Longitudinal three-dimensional compound material box carrying mechanism

Abstract

The utility model discloses a longitudinal three-dimensional compound material box carrying mechanism, which belongs to the technical field of semiconductor manufacturing equipment and comprises a frame body and a manipulator, a plurality of loading structures are respectively arranged on two sides in the frame body, and the loading structures are arranged at intervals along the longitudinal direction of the frame body and used for placing wafer material boxes. Loading structures are arranged on the two sides of the frame body, a moving space is reserved between the loading structures on the two sides, a moving part is arranged on the side wall of the frame body, the moving part can move in the longitudinal direction, a transverse guide rail is arranged on the moving part, and the mechanical arm is installed on the transverse guide rail and can move along the transverse guide rail; on the occasion of vertical space utilization, the efficiency and accuracy of material box carrying in the dust-free environment are improved, meanwhile, manual operation is reduced, the labor intensity is lowered, and efficient and accurate material management can be achieved through automatic control.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, and particularly relates to a longitudinal three-dimensional compound cassette handling mechanism. Background Art

[0002] Semiconductor refers to a material whose electrical conductivity at room temperature is between that of a conductor and an insulator. Such materials are widely used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields.

[0003] Semiconductor chip manufacturing is one of the key industries currently developed in China. A wafer is an indispensable and important material in the semiconductor industry. Its preparation process is complex and has extremely high technical requirements. With the continuous progress of technology and the continuous expansion of application fields, the status of wafers in the semiconductor industry will become more and more important. During semiconductor processing, wafers loaded in wafer cassettes need to be transported from an automated three-dimensional warehouse. Generally, the cassettes are taken and placed on the stacker of the three-dimensional warehouse. The existing three-stage telescopic fork and clamping fork occupy a large space and have a low cleanliness, and it is difficult to perform multi-directional material taking in the three-dimensional warehouse, resulting in low handling efficiency. At the same time, it is also difficult to meet the cleanliness requirements of semiconductor processing. Summary of the Utility Model

[0004] The main purpose of the utility model is to provide a longitudinal three-dimensional compound cassette handling mechanism, aiming to improve the efficiency and accuracy of cassette handling in a dust-free environment, reduce manual operation at the same time, reduce labor intensity, and through automatic control, efficient and accurate material management can be realized.

[0005] To achieve the above object, a longitudinal three-dimensional compound cassette handling mechanism proposed by the utility model includes a frame body and a manipulator. On both sides inside the frame body, a plurality of loading structures are respectively provided. The loading structures are arranged at intervals along the longitudinal direction of the frame body for placing wafer cassettes. A moving space is reserved between the loading structures on both sides. A moving member is provided on the side wall of the frame body. The moving member can move in the longitudinal direction. A transverse guide rail is provided on the moving member. The manipulator is installed on the transverse guide rail and can move along the transverse guide rail. Further, the longitudinal movement of the moving member controls the longitudinal movement of the transverse guide rail, thereby driving the manipulator to move in the longitudinal direction to grab and place the cassettes on the loading structures at different positions.

[0006] Optionally, two straight rods are provided on the side wall of the frame body. A channel is formed between the two straight rods. The moving member is installed between the two straight rods and can move along the straight rods with the straight rods as guide rails.

[0007] Optionally, a lead screw module is provided on the transverse guide rail, and the manipulator is connected to the lead screw module, and the lead screw module controls the lateral movement of the manipulator.

[0008] Optionally, a dust-free cable carrier is provided at the lower end of the transverse guide rail. Further, the dust-free cable carrier prevents dust from entering the interior of the device, protects precision instruments and electronic components from contamination, and improves the cleanliness of the production environment.

[0009] Optionally, a driving motor is provided at the lower end of the transverse guide rail, and the driving motor is connected to the lead screw module to control the lead screw module.

[0010] Optionally, a receiving box is provided at the side end of the transverse guide rail. A synchronous belt and a synchronous pulley are provided in the receiving box, and the driving motor drives the lead screw to rotate by driving the synchronous belt and the synchronous pulley. Further, the driving motor drives the lead screw to rotate by driving the synchronous belt and the synchronous pulley, so that the manipulator can perform lateral movement left and right to pick up and place the cassette at different positions.

[0011] Optionally, the loading structure includes a connecting plate and a loading plate. The connecting plate is connected to the frame body, the loading plate is horizontally arranged on the connecting plate, and a positioning cylinder is provided on the loading plate for detecting the position information of the cassette.

[0012] Optionally, a sensor amplifier is further provided on the loading plate. Further, the sensor amplifier amplifies weak sensor signals and improves the detection ability of the system.

[0013] Compared with the prior art, the present utility model has the following beneficial effects:

[0014] The longitudinal three-dimensional compound cassette handling mechanism of the technical solution of the present utility model is provided with a frame body and a manipulator. On both sides inside the frame body, a plurality of loading structures are respectively provided. The loading structures are arranged at intervals along the longitudinal direction of the frame body for placing wafer cassettes. A moving space is reserved between the loading structures on both sides. A moving member is provided on the side wall of the frame body, and the moving member can perform longitudinal movement. A transverse guide rail is provided on the moving member, and the manipulator is mounted on the transverse guide rail and can move along the transverse guide rail; in the case of using vertical space, it improves the efficiency and accuracy of cassette handling in a dust-free environment, reduces manual operation at the same time, and reduces labor intensity. Through automatic control, efficient and accurate material management can be realized. Description of the Drawings

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on the structures shown in these drawings.

[0016] Figure 1 It is a schematic structural diagram of an embodiment of the longitudinal three-dimensional compound material box handling mechanism of the present invention;

[0017] Figure 2 It is a schematic structural diagram of the manipulator installed on the transverse guide rail;

[0018] Figure 3 It is a schematic structural diagram of a loading structure.

[0019] Explanation of the reference numerals in the drawings:

[0020] Label Name Label Name 10 Frame 20 Manipulator 11 Straight rod 31 Loading plate 30 Loading structure 33 Positioning cylinder 32 Connecting plate 40 Moving part 34 Sensor amplifier 60 Lead screw module 50 Horizontal guide rail 62 Accommodating box 61 Drive motor 70 Clean drag chain

[0021] The realization, functional characteristics and advantages of the object of the present invention will be further described in conjunction with the embodiments and with reference to the drawings. Detailed implementation manners

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0023] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the drawings). If this specific posture changes, the directional indications will also change accordingly.

[0024] In addition, the descriptions involving "first", "second", etc. in the present invention are only for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0025] The present utility model provides a longitudinal three-dimensional compound material box handling mechanism.

[0026] Please refer to Figure 1 - Figure 3 , in an embodiment of the present utility model, the longitudinal three-dimensional compound material box handling mechanism includes a frame body 10 and a manipulator 20. On both sides inside the frame body 10, a plurality of loading structures 30 are respectively provided. The loading structures 30 are arranged at intervals along the longitudinal direction of the frame body 10 and are used for placing wafer boxes. A moving space is reserved between the loading structures 30 on both sides, so that the manipulator 20 can move in the longitudinal direction in the moving space. A moving member 40 is provided on the side wall of the frame body 10, and the moving member 40 can move in the longitudinal direction. A transverse guide rail 50 is provided on the moving member 40, and the manipulator 20 is installed on the transverse guide rail 50 and can move along the transverse guide rail 50.

[0027] In this embodiment, the frame body 10 is spliced by aluminum profiles, and the overall mass is light, which is beneficial to movement; two straight rods 11 are provided on the side wall of the frame body 10, and a channel is formed between the two straight rods 11. This channel is the moving channel of the moving member 40. The moving member 40 is installed between the two straight rods 11 and uses the straight rods 11 as guide rails and can move along the straight rods 11, thereby driving the manipulator 20 to move in the longitudinal direction, facilitating the storage of the material box on the loading structures 30 at different positions or taking the material box from the loading structures 30 at different positions.

[0028] In an embodiment of the present utility model, a lead screw module 60 is provided on the transverse guide rail 50. The manipulator 20 is connected to the lead screw module 60, and the lead screw module 60 controls the manipulator 20 to move horizontally. A dust-free cable chain 70 is provided at the lower end of the transverse guide rail 50. The main function of the dust-free cable chain 70 is to prevent dust from entering the equipment interior, protect precision instruments and electronic components from contamination, and improve the cleanliness of the production environment.

[0029] In this embodiment, a driving motor 61 is provided at the lower end of the transverse guide rail 50. The driving motor 61 can be a common servo motor. The driving motor 61 is connected to the lead screw module 60 to control the lead screw module 60. A receiving box 62 is provided at the side end of the transverse guide rail 50. A synchronous belt and synchronous pulleys are provided inside the receiving box 62. The driving motor 61 drives the lead screw to rotate by driving the synchronous belt and synchronous pulleys, so that the manipulator 20 can move horizontally left and right to grasp and place the material boxes at different positions.

[0030] It can be understood that the manipulator 20 and the moving member 40 are controlled by a PCB control circuit. First, the manipulator 20 is horizontally moved to the moving space between the loading structures 30 on both sides through the lead screw module 60, and then the moving member 40 is controlled to move the manipulator 20 in the longitudinal direction to place the cassette on the loading structures 30 at different positions.

[0031] In an embodiment of the present invention, the loading structure 30 includes a connecting plate 32 and a loading plate 31. The connecting plate 32 is connected to the frame body 10, and the two can be detachably connected by screws. The loading plate 31 is horizontally arranged on the connecting plate 32. A positioning cylinder 33 is provided on the loading plate 31 for detecting the position information of the cassette, and a sensor amplifier 34 is also provided on the loading plate 31.

[0032] In this embodiment, the positioning cylinder 33 is a sensor-controlled positioning cylinder, which uses a sensor to detect the position information of an object and controls the movement of the cylinder to achieve positioning; the weak sensor signal is amplified by the sensor amplifier 34 to improve the detection ability of the system. During the entire handling process, the system will monitor the status of each link in real time to ensure the accuracy and safety of the operation. If the system detects an abnormality, it will automatically stop the operation and issue an alarm, waiting for the operator to handle it.

[0033] Working principle: The manipulator 20 receives a system instruction and starts to move upward from the standby position. It transports the two top-layer cassettes to one of the two material-taking positions on the second layer through vertical and horizontal movements. After the cassette is accurately placed at the target position, the manipulator 20 performs the work of material taking and material receiving. When the wafer card slots of the material-receiving cassette are full, the manipulator 20 transports it to the six storage stations on the third layer below the mechanism or directly transports it to the overhead position on the top layer for the overhead crane system to carry away. When the manipulator 20 moves longitudinally, it can only first horizontally move the manipulator to the moving space between the loading structures on both sides through the lead screw module 30, and then control the moving member 40 to move longitudinally to grasp and place the cassettes at different positions.

[0034] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention. Any equivalent structural transformation made under the inventive concept of the present invention by using the content of the specification and drawings of the present invention, or directly / indirectly applied to other related technical fields, is included in the patent protection scope of the present invention.

Claims

1. A vertical three-dimensional compound material box transport mechanism, characterized in that: It includes a frame and a robot. A plurality of loading structures are respectively provided on both sides of the frame. The loading structures are spaced apart along the longitudinal direction of the frame and are used to place wafer boxes. A moving space is reserved between the loading structures on both sides. A moving part is provided on the side wall of the frame. The moving part can move in the longitudinal direction. A transverse guide rail is provided on the moving part. The robot is installed on the transverse guide rail and can move along the transverse guide rail.

2. The vertical three-dimensional compound material box conveying mechanism according to claim 1, characterized in that: The side wall of the frame is provided with two straight rods, a channel is formed between the two straight rods, and the moving part is installed between the two straight rods, and can move along the straight rods with the straight rods as guide rails.

3. The vertical three-dimensional compound material box conveying mechanism according to claim 1, characterized in that: A screw module is provided on the transverse guide rail, the manipulator is connected to the screw module, and the screw module controls the manipulator to move transversely.

4. The vertical three-dimensional compound material box conveying mechanism according to claim 1, characterized in that: A dust-free drag chain is arranged at the lower end of the transverse guide rail.

5. The vertical three-dimensional compound material box conveying mechanism according to claim 3, characterized in that: A driving motor is provided at the lower end of the transverse guide rail, and the driving motor is connected to the screw module to control the screw module.

6. The vertical three-dimensional compound material box conveying mechanism according to claim 5, characterized in that: A accommodating box is provided at the side end of the transverse guide rail, and a synchronous belt and a synchronous wheel are provided in the accommodating box. The driving motor drives the screw rod to rotate by driving the synchronous belt and the synchronous wheel.

7. The vertical three-dimensional compound material box conveying mechanism according to claim 1, characterized in that: The loading structure includes a connecting plate and a loading plate, wherein the connecting plate is connected to the frame, the loading plate is horizontally arranged on the connecting plate, and a positioning cylinder is arranged on the loading plate for detecting the position information of the material box.

8. The vertical three-dimensional compound material box conveying mechanism according to claim 7, characterized in that: The loading plate is also provided with a sensor amplifier.

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