat 3 is also more stable, the jitter is reduced accordingly, and the service life of the second sliding group 9 between the second sliding seat 3 and the first sliding seat 2 is also increased.

[0048] In a second aspect, a die bonder is provided, including the die ring driving device of any one of the above. The die ring driving device is arranged on the machine table of the die bonder, and the feeding platform is arranged on the second sliding seat 3. The position adjustment of the feeding platform in the horizontal direction can be realized by the sliding of the second sliding seat 3 along the second direction Y and the sliding of the first sliding seat 2 along the first direction X. Both the first direction X and the second direction Y are horizontal directions, and the first direction X and the second direction Y are arranged at an angle, and the angle is generally a right angle. It can be understood that the beneficial effects of the second aspect can refer to the relevant descriptions in the first aspect above, and will not be elaborated here.

[0049] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for the purpose of explaining the principles of the present invention, and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanation here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementation methods of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A crystal ring driving device, characterized in that: It includes a base, a first sliding seat and a second sliding seat, the first sliding seat is slidably set on the base, the second sliding seat is slidably set on the first sliding seat, the base has a first magnetic part set along a first direction, the first sliding seat is connected to a first coil assembly, the first coil assembly is slidably connected to the first magnetic part, the first coil assembly is used to generate a magnetic field when power is turned on and interact with the first magnetic part to push the first coil assembly to slide along the first magnetic part, the first sliding seat has a second magnetic part set along a second direction, the second direction is set at an angle to the first direction, the second sliding seat is connected to a second coil assembly, the second coil assembly is used to generate a magnetic field when power is turned on and interact with the second magnetic part to push the second coil assembly to slide along the second magnetic part.

2. The crystal ring driving device according to claim 1, characterized in that: The first magnetic component includes a first magnetic rod, the first coil assembly has a first hole, the first magnetic rod is inserted into the first hole, and the first magnetic rod can slide relative to the inner wall of the first hole. The second magnetic component includes a second magnetic rod, the second coil assembly has a second hole, the second magnetic rod is inserted into the second hole, and the second magnetic rod can slide relative to the inner wall of the second hole.

3. The crystal ring driving device according to claim 2, characterized in that: A first fixing component is arranged on the top surface of the base, and both ends of the first magnetic rod are fixed to the base through the first fixing component; a second fixing component is arranged on the top surface of the first sliding seat, and both ends of the second magnetic rod are fixed to the first sliding seat through the second fixing component.

4. The crystal ring driving device according to claim 3, characterized in that: The first magnetic rod and the second magnetic rod both include a main cylinder and a magnetic block. There are multiple magnetic blocks. The main cylinder has a channel. The multiple magnetic blocks are arranged in the channel along the length direction of the main cylinder.

5. The crystal ring driving device according to claim 4, characterized in that: A spacing block is arranged between two adjacent magnetic blocks, and the spacing block is used to space the two adjacent magnetic blocks.

6. The crystal ring driving device according to any one of claims 1 to 5, characterized in that: A first sliding group is arranged between the base and the first sliding seat, and the first sliding seat is slidably connected to the base through the first sliding group. A second sliding group is arranged between the first sliding seat and the second sliding seat, and the second sliding seat is slidably connected to the first sliding seat through the second sliding group.

7. The crystal ring driving device according to claim 6, characterized in that: The first sliding group includes a first sliding rail and a first slider, the first sliding rail is arranged along the first direction, the first slider can slide along the first sliding rail, the first sliding rail is arranged on the base, and the first slider is connected to the first sliding seat, the second sliding group includes a second sliding rail and a second slider, the second sliding rail is arranged along the second direction, the second slider can slide along the length direction of the second sliding rail, the second sliding rail is arranged on the first sliding seat, and the second slider is connected to the second sliding seat.

8. The crystal ring driving device according to any one of claims 1 to 5, characterized in that: A first measuring part is arranged between the base and the first sliding seat, and the first measuring part is used to detect the displacement of the first sliding seat relative to the base. A second measuring part is arranged between the first sliding seat and the second sliding seat, and the second measuring part is used to detect the displacement of the second sliding seat relative to the first sliding seat.

9. The crystal ring driving device according to any one of claims 1 to 5, characterized in that: There are multiple first magnetic parts, and the multiple first magnetic parts are arranged at intervals along the second direction, the number and positions of the first coil components match the number and positions of the first magnetic parts, there are multiple second magnetic parts, and the multiple second magnetic parts are arranged at intervals along the first direction, and the number and positions of the second coil components match the number and positions of the second magnetic parts.

10. A die bonding machine, characterized in that: It comprises the crystal ring driving device as claimed in any one of claims 1 to 9.

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