Self-frequency-stabilizing optical machine assembly for gas detection

Abstract

The utility model belongs to the technical field of gas detection, and provides a self-frequency-stabilizing optical machine assembly for gas detection, which comprises a shell connected with a laser, a first detection detector and a reference detector. A detection gas chamber is arranged in the shell; the detection gas chamber is provided with a beam splitter which is located on an emergent light path of the laser; the detection end of the reference detector is located on a first split light path split by the beam splitter; the detection end of the first detection detector is located on a second split light path split by the beam splitter, and the second split light path penetrates through the detection gas chamber. According to the optical machine assembly, the light splitting sheet is used, so that gas isolation and sealing between a reference optical path and a measurement optical path are guaranteed, and optical frequency self-calibration of the laser is achieved. In addition, welding and fixing are achieved through the adjusting sleeve, and use under complex working conditions is met.

Description

Technical Field

[0001] The utility model belongs to the technical field of gas detection, and particularly relates to a self-frequency-stabilized optomechanical component for gas detection. Background Art

[0002] TDLAS technology (Tunable Diode Laser Absorption Spectroscopy) is based on a tunable diode laser and uses the "frequency selection" characteristic of the measured gas molecules to realize the measurement of the characteristics of the measured gas. The "frequency selection" characteristic of gas molecules for light waves avoids the cross-interference of other irrelevant gas components and has become the preferred solution for current precise real-time online gas detection systems. Its characteristics of fast response speed and low measurement lower limit are particularly suitable for the measurement of dangerous gases such as methane, carbon monoxide, carbon dioxide, oxygen, ammonia, and hydrogen sulfide. Since the late 1990s, gas detection solutions and devices based on TDLAS technology have emerged in large numbers, and various measurement methods such as fixed test systems, distributed test systems, and telemetry test systems have appeared in the industrial application field.

[0003] The existing devices for realizing gas online detection based on TDLAS technology mainly have the following technical problems:

[0004] (1) The fully integrated optomechanical component used in the current real-time online detector does not have a self-frequency-stabilizing function. During the change of the use environment temperature, due to the drift of the center wavelength of the laser, problems such as low measurement accuracy of the online detection device and even false alarms will occur. This problem will cause huge management losses in special working condition places such as coal mines.

[0005] (2) The fully integrated optomechanical component used in the current real-time online detector is basically a glue-fixed mechanism, that is, the laser and the detector component are both glued and fixed on the gas chamber after coupling. This method has low production efficiency and poor reliability. It cannot meet the use in complex working conditions such as oil and gas and corrosive gases.

[0006] (3) Due to the unreasonable design of the optical component links inside the fully integrated optomechanical component used in the current real-time online detector, serious optical interference occurs inside the optomechanical component, resulting in high optical noise of the optomechanical component, and it changes with the change of the use environment temperature and cannot be filtered out by algorithms. Therefore, the zero point of the real-time online detector often drifts when used in different temperature working conditions. Content of the Utility Model

[0007] The purpose of the utility model is to overcome the problems in the prior art such as low measurement accuracy, serious internal optical interference, and inability to meet complex working conditions.

[0008] To this end, the present utility model provides a self-frequency-stabilizing optomechanical component for gas detection, comprising a housing, wherein a laser, a first detection detector, and a reference detector for optical frequency self-calibration are connected to the housing; a detection gas chamber is provided inside the housing; a beam splitter is provided in the detection gas chamber, and the beam splitter is located on the optical path of the emitted light of the laser; the detection end of the reference detector is located on the first split optical path split by the beam splitter; the detection end of the first detection detector is located on the second split optical path split by the beam splitter, and the second split optical path passes through the detection gas chamber.

[0009] Specifically, the above-mentioned self-frequency-stabilizing optomechanical component for gas detection further comprises a laser adjustment sleeve, a detection detector adjustment sleeve, and a reference detector adjustment sleeve; the laser is coupled and installed on the housing through the laser adjustment sleeve; the first detection detector is coupled and installed on the housing through the detection detector adjustment sleeve; the reference detector is coupled and installed on the housing through the reference detector adjustment sleeve.

[0010] Specifically, the laser is welded to the laser adjustment sleeve; the laser adjustment sleeve is welded to the housing; the first detection detector is welded to the detection detector adjustment sleeve; the detection detector adjustment sleeve is welded to the housing; the reference detector is welded to the reference detector adjustment sleeve; the reference detector adjustment sleeve is welded to the housing.

[0011] Specifically, the above-mentioned reference detector comprises a second detection detector and a reference gas chamber; the detection end of the second detection detector is arranged at the light outlet of the reference gas chamber; both the light inlet and the light outlet of the reference gas chamber are located on the first split optical path split by the beam splitter.

[0012] Specifically, a total reflection device is provided inside the detection gas chamber; the total reflection device is located on the second split optical path split by the beam splitter; the detection end of the first detection detector is located on the reflected light optical path of the total reflection device.

[0013] Specifically, a sealing lens is provided at the light outlet of the detection gas chamber.

[0014] Specifically, the incident surface of the beam splitter is coated with a semi-transparent and semi-reflective dielectric film, and the outgoing surface is coated with an anti-reflection film.

[0015] Specifically, the above-mentioned self-frequency-stabilizing optomechanical component for gas detection further comprises a temperature and pressure sensor for sensing the temperature and pressure inside the detection gas chamber.

[0016] Specifically, a split inclined plane is provided at the light inlet of the detection gas chamber; a split outlet hole is opened on the split inclined plane; the beam splitter is fixed on the split inclined plane and covers the split outlet hole.

[0017] Specifically, the above-mentioned laser includes a divergent beam laser, a convergent beam laser, and a collimated beam laser.

[0018] Specifically, the above-mentioned first detection detector includes a glass inclined plane light window detector, a glass flat plane light window detector, a glass spherical light window detector, and an air clearance light window detector; the second detection detector includes a glass inclined plane light window detector, a glass flat plane light window detector, and a glass spherical light window detector.

[0019] Compared with the prior art, the present utility model has the following advantages and beneficial effects:

[0020] The self-stabilizing optical-mechanical component for gas detection provided by the present utility model uses a beam splitter in its optical link, which serves two purposes. That is, it acts as a sealing sheet for the diffusion type detection gas chamber, ensuring complete isolation and sealing of the gas between the reference optical path and the measurement optical path, and preventing cross-interference caused by leakage. It also acts as a beam splitting function, splitting the laser beam emitted by the laser into two paths. One path of the beam is emitted into the reference detector to realize the self-calibration of the optical frequency of the laser; the other path of the beam is emitted into the first detection detector to complete the gas concentration detection function. It eliminates the problem that the measurement accuracy of the on-line detection device is low or even false alarms occur due to the drift of the central wavelength of the laser during the change of the use environment temperature. In addition, an adjustment sleeve is added, and the laser, the reference detector, and the first detection detector can all be coupled and adjusted in three dimensions of XYZ with the corresponding mounting holes of the housing by means of the sleeve. After adjustment, it can be fixed by laser penetration welding and laser lap welding. It improves the production efficiency, enhances the product reliability, and meets the use in more complex working conditions such as oil and gas, corrosive gases, etc.

[0021] The following will further describe the present utility model in detail with reference to the accompanying drawings. Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram of the first perspective of the self-stabilizing optical-mechanical component of the divergent optical link in Embodiment 1 of the present utility model.

[0023] Figure 2 It is a schematic structural diagram of the second perspective of the self-stabilizing optical-mechanical component of the divergent optical link in Embodiment 1 of the present utility model.

[0024] Figure 3 It is a schematic structural diagram of the first perspective of the self-stabilizing optical-mechanical component of the convergent optical link in Embodiment 2 of the present utility model.

[0025] Figure 4 It is a schematic structural diagram of the second perspective of the self-stabilizing optical-mechanical component of the convergent optical link in Embodiment 2 of the present utility model.

[0026] Figure 5It is a schematic diagram of the first perspective structure of the self-stabilizing optical mechanical component of the collimated optical link in Embodiment 3 of the present utility model.

[0027] Figure 6 It is a schematic diagram of the second perspective structure of the self-stabilizing optical mechanical component of the collimated optical link in Embodiment 3 of the present utility model.

[0028] Figure 7 It is a schematic diagram of the structure of the self-stabilizing optical mechanical component of the collimated optical link in Embodiment 4 of the present utility model

[0029] Reference numerals: 1, housing; 101, laser installation hole; 102, reference detector installation hole; 103, detection detector installation hole; 104, sensor installation hole; 2, detection gas chamber; 201, beam splitting inclined plane; 3, beam splitting sheet; 4, first total reflection sheet; 5, second total reflection sheet; 6, third total reflection sheet; 7, sealing lens; 8, first detection detector; 9, detection detector adjustment sleeve; 10, second detection detector; 11, reference detector adjustment sleeve; 12, reference gas chamber; 121, reference gas; 13, temperature and pressure sensor; 14, laser; 141, single-stage isolator; 142, double-stage isolator; 15, laser adjustment sleeve; 16, first glass inclined plane optical window; 17, glass flat optical window; 18, glass spherical optical window; 19, second glass inclined plane optical window. Detailed implementation manners

[0030] The technical solutions in the present utility model will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Although the representative embodiments of the present utility model have been described in detail, those of ordinary skill in the technical field to which the present utility model belongs will understand that various modifications and changes can be made to the present utility model without departing from the scope of the present utility model. Therefore, the scope of the present utility model should not be limited to the embodiments, but should be defined by the appended claims and their equivalents.

[0031] The present utility model provides a self-stabilizing optical mechanical component for gas detection, including a housing 1, a laser 14, a first detection detector 8 and a reference detector for optical frequency self-calibration are connected to the housing 1; a detection gas chamber 2 is provided in the housing 1; a beam splitting sheet is provided in the detection gas chamber 2, and the beam splitting sheet 3 is located on the outgoing light path of the laser 14, splitting the outgoing light of the laser 14 into two parts, one part is reflected and the other part is transmitted; the detection end of the reference detector is located on the first split optical path split by the beam splitting sheet 3; the detection end of the first detection detector 8 is located on the second split optical path split by the beam splitting sheet 3, and the second split optical path passes through the detection gas chamber 2.

[0032] Optionally, the laser 14 includes a laser 14 that emits a divergent beam, a laser 14 that converges a beam, or a laser 14 that collimates a beam. The laser 14 is optionally selected without a built-in isolator, or with a single-stage or double-stage optical isolator. The first detection detector 8 can be selected to use one of a glass beveled optical window, a glass flat optical window 17, a glass spherical optical window 18, and a clearance optical window. The reference detector uses one of a glass beveled optical window, a glass flat optical window 17, and a glass spherical optical window 18.

[0033] During use, the self-stabilizing optical machine assembly is placed in the environment to be measured, and the laser 14 is started to emit a beam. When passing through the beam splitter 3, the beam is split into two according to the light intensity, one beam is the reference beam and the other beam is the detection beam. The reference beam is received by the reference detector, and the reference detector detects the change in the central wavelength of the reference beam and controls the temperature of the laser 14 based on this, so that the central wavelength of the emitted beam is kept aligned with the central wavelength of the target gas to be measured in real time. The other beam is received by the first detection detector 8, and the first detection detector 8 detects the change in the light intensity absorption of the measurement beam, thereby judging the concentration of the gas to be measured in the detection gas chamber 2.

[0034] In one embodiment, as Figures 1-6 shown, the first beam splitting optical path (reference beam optical path) is the reflection optical path of the beam splitter 3, and the second beam splitting optical path (detection beam optical path) is the transmission optical path of the beam splitter 3. That is, the detection end of the reference detector is located on the reflection optical path of the beam splitter 3, and the detection end of the first detection detector 8 is located on the transmission optical path of the beam splitter 3. After the light emitted by the laser 14 passes through the beam splitter 3, the reflected light is received by the reference detector, and the transmitted light passes through the detection gas chamber 2 and is then received by the first detection detector 8.

[0035] In another embodiment, as Figure 7 shown, the first beam splitting optical path (reference beam optical path) is the transmission optical path of the beam splitter 3, and the second beam splitting optical path (detection beam optical path) is the reflection optical path of the beam splitter 3. That is, the detection end of the reference detector is located on the transmission optical path of the beam splitter 3, and the detection end of the first detection detector 8 is located on the reflection optical path of the beam splitter 3. After the light emitted by the laser 14 passes through the beam splitter 3, the transmitted light is received by the reference detector, and the reflected light passes through the detection gas chamber 2 and is then received by the first detection detector 8.

[0036] The beam splitter 3 serves two purposes. It acts as the sealing piece of the detection cell 2, ensuring complete isolation and sealing of the gas between the reference optical path and the measurement optical path, and preventing cross-interference caused by leakage. It also functions as a beam splitter to achieve self-calibration of the optical frequency of the laser 14. This eliminates the problems of low measurement accuracy and even false alarms of the on-line detection device due to the drift of the central wavelength of the laser 14 during the change of the ambient temperature. Preferably, the beam splitter 3 is coated with a semi-transparent and semi-reflective dielectric film on the incident light surface. More preferably, the beam splitter 3 is coated with an anti-reflection film on the outgoing light surface to increase the transmittance of the light beam.

[0037] In a refined embodiment, a beam splitting inclined plane 201 is provided in the detection cell 2. A beam splitting exit hole is formed on the beam splitting inclined plane 201, and the beam splitting inclined plane 201 forms a certain angle with the main optical axis of the light beam incident on the detection cell 2. The beam splitter 3 is fixed on the beam splitting inclined plane 201 to cover the beam splitting exit hole. The light split by the beam splitter 3 enters the detection cell 2 through the beam splitting exit hole or is received by the reference detector.

[0038] To facilitate the XYZ three-dimensional coupling adjustment of the laser 14, the first detection detector 8, and the reference detector, and reduce the optical noise in the opto-mechanical component, the self-stabilizing opto-mechanical component for gas detection further includes a laser adjustment sleeve 15, a detection detector adjustment sleeve 9, and a reference detector adjustment sleeve 11. The laser 14 is coupled and installed on the housing 1 through the laser adjustment sleeve 15. The first detection detector 8 is coupled and installed on the housing 1 through the detection detector adjustment sleeve 9. The reference detector is coupled and installed on the housing 1 through the reference detector adjustment sleeve 11.

[0039] Furthermore, the laser 14 is welded to the laser adjustment sleeve 15. The laser adjustment sleeve 15 is welded to the housing 1. The first detection detector 8 is welded to the detection detector adjustment sleeve 9. The detection detector adjustment sleeve 9 is welded to the housing 1. The reference detector is welded to the reference detector adjustment sleeve 11. The reference detector adjustment sleeve 11 is welded to the housing 1. With the help of the adjustment sleeve, the laser 14, the first detection detector 8, and the reference detector can be fixed to the housing 1 by laser penetration welding and laser lap welding, improving the production efficiency of the opto-mechanical component, enhancing the product reliability, and enabling use in complex working conditions such as oil and gas and corrosive gases.

[0040] In one embodiment, the reference detector includes a second detection detector 10 and a reference gas chamber 12; the detection end of the second detection detector 10 is arranged at the light outlet of the reference gas chamber 12; both the light inlet and the light outlet of the reference gas chamber 12 are located on the first split optical path split by the beam splitter 3. The reference gas chamber 12 is filled with a reference gas 121 identical to the target gas to be measured, ensuring that the reference detector can perform real-time feedback to more precisely control the temperature of the laser 14.

[0041] Furthermore, a total reflection device is provided in the detection gas chamber 2; the total reflection device is located on the second split optical path of the beam splitter 3; the detection end of the first detection detector 8 is located on the reflected light optical path of the total reflection device. By reflecting the beam split by the beam splitter 3 through the total reflection device, a longer optical path can be achieved within a smaller volume, and the first detection detector 8 can be arranged on the same side as the laser 14, making the overall structure of the self-stabilizing optical-mechanical component more compact. The total reflection device includes at least one total reflection sheet, and the specific quantity and arrangement position can be designed according to actual needs, ensuring that the beam split by the beam splitter 3 is reflected to the detection end of the first detection detector 8. The total reflection sheet is preferably coated with a reflection film on the light incident surface, and more preferably coated with an HR reflection film to totally reflect the beam incident on this film layer.

[0042] In another embodiment, a sealing lens 7 is provided at the light outlet of the detection gas chamber 2, preferably a lens coated with an antireflection film on both sides, and the light outlet of the detection gas chamber 2 is sealed through the sealing lens 7. Whether to set the sealing lens 7 is selected according to the actual models of the laser 14 and the detection detector.

[0043] In an optimized embodiment, the self-stabilizing optical-mechanical component further includes a temperature and pressure sensor 13 for sensing the temperature and pressure in the detection gas chamber 2. Specifically, a sensor mounting hole 104 communicating with the detection gas chamber 2 is opened on the housing 1, and the temperature and pressure sensor 13 is inserted into the sensor mounting hole 104 and fixed by potting to monitor the temperature and pressure in the detection gas chamber 2.

[0044] In order to reduce the optical noise in the self-stabilizing optical-mechanical component, all the lenses on the optical path are treated with an antireflection film coating on the non-functional surface, which increases the transmittance of the beam and reduces the reflectance. Therefore, the occurrence of irregular stray light in the optical-mechanical component is reduced, and the optical noise of the system is lowered.

[0045] Furthermore, the beam splitter 3, the total reflection sheet, the optical window of the reference detector, the optical window of the first detection detector 8, and the sealing lens 7 are all arranged non-perpendicularly to the main optical axis of their incident beams and are installed and fixed at a certain angle to reduce the system oscillation optical noise caused by the reflected beam reflecting along the original optical path.

[0046] Next, the effects of the self-stabilizing optical-mechanical component for gas detection of the present invention are studied through specific embodiments.

[0047] Example 1:

[0048] Referring to Figures 1-2 , this embodiment provides a self - frequency - stabilizing optomechanical component for gas detection, including a housing 1, a beam splitter 3, a total reflection device, a laser 14, a reference detector, a first detection detector 8, and a temperature - pressure sensor 13.

[0049] A diffusive detection gas chamber 2 is provided inside the housing 1. A beam - splitting inclined plane 201 is provided at the light - incident port of the detection gas chamber 2. The size of the beam - splitting inclined plane 201 matches the size of the light - incident port, and a beam - splitting exit hole is opened thereon. The beam - splitting inclined plane 201 forms a 45 - degree angle with the main optical axis of the beam incident on the detection gas chamber 2. The beam splitter 3 is fixed on the beam - splitting inclined plane 201, covering the beam - splitting exit hole. A semi - transparent and semi - reflective dielectric film is coated on the light - incident surface of the beam splitter 3, and an AR antireflection film is coated on the other surface.

[0050] The total reflection device includes a first total reflection sheet 4, a second total reflection sheet 5, and a third total reflection sheet 6, which are distributed in a triangular shape on the inner wall of the detection gas chamber 2. The first total reflection sheet 4 is located on the transmission light path of the beam splitter 3, the second total reflection sheet 5 is located on the reflection light path of the first total reflection sheet 4, and the third total reflection sheet 6 is located on the reflection light path of the second total reflection sheet 5. An HR reflection film is coated on the light - incident surface of the total reflection sheet, and an AR antireflection film is coated on the other surface.

[0051] The housing 1 is respectively provided with a laser installation hole 101, a detection detector installation hole 103, a reference detector installation hole 102, and a sensor installation hole 104. Among them, the laser installation hole 101 and the detection detector installation hole 103 are located on the same side. The laser installation hole 101 corresponds to the light - incident port of the detection gas chamber 2. The detection detector installation hole 103 is communicated with the detection gas chamber 2 and is located on the reflection light path of the third total reflection sheet 6. The reference detector installation hole 102 is located on the reflection light path of the beam splitter 3. The sensor installation hole 104 is communicated with the detection gas chamber 2.

[0052] The sealing lens 7 is double - coated with an AR antireflection film and is fixed in the detection detector installation hole 103.

[0053] The reference detector includes a second detection detector 10 and a glass planar light window 17. A reference gas chamber 12 is formed between the glass planar light window 17 and the second detection detector 10. The detection ends of both the glass planar light window 17 and the second detection detector 10 are located on the reflection light path of the beam splitter 3. After the reference detector is sleeved with a reference detector adjustment sleeve 11, it is inserted into the reference detector installation hole 102 for coupling installation and fixation. The reference gas chamber 12 is filled with a reference gas 121. In this embodiment, the reference gas 121 is methane.

[0054] The first detection detector 8 uses a glass spherical light window 18. After the first detection detector 8 is sleeved with the detection detector adjustment sleeve 9, it is inserted into the detection detector mounting hole 103 for coupling and fixing.

[0055] The laser 14 uses a laser 14 with a divergent beam that incorporates a built-in dual-stage isolator 142. The laser 14 with a divergent beam is a laser 14 device with a coaxial package and a semiconductor refrigeration module, and can be, but is not limited to, a DFB laser (distributed feedback laser) with a TEC (semiconductor refrigeration module) in a TO package. After the laser 14 is sleeved with the laser adjustment sleeve 15, it is inserted into the laser mounting hole 101 for coupling and fixing. The detection wavelength used by the laser 14 corresponds to the type of the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12. For example, when the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12 are methane gases, the peak wavelength of the DFB laser 14TEC of the laser 14 with a divergent beam after temperature control is 1653.7 nm.

[0056] The temperature and pressure sensor 13 assembly is inserted into the sensor mounting hole 104 and fixed by potting.

[0057] The self-stabilizing optical machine assembly provided in this embodiment is assembled by the following steps.

[0058] S1. Glue and fix the beam splitter 3 on the beam splitting inclined surface 201 to cover the beam splitting outlet hole.

[0059] The first total reflection sheet 4, the second total reflection sheet 5, and the third total reflection sheet 6 are respectively glued and fixed at the corresponding positions on the inner wall of the detection gas chamber 2.

[0060] The sealing lens 7 is glued and fixed in the detection detector mounting hole 103.

[0061] S2. After the first detection detector 8 is sleeved with the detection detector adjustment sleeve 9, it is inserted into the detection detector mounting hole 103 and glued and pre-fixed.

[0062] S3. After the laser 14 is sleeved with the laser adjustment sleeve 15, it is inserted into the laser mounting hole 101. The laser 14 and the first detection detector 8 are connected to the active test platform for link optical intensity linearity testing and optical noise testing. The XYZ axes of the laser 14 are coupled. After the response degree and optical noise of the first detection detector 8 are qualified, the laser 14, the laser adjustment sleeve 15, and the laser mounting hole 101 are sequentially fixed by laser welding.

[0063] S4. Insert the reference detector into the reference detector mounting hole 102 after sleeving it with the reference detector adjustment sleeve 11, and also connect the reference detector to the active test platform to perform link optical intensity linearity testing and optical noise testing. Couple the XYZ axes of the reference detector. After the responsivity and optical noise of the first detection detector 8 and the reference detector are both qualified, laser-weld and fix the reference detector, the reference detector adjustment sleeve 11, and the reference detector mounting hole 102 in sequence.

[0064] S5. Recouple the originally pre-fixed first detection detector 8, adjust the XYZ axes. After its responsivity and optical noise are qualified, laser-weld and fix the first detection detector 8, the detection detector adjustment sleeve 9, and the detection detector mounting hole 103 in sequence.

[0065] Insert the temperature and pressure sensor 13 assembly into the sensor mounting hole 104 and pot and fix it.

[0066] The method for using the self-stabilizing optical machine assembly provided in this embodiment is as follows.

[0067] Place the self-stabilizing optical machine assembly in the environment to be measured, start the laser 14 to emit a light beam. When passing through the beam splitter 3 in the detection gas chamber 2, the light beam is split by the semi-transparent and semi-reflective dielectric film prefabricated on the beam splitter 3, and the light beam is divided into two equal parts according to the optical intensity. One of them is the reference light beam, which is reflected and then passes through the glass plane light window 17 of the reference detector and enters the reference gas chamber 12. The second detection detector 10 detects the change in the central wavelength of the reference light beam. When the central wavelength of the laser 14 moves in the direction of increasing wavelength, the wavelength can be pulled back by reducing the temperature control temperature, and vice versa, the temperature is increased to pull back the wavelength. The wavelength calibration control is carried out in real time by controlling the temperature of the laser 14, so that the central wavelength of the emitted light beam is kept aligned with the central wavelength of the target gas to be measured in real time. The other light beam passes through the beam splitter 3 by transmission, and then passes through the first total reflection mirror 4, the second total reflection mirror 5, the third total reflection mirror 6, and the sealing lens 7 in sequence, and finally passes through the glass spherical light window 18 of the first detection detector 8. The first detection detector 8 detects the change in the light intensity absorption of the measurement light beam, so as to judge the concentration of the gas to be measured in the detection gas chamber 2.

[0068] Embodiment 2:

[0069] Refer to Figures 3-4 , this embodiment provides a self-stabilizing optical machine assembly for gas detection, including a housing 1, a beam splitter 3, a total reflection device, a laser 14, a reference detector, a first detection detector 8, and a temperature and pressure sensor 13.

[0070] Inside the housing 1, a diffusive detection gas chamber 2 is provided. At the light inlet of the detection gas chamber 2, there is a spectral splitting inclined plane 201. The size of the spectral splitting inclined plane 201 matches that of the light inlet, and a spectral splitting outlet hole is opened thereon. The spectral splitting inclined plane 201 forms an angle of 40 degrees with the main optical axis of the light beam incident on the detection gas chamber 2. The spectral splitting plate 3 is fixed on the spectral splitting inclined plane 201, covering the spectral splitting outlet hole. A semi-transparent and semi-reflective dielectric film is coated on the light incident surface of the spectral splitting plate 3, and an AR anti-reflection film is coated on the other side.

[0071] The total reflection device includes a first total reflection plate 4, a second total reflection plate 5, and a third total reflection plate 6, which are distributed in a triangular shape on the inner wall of the detection gas chamber 2. And the first total reflection plate 4 is located on the transmission light path of the spectral splitting plate 3, the second total reflection plate 5 is located on the reflection light path of the first total reflection plate 4, and the third total reflection plate 6 is located on the reflection light path of the second total reflection plate 5. An HR reflection film is coated on the light incident surface of the total reflection plate, and an AR anti-reflection film is coated on the other side.

[0072] The housing 1 is respectively provided with a laser installation hole 101, a detection detector installation hole 103, a reference detector installation hole 102, and a sensor installation hole 104. Among them, the laser installation hole 101 and the detection detector installation hole 103 are located on the same side. The laser installation hole 101 corresponds to the light inlet of the detection gas chamber 2. The detection detector installation hole 103 is communicated with the detection gas chamber 2 and is located on the reflection light path of the third total reflection plate 6. The reference detector installation hole 102 is located on the reflection light path of the spectral splitting plate 3. The sensor installation hole 104 is communicated with the detection gas chamber 2.

[0073] The reference detector includes a second detection detector 10 and a first glass inclined plane light window 16. A reference gas chamber 12 is formed between the first glass inclined plane light window 16 and the second detection detector 10. The detection ends of the first glass inclined plane light window 16 and the second detection detector 10 are both located on the reflection light path of the spectral splitting plate 3. After the reference detector is sleeved with the reference detector adjustment sleeve 11, it is inserted into the reference detector installation hole 102 for coupling installation and fixation. The reference gas chamber 12 is filled with a reference gas 121. In this embodiment, the reference gas 121 is ammonia gas.

[0074] The first detection detector 8 uses a glass flat light window 17. After the first detection detector 8 is sleeved with the detection detector adjustment sleeve 9, it is inserted into the detection detector installation hole 103 for coupling installation and fixation. In this embodiment, the sealing lens 7 is not used. Therefore, the gap between the first detection detector 8 and the detection detector installation hole 103 is potted, so that the glass flat light window 17 of the first detection detector 8 seals the detection gas chamber 2.

[0075] The laser 14 uses a laser 14 that converges light beams with a built-in single-stage isolator 141. The laser 14 that converges light beams is a laser 14 device with a coaxial package and a semiconductor refrigeration module, and can be, but is not limited to, a DFB laser (distributed feedback laser) with a TEC (semiconductor refrigeration module) in a TO package. After the laser 14 is sleeved with the laser adjustment sleeve 15, it is inserted into the laser mounting hole 101 for coupling and fixing. The detection wavelength used by the laser 14 corresponds to the type of the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12. For example, when the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12 are ammonia gas, the peak wavelength of the DFB laser 14TEC of the laser 14 that converges light beams is 1512 nm after temperature control.

[0076] The temperature and pressure sensor 13 assembly is inserted into the sensor mounting hole 104 and sealed and fixed by potting.

[0077] The self-stabilizing optical-mechanical component provided in this embodiment is assembled by the following steps.

[0078] S1. Sinter and fix the beam splitter 3 on the beam splitting inclined surface 201 through a glass-metal sintering process to cover the beam splitting outlet hole.

[0079] The first total reflection mirror 4, the second total reflection mirror 5, and the third total reflection mirror 6 are respectively sintered and fixed at corresponding positions on the inner wall of the detection gas chamber 2 through a glass-metal sintering process.

[0080] S2. The first detection detector 8 is sleeved with the detection detector adjustment sleeve 9 and then inserted into the detection detector mounting hole 103 and pre-fixed by gluing.

[0081] S3. After the laser 14 is sleeved with the laser adjustment sleeve 15, it is inserted into the laser mounting hole 101. The laser 14 and the first detection detector 8 are connected to an active test platform for link light intensity linearity testing and optical noise testing. The XYZ axes of the laser 14 are coupled. After the responsivity and optical noise of the first detection detector 8 are qualified, the laser 14, the laser adjustment sleeve 15, and the laser mounting hole 101 are sequentially fixed by laser welding.

[0082] S4. The reference detector is sleeved with the reference detector adjustment sleeve 11 and then inserted into the reference detector mounting hole 102. The reference detector is also connected to the active test platform for link light intensity linearity testing and optical noise testing. The XYZ axes of the reference detector are coupled or the reference detector is rotated. After the responsivity and optical noise of the first detection detector 8 and the reference detector are both qualified, the reference detector, the reference detector adjustment sleeve 11, and the reference detector mounting hole 102 are sequentially fixed by laser welding.

[0083] S5. Re-couple the originally pre-fixed first detection detector 8, adjust the XYZ axis directions. After its responsivity and optical noise are qualified, laser-weld and fix the first detection detector 8, the detection detector adjustment sleeve 9, and the detection detector mounting hole 103 in sequence.

[0084] Insert the temperature and pressure sensor 13 assembly into the sensor mounting hole 104 and fix it by potting.

[0085] Pot the gap between the first detection detector 8 and the detection detector mounting hole 103 to make it fully airtight.

[0086] The usage method of the self-frequency-stabilized optical-mechanical component provided in this embodiment is as follows.

[0087] Place the self-frequency-stabilized optical-mechanical component in the environment to be measured, start the laser 14 to emit a light beam. When the light beam passes through the beam splitter 3 in the detection gas chamber 2, it is split by the semi-transparent and semi-reflective dielectric film prefabricated on the beam splitter 3, and the light beam is divided into two parts according to the light intensity. One part is the reference light beam, which is reflected and then passes through the first glass inclined-plane light window 16 of the reference detector and enters the reference gas chamber 12. The second detection detector 10 detects the change in the central wavelength of the reference light beam. When the central wavelength of the laser 14 moves in the direction of increasing wavelength, lower the temperature control temperature to pull the wavelength back; otherwise, raise the temperature to pull the wavelength back, and perform wavelength calibration control in real time, so as to keep the central wavelength of the emitted light beam aligned with the central wavelength of the target gas to be measured in real time. The other light beam passes through the beam splitter 3 by transmission, and then passes through the first total reflection mirror 4, the second total reflection mirror 5, and the third total reflection mirror 6 in sequence, and finally passes through the glass plane light window 17 of the first detection detector 8. The first detection detector 8 detects the change in the light intensity absorption of the measurement light beam, so as to judge the concentration of the gas to be measured in the detection gas chamber 2.

[0088] Embodiment 3:

[0089] Refer to Figures 5-6 , this embodiment provides a self-frequency-stabilized optical-mechanical component for gas detection, including a housing 1, a beam splitter 3, a total reflection device, a laser 14, a reference detector, a first detection detector 8, and a temperature and pressure sensor 13.

[0090] A diffusion-type detection gas chamber 2 is provided in the housing 1. The light inlet of the detection gas chamber 2 is provided with a light-splitting inclined plane 201. The size of the light-splitting inclined plane 201 matches the size of the light inlet, and a light-splitting outlet hole is opened thereon. The light-splitting inclined plane 201 forms an angle of 50 degrees with the main optical axis of the light beam incident on the detection gas chamber 2. The beam splitter 3 is fixed on the light-splitting inclined plane 201 and covers the light-splitting outlet hole. The light incident surface of the beam splitter 3 is coated with a semi-transparent and semi-reflective dielectric film, and the other surface is coated with an AR anti-reflection film.

[0091] The total reflection device includes a first total reflection sheet 4, a second total reflection sheet 5, and a third total reflection sheet 6, which are distributed in a triangular shape on the inner wall of the detection cell 2. The first total reflection sheet 4 is located on the transmission light path of the beam splitting sheet 3, the second total reflection sheet 5 is located on the reflection light path of the first total reflection sheet 4, and the third total reflection sheet 6 is located on the reflection light path of the second total reflection sheet 5. The incident light surface of the total reflection sheet is coated with an HR reflection film, and the other side is coated with an AR antireflection film.

[0092] The housing 1 is respectively provided with a laser installation hole 101, a detection detector installation hole 103, a reference detector installation hole 102, and a sensor installation hole 104. Among them, the laser installation hole 101 and the detection detector installation hole 103 are located on the same side. The laser installation hole 101 corresponds to the incident light port of the detection cell 2. The detection detector installation hole 103 is communicated with the detection cell 2 and is located on the reflection light path of the third total reflection sheet 6. The reference detector is located on the reflection light path of the beam splitting sheet 3, and the sensor installation hole 104 is communicated with the detection cell 2.

[0093] The sealing lens 7 is double-sided coated with an AR antireflection film and is fixed in the detection detector installation hole 103.

[0094] The reference detector includes a second detection detector 10 and a first glass inclined light window 16. A reference cell 12 is formed between the first glass inclined light window 16 and the second detection detector 10. The detection ends of the first glass inclined light window 16 and the second detection detector 10 are both located on the reflection light path of the beam splitting sheet 3. After the reference detector is sleeved with the reference detector adjustment sleeve 11, it is inserted into the reference detector installation hole 102 for coupling installation and fixation. The reference cell 12 is filled with a reference gas 121. In this embodiment, the reference gas 121 is acetylene.

[0095] The first detection detector 8 uses a second glass inclined light window 19. After the first detection detector 8 is sleeved with the detection detector adjustment sleeve 9, it is inserted into the detection detector installation hole 103 for coupling installation and fixation.

[0096] The first total reflection sheet 4, the third total reflection sheet 6, the first glass inclined light window 16 in the reference detector, the second glass inclined light window 19 of the first detection detector 8, and the sealing lens 7 are all non-perpendicular to the main optical axis of their corresponding incident light beams and are installed and fixed at a certain angle. In this embodiment, they are all installed at an angle of 11 degrees between the lens normal and the incident light beam. The normal of the second total reflection sheet 5 is installed at an angle of 22 degrees with the incident light beam, and no two lenses are parallel to each other.

[0097] The laser 14 uses a collimated beam laser 14 without an in-built isolator. The collimated beam laser 14 is a coaxial package laser device with a semiconductor refrigeration module, and can be, but is not limited to, a DFB laser (distributed feedback laser) with a TEC (semiconductor refrigeration module) in a TO package. After the laser 14 is sleeved with the laser adjustment sleeve 15, it is inserted into the laser mounting hole 101 for coupling and fixing. The detection wavelength adopted by the laser 14 corresponds to the type of the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12. For example, when the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12 are acetylene gases, the peak wavelength of the DFB laser 14TEC of the collimated beam laser 14 after temperature control is 1521.2 nm.

[0098] The temperature and pressure sensor 13 assembly is inserted into the sensor mounting hole 104 and fixed by potting.

[0099] The self-frequency-stabilized optical machine assembly provided in this embodiment is assembled by the following steps.

[0100] S1. The beam splitter 3 is fixed on the beam splitting inclined plane 201 by soldering, covering the beam splitting outlet hole.

[0101] The first total reflection mirror 4, the second total reflection mirror 5 and the third total reflection mirror 6 are respectively fixed on the corresponding positions on the inner wall of the detection gas chamber 2 by soldering.

[0102] The sealing lens 7 is fixed in the detection detector mounting hole 103 by soldering.

[0103] S2. After the first detection detector 8 is sleeved with the detection detector adjustment sleeve 9, it is inserted into the detection detector mounting hole 103. The first detection detector 8 is rotated until its second glass inclined plane optical window 19 is non-parallel to the sealing lens 7, and then glued and pre-fixed.

[0104] S3. After the laser 14 is sleeved with the laser adjustment sleeve 15, it is inserted into the laser mounting hole 101. The laser 14 and the first detection detector 8 are connected to the active test platform for link light intensity linearity test and optical noise test. The XYZ axes of the laser 14 are coupled. After the responsivity and optical noise of the first detection detector 8 are qualified, the laser 14, the laser adjustment sleeve 15 and the laser mounting hole 101 are sequentially fixed by laser soldering.

[0105] S4. After sleeving the reference detector with the reference detector adjustment sleeve 11, insert it into the reference detector mounting hole 102, and also connect the reference detector to the active test platform to perform link optical intensity linearity testing and optical noise testing. Couple the XYZ axes of the reference detector or rotate the reference detector. After the responsivities and optical noises of the first detection detector 8 and the reference detector are both qualified, laser-weld and fix the reference detector, the reference detector adjustment sleeve 11, and the reference detector mounting hole 102 in sequence.

[0106] S5. Recouple the originally pre-fixed first detection detector 8. Rotate the first detection detector 8 until its second glass inclined plane light window 19 is non-parallel to the sealing lens 7, then adjust the XYZ axes. After its responsivity and optical noise are qualified, laser-weld and fix the first detection detector 8, the detection detector adjustment sleeve 9, and the detection detector mounting hole 103 in sequence.

[0107] Insert the temperature and pressure sensor 13 assembly into the sensor mounting hole 104 and fix it by potting.

[0108] The usage method of the self-frequency-stabilized optical-mechanical component provided in this embodiment is as follows.

[0109] Place the self-frequency-stabilized optical-mechanical component in the environment to be measured, start the laser 14 to emit a light beam. When passing through the beam splitter 3 in the detection gas chamber 2, the light beam is split by the semi-transmissive and semi-reflective dielectric film prefabricated on the beam splitter 3, and the light beam is divided into two equal parts according to the optical intensity. One of the beams is the reference beam, which is reflected and then passes through the first glass inclined plane light window 16 of the reference detector and enters the reference gas chamber 12. The second detection detector 10 detects the change in the central wavelength of the reference beam. When the central wavelength of the laser 14 moves in the direction of increasing wavelength, the wavelength can be pulled back by reducing the temperature control temperature, and vice versa, the temperature is increased to pull back the wavelength. The wavelength calibration control is performed in real time by controlling the temperature of the laser 14, so that the central wavelength of its emitted light beam is kept aligned with the central wavelength of the target gas to be measured in real time. The other beam of light passes through the beam splitter 3 in a transmissive manner, and then passes through the first total reflection mirror 4, the second total reflection mirror 5, the third total reflection mirror 6, and the sealing lens 7 in sequence, and finally passes through the second glass inclined plane light window 19 of the first detection detector 8. The first detection detector 8 detects the change in the light intensity absorption of the measurement beam, so as to judge the concentration of the gas to be measured in the detection gas chamber 2.

[0110] Embodiment 4:

[0111] Refer to Figure 7 , this embodiment provides a self-frequency-stabilized optical-mechanical component for gas detection, including a housing 1, a beam splitter 3, a reflection device, a laser 14, a reference detector, a first detection detector 8, and a temperature and pressure sensor 13.

[0112] Different from the above three embodiments, in this embodiment, the detection end of the reference detector is located on the transmission light path of the beam splitter 3; the total reflection device and the detection end of the first detection detector 8 are located on the reflection light path of the beam splitter 3. In addition to the beam splitting function and the sealing function, the beam splitter 3 also functions as the first-stage reflector of the reflection device.

[0113] A diffusive detection gas chamber 2 is provided in the housing 1. A beam splitting inclined plane 201 is provided in the detection gas chamber 2. A beam splitting exit hole is provided on the beam splitting inclined plane 201. The normal line of the beam splitting inclined plane 201 forms an angle of 13 degrees with the main optical axis of the beam incident on the detection gas chamber 2. The beam splitter 3 is fixed on the beam splitting inclined plane 201, covering the beam splitting exit hole. A semi-transparent and semi-reflective dielectric film is coated on the incident light surface of the beam splitter 3, and an AR anti-reflection film is coated on the other side.

[0114] The reflection device includes a beam splitter 3, a second total reflection sheet 5 and a third total reflection sheet 6, which are distributed in a triangular shape on the inner wall of the detection gas chamber 2. The second total reflection sheet 5 is located on the reflection light path of the beam splitter 3, and the third total reflection sheet 6 is located on the reflection light path of the second total reflection sheet 5. An HR reflection film is coated on the incident light surface of the total reflection sheet, and an AR anti-reflection film is coated on the other side.

[0115] The housing 1 is respectively provided with a laser installation hole 101, a detection detector installation hole 103, a reference detector installation hole 102, and a sensor installation hole 104. Among them, the laser installation hole 101 and the detection detector installation hole 103 are located on the same side, and the laser installation hole 101 and the reference detector installation hole 102 are arranged opposite to each other. The laser installation hole 101 corresponds to the light inlet of the detection gas chamber 2. The detection detector installation hole 103 is communicated with the detection gas chamber 2 and is located on the reflection light path of the third total reflection sheet 6. The reference detector installation hole 102 is located on the transmission light path of the beam splitter 3, and the sensor installation hole 104 is communicated with the detection gas chamber 2.

[0116] The reference detector includes a second detection detector 10 and a first glass inclined plane light window 16. A reference gas chamber 12 is formed between the first glass inclined plane light window 16 and the second detection detector 10. The detection ends of the first glass inclined plane light window 16 and the second detection detector 10 are both located on the transmission light path of the beam splitter 3. After the reference detector is sleeved with the reference detector adjustment sleeve 11, it is inserted into the reference detector installation hole 102 for coupling installation and fixation. The reference gas chamber 12 is filled with a reference gas 121. In this embodiment, the reference gas 121 is methane.

[0117] The first detection detector 8 uses the second glass inclined-plane light window 19. After the first detection detector 8 is sleeved with the detection detector adjustment sleeve 9, it is inserted into the detection detector mounting hole 103 for coupling and fixing. In this embodiment, the sealing lens 7 is not used. Therefore, the gap between the first detection detector 8 and the detection detector mounting hole 103 is potted, so that the second glass inclined-plane light window 19 of the first detection detector 8 seals the detection gas chamber 2.

[0118] The beam splitter 3, the third total reflection sheet 6, the first glass inclined-plane light window 16 in the reference detector, and the second glass inclined-plane light window 19 of the first detection detector 8 are all non-perpendicular to the main optical axis of their corresponding incident light beams and are installed and fixed at a certain angle. In this embodiment, an angle of 13 degrees is used for installation, and the normal line of the second total reflection sheet 5 forms an angle of 26 degrees with the incident light beam. And no two lenses are parallel to each other.

[0119] The laser 14 uses a laser 14 with a collimated beam without an internal isolator. The laser 14 with a collimated beam is a coaxial packaged laser 14 device with a semiconductor refrigeration module, and it can be a DFB laser (distributed feedback laser) with a TEC (semiconductor refrigeration module) in TO package, but not limited to this. After the laser 14 is sleeved with the laser adjustment sleeve 15, it is inserted into the laser mounting hole 101 for coupling and fixing. The detection wavelength used by the laser 14 corresponds to the type of the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12. For example, when the target gas to be measured in the detection gas chamber 2 and the reference gas 121 filled in the reference gas chamber 12 are methane gases, the peak wavelength of the DFB laser 14 of the laser 14 with a collimated beam after TEC temperature control is 1650.9 nm.

[0120] The temperature and pressure sensor 13 assembly is inserted into the sensor mounting hole 104 and potted and fixed.

[0121] The self-stabilizing optical-mechanical assembly provided in this embodiment is assembled by the following steps.

[0122] S1. The beam splitter 3 is fixed on the splitting inclined plane 201 by soldering, covering the splitting outlet hole.

[0123] The second total reflection sheet 5 and the third total reflection sheet 6 are respectively fixed on the corresponding positions on the inner wall of the detection gas chamber 2 by soldering.

[0124] S2. After the first detection detector 8 is sleeved with the detection detector adjustment sleeve 9, it is inserted into the detection detector mounting hole 103. The first detection detector 8 is rotated until its second glass inclined-plane light window 19 is non-parallel to any other lens, and then it is glued and pre-fixed.

[0125] S3. After sleeving 14 lasers with laser adjustment sleeves 15, insert them into the laser installation holes 101. Connect the lasers 14 and the first detection detector 8 to the active test platform to conduct link optical intensity linearity tests and optical noise tests. Couple the lasers 14 in the XYZ axis directions. After the responsivity and optical noise of the first detection detector 8 are qualified, laser-weld and fix the lasers 14, the laser adjustment sleeves 15, and the laser installation holes 101 in sequence.

[0126] S4. After sleeving the reference detector with the reference detector adjustment sleeve 11, insert it into the reference detector installation hole 102. Also connect the reference detector to the active test platform to conduct link optical intensity linearity and optical noise tests. Couple the reference detector in the XYZ axis directions or rotate the reference detector. After the responsivities and optical noises of the first detection detector 8 and the reference detector are both qualified, laser-weld and fix the reference detector, the reference detector adjustment sleeve 11, and the reference detector installation hole 102 in sequence.

[0127] S5. Recouple the originally pre-fixed first detection detector 8. Rotate the first detection detector 8 until its second glass inclined-plane light window 19 is non-parallel to any other lens, then adjust the XYZ axis directions. After its responsivity and optical noise are qualified, laser-weld and fix the first detection detector 8, the detection detector adjustment sleeve 9, and the detection detector installation hole 103 in sequence.

[0128] Insert the temperature and pressure sensor 13 assembly into the sensor installation hole 104 and fix it by potting.

[0129] Pot the gap between the first detection detector 8 and the detection detector installation hole 103 to make it fully airtight.

[0130] The usage method of the self-frequency-stabilized optical-mechanical component provided in this embodiment is as follows.

[0131] Place the self - frequency - stabilizing optomechanical component in the environment to be measured. Start the laser 14 to emit a beam. When the beam passes through the beam splitter 3 in the detection cell 2, it is split by the semi - transparent and semi - reflective dielectric film pre - fabricated on the beam splitter 3, dividing the beam into two parts according to the light intensity. One of the beams is the reference beam, which passes through the first glass inclined - plane light window 16 of the reference detector after transmission and enters the reference cell 12. The second detection detector 10 detects the change in the center wavelength of the reference beam. When the center wavelength of the laser 14 moves in the direction of longer wavelength, the wavelength is pulled back by reducing the temperature control temperature. Conversely, the temperature is increased to pull back the wavelength. The wavelength calibration control is carried out in real - time by controlling the temperature of the laser 14, so as to keep the center wavelength of the emitted beam of the laser 14 aligned with the center wavelength of the target gas to be measured in real - time. The other beam of light is reflected by the beam splitter 3 and then passes through the second total - reflection mirror 5 and the third total - reflection mirror 6 in sequence, and finally passes through the second glass inclined - plane light window 19 of the first detection detector 8. The first detection detector 8 detects the change in the light - intensity absorption of the measurement beam, thereby judging the concentration of the gas to be measured in the detection cell 2.

[0132] In summary, for the self - frequency - stabilizing optomechanical component for gas detection provided by the present utility model, without changing other structural components and assembly methods within the optomechanical component, different components with different beam output forms can be selected for the spatial light output component; different components with different light windows can also be selected for the reference detector and the detection detector. After combining the use of the active - link optical - noise coupling adjustment process and the laser - welding process, the temperature adaptability and reliability of the product are improved, the manufacturing cost and the use cost are reduced, and the functions of calibration - free and calibration - free after the product leaves the factory are realized.

[0133] The above examples are only illustrative of the present utility model and do not constitute a limitation on the protection scope of the present utility model. Any design identical or similar to the present utility model falls within the protection scope of the present utility model.

Claims

1. A self-stabilizing frequency optical machine assembly for gas detection, comprising a housing, characterized in that: The shell is connected to a laser, a first detection detector and a reference detector for optical frequency self-calibration; a detection chamber is arranged in the shell; the detection chamber is provided with a spectrometer, and the spectrometer is located on the output light path of the laser; the detection end of the reference detector is located on the first spectrometer light path separated by the spectrometer; the detection end of the first detection detector is located on the second spectrometer light path separated by the spectrometer, and the second spectrometer light path passes through the detection chamber.

2. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 1, characterized in that: It also includes a laser adjustment sleeve, a detector adjustment sleeve, and a reference detector adjustment sleeve; the laser is coupled and mounted on the housing through the laser adjustment sleeve; the first detector is coupled and mounted on the housing through the detector adjustment sleeve; The reference detector is coupled and mounted on the housing through the reference detector adjustment sleeve.

3. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 2, characterized in that: The laser is welded to the laser adjustment sleeve; the laser adjustment sleeve is welded to the shell; the first detection detector is welded to the detection detector adjustment sleeve; the detection detector adjustment sleeve is welded to the shell; the reference detector is welded to the reference detector adjustment sleeve; the reference detector adjustment sleeve is welded to the shell.

4. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 1, characterized in that: The reference detector comprises a second detector and a reference air chamber; the detection end of the second detector is arranged at the light outlet of the reference air chamber; the light inlet and light outlet of the reference air chamber are both located on the first split light path split by the splitter.

5. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 1, characterized in that: A total reflection device is provided in the detection air chamber; the total reflection device is located on the second split light path separated by the splitter; the detection end of the first detection detector is located on the reflected light path of the total reflection device.

6. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 1, characterized in that: The light outlet of the detector air chamber is provided with a sealing lens.

7. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 1, characterized in that: The light incident surface of the beam splitter is coated with a semi-transparent and semi-reflective dielectric film, and the light emitting surface is coated with an anti-reflection film.

8. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 1, characterized in that: A temperature and pressure sensor is also included for sensing the temperature and pressure in the detection chamber.

9. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 1, characterized in that: A beam splitting inclined plane is arranged in the detector air chamber; a beam splitting exit hole is opened on the beam splitting inclined plane; and the beam splitter is fixed on the beam splitting inclined plane and covers the beam splitting exit hole.

10. The self-stabilizing frequency optical machine assembly for gas detection as claimed in claim 4, characterized in that: The laser includes a divergent beam laser, a convergent beam laser, and a collimated beam laser; the first detection detector includes a glass bevel light window detector, a glass plane light window detector, a glass spherical light window detector, and a space-avoiding light window detector; the second detection detector includes a glass bevel light window detector, a glass plane light window detector, and a glass spherical light window detector.

Images