Support plate mechanism and coating equipment

Abstract

The utility model belongs to the technical field of solar cell manufacturing, and discloses a carrier plate mechanism and coating equipment. The carrier plate mechanism is used for bearing sheets and comprises a carrier plate body and a pressing and fixing assembly, a plurality of limiting grooves are formed in the carrier plate body and used for containing the sheets, the bottom walls and the side walls of the limiting grooves can abut against the sheets in a limiting mode, and an installation part is formed between every two adjacent limiting grooves. The pressing and fixing assembly is arranged on the mounting part and rotationally connected to the carrier plate body. When the pressing and fixing assembly rotates to a first preset angle, the sheet can enter and leave the limiting groove, and when the pressing and fixing assembly rotates to a second preset angle, the pressing and fixing assembly can fix the sheet between the pressing and fixing assembly and the limiting groove. The sheet is mounted and dismounted through the pressing and fixing assembly, operation is convenient and fast, automatic mounting, fixing and separating are easy to achieve, and therefore the coating process of large-batch sheets is efficiently achieved, the coating efficiency is improved, and the coating cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, in particular to a carrier plate mechanism and a coating device. Background Art

[0002] In the coating process of HJT solar cells (heterojunction solar cells), the coating CVD equipment is divided into CAT-CVD (hot wire chemical vapor deposition) equipment and PECVD (plasma enhanced chemical vapor deposition) equipment. The principle of CAT-CVD equipment is that process gases are cracked under the high temperature and catalytic action of a hot wire and then deposited on the surface of a silicon wafer, so as to obtain the required process film. In the coating process, a carrier plate can carry and support solar cell wafers and achieve an electrical conduction effect.

[0003] However, with the increasing demand for production volume, the number of solar cell wafers to be carried on each carrier plate gradually increases. It takes a lot of time to manually install solar cell wafers onto the carrier plate and manually remove solar cell wafers from the carrier plate, which restricts the improvement of coating efficiency and is not conducive to large-scale production.

[0004] Based on the above, there is an urgent need for a carrier plate mechanism and a coating device to solve the above technical problems. Summary of the Utility Model

[0005] An object of the utility model is to provide a carrier plate mechanism, which can quickly install and remove sheets, thereby improving the efficiency of the coating process.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A carrier plate mechanism for carrying sheets, comprising a carrier plate main body and a pressing and fixing assembly. A plurality of limiting grooves are arranged on the carrier plate main body. The limiting grooves are used for accommodating the sheets to be coated, and the bottom wall and side walls of the limiting grooves can limit and abut against the sheets. An installation part is formed between a plurality of adjacent limiting grooves. The pressing and fixing assembly is arranged in the installation part and is rotatably connected to the carrier plate main body. The pressing and fixing assembly includes an abutting member. When the pressing and fixing assembly rotates to a first preset angle, the sheets can enter and leave the limiting grooves. When the pressing and fixing assembly rotates to a second preset angle, the pressing and fixing assembly stops the sheets in a direction perpendicular to the limiting grooves, so that the sheets can be fixed between the pressing and fixing assembly and the limiting grooves.

[0008] The beneficial effect of the carrier mechanism of the utility model is that through the above-mentioned carrier mechanism, the sheet material can be installed, fixed and separated by rotating the pressing and fixing components on the carrier body. The operation is convenient and quick, and it is easy to realize automatic installation, fixing and separation on the carrier body through manipulators, robots and other loading equipment, thereby efficiently realizing the coating process of large quantities of sheets, which not only improves the coating efficiency but also reduces the coating cost.

[0009] In some embodiments, the clamping and fixing assembly includes a rotating member and an abutting member, a rotating shaft is rotatably connected between the rotating member and the carrier body, and the abutting member is connected to the rotating member along the radial direction of the rotating shaft. The rotating shaft can stably and reliably realize the rotating connection, so that the sheet is clamped and fixed when the clamping and fixing assembly rotates to the second preset angle.

[0010] In some embodiments, the rotating member is connected to four abutment members, and the four abutment members are evenly spaced along the circumferential direction of the rotating member, and when the clamping and fixing assembly is rotated to a second preset angle, each abutment member can correspond to abut against a sheet material, so that each clamping and fixing assembly can fix multiple sheets, which is convenient for setting more limit grooves on a carrier body and fully utilizing the surface area of ​​the carrier body.

[0011] In some embodiments, the distance between the rotating member and the carrier body is adjustable, and the carrier body is provided with a magnetic member, which is used to adsorb and fix the rotating member. The rotating shaft is set away from the geometric center of the rotating member, and when the magnetic member adsorbs and fixes the rotating member, the projection of the geometric center of the rotating member in the direction perpendicular to the rotating member in the carrier body falls on the magnetic member. Through magnetic adsorption, the depth of the rotating shaft inserted into the rotating shaft hole is adjustable, thereby meeting the fixing requirements of sheets of different thicknesses. At the same time, it can fully attract the rotating member and effectively fix the sheet, and it can also prevent the rotating member from continuing to rotate, avoiding scratches on the surface of the sheet or even causing the sheet to fall off.

[0012] In some embodiments, the carrier body is provided with a shaft groove, and the rotating shaft is rotatably inserted in the shaft groove and can slide from one end of the shaft groove to the other end of the shaft groove. The shaft groove can realize two movement modes: rotating the rotating shaft and sliding the rotating shaft, which further facilitates the adjustment of the clamping and fixing components to not block the notch of the limit groove, so that more limit grooves can be set on the carrier body of the same area, further improving the coating efficiency.

[0013] In some embodiments, the carrier body is provided with a mounting slot at the mounting portion, the magnetic member is arranged in the mounting slot, a removal hole is arranged in the mounting slot, and the removal hole penetrates the carrier body, and the inner diameter of the removal hole is smaller than the inner diameter of the mounting slot. When removal is required, a tool such as a screwdriver can be inserted into the removal hole and abutted against the magnet, and then pushed out of the mounting slot, thereby facilitating replacement of the magnet.

[0014] In some embodiments, the carrier plate mechanism further includes a carrier plate mother frame, and the carrier plate body is detachably mounted on the carrier plate mother frame, and the carrier plate mother frame can be fixedly arranged in the coating cavity of the coating equipment. In this way, by replacing the carrier plate body, the negative impact of the carrier plate body after multiple coatings on the coating of the sheet can be avoided.

[0015] In some embodiments, at least part of the surface of the carrier plate mother frame is covered with a detachable protective plate. In this way, by replacing the protective plate, the negative impact of the carrier plate mother frame after multiple coatings on the coating of the sheet can be avoided.

[0016] In some embodiments, connecting bolts are passed through the carrier plate mother frame, and fastening nuts are sleeved on the connecting bolts. The carrier plate body is provided with fixing holes, and the connecting bolts can pass through the fixing holes, and the fastening nuts can fixedly press the carrier plate body against the carrier plate mother frame, so as to realize the detachable connection between the carrier plate body and the carrier plate mother frame.

[0017] In some embodiments, the fixing hole is a gourd hole, and the gourd hole has a large-diameter part and a small-diameter part that are communicated. The diameter of the large-diameter part is larger than the outer diameter of the fastening nut, and the diameter of the small-diameter part is smaller than the outer diameter of the fastening nut. And when the carrier plate mechanism is suspended, the large-diameter part is located below the small-diameter part. The gourd hole can prevent the removal of the fastening nut, greatly facilitating the installation of the carrier plate body, and it is easy to realize the automatic suspension of the carrier plate body, thereby further accelerating the coating efficiency.

[0018] In some embodiments, the carrier plate mother frame is provided with countersunk holes, the connecting bolts are passed through the countersunk holes, and the nut parts of the connecting bolts are located in the countersunk holes. When the carrier plate body and the carrier plate mother frame are fixedly connected, the nut parts of the connecting bolts do not protrude from the carrier plate mother frame, so that the side of the carrier plate mother frame away from the fastening nut presents a plane, which can ensure the uniformity of the gas flow field in the coating process.

[0019] In some embodiments, one of the carrier plate mother frame and the carrier plate body is provided with a plug-in part, and the other is provided with a plug-in hole. When the carrier plate mechanism is suspended, the plug-in part is inserted into the plug-in hole in the vertical direction to connect the carrier plate mother frame and the carrier plate body. In this way, the carrier plate mother frame and the carrier plate body can be fixedly connected when the fastening nut is not tightened, achieving a pre-fixing effect and further facilitating the suspension of the carrier plate body.

[0020] Another object of the present invention is to provide a coating equipment with a relatively high coating efficiency.

[0021] To achieve this purpose, the present invention adopts the following technical solutions:

[0022] Coating equipment, which has a coating cavity, and the above-mentioned carrier plate mechanism is installed in the coating cavity.

[0023] The beneficial effects of the coating equipment of the present utility model are as follows. By providing the above-mentioned carrier plate mechanism, the installation, fixation, and separation of the sheet material can be achieved on the carrier plate body through the rotation of the pressing and fixing component. The operation is convenient and fast, and it is easy to realize the automatic installation, fixation, and separation on the carrier plate body through feeding equipment such as manipulators and robots, thereby efficiently realizing the coating process of a large number of sheet materials, improving the coating efficiency and reducing the coating cost. Brief Description of the Drawings

[0024] Figure 1 is the front view structural diagram of the carrier plate mechanism provided by the present utility model;

[0025] Figure 2 is Figure 1 the partial enlarged view at A in

[0026] Figure 3 is the cross-sectional schematic diagram of the pressing and fixing component connected to the carrier plate body in the present utility model;

[0027] Figure 4 is the front view structural diagram of the carrier plate body provided by the present utility model;

[0028] Figure 5 is Figure 4 the partial enlarged view at C in

[0029] Figure 6 is the rear view structural diagram of the carrier plate mechanism provided by the present utility model;

[0030] Figure 7 is the rear view structural diagram of the carrier plate mother frame in the present utility model;

[0031] Figure 8 is the first cross-sectional schematic diagram of the carrier plate body connected to the carrier plate mother frame in the present utility model;

[0032] Figure 9 is Figure 1 the partial enlarged view at B in

[0033] Figure 10 is the rear view structural diagram of the carrier plate mother frame provided by the present utility model;

[0034] Figure 11 is Figure 10 the partial cross-sectional view at D in

[0035] Figure 12 is the second cross-sectional schematic diagram of the carrier plate body connected to the carrier plate mother frame in the present utility model.

[0036] In the figures:

[0037] 1. Carrier board body; 101. Protrusion; 102. Limit groove; 103. Clamping groove; 104. Through groove; 105. Magnetic part; 106. Installation groove; 107. Demolition hole; 108. Rotating shaft groove; 109. Fixing hole; 1091. Large diameter part; 1092. Small diameter part; 110. Second fixing part; 1101. Insertion hole; 111. Installation part;

[0038] 2. Pressing and fixing assembly; 201. Contact part; 202. Rotating part; 2021. Rotating shaft; 2022. Handle part;

[0039] 3. Carrier board mother frame; 301. Protection board; 302. Square tube; 303. Steel plate; 304. Connecting bolt; 305. Fastening nut; 306. Countersunk hole; 307. First fixing part; 308. Insertion part. Detailed implementation manner

[0040] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the convenience of description, only parts related to the present utility model rather than all structures are shown in the drawings.

[0041] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0042] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above", and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature is at a higher horizontal height than the second feature. The first feature being "below", "below", and "under" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature is at a lower horizontal height than the second feature.

[0043] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "right", etc. are based on the orientation or positional relationships shown in the drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0044] Next, according to the attached Figure 1 to the attached Figure 12 This paper introduces the carrier plate mechanism and coating equipment provided by the present utility model.

[0045] As Figure 1 shown, in the present utility model, the carrier plate mechanism mainly includes a carrier plate mother frame 3 and a carrier plate body 1. Among them, the carrier plate mother frame 3 can be fixedly arranged in the coating cavity of the coating equipment, and the carrier plate body 1 is detachably installed on the carrier plate mother frame 3. Before the coating process, the carrier plate body 1 can be separated from the carrier plate mother frame 3, and the sheet to be coated (such as a solar cell, a glass sheet, etc.) can be installed on the carrier plate body 1. A clamping groove 103 is arranged at the edge of the carrier plate body 1, which can facilitate the automatic clamping and moving by means of a robot or a manipulator, so as to install the carrier plate body 1 on the carrier plate mother frame 3.

[0046] After the installation is completed, the carrier plate body 1 can be installed on the carrier plate mother frame 3 and placed in the coating cavity in a hanging manner to carry out the coating process. After the coating is completed, the carrier plate body 1 is separated from the carrier plate mother frame 3, and the sheet can be separated from the carrier plate body 1, or detected or other processing processes can be carried out together with the carrier plate body 1. At least part of the surface of the carrier plate mother frame 3 is covered with a detachable protective plate 301 in a threaded connection or other manner. After the protective plate 301 and the carrier plate body 1 are coated together in the coating process, it will have a negative impact on the coating of the subsequent batches of sheets. At this time, the negative impact can be avoided by replacing the protective plate 301 or the carrier plate body 1.

[0047] As Figure 1 , Figure 2 shown, in this embodiment, the carrier plate body 1 is processed from an integral steel plate 303 and has high flatness and parallelism. A plurality of convex portions 101 are arranged on the carrier plate body 1, and limiting grooves 102 are defined between the convex portions 101. Each limiting groove 102 can limit and accommodate a solar cell. When the solar cell is placed in the limiting groove 102, the bottom wall and side walls of the limiting groove 102 can limit and abut against the bottom surface and four side surfaces of the solar cell. More specifically, in this embodiment, a through groove 104 is further arranged on the bottom wall of the limiting groove 102. The through groove 104 can not only reduce the weight of the carrier plate body 1, but also meet the need for coating the bottom surface and top surface of the sheet at the same time.

[0048] Continue to refer to Figure 1 、 Figure 2 The carrier plate mechanism further includes a pressing and fixing component 2, which can facilitate the fixing of the sheet material. Specifically, an installation portion 111 is formed between multiple adjacent limiting grooves 102. The pressing and fixing component 2 is disposed in the installation portion 111 and is rotatably connected to the carrier plate main body 1, and can rotate to a first preset angle and a second preset angle along a direction parallel to the carrier plate main body 1. The pressing and fixing component 2 includes an abutting member 201. When the pressing and fixing component 2 rotates to the first preset angle, the abutting member 201 is located at a position away from the notch of the limiting groove 102, and the sheet material can enter and leave the limiting groove 102 through the notch. Among them, the first preset angle can be 30 degrees, 45 degrees, 60 degrees, 90 degrees, etc. When the pressing and fixing component 2 rotates to the second preset angle, the abutting member 201 is located at the notch of the limiting groove 102, and stops the sheet material located in the limiting groove 102 along a direction perpendicular to the limiting groove 102, so that the sheet material can be fixed between the pressing and fixing component 2 and the limiting groove 102. Among them, the second preset angle can be 30 degrees, 45 degrees, 60 degrees, 90 degrees, etc.

[0049] Through the above carrier plate mechanism, the installation, fixing and separation of the sheet material can be realized on the carrier plate main body 1 by rotating the pressing and fixing component 2. The operation is convenient and fast, and it is easy to realize the automatic installation, fixing and separation on the carrier plate main body 1 through feeding equipment such as manipulators and robots, so as to efficiently realize the coating process of a large number of sheet materials, which not only improves the coating efficiency but also reduces the coating cost.

[0050] As Figure 2 、 Figure 3 shown, in this embodiment, the pressing and fixing component 2 includes a rotating member 202 and an abutting member 201. The rotating member 202 is integrally provided with a rotating shaft 2021. The rotating shaft 2021 is rotatably inserted and connected to the carrier plate main body 1. The abutting member 201 is connected to the rotating member 202 along the radial direction of the rotating shaft 2021 and is arranged at a certain distance from the bottom wall of the limiting groove 102, so as to clamp and fix the sheet material when the pressing and fixing component 2 rotates to the second preset angle. Preferably, a handle portion 2022 is provided on the rotating member 202 to facilitate the rotation operation.

[0051] Of course, in some other embodiments, the rotating shaft 2021 can also be fixedly arranged on the carrier plate main body 1 and rotatably inserted into the rotating member 202, which can also realize the rotation of the pressing and fixing component 2 and also belongs to the range where the rotating shaft 2021 is rotatably connected between the rotating member 202 and the carrier plate main body 1.

[0052] Continue to refer to Figure 1 、 Figure 2As shown, in this embodiment, a plurality of protruding portions 101 extend independently along the length direction and the width direction of the carrier body 1, so that a plurality of limiting grooves 102 are arranged in an array, and are arranged in at least two rows and at least two columns, so as to arrange more limiting grooves 102 on one carrier body 1 and make full use of the surface area of the carrier body 1. A pressing and fixing assembly 2 is arranged at each vertex of each limiting groove 102, and the pressing and fixing assembly 2 can abut and limit a corner of the sheet material in at least two adjacent limiting grooves 102.

[0053] Exemplarily, for the pressing and fixing assembly 2 located at the edge of the carrier body 1, it can simultaneously abut and limit a corner of the sheet material in two limiting grooves 102 arranged in a row or the limiting grooves 102 arranged in a column. As Figure 2 shown, for the pressing and fixing assembly 2 located between four pairwise adjacent limiting grooves 102, each rotating member 202 is connected with four abutting members 201, and the four abutting members 201 are evenly spaced along the circumferential direction of the rotating member 202. When the pressing and fixing assembly 2 rotates to the second preset angle, each abutting member 201 can correspondingly abut against a sheet material, so that the pressing and fixing assembly 2 can simultaneously abut and limit a corner of the four sheet materials located in these four limiting grooves 102.

[0054] Of course, in some other embodiments, depending on the specific arrangement of the limiting grooves 102, the rotating member 202 can also be connected with one, three or even more abutting members 201 to abut and limit the sheet material. Moreover, one abutting member 201 can abut against one sheet material, or multiple abutting members 201 can abut against one sheet material, or the shape of the abutting member 201 can be changed to simultaneously abut against multiple sheet materials. The present utility model does not make specific limitations thereto.

[0055] Referring to Figure 3 shown, in some embodiments, a rotating shaft hole is arranged on the carrier body 1, and the rotating shaft 2021 is rotatably inserted into the rotating shaft hole and is arranged at an adjustable distance from the carrier body 1. Specifically, the carrier body 1 is provided with a magnetic member 105, and the rotating member 202 is made of a magnetic metal material or is provided with an adsorbing member that can be adsorbed by the magnetic member 105, so that the magnetic member 105 can adsorb and fix the rotating member 202.

[0056] It can be understood that as long as it is within the range where the magnetic member 105 can adsorb and fix, the pressing and fixing assembly 2 can have the ability to press and fix the sheet material. At this time, the depth of the rotating shaft 2021 inserted into the rotating shaft hole is adjustable, so that the distance between the abutting member 201 and the bottom wall of the limiting groove 102 can be changed according to the specific thickness of the sheet material, so as to meet the fixing requirements of sheet materials with different thicknesses.

[0057] Preferably, an installation groove 106 is provided on one side of the carrier plate body 1 where the limiting groove 102 is provided. The magnetic member 105 is a magnet, and the magnet is arranged in the installation groove 106. On the other side of the carrier plate body 1, a removal hole 107 is provided. The removal hole 107 is communicated with the installation groove 106 and penetrates through the carrier plate body 1, and the inner diameter of the removal hole 107 is smaller than that of the installation groove 106. When the magnet is arranged in the installation groove 106, it can be fixed by interference fit or glue. When removal is needed, tools such as a screwdriver can be inserted into the removal hole 107 and abutted against the magnet, and then pushed out of the installation groove 106, so as to facilitate the replacement of the magnet.

[0058] In this embodiment, the rotating shaft 2021 is arranged deviating from the geometric center of the rotating member 202, and when the magnetic member 105 adsorbs and fixes the rotating member 202, the projection of the geometric center of the rotating member 202 on the carrier plate body 1 in a direction perpendicular to the rotating member 202 falls on the magnetic member 105. As Figure 2 、 Figure 3 shown, the rotating member 202 is cylindrical, the abutting member 201 is arranged on its outer peripheral surface, and the rotating shaft 2021 is arranged on the end surface of the rotating member 202 and is spaced from the center of the circle. When the pressing and fixing assembly 2 rotates to the second preset angle, the magnetic member 105 is exactly in a position relative to the center of the circle, which can not only fully attract the rotating member 202, effectively fix the sheet material, but also prevent the rotating member 202 from continuing to rotate, avoiding scratching the surface of the sheet material or even causing the sheet material to fall off.

[0059] Furthermore, in this embodiment, as Figure 4 、 Figure 5 shown, a rotating shaft groove 108 is provided on the carrier plate body 1. The rotating shaft groove 108 can be a circular arc groove, a straight groove, etc. The rotating shaft 2021 can slide from one end of the rotating shaft groove 108 to the other end along the rotating shaft groove 108. The rotating shaft 2021 is inserted into the rotating shaft groove 108, and can not only rotate in the rotating shaft groove 108, but also slide between the two ends of the rotating shaft groove 108. Compared with setting a rotating shaft hole, the rotating shaft groove 108 can realize two moving modes of rotating the rotating shaft 2021 and sliding the rotating shaft 2021, further facilitating the adjustment of the pressing and fixing assembly 2 so as not to block the notch of the limiting groove 102, so that more limiting grooves 102 can be provided on the carrier plate body 1 with the same area, and further improving the coating efficiency.

[0060] As Figure 6 、 Figure 7 shown, the carrier plate mother frame 3 is made by welding a square tube 302 and a steel plate 303, which has high structural strength, and using the square tube 302 can effectively reduce the weight of the carrier plate mother frame 3, so as to facilitate increasing the number of limiting grooves 102 on the carrier plate body 1 on the basis of meeting the hanging weight and the overall structural strength. As Figure 8 、Figure 9 As shown in the figure, the connection bolts 304 are passed through the carrier board mother frame 3, and fastening nuts 305 are sleeved on the connection bolts 304. The carrier board main body 1 is provided with fixing holes 109. The connection bolts 304 can pass through the fixing holes 109, and the fastening nuts 305 can fix and press the carrier board main body 1 against the carrier board mother frame 3. Both the connection bolts 304 and the fastening nuts 305 are detachable structures. When they are coated together during the coating process, it will have a negative impact on the coating of other subsequent sheets. At this time, the negative impact can be avoided by replacing the connection bolts 304 and the fastening nuts 305.

[0061] Preferably, as Figure 4 、 Figure 9 shown, the fixing hole 109 is a gourd-shaped hole. The gourd-shaped hole has a large-diameter part 1091 and a small-diameter part 1092 that are connected. The diameter of the large-diameter part 1091 is greater than the outer diameter of the fastening nut 305, and the diameter of the small-diameter part 1092 is less than the outer diameter of the fastening nut 305. When hanging the carrier board main body 1, the fastening nut 305 can be directly passed through the large-diameter part 1091 without completely removing the fastening nut 305, and the small-diameter part 1092 can be moved between the fastening nut 305 and the carrier board mother frame 3. At this time, the large-diameter part 1091 is located below the small-diameter part 1092. Under the action of gravity, it can prevent the connection bolt 304 from moving to the large-diameter part 1091, thereby preventing the fastening nut 305 from passing through the large-diameter part 1091 again and causing the separation of the carrier board main body 1 and the carrier board mother frame 3. By tightening the fastening nut 305, the carrier board main body 1 can be fixedly connected to the carrier board mother frame 3. The gourd-shaped hole can prevent the removal of the fastening nut 305, greatly facilitating the installation of the carrier board main body 1 and making it easy to realize the automatic hanging of the carrier board main body 1, thereby further accelerating the coating efficiency.

[0062] Furthermore, as Figures 9 to 11 shown, the carrier board mother frame 3 is provided with countersunk holes 306. The connection bolts 304 are passed through the countersunk holes 306, and the nut parts of the connection bolts 304 are located in the countersunk holes 306. After the carrier board main body 1 and the carrier board mother frame 3 are fixedly connected, the nut parts of the connection bolts 304 do not protrude from the carrier board mother frame 3, so that the side of the carrier board mother frame 3 away from the fastening nut 305 presents a plane, which can ensure the uniformity of the gas field flow during the coating process.

[0063] As Figure 12As shown in the figure, in this embodiment, the carrier plate mother frame 3 is threadedly connected with a first fixing member 307, and a plug-in member 308 is arranged on the first fixing member 307. The carrier plate main body 1 is threadedly connected with a second fixing member 110, and a plug-in hole 1101 is arranged on the second fixing member 110. The plug-in member 308 is selected as a plug pin, and when the carrier plate mechanism is suspended, the plug-in member 308 can be inserted into the plug-in hole 1101 in the vertical direction, so that the carrier plate mother frame 3 and the carrier plate main body 1 can be fixedly connected when the fastening nut 305 is not tightened, achieving a pre-fixing effect and further facilitating the suspension of the carrier plate main body 1.

[0064] The present invention also provides a coating device, which has a coating chamber, and the above-mentioned carrier plate mechanism is arranged in the coating chamber. By arranging the above-mentioned carrier plate mechanism, the installation, fixation and separation of the sheet material can be realized by rotating the pressing and fixing component 2 on the carrier plate main body 1, the operation is convenient and fast, and it is easy to realize the automatic installation, fixation and separation on the carrier plate main body 1 through feeding equipment such as manipulators and robots, so as to efficiently realize the coating process of a large number of sheet materials, improving both the coating efficiency and reducing the coating cost.

[0065] Obviously, the above-mentioned embodiments of the present invention are only examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A plate carrier mechanism, used for carrying sheets, characterized in that: The plate carrier mechanism comprises: A carrier body, wherein a plurality of limiting grooves are provided on the carrier body, wherein the limiting grooves are used to accommodate the sheet material, and the bottom wall and the side wall of the limiting grooves can be limitedly abutted against the sheet material, and a mounting portion is formed between a plurality of adjacent limiting grooves; A clamping and fixing assembly is arranged on the mounting portion and is rotatably connected to the carrier body. The clamping and fixing assembly is configured so that when the clamping and fixing assembly is rotated to a first preset angle, the sheet material can enter and leave the limiting groove, and when the clamping and fixing assembly is rotated to a second preset angle, the clamping and fixing assembly stops the sheet material in a direction perpendicular to the limiting groove so that the sheet material can be fixed between the clamping and fixing assembly and the limiting groove.

2. The plate carrier mechanism according to claim 1, characterized in that: The pressing and fixing assembly comprises a rotating member and an abutting member. A rotating shaft is rotatably connected between the rotating member and the carrier body. The abutting member is connected to the rotating member along the radial direction of the rotating shaft.

3. The plate carrier mechanism according to claim 2, characterized in that: The rotating member is connected to four abutting members, which are evenly spaced along the circumferential direction of the rotating member, and when the pressing and fixing assembly is rotated to a second preset angle, each abutting member can abut against one of the sheets.

4. The plate carrier mechanism according to claim 2, characterized in that: The distance between the rotating member and the carrier body is adjustable, and the carrier body is provided with a magnetic member, and the magnetic member is used to adsorb and fix the rotating member. The rotating shaft is arranged to deviate from the geometric center of the rotating member, and when the magnetic member adsorbs and fixes the rotating member, the projection of the geometric center of the rotating member on the carrier body along a direction perpendicular to the rotating member falls on the magnetic member.

5. The plate carrier mechanism according to claim 4, characterized in that: The carrier body is provided with a rotation shaft groove, and the rotation shaft is rotatably inserted in the rotation shaft groove and can slide from one end of the rotation shaft groove to the other end of the rotation shaft groove.

6. The plate carrier mechanism according to claim 4, characterized in that: The carrier body is provided with a mounting groove at the position of the mounting portion, the magnetic member is arranged in the mounting groove, a removal hole is arranged in the mounting groove, and the removal hole penetrates the carrier body, and the inner diameter of the removal hole is smaller than the inner diameter of the mounting groove.

7. The plate carrier mechanism according to any one of claims 1 to 6, characterized in that: The carrier mechanism also includes a carrier mother frame, the carrier body can be detachably installed on the carrier mother frame, the carrier mother frame can be fixedly set in the coating chamber of the coating equipment, and at least part of the surface of the carrier mother frame is covered with a detachable protective plate.

8. The plate carrier mechanism according to claim 7, characterized in that: The carrier mother frame is provided with connecting bolts, and the connecting bolts are sleeved with fastening nuts. The carrier body is provided with fixing holes, the connecting bolts can be inserted into the fixing holes, and the fastening nuts can fix and press the carrier body to the carrier mother frame. The fixing hole is a gourd hole, and the gourd hole has a large diameter portion and a small diameter portion that are connected, the diameter of the large diameter portion is larger than the outer diameter of the fastening nut, and the diameter of the small diameter portion is smaller than the outer diameter of the fastening nut, and, When the plate carrying mechanism is suspended, the large diameter portion is located below the small diameter portion.

9. The plate carrier mechanism according to claim 8, characterized in that: The carrier mother frame is provided with a countersunk hole, the connecting bolt is passed through the countersunk hole, and the nut part of the connecting bolt is located in the countersunk hole.

10. The plate carrier mechanism according to claim 7, characterized in that: One of the carrier mother frame and the carrier body is provided with a plug-in component, and the other is provided with a plug-in hole. When the carrier mechanism is suspended, the plug-in component is inserted into the plug-in hole along the vertical direction to connect the carrier mother frame and the carrier body.

11. A coating device, characterized in that: The coating equipment comprises a coating chamber, in which the plate carrier mechanism as claimed in any one of claims 1 to 10 is installed.

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