Chlorosilane sampling device

By designing a chlorosilane sampling device with simple structure, portable and easy to use, and using a suction closed sampling cylinder and polytetrafluoroethylene liner material, the problems of sampling in the prior art are solved, and safe and reliable chlorosilane sampling is achieved.

CN222994057UActive Publication Date: 2025-06-17青海亚洲硅业半导体有限公司 +4
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Patent Information

Application Number
CN202323342275.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-12-08
Publication Date
2025-06-17
Estimated Expiration
2033-12-08

AI Technical Summary

Technical Problem

Existing chlorosilane sampling devices are difficult to achieve closed sampling during process adjustment or system maintenance, and it is easy to introduce air during the sampling process to cause sample contamination and corrosion.

Method used

A chlorosilane sampling device with simple structure, portable and easy to use is designed. It adopts a suction chlorosilane sealed sampling barrel, including flange, needle valve, sampling barrel, nitrogen needle valve, waste needle valve and four-way pipe. The sampling barrel is lined with 304 stainless steel and polytetrafluoroethylene materials to ensure sealing and corrosion protection.

Benefits of technology

Confined sampling during process adjustment or system maintenance is achieved, pollution and corrosion caused by the contact between the sample and the air is avoided, and the safety of the sample and the accuracy of the detection results are ensured.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of chemical engineering, in particular to a chlorosilane sampling device. The sampling device comprises a flange (1), a needle valve (2), a sampling barrel (3), a nitrogen needle valve (11), a waste discharge needle valve (12) and a four-way pipe (13); one interface of the four-way pipe (13) is provided with the flange (1), the interface on the opposite side of the flange (1) is connected with the needle valve (2), and the other end of the needle valve (2) is connected with the sampling barrel (3); and other interfaces of the four-way pipe (13) are respectively connected with a nitrogen needle valve (11) and a waste discharge needle valve (12). The utility model has the advantages of simple structure and convenience in carrying and use. Safety and reliability. No pollution sample risk is caused.
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Description

Technical Field

[0001] The utility model relates to the technical field of chemical engineering, and particularly relates to a chlorosilane sampling device. Background Art

[0002] Chlorosilanes mainly refer to gases or liquids of a mixed component of dichlorosilane, trichlorosilane, and silicon tetrachloride. They have the characteristic of catching fire when encountering moisture. Chlorosilanes with a relatively high content of dichlorosilane are prone to spontaneous combustion in the air. Moreover, chlorosilanes undergo hydrolysis reactions with moisture in the air to generate hydrogen chloride, hydrogen, and silicon dioxide crystals, and there are great risks in external sampling.

[0003] Although the box-type closed sampler can achieve closed sampling, it is only applicable to fixed sampling ports. During process adjustment and system maintenance, there are usually no box-type closed samplers at necessary sampling points. Moreover, a small amount of air mixed in when connecting the sampling bottle during sampling reacts with chlorosilanes to generate hydrogen chloride, which will corrode metals, causing the chlorosilane sample to be contaminated by metals and affecting the test results. Content of the Utility Model

[0004] The purpose of the utility model is to overcome the above technical problems and provide a chlorosilane sampling device with a simple structure, convenient to carry and use, and safe and reliable.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is as follows.

[0006] A chlorosilane sampling device, the sampling device includes a flange 1, a needle valve 2, a sampling cylinder 3, a nitrogen needle valve 11, a waste discharge needle valve 12, and a four-way pipe 13;

[0007] One interface of the four-way pipe 13 is provided with a flange 1, the interface on the opposite side of the flange 1 is connected to the needle valve 2, and the other end of the needle valve 2 is connected to the sampling cylinder 3;

[0008] The remaining interfaces of the four-way pipe 13 are respectively connected to the nitrogen needle valve 11 and the waste discharge needle valve 12.

[0009] Further, the nitrogen needle valve 11 is a single valve.

[0010] Further, the inner parts of both the flange 1 and the four-way pipe 13 are provided with polytetrafluoroethylene linings.

[0011] Further, one side of the sampling cylinder 3 is provided with a connection port 14, and the connection port 14 is communicated with one end of the needle valve 2.

[0012] Further, a gland 8 is arranged at the end of the sampling cylinder 3;

[0013] A pull rod 7 passes through the gland 8 and extends into the sampling cylinder 3, and a piston 4 is arranged at the end of the pull rod 7 inside the sampling cylinder 3.

[0014] Furthermore, a lining 5 is provided inside the sampling cylinder 3;

[0015] The outside of the piston 4 is covered by a wrapping layer 9.

[0016] Furthermore, a sealing ring 10 is provided between the wrapping layer 9 and the lining 5.

[0017] Furthermore, a sliding sleeve 6 is provided on the rod 7 passing through the hole of the gland 8.

[0018] Furthermore, a handle is provided at one end of the rod 7 outside the sampling cylinder 3; a scale is provided on the rod 7.

[0019] Furthermore, the lining 5, the sliding sleeve 6, the wrapping layer 9 and the sealing ring 10 are made of polytetrafluoroethylene.

[0020] A chlorosilane sampling device provided by the present utility model adopts a suction-type chlorosilane closed sampling cylinder, mainly including a rod, a piston, a sampling cylinder, a sampling cylinder gland, a polytetrafluoroethylene sliding sleeve, a material needle valve, a nitrogen needle valve, a waste discharge needle valve, and a flange joint. Among them, the sampling cylinder is made of 304 stainless steel lined with polytetrafluoroethylene, and the main body of the piston is 304 stainless steel wrapped with polytetrafluoroethylene to ensure that the material does not contact the stainless steel sampling cylinder; three polytetrafluoroethylene sealing rings are installed on the piston, and a polytetrafluoroethylene sliding sleeve is installed between the gland and the rod to ensure smooth reciprocating movement of the piston and ensure sealing at the same time; a certain amount of nitrogen is filled in the closed area at the rear end of the piston, which plays a certain buffering role during the sampling of the suction-type chlorosilane sampler and also prevents the material from directly contacting the air when the sealing ring on the piston fails; a scale is marked on the rod, and the volume of the sampled sample is reflected through the scale.

[0021] For a chlorosilane sampling device provided by the present utility model, the flange joint is connected to the on-site temporary sampling port, the nitrogen interface is connected to the on-site nitrogen, the waste discharge interface is connected to the waste gas absorption bottle. Open the nitrogen needle valve, the waste discharge needle valve and the two material needle valves, and by repeatedly pulling and pushing the rod, after the air in the sampling cylinder is fully replaced by nitrogen, close the waste discharge needle valve and the nitrogen needle valve in sequence, then open the material valve on the sampling port and the two material needle valves of the sampler, and by repeatedly pulling and pushing the rod, after the material is fully replaced in the sampling cylinder, close the material valve on the sampling port and the two material needle valves of the sampler, then open the nitrogen needle valve and the waste discharge needle valve, purge the residual material in the dead zone at the front end of the material needle valve, and then close the nitrogen needle valve and the waste discharge needle valve, and remove the sampler from the flange to complete the sampling.

[0022] When using a chlorosilane sampling device provided by the present utility model, connect the flange joint of the suction-type chlorosilane sampler to the on-site temporary sampling port, connect the nitrogen interface to the on-site nitrogen, and connect the waste discharge interface to the waste gas absorption bottle.

[0023] Open the nitrogen needle valve, waste discharge needle valve and two material needle valves. By repeatedly pulling and pushing the pull rod, after the air in the sampling cylinder is fully replaced by nitrogen, close the waste discharge needle valve and nitrogen needle valve in sequence.

[0024] Open the material valve at the sampling point and the two material needle valves of the sampler. By repeatedly pulling and pushing the pull rod, make the material fully replace in the sampling cylinder.

[0025] Close the material valve at the sampling point and the two material needle valves of the sampler.

[0026] Open the nitrogen needle valve and waste discharge needle valve to purge the residual material in the dead zone at the front end of the material needle valve. Close the nitrogen needle valve and waste discharge needle valve, and disassemble the connecting flange to complete the sampling.

[0027] Compared with the prior art, the advantages of a chlorosilane sampling device provided by the present utility model are as follows:

[0028] (1) The structure is simple, and it is convenient to carry and use.

[0029] (2) Safe and reliable.

[0030] (3) There is no risk of polluting the sample. Description of the Drawings

[0031] Figure 1 It is a schematic structural diagram of a chlorosilane sampling device provided by the present utility model.

[0032] Figure 2 It is a schematic structural diagram of the sampling cylinder of a chlorosilane sampling device provided by the present utility model.

[0033] Figure 3 It is a schematic internal structural diagram of the sampling cylinder of a chlorosilane sampling device provided by the present utility model.

[0034] In the figure, 1 is a flange, 2 is a needle valve, 3 is a sampling cylinder, 4 is a piston, 5 is a lining, 6 is a sliding sleeve, 7 is a pull rod, 8 is a gland, 9 is a wrapping layer, 10 is a sealing ring, 11 is a nitrogen needle valve, 12 is a waste discharge needle valve, 13 is a four-way pipe, and 14 is a connection port. Detailed Embodiments

[0035] To enable those skilled in the art to better understand the technical solutions of the present utility model, the following embodiments further describe the present utility model in detail. The following embodiments are only used to illustrate the utility model, but not to limit the scope of the present utility model.

[0036] A chlorosilane sampling device, the sampling device includes a flange 1, a needle valve 2, a sampling cylinder 3, a nitrogen needle valve 11, a waste discharge needle valve 12 and a four-way pipe 13;

[0037] One interface of the four-way pipe 13 is provided with a flange 1. The interface on the opposite side of the flange 1 is connected to a needle valve 2, and the other end of the needle valve 2 is connected to a sampling cylinder 3.

[0038] The remaining interfaces of the four-way pipe 13 are respectively connected to a nitrogen needle valve 11 and a waste discharge needle valve 12.

[0039] Further, the nitrogen needle valve 11 is a single valve.

[0040] Further, both the flange 1 and the interior of the four-way pipe 13 are provided with polytetrafluoroethylene linings.

[0041] Further, one side of the sampling cylinder 3 is provided with a connection port 14, and the connection port 14 communicates with one end of the needle valve 2.

[0042] Further, a gland 8 is provided at the end of the sampling cylinder 3.

[0043] A pull rod 7 passes through the gland 8 and extends into the interior of the sampling cylinder 3. A piston 4 is provided at the end of the pull rod 7 inside the sampling cylinder 3.

[0044] Further, a lining 5 is provided inside the sampling cylinder 3.

[0045] The outside of the piston 4 is covered by a wrapping layer 9.

[0046] Further, a sealing ring 10 is provided between the wrapping layer 9 and the lining 5.

[0047] Further, a sliding sleeve 6 is provided on the hole where the pull rod 7 passes through the gland 8.

[0048] Further, a handle is provided at one end of the pull rod 7 outside the sampling cylinder 3; a scale is provided on the pull rod 7.

[0049] Further, the lining 5, the sliding sleeve 6, the wrapping layer 9, and the sealing ring 10 are made of polytetrafluoroethylene.

[0050] Example 1

[0051] As Figures 1 to 3 shown, a chlorosilane sampling device, the sampling device includes a flange 1, a needle valve 2, a sampling cylinder 3, a nitrogen needle valve 11, a waste discharge needle valve 12, and a four-way pipe 13; one interface of the four-way pipe 13 is provided with a flange 1, the interface on the opposite side of the flange 1 is connected to a needle valve 2, and the other end of the needle valve 2 is connected to a sampling cylinder 3; the remaining interfaces of the four-way pipe 13 are respectively connected to a nitrogen needle valve 11 and a waste discharge needle valve 12.

[0052] The described nitrogen needle valve 11 is a single valve. The inside of both the flange 1 and the four-way pipe 13 is provided with a polytetrafluoroethylene lining. One side of the sampling cylinder 3 is provided with a connection port 14, and the connection port 14 communicates with one end of the needle valve 2. The end of the sampling cylinder 3 is provided with a gland 8; a pull rod 7 passes through the gland 8 and extends into the sampling cylinder 3, and a piston 4 is arranged at the end of the pull rod 7 inside the sampling cylinder 3.

[0053] The inside of the sampling cylinder 3 is provided with a lining 5; the outside of the piston 4 is covered by a wrapping layer 9. A sliding sleeve 6 is arranged on the hole where the pull rod 7 passes through the gland 8. The materials of the lining 5, the sliding sleeve 6, the wrapping layer 9 and the sealing ring 10 are polytetrafluoroethylene.

[0054] Embodiment 2

[0055] Combined with Figures 1 to 3 As shown, a chlorosilane sampling device, the sampling device includes a flange 1, a needle valve 2, a sampling cylinder 3, a nitrogen needle valve 11, a waste discharge needle valve 12 and a four-way pipe 13; one interface of the four-way pipe 13 is provided with a flange 1, the interface on the opposite side of the flange 1 is connected to the needle valve 2, and the other end of the needle valve 2 is connected to the sampling cylinder 3; the remaining interfaces of the four-way pipe 13 are respectively connected to the nitrogen needle valve 11 and the waste discharge needle valve 12. The nitrogen needle valve 11 is a single valve. The inside of both the flange 1 and the four-way pipe 13 is provided with a polytetrafluoroethylene lining.

[0056] One side of the sampling cylinder 3 is provided with a connection port 14, and the connection port 14 communicates with one end of the needle valve 2.

[0057] The end of the sampling cylinder 3 is provided with a gland 8; a pull rod 7 passes through the gland 8 and extends into the sampling cylinder 3, and a piston 4 is arranged at the end of the pull rod 7 inside the sampling cylinder 3. The inside of the sampling cylinder 3 is provided with a lining 5; the outside of the piston 4 is covered by a wrapping layer 9. A sealing ring 10 is arranged between the wrapping layer 9 and the lining 5. A sliding sleeve 6 is arranged on the hole where the pull rod 7 passes through the gland 8. One end of the pull rod 7 outside the sampling cylinder 3 is provided with a handle; a scale is arranged on the pull rod 7. The materials of the lining 5, the sliding sleeve 6, the wrapping layer 9 and the sealing ring 10 are polytetrafluoroethylene.

[0058] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various transformations can be made to the technical solutions of the present invention, and these simple variants all belong to the protection scope of the present invention.

[0059] In addition, it should be noted that, in the above specific embodiments, the various specific technical features and steps described can be combined in any suitable way without conflict. In order to avoid unnecessary repetition, the present invention will not separately describe various possible combination methods.

[0060] In addition, any combination can be made among various different embodiments of the present utility model, as long as it does not violate the idea of the present utility model, and it should equally be regarded as the content disclosed by the present utility model.

Claims

1. A chlorosilane sampling device, characterized in that: The described sampling device includes a flange (1), a needle valve (2), a sampling cylinder (3), a nitrogen needle valve (11), a waste discharge needle valve (12), and a four-way pipe (13); One interface of the four-way pipe (13) is provided with a flange (1), the interface on the opposite side of the flange (1) is connected to the needle valve (2), and the other end of the needle valve (2) is connected to the sampling cylinder (3); The remaining interfaces of the four-way pipe (13) are respectively connected to the nitrogen needle valve (11) and the waste discharge needle valve (12).

2. The chlorosilane sampling device according to claim 1, characterized in that: The nitrogen needle valve (11) is a single valve.

3. The chlorosilane sampling device according to claim 1 or 2, characterized in that: Teflon linings are provided inside both the flange (1) and the four-way pipe (13).

4. The chlorosilane sampling device according to claim 1 or 2, characterized in that: A connection port (14) is provided on one side of the sampling cylinder (3), and the connection port (14) communicates with one end of the needle valve (2).

5. The chlorosilane sampling device according to claim 1 or 2, characterized in that: A gland (8) is provided at the end of the sampling cylinder (3); A pull rod (7) passes through the gland (8) and extends into the sampling cylinder (3), and a piston (4) is provided at the end of the pull rod (7) inside the sampling cylinder (3).

6. The chlorosilane sampling device according to claim 5, characterized in that: A lining (5) is provided inside the sampling cylinder (3); The outside of the piston (4) is covered by a wrapping layer (9).

7. The chlorosilane sampling device according to claim 6, characterized in that: A sealing ring (10) is provided between the wrapping layer (9) and the lining (5).

8. The chlorosilane sampling device according to claim 5, characterized in that: A sliding sleeve (6) is provided on the hole where the pull rod (7) passes through the gland (8).

9. The chlorosilane sampling device according to claim 5, characterized in that: A handle is provided at one end of the pull rod (7) outside the sampling cylinder (3); a scale is provided on the pull rod (7).

10. The chlorosilane sampling device according to claim 7, characterized in that: The lining (5), the sliding sleeve (6), the wrapping layer (9), and the sealing ring (10) are made of Teflon.