Linear heating and cooling clean oven
By designing a linear cooling clean oven, the problem that the existing oven cannot ensure a clean drying environment is solved, and the clean, oxygen-free and efficient cooling functions of baking in the semiconductor industry are realized.
Patent Information
- Application Number
- CN202421876728.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-05
- Publication Date
- 2025-06-13
- Estimated Expiration
- 2034-08-05
AI Technical Summary
The existing ovens used in the semiconductor industry cannot guarantee the cleanliness of the drying environment, affect the quality of adult semiconductors, and are prone to produce bad products.
A clean oven with linear cooling is designed, including a control panel, a circulation fan, a filter, a quartz heating pipe and multiple placing racks to ensure the cleanliness and oxygen-free drying environment and has linear cooling function.
When drying, the oven has the advantages of a clean environment, an oxygen-free environment and linear cooling. It discharges toxic gases through the exhaust valve, the temperature controller controls the temperature, and the heat dissipation port performs heat dissipation treatment to ensure the efficient operation and long life of the oven.
Smart Images

Figure CN222978474U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of ovens, and particularly to a clean oven with linear temperature rise and fall. Background Technique
[0002] An oven is a type of drying equipment, also known as a baking machine. Ovens are widely used in precision baking, drying, and shaping processes of optoelectronics, electronics, motors, communications, electroplating, plastics, mechanical equipment, etc.
[0003] Existing ovens used in the semiconductor industry cannot ensure the cleanliness of the drying environment during their operation, which will affect the quality of the finished semiconductor and easily result in the production of defective products.
[0004] Therefore, it is very necessary to propose a clean oven with linear temperature rise and fall to solve the above problems. Content of the Utility Model
[0005] The main purpose of the utility model is to provide a clean oven with linear temperature rise and fall, which can effectively solve the problems in the background technique.
[0006] To achieve the above purpose, the technical solution adopted by the utility model is as follows:
[0007] A clean oven with linear temperature rise and fall includes an oven body. A control panel is installed at the top of the outer wall of the oven body. A first inspection plate is threadedly connected to the side of the top of the oven body. A circulation fan is fixedly connected to the top of the inner cavity of the oven body. A filter is installed on the side of the inner cavity of the oven body. A placement rack is arranged on the side of the filter. A quartz heating tube is fixedly connected to the top of the inner cavity of the oven body.
[0008] Preferably, a door is rotatably connected to the outer wall of the oven body. A box lock is installed on the outer wall of the oven body. The door is locked to the outer wall of the oven body through the box lock. Universal wheels are symmetrically and fixedly connected to the four corners of the bottom of the oven body.
[0009] Preferably, an exhaust valve is installed at the top of the outer wall of the oven body. A temperature controller is fixedly connected to the top of the outer wall of the oven body. A three-color lamp is fixedly connected to the top of the first inspection plate.
[0010] Preferably, a first heat dissipation port and a second heat dissipation port are opened at the top of the outer wall of the oven body. A switch button is installed at the top of the side of the outer wall of the oven body. A second inspection plate is threadedly connected to the outer wall of the oven body. Both the first heat dissipation port and the second heat dissipation port are communicated with the inner cavity of the oven body.
[0011] Preferably, a circulation fan is installed on the front of the circulation fan. Mounting frames are symmetrically and fixedly connected to the top and bottom of the side of the inner cavity of the oven body. The filter is installed in the inner cavity of the oven body through the mounting frames.
[0012] Preferably, the placement rack is fixedly connected in the inner cavity of the oven body. The number of the placement racks is at least eight. The quartz heating tubes are installed in the inner cavity of the oven body. The quartz heating tubes communicate with the inner cavity of the air duct. The air duct and the inner cavity of the filter communicate with each other. An air inlet is fixedly connected to the top of the oven body. The air inlet communicates with the inner cavity of the filter.
[0013] Advantages
[0014] Compared with the prior art, the utility model has the following beneficial effects:
[0015] 1. This linearly heated and cooled clean oven can be used for baking in the semiconductor industry. When this oven is performing the drying work, it has the advantages of a clean environment, an oxygen-free environment, and linearly heated and cooled. Through the set three-color lamp, the working condition of the oven body can be directly monitored. Through the set control panel, it is convenient to control the oven body. By starting the set exhaust valve, it is convenient for the oven body to perform the exhaust work, so as to facilitate the discharge of toxic gases. Through the set temperature controller, the temperature can be controlled according to the use requirements.
[0016] 2. This linearly heated and cooled clean oven, through the set first heat dissipation port and second heat dissipation port, is convenient for heat dissipation treatment when the oven body is working, so as to effectively improve its working life and efficiency. Through the detachable first maintenance plate and second maintenance plate, it is convenient to maintain the inside of the oven body.
[0017] 3. This linearly heated and cooled clean oven, by starting the set circulation fan, can perform heat dissipation treatment on the oven body through the air duct. And through the set filter, the air for heat dissipation can be filtered. At the same time, through the set mounting frames, it is convenient to disassemble and maintain the filter. By starting the set quartz heating tubes, the inner cavity of the oven body can be heated up, which is convenient for drying the materials. Through the set multiple placement racks, it is convenient to place the materials, so as to facilitate the drying treatment. Description of the Drawings
[0018] Figure 1 is the front structural schematic diagram of the utility model;
[0019] Figure 2 is the side structural schematic diagram of the utility model;
[0020] Figure 3This is a schematic structural diagram of the inner cavity of the utility model.
[0021] In the figure: 1. Oven body; 2. Door; 3. Universal wheel; 4. Box lock; 5. Exhaust valve; 6. Control panel; 7. Switch button; 8. Temperature controller; 9. Three-color lamp; 10. First inspection plate; 11. Air inlet; 12. First heat dissipation port; 13. Second heat dissipation port; 14. Second inspection plate; 15. Circulation fan; 16. Air duct; 17. Quartz heating tube; 18. Filter; 19. Mounting rack; 20. Placing rack. Specific embodiments
[0022] In order to make the technical means, creative features, achieved purposes and functions of the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments.
[0023] As Figures 1 - 3 shown, a clean oven with linear temperature rise and fall includes an oven body 1. A control panel 6 is installed at the top of the outer wall of the oven body 1. A first inspection plate 10 is threadedly connected to the side of the top of the oven body 1. A circulation fan 15 is fixedly connected to the top of the inner cavity of the oven body 1. A filter 18 is installed on the side of the inner cavity of the oven body 1. A placing rack 20 is arranged on the side of the filter 18. A quartz heating tube 17 is fixedly connected to the top of the inner cavity of the oven body 1. A door 2 is rotatably connected to the outer wall of the oven body 1. A box lock 4 is installed on the outer wall of the oven body 1. The door 2 is locked to the outer wall of the oven body 1 through the box lock 4. Universal wheels 3 are symmetrically and fixedly connected to the four sides of the bottom of the oven body 1. An exhaust valve 5 is installed at the top of the outer wall of the oven body 1. A temperature controller 8 is fixedly connected to the top of the outer wall of the oven body 1. A three-color lamp 9 is fixedly connected to the top of the first inspection plate 10. First heat dissipation ports 12 and second heat dissipation ports 13 are opened at the top of the outer wall of the oven body 1. A switch button 7 is installed at the top of the side of the outer wall of the oven body 1. A second inspection plate 14 is threadedly connected to the outer wall of the oven body 1. Both the first heat dissipation port 12 and the second heat dissipation port 13 communicate with the inner cavity of the oven body 1. A circulation fan 15 is installed on the front of the circulation fan 15. Mounting racks 19 are symmetrically and fixedly connected to the top and bottom of the side of the inner cavity of the oven body 1. The filter 18 is installed in the inner cavity of the oven body 1 through the mounting rack 19. The placing rack 20 is fixedly connected in the inner cavity of the oven body 1. The number of the placing racks 20 is at least eight. The quartz heating tube 17 is installed in the inner cavity of the oven body 1. The quartz heating tube 17 communicates with the inner cavity of the air duct 16. The air duct 16 communicates with the inner cavity of the filter 18. An air inlet 11 is fixedly connected to the top of the oven body 1. The air inlet 11 communicates with the inner cavity of the filter 18;
[0024] It can be used for baking in the semiconductor industry. This oven has the advantages of a clean environment, an oxygen-free environment, and linear temperature rise and fall during the drying process. Through the set three-color lamp 9, the working condition of the oven body 1 can be directly monitored. Through the set control panel 6, it is convenient to control the oven body 1. By starting the set exhaust valve 5, it is convenient for the oven body 1 to exhaust air, so as to facilitate the discharge of toxic gases. Through the set temperature controller 8, the temperature can be controlled according to the usage requirements. Through the set first heat dissipation port 12 and second heat dissipation port 13, when the oven body 1 is working, it is convenient to dissipate heat from it, thereby effectively improving its service life and efficiency. Through the detachable first inspection plate 10 and second inspection plate 14, it is convenient to maintain the inside of the oven body 1. By starting the set circulation fan 15, heat dissipation can be carried out on the oven body 1 through the air duct 16, and through the set filter 18, the air for heat dissipation can be filtered. At the same time, through the set mounting rack 19, it is convenient to disassemble and maintain the filter 18. By starting the set quartz heating tube 17, the temperature of the inner cavity of the oven body 1 can be raised, facilitating the drying of materials. Through the set multiple placement racks 20, it is convenient to place materials, thus facilitating their drying process.
[0025] It should be noted that the present utility model is a clean oven with linear temperature rise and fall. When in use, open the box lock 4 to open the box door 2, place the material to be dried at the placement rack 20, close the box door 2, start the quartz heating tube 17 and the circulation fan 15. The air enters the filter 18 for filtration and then contacts the material to carry out the drying process. The temperature of the oven body 1 is controlled by the temperature controller 8. When the drying is completed, open the box door 2, take out the material, close the quartz heating tube 17, start the circulation fan 15, and dissipate heat from the inner cavity of the oven body 1. The excess heat flows out from the second heat dissipation port 13 and the first heat dissipation port 12, thus facilitating the subsequent drying of materials.
[0026] The above shows and describes the basic principles, main features, and advantages of the present utility model. Those skilled in the art of this industry should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.
Claims
1. A clean oven with linear temperature rise and fall, comprising an oven body (1), characterized in that: A control panel (6) is installed on the top of the outer wall of the oven body (1); a first inspection panel (10) is threadedly connected to the side of the top of the oven body (1); a circulating fan (15) is fixedly connected to the top of the inner cavity of the oven body (1); a filter (18) is installed on the side of the inner cavity of the oven body (1); a placement rack (20) is provided on the side of the filter (18); and a quartz heating tube (17) is fixedly connected to the top of the inner cavity of the oven body (1).
2. A clean oven with linear temperature rise and fall according to claim 1, characterized in that: The outer wall of the oven body (1) is rotatably connected to a door (2), the outer wall of the oven body (1) is provided with a lock (4), the door (2) is locked to the outer wall of the oven body (1) by the lock (4), and universal wheels (3) are symmetrically fixedly connected to the four sides of the bottom of the oven body (1).
3. A clean oven with linear temperature rise and fall according to claim 1, characterized in that: An exhaust valve (5) is installed on the top of the outer wall of the oven body (1), a temperature controller (8) is fixedly connected to the top of the outer wall of the oven body (1), and a three-color lamp (9) is fixedly connected to the top of the first inspection panel (10).
4. A clean oven with linear temperature rise and fall according to claim 1, characterized in that: A first heat dissipation port (12) and a second heat dissipation port (13) are provided at the top of the outer wall of the oven body (1); a switch button (7) is installed at the top of the side of the outer wall of the oven body (1); a second inspection plate (14) is threadedly connected to the outer wall of the oven body (1); and the first heat dissipation port (12) and the second heat dissipation port (13) are both in communication with the inner cavity of the oven body (1).
5. The clean oven with linear temperature rise and fall according to claim 1, characterized in that: A circulating fan (15) is installed on the front side of the circulating fan (15), and mounting brackets (19) are symmetrically fixedly connected to the top and bottom of the inner cavity side of the oven body (1), and the filter (18) is installed in the inner cavity of the oven body (1) through the mounting brackets (19).
6. The clean oven with linear temperature rise and fall according to claim 1, characterized in that: The placement rack (20) is fixedly connected to the inner cavity of the oven body (1), and the number of the placement racks (20) is at least eight. The quartz heating tube (17) is installed in the inner cavity of the oven body (1), and the quartz heating tube (17) is communicated with the inner cavity of the air duct (16), and the inner cavity of the air duct (16) and the filter (18) are communicated. The top of the oven body (1) is fixedly connected with an air inlet (11), and the air inlet (11) is communicated with the inner cavity of the filter (18).