Vacuum cavity and processing equipment

Abstract

The embodiment of the utility model relates to the technical field of photovoltaic material processing, and provides a vacuum cavity and processing equipment. The vacuum cavity comprises an outer shell, an outer door, an inner shell and an inner door. The outer door covers the shell, the outer door can block the shell and form a vacuum cavity with the shell, and the air pressure of the vacuum cavity is lower than the atmospheric pressure. The inner shell is located in the vacuum cavity, and the thermal expansion coefficient of the inner wall face of the inner shell at the temperature of 20 DEG C to 800 DEG C ranges from 1.5 * 10 < E >-6 / K to 5.5 * 10 < E >-6 / K. The inner door covers the inner shell, and the inner door and the inner shell can define a reaction chamber.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic material processing, and more particularly, to a vacuum chamber and a processing device. Background Art

[0002] Currently, processing devices such as diffusion furnaces, oxidation furnaces, annealing furnaces, Plasma Enhanced Chemical Vapor Deposition (PECVD) devices, and Low Pressure Chemical Vapor Deposition (LPCVD) devices widely use quartz tubes as reaction chambers for processes such as diffusion, oxidation, annealing, and deposition of photovoltaic cells. However, in the above-mentioned processing devices, due to the short lifespan of quartz tubes, the reaction chambers of the processing devices need to be frequently replaced, which affects production efficiency. Summary of the Utility Model

[0003] A first aspect of the present application provides a vacuum chamber. The vacuum chamber includes an outer shell, an outer door, an inner shell, and an inner door. The outer door covers the outer shell and can seal the outer shell and form a vacuum chamber with the outer shell, and the air pressure in the vacuum chamber is lower than the atmospheric pressure. The inner shell is located in the vacuum chamber, and the range of the coefficient of thermal expansion of the inner wall surface of the inner shell at 20°C to 800°C is 1.5×10E-6 / K to 5.5×10E-6 / K. The inner door covers the inner shell, and the inner door can enclose with the inner shell to form a reaction chamber.

[0004] It should be noted that in existing processing equipment, a quartz tube is used as the reaction chamber. On the one hand, the material of the quartz tube itself has a risk of being fragile. On the other hand, in diffusion equipment and LPCVD coating equipment, during the process of introducing reaction gas into the quartz tube to form polysilicon, since polysilicon will adhere to the inner wall of the quartz tube, however, due to the large difference between the thermal expansion coefficient range of polysilicon (about 2.5×10E-6 / K to 4.5×10E-6 / K) and the thermal expansion coefficient range of the quartz tube (about 0.5×10E-6 / K to 0.55×10E-6 / K), when the polysilicon peels off from the inner wall of the quartz tube, it will erode the quartz tube, causing pits, and making the quartz tube rupture due to pressure concentration at the pit position. Therefore, in existing processing equipment, the quartz tube has the problem of short lifespan (about three months). In the vacuum chamber of the embodiment of the present application, the inner wall surface of the inner shell has a thermal expansion coefficient range of 1.5×10E-6 / K to 5.5×10E-6 / K at 20°C to 800°C, and the inner wall surface of the inner shell is similar to that of polysilicon in terms of thermal expansion coefficient. Therefore, compared with the conventional quartz tube, the vacuum chamber of the embodiment of the present application is beneficial to resisting the thermal stress generated due to the difference in thermal expansion coefficient, thereby being beneficial to improving the service life of the vacuum chamber (it can be used for more than one year), reducing the frequency of reaction chamber replacement, and improving production efficiency, so as to solve the pain points of frequent quartz tube replacement and long production stoppage time caused by each quartz tube replacement.

[0005] In some embodiments, the overall thermal expansion coefficient of the inner shell at 20°C to 800°C ranges from 1.5×10E-6 / K to 5.5×10E-6 / K.

[0006] In some embodiments, the inner wall surface of the inner door has a thermal expansion coefficient range of 1.5×10E-6 / K to 5.5×10E-6 / K at 20°C to 800°C.

[0007] In some embodiments, the vacuum chamber further includes an air inlet assembly and an air extraction port. The air inlet assembly is connected to the outer shell, and the air extraction port communicates with the vacuum chamber and is used to connect to a vacuum pumping system; wherein, the material of the inner shell is carbon fiber cloth, the air inlet assembly communicates with the vacuum chamber, the vacuum chamber communicates with the reaction chamber through the carbon fiber cloth, and the reaction gas in the air inlet assembly can enter the reaction chamber through the vacuum chamber and the carbon fiber cloth; or, the material of the inner shell is silicon carbide or composite ceramic, and the inner shell is further provided with air inlet holes, the air inlet assembly communicates with the reaction chamber through the air inlet holes, and the reaction gas in the air inlet assembly can enter the reaction chamber through the air inlet holes.

[0008] In some embodiments, the vacuum chamber further includes a plurality of protrusions, and the plurality of protrusions are arranged at intervals along the inner side wall of the outer shell, and each protrusion extends from the inner side wall of the outer shell in a direction away from the inner side wall; the inner shell includes a plurality of depressions, and each depression is adapted to a corresponding protrusion, so that the outer shell supports the inner shell through the plurality of protrusions.

[0009] In some embodiments, the outer shell is connected to the inner shell by fasteners, and / or the outer door is connected to the inner door by fasteners.

[0010] In some embodiments, the vacuum chamber further comprises a beam frame, which is located inside the outer shell and connected to the inner wall of the outer shell, and the inner shell comprises a notch, which avoids the beam frame.

[0011] In some embodiments, reinforcing ribs are further provided on the outer wall of the outer shell and / or the outer door.

[0012] In some embodiments, the cross section of the inner shell is circular or rectangular, and the cross section of the outer shell is rectangular.

[0013] A second aspect of the present application provides a processing device. The processing device comprises:

[0014] The vacuum chamber of the first aspect of the present application; and

[0015] The vacuum pumping system is connected to the vacuum chamber and is used to evacuate the vacuum chamber.

[0016] The processing equipment of the second aspect of the present application has at least the same advantages as the vacuum chamber of the first aspect of the present application, which will not be described in detail. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 FIG. 1 is a schematic structural diagram of a vacuum chamber according to an embodiment of the present application.

[0018] Figure 2 for Figure 1 Schematic diagram of the structure of the vacuum chamber from another perspective.

[0019] Explanation of the main component symbols: 100, vacuum chamber; 110, outer shell; 111, protrusion; 112, beam; 113, first reinforcing rib; 121, second reinforcing rib; 114, air inlet assembly; 120, outer door; 130, inner shell; 131, depression; 132, notch; 140, inner door; R1, vacuum chamber; R2, reaction chamber; H, exhaust port. DETAILED DESCRIPTION

[0020] Figure 1 FIG. 1 is a schematic structural diagram of a vacuum chamber 100 according to an embodiment of the present application. Figure 2 for Figure 1 The structure schematic diagram of the vacuum chamber 100 from another perspective. The vacuum chamber 100 can be applied to processing equipment. The processing equipment is, for example, diffusion equipment, oxidation equipment, dry cleaning equipment, PECVD equipment, cross-section passivation equipment, LPCVD equipment, ALD equipment, etc. Specifically, the vacuum chamber 100 is particularly suitable for diffusion equipment and LPCVD coating equipment.

[0021] like Figure 1 andFigure 2 As shown, the vacuum chamber 100 includes an outer shell 110, an outer door 120, an inner shell 130, and an inner door 140.

[0022] The outer door 120 covers the outer shell 110. The outer door 120 can seal the outer shell 110 and form a vacuum chamber R1 with the outer shell 110. The air pressure in the vacuum chamber R1 is lower than the atmospheric pressure.

[0023] The inner shell 130 is located in the vacuum chamber R1, and the inner door 140 covers the inner shell 130. The inner shell 130 and the inner door 140 can enclose to form a reaction chamber R2. Thus, the chamber formed after the chamber door 120 and the outer chamber 110 are closed is used to withstand the atmospheric pressure, and the outside of the inner shell 130 and the outside of the inner plate 140 located in the vacuum chamber R1 do not need to withstand the atmospheric pressure.

[0024] It should be noted that in existing processing equipment, a quartz tube is used as the reaction chamber. On the one hand, the material of the quartz tube itself has a risk of being fragile. On the other hand, in processing equipment such as diffusion equipment and LPCVD coating equipment, during the process of introducing reaction gas into the quartz tube to form polysilicon, since silicon will adhere to the inner wall of the quartz tube, however, due to the large difference in the thermal expansion coefficients of silicon and the quartz tube, when the silicon flakes off from the inner wall of the quartz tube, it will erode the quartz tube, causing pits, and making the quartz tube rupture due to pressure concentration at the pit position.

[0025] In the vacuum chamber 100 of the embodiment of the present application, the inner wall surface of the inner shell 130 has a thermal expansion coefficient in the range of 1.5×10E-6 / K to 5.5×10E-6 / K at 20°C to 800°C, which is similar to the thermal expansion coefficient of polysilicon (about 2.5×10E-6 / K to 4.5×10E-6 / K). Therefore, compared with a conventional quartz tube, the vacuum chamber 100 of the embodiment of the present application is beneficial to resisting the thermal stress generated due to the difference in thermal expansion coefficients, and thus is beneficial to improving the service life of the vacuum chamber (it can be used for more than one year), so as to solve the pain points of frequent replacement of quartz tubes and long production stoppage time caused by each replacement of the quartz tube.

[0026] In other embodiments, the inner shell 130 can be prepared from different materials. For example, the inner shell 130 includes an inner shell body formed of the same material and a heat-resistant layer formed on the inner wall of the inner shell body. The surface of the heat-resistant layer facing away from the inner shell body forms the inner wall surface of the inner shell 130, or rather, the heat-resistant layer is the surface of the inner shell 130 that is directly in contact with the reaction gas. Thus, on the one hand, the heat-resistant layer in the inner shell 130 is used to withstand high-temperature operating conditions, prevent damage or deformation of the inner surface of the reaction chamber R2 at high temperatures, and thereby extend the service life of the vacuum chamber 100; on the other hand, the thermal expansion coefficient of the heat-resistant layer in the inner shell 130 is adapted to the thermal expansion coefficient of polysilicon to avoid the problem of uneven thermal stress on the inner wall of the reaction chamber R2, and further extend the service life of the vacuum chamber 100.

[0027] In some embodiments, the coefficient of thermal expansion of the inner wall surface of the inner door 140 is similar to that of polysilicon. For example, the inner door 140 is entirely formed of the same material, and the coefficient of thermal expansion of this material is similar to that of polysilicon. Alternatively, the inner door 140 can be prepared from different materials. For example, the inner door 140 includes an inner door body formed of the same material and a heat-resistant layer formed on the inner wall of the inner door body. The surface of the heat-resistant layer facing away from the inner door body forms the inner wall surface of the inner door 140. In other words, the heat-resistant layer is the surface of the inner door 140 that is in direct contact with the reaction gas. Thus, on the one hand, the heat-resistant layer in the inner door 140 is used to withstand high-temperature operating conditions, preventing damage or deformation of the inner surface of the reaction chamber R2 at high temperatures, thereby extending the service life of the vacuum chamber 100. On the other hand, the coefficient of thermal expansion of the heat-resistant layer in the inner door 140 is adapted to that of polysilicon to avoid the problem of uneven thermal stress on the inner wall of the reaction chamber R2, further extending the service life of the vacuum chamber 100.

[0028] More specifically, the materials of the inner shell 130 and the inner door 140 can be selected from, but are not limited to, any one of the following existing materials: carbon fiber cloth, silicon carbide, and composite ceramics. On the one hand, carbon fiber cloth, silicon carbide, and composite ceramics are less prone to breakage than quartz itself. On the other hand, the coefficients of thermal expansion of carbon fiber cloth, silicon carbide, and composite ceramics are similar to that of polysilicon. Therefore, compared with conventional quartz tubes, the reaction chamber R2 formed of these materials such as carbon fiber cloth, silicon carbide, and composite ceramics is beneficial to resisting thermal stress generated due to differences in the coefficient of thermal expansion, and thus is beneficial to increasing the service life of the vacuum chamber 100 (it can be used for more than one year), so as to solve the pain points of frequent replacement of quartz tubes and long downtime for each replacement of quartz tubes.

[0029] In some embodiments, the material of the inner shell 130 or the inner door 140 is carbon fiber cloth, and the range of the coefficient of thermal expansion of the carbon fiber cloth is about 1.5×10E-6 / K to 3.0×10E-6 / K (for example, 1.5×10E-6 / K to 2.0×10E-6 / K, 2.0×10E-6 / K to 2.5×10E-6 / K, 2.5×10E-6 / K to 3.0×10E-6 / K).

[0030] In some embodiments, the material of the inner shell 130 or the inner door 140 is silicon carbide, and the range of the coefficient of thermal expansion of the silicon carbide is about 2.5×10E-6 / K to 5.0×10E-6 / K (for example, 2.5×10E-6 / K to 3.0×10E-6 / K, 3.0×10E-6 / K to 4.0×10E-6 / K, 4.0×10E-6 / K to 5.0×10E-6 / K).

[0031] In some embodiments, the material of the inner shell 130 or the inner door 140 is a composite ceramic, and the range of the thermal expansion coefficient of the composite ceramic is about 1.5×10E-6 / K to 5.5×10E-6 / K (e.g., 1.5×10E-6 / K to 2.5×10E-6 / K, 2.5×10E-6 / K to 3.0×10E-6 / K, 3.0×10E-6 / K to 4.0×10E-6 / K, 4.0×10E-6 / K to 5.0×10E-6 / K, 5.0×10E-6 / K to 5.5×10E-6 / K).

[0032] It should be noted that carbon fiber cloth, silicon carbide, and composite ceramics are all existing materials. Specifically, the composite ceramic can be silicon nitride ceramic, silicon carbide ceramic, etc.

[0033] Specifically, the material of the inner shell 130 and the material of the inner door 140 can be the same or different. When the materials of the inner shell 130 and the inner door 140 are the same, it can ensure that the inner shell 130 and the inner door 140 have the same thermal expansion coefficient, mechanical properties, and chemical stability, thereby reducing the stress and deformation caused by inconsistent expansion of different materials under high temperature or pressure changes. In addition, when the materials of the inner shell 130 and the inner door 140 are the same, it can also simplify the manufacturing process and maintenance work because only the inventory and handling of one material are required, and this also reduces the complex interaction and matching problems that may occur between different materials.

[0034] When the materials of the inner shell 130 and the inner door 140 are different, the most suitable material combination can be selected according to specific requirements and usage conditions. For example, silicon carbide can be selected as the material of the inner shell 130 to withstand high temperature and mechanical stress, while composite ceramic can be selected as the material of the inner door 140 to provide better heat insulation effect. Or, the best balance between performance and cost can be achieved according to the combination of different materials. For example, some high-performance materials (such as silicon carbide) are expensive, and choosing to use them in key parts can reduce the overall cost without affecting the equipment performance.

[0035] More specifically, the carbon fiber cloth also has the advantages of light weight and good corrosion resistance, enabling the vacuum chamber 100 to reduce the overall weight while maintaining the structural strength and being applicable to harsh chemical environments. Silicon carbide also has the advantages of high temperature stability and high thermal conductivity, which is beneficial to the application of the vacuum chamber 100 in high temperature environments and is beneficial to maintaining the temperature uniformity inside the vacuum chamber 100. The composite ceramic has the advantages of high temperature resistance and good electrical insulation performance, which is beneficial to the application of the vacuum chamber 100 in high temperature environments and environments that require electrical insulation.

[0036] Please continue to refer to Figure 1 and Figure 2The vacuum chamber 100 further includes a plurality of protrusions 111. The plurality of protrusions 111 are arranged at intervals along the inner side wall of the outer shell 110. Each protrusion 111 extends from the inner side wall of the outer shell 110 in a direction away from the inner side wall. The inner shell 130 includes a plurality of recesses 131. Each recess 131 is adapted to a corresponding protrusion 111, so that the outer shell 110 supports the inner shell 130 through the plurality of protrusions 111.

[0037] Thus, a plurality of protrusions 111 are arranged at intervals along the inner side wall of the outer shell 110, and are adapted to the recess 131 of the inner shell 130, so that the inner shell 130 can be evenly supported. This uniform support method can effectively reduce the possibility of deformation of the inner shell 130 under external pressure or internal vacuum environment, and enhance the stability of the overall structure. Moreover, the cooperation between the recess 131 and the protrusion 111 enables the inner shell 130 to be automatically aligned and fixed during the installation process, which simplifies the installation process and improves the assembly accuracy. In addition, the design of the protrusion 111 and the recess 131 can buffer the stress caused by thermal expansion and contraction to a certain extent. The inner shell 130 is supported by a plurality of protrusions 111, which can effectively cope with the thermal stress caused by temperature changes and reduce the risk of the inner shell 130 being broken or deformed due to thermal stress.

[0038] In other embodiments, the outer shell 110 is connected to the inner shell 130 by fasteners (such as screws), and the outer door 120 is connected to the inner door 140 by fasteners (such as screws). As a result, the fasteners can provide a reliable mechanical connection, ensure the firm connection between the outer shell 110 and the inner shell 130 and the outer door 120 and the inner door 140, and prevent loosening and falling off due to vibration or external force. In addition, fasteners such as screws are usually standardized components. Using fasteners such as screws to connect can simplify the installation process, make the connection between components more convenient and efficient, and reduce installation time and labor costs.

[0039] See also Figure 1 The vacuum chamber 100 further includes a beam frame 112. The beam frame 112 is located inside the outer shell 110 and connects two opposite inner side walls of the outer shell 110. The inner shell 130 further includes a notch 132, and the notch 132 avoids the beam frame 112.

[0040] Thus, the beam frame 112 is connected to the inner sidewall of the outer shell 110, which can significantly enhance the mechanical strength and rigidity of the outer shell 110, making the outer shell 110 more stable under external pressure or internal vacuum environment, and thus being able to better resist deformation and ensure the shape and size stability of the cavity. In addition, the inner shell 130 includes a notch 132 to avoid the beam frame 112, enabling the inner shell 130 to fit tightly within the outer shell 110 without affecting the strengthening effect of the beam frame 112. Such a design can not only make full use of the internal space to improve the compactness of the vacuum cavity 100 but also ensure that the function of the beam frame 112 is not affected. Moreover, the inner shell 130 is designed with a notch 132 to avoid the beam frame 112, which can make it easier to align and fix during the installation process, reducing the installation difficulty and time.

[0041] Please continue to refer to Figure 1 , the vacuum cavity 100 further includes an air inlet assembly 114 and an air extraction port H. The air inlet assembly 114 is connected to the outer shell 110.

[0042] The air extraction port H communicates with the vacuum chamber R1 and is used to connect to a vacuum pumping system. Thus, by connecting the vacuum pumping system through the air extraction port H, the air pressure in the vacuum chamber R1 can be quickly reduced to achieve a high vacuum degree. Specifically, the air inlet assembly 114 and the air extraction port H are oppositely arranged. Thus, it is beneficial to form a uniform air flow path in the vacuum chamber R1, ensuring that the gas flow in the vacuum chamber R1 is more uniform and avoiding dead corners and local air pressure unevenness. In some embodiments, the materials of the inner shell 130 and the inner door 140 are both carbon fiber cloth. Since the structure of the carbon fiber cloth is relatively loose, the reaction gas can naturally penetrate through the carbon fiber cloth. Therefore, in this case, air inlet holes may not be provided on the inner shell 130 and the inner door 140. The air inlet assembly 114 communicates with the vacuum chamber R1. The vacuum chamber R1 communicates with the reaction chamber R2 through the carbon fiber cloth.

[0043] Thus, the reaction gas in the air inlet assembly 114 can enter the reaction chamber R2 via the vacuum chamber R1 and the carbon fiber cloth to achieve a specific atmosphere environment in the reaction chamber R2. Thus, the step of providing air inlet holes on the inner shell 130 and the inner door 140 can be omitted, simplifying the design and manufacturing process, reducing the production cost and process complexity. Moreover, the gas can uniformly penetrate into the entire inner shell 130 and the inner door 140, ensuring a more uniform gas distribution during the reaction process and improving the consistency of the reaction effect. In addition, in this case, the air pressures on both the inner and outer sides of the inner shell 130 and on both the inner and outer sides of the inner door 140 are approximately equal. Thus, it is beneficial to avoid deformation of the inner shell 130 and the inner door 140 caused by too large an internal and external pressure difference, and thus beneficial to extend the service life of the inner shell 130 and the inner door 140.

[0044] In some other embodiments, the materials of the inner shell 130 and the inner door 140 are one of silicon carbide and composite ceramics. Since the structures of silicon carbide and composite ceramics are relatively dense and hardly allow natural gas penetration, in this case, air inlets need to be additionally provided on the inner shell 130 and / or the inner door 140. The intake assembly 114 communicates with the reaction chamber R2 through the air inlets, and the reaction gas in the intake assembly 114 can enter the reaction chamber R2 through the air inlets. Among them, by setting the air inlets, optimization can be carried out according to actual needs, and the shape, quantity and position of the air inlets can be flexibly adjusted, so as to more accurately control the path and flow rate of gas entry and improve the control ability of the reaction process.

[0045] In other embodiments, when the materials of the inner shell 130 and the inner door 140 are carbon fiber cloth, air inlets can also be provided on the inner shell 130 and the inner door 140 to ensure that the reaction gas can enter the reaction chamber R2.

[0046] In this embodiment, the cross-section of the inner shell 130 is rectangular, and the inner door 140 is in the shape of a rectangular flat plate. It should be noted that in related technologies, in order to improve production capacity, multiple quartz tubes may be stacked horizontally or the size of the quartz tube may be increased. However, limited by factors such as the height of the factory building and the height limit of the transportation road surface, the increase in production capacity is limited. In the embodiment of the present application, the cross-section of the inner shell 130 is rectangular. Compared with a circular quartz tube, the shape of the rectangular cavity is adapted to the carrier for carrying square sheets (such as silicon wafers for preparing solar cells), with less invalid space, which is beneficial to improving the space utilization rate of the vacuum cavity 100, and thus is beneficial to improving production capacity under the same floor area.

[0047] In other embodiments, the cross-section of the inner shell 130 is circular or other shapes. Among them, the inner shell 130 with a circular cross-section can evenly withstand the pressure from all directions due to its geometric characteristics, enhancing the structural stability and pressure resistance. The inner shell 130 with a cross-section of other shapes can be comprehensively considered according to specific space layouts, structural stability, air flow uniformity and specific process requirements, etc., to improve the adaptability of the vacuum cavity 100.

[0048] Please refer to Figure 1 and Figure 2 , and reinforcing ribs (hereinafter referred to as the first reinforcing ribs 113) are also provided on the outer wall of the outer shell 110. The first reinforcing ribs 113 are arranged horizontally and vertically on the outer surfaces of each of the top wall and the side walls of the outer shell 110. Thereby, it is beneficial to improve the overall rigidity of the outer shell 110, so that the outer shell 110 can better withstand internal and external pressures and reduce deformation. Moreover, the horizontally and vertically arranged first reinforcing ribs 113 are beneficial to avoiding stress concentration on the outer shell 110, effectively prolonging the service life of the outer shell 110 and reducing the maintenance and replacement frequency.

[0049] Please refer to Figure 2, reinforcing ribs (hereinafter referred to as the second reinforcing ribs 121) are also provided on the outer wall of the outer door 120. The second reinforcing ribs 121 are arranged horizontally and vertically in a staggered manner on the outer surface of the bottom wall of the outer door 120 facing away from the housing 110. Thereby, it is beneficial to improve the overall rigidity of the outer door 120, enabling the outer door 120 to better withstand internal and external pressures and reducing deformation. Moreover, the horizontally and vertically staggered second reinforcing ribs 121 are beneficial to avoid stress concentration on the outer door 120, effectively extending the service life of the outer door 120 and reducing the maintenance and replacement frequency.

[0050] The embodiment of the present application also provides a processing device (not shown in the figure). The processing device includes the above-mentioned vacuum chamber 100 and a vacuum pumping system. The vacuum pumping system is connected to the vacuum chamber 100 and is used to pump the vacuum chamber 100. Specifically, the vacuum pumping system is connected to the air extraction port H of the vacuum chamber 100 to perform a vacuum pumping operation on the cavity formed after the housing 110 and the outer door 120 are closed at the air extraction port H, so that the housing 110 and the outer door 120 form a vacuum chamber R1. It can be understood that the processing device further includes a purification table for cooling and purifying high-temperature products, a gas source cabinet for providing reaction gases, etc. The gas source cabinet includes a gas panel, a water circuit, a gas circuit, etc. Since the processing device includes the above-mentioned vacuum chamber 100, therefore, the processing device also has a long service life.

[0051] The working process of the processing device will be described below by taking the coating device as an example: First, the workpiece to be coated is placed on the inner door 140, and then the outer door 120 is used to block the housing 110, and a vacuum pumping operation is performed on the vacuum chamber R1 formed after the housing 110 and the outer door 120 are closed. When the vacuum degree in the vacuum chamber R1 reaches the preset requirement, reaction gases are introduced into the reaction chamber R2 formed between the inner housing 130 and the inner door 140 through the air extraction assembly, and then film deposition is performed on the workpiece to be coated. Specifically, the deposited film layer can be polysilicon. Since the thermal expansion coefficients of the materials of the inner housing 130 and the door panel 140 are adapted to the thermal expansion coefficient of polysilicon, therefore, compared with the conventional quartz tube, the reaction chamber R2 formed by the inner housing 130 and the door panel 140 is beneficial to resist the thermal stress generated due to the difference in thermal expansion coefficients, and thus is beneficial to improving the service life of the vacuum chamber 100.

[0052] The above embodiments are only used to illustrate the technical solutions of the present application and are not restrictive. Although the present application has been described in detail with reference to the above preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A vacuum chamber, characterized in that: include: shell; An outer door is covered on the outer shell, and the outer door can seal the outer shell and form a vacuum chamber with the outer shell, wherein the air pressure of the vacuum chamber is lower than the atmospheric pressure; An inner shell, located in the vacuum chamber, wherein the thermal expansion coefficient of the inner wall of the inner shell ranges from 1.5×10E-6 / K to 5.5×10E-6 / K at 20° C. to 800° C.; and The inner door is covered on the inner shell, and the inner door can be enclosed with the inner shell to form a reaction chamber.

2. The vacuum chamber according to claim 1, characterized in that: The thermal expansion coefficient of the inner shell as a whole ranges from 1.5×10E-6 / K to 5.5×10E-6 / K at 20° C. to 800° C.

3. The vacuum chamber according to claim 1, characterized in that: The thermal expansion coefficient of the inner wall surface of the inner door at 20° C. to 800° C. ranges from 1.5×10E-6 / K to 5.5×10E-6 / K.

4. The vacuum chamber according to claim 1, characterized in that: The vacuum chamber further comprises an air inlet assembly and an air extraction port, wherein the air inlet assembly is connected to the housing, and the air extraction port is connected to the vacuum chamber and is used to be connected to a vacuum extraction system; Wherein, the material of the inner shell is carbon fiber cloth, the air intake assembly is connected to the vacuum chamber, the vacuum chamber is connected to the reaction chamber through the carbon fiber cloth, and the reaction gas in the air intake assembly can enter the reaction chamber via the vacuum chamber and the carbon fiber cloth; or, the material of the inner shell is silicon carbide or composite ceramic, the inner shell is also provided with an air intake hole, the air intake assembly is connected to the reaction chamber through the air intake hole, and the reaction gas in the air intake assembly can enter the reaction chamber via the air intake hole.

5. The vacuum chamber according to claim 1, wherein: The vacuum chamber also includes a plurality of protrusions, which are arranged at intervals along the inner side wall of the outer shell, and each of the protrusions extends from the inner side wall of the outer shell in a direction away from the inner side wall; the inner shell includes a plurality of recesses, each of the recesses is adapted to a corresponding protrusion, so that the outer shell supports the inner shell through the plurality of protrusions.

6. The vacuum chamber according to claim 1, characterized in that: The outer shell is connected to the inner shell via fasteners, and / or the outer door is connected to the inner door via fasteners.

7. The vacuum chamber according to claim 1, characterized in that: The vacuum chamber further comprises a beam frame, wherein the beam frame is located inside the outer shell and connected to the inner side wall of the outer shell, and the inner shell comprises a notch, wherein the notch avoids the beam frame.

8. The vacuum chamber according to claim 1, wherein: Reinforcing ribs are also provided on the outer wall of the outer shell and / or the outer door.

9. The vacuum chamber according to any one of claims 1 to 8, characterized in that: The cross section of the inner shell is circular or rectangular, and the cross section of the outer shell is rectangular.

10. A processing equipment, characterized in that: include: The vacuum chamber according to any one of claims 1 to 9; as well as A vacuum pumping system is connected to the vacuum cavity and is used to vacuum the vacuum cavity.

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