Visual observation device for scribing machine and scribing machine

Abstract

The visual observation device for the scribing machine comprises a camera and a lens, the camera and the lens are arranged on a support and shoot downwards, the support is further provided with a strip-shaped light source assembly located on the side portion of the lens, the strip-shaped light source assembly is connected with an adjusting mechanism arranged on the support, and the adjusting mechanism is connected with the strip-shaped light source assembly. The adjusting mechanism is used for adjusting the irradiation angle of the strip-shaped light source assembly and further used for adjusting at least one of the installation height and the horizontal position of the strip-shaped light source assembly. According to the utility model, the conventional mode that an annular light source is arranged below the lens is changed, the strip-shaped light source assembly is adopted and is arranged on the adjusting mechanism, so that the side surface of the lens can be lighted, and the irradiation angle and the mounting position of the light source assembly can be adjusted according to the requirements of different workpieces, thereby ensuring the precision of visual observation; and the observation requirements of different workpieces can be effectively met, the application range is wide, and adjustment is flexible.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor device processing equipment, in particular to a visual observation device for a dicing machine and a dicing machine. Background Art

[0002] When a dicing machine cuts, it is necessary to observe the cutting situation through a visual observation device.

[0003] Patents with the authorization announcement numbers CN218003281U, CN219466626U, etc. disclose the structures of common visual observation devices.

[0004] In these structures, a ring light source is usually concentrically arranged below the lens to illuminate the workpiece.

[0005] However, the installation position, irradiation angle, etc. of the ring light source are fixed and non-adjustable, and the illumination angle and light-emitting position will have a great interference on recognition. For example, for products with a dark surface color, the cutting track after dicing is very close to the surface color of the product. Even with a partition-controlled ring light source, the desired contrast cannot be achieved, thus affecting the accuracy of visual observation. Summary of the Utility Model

[0006] The purpose of the utility model is to solve the above problems existing in the prior art, and provide a visual observation device for a dicing machine and a dicing machine.

[0007] The purpose of the utility model is achieved by the following technical solutions:

[0008] A visual observation device for a dicing machine, comprising a camera and a lens arranged on a bracket and shooting downward, a strip light source assembly is further arranged on the bracket at the side of the lens, the strip light source assembly is connected to an adjustment mechanism arranged on the bracket, the adjustment mechanism is used to adjust the irradiation angle of the strip light source assembly, and the adjustment mechanism is further used to adjust at least one of the installation height and the horizontal position of the strip light source assembly.

[0009] Preferably, in the visual observation device for a dicing machine, the adjustment mechanism comprises a first adjustment plate, a first adjustment hole is arranged on the first adjustment plate, the first adjustment plate is connected to the bracket through the first adjustment hole, and the first adjustment hole is a strip hole extending in the vertical direction or the radial direction of the lens.

[0010] Preferably, in the visual observation device for a dicing machine, the first adjustment plate is connected to the bracket through a second adjustment plate, and the second adjustment plate is connected to the bracket in a manner that can adjust the horizontal position or the installation height.

[0011] Preferably, in the visual observation device for the dicing machine, among the first adjustment plate and the second adjustment plate, one is used to adjust the installation height of the bar light source assembly, and the other is used to adjust the horizontal position of the bar light source assembly.

[0012] Preferably, in the visual observation device for the dicing machine, the bar light source assembly is screwed on the first adjustment plate. The first adjustment plate is provided with a connection hole below the first adjustment hole and an arc-shaped adjustment hole concentric with the side of the connection hole. One side of the bar light source assembly is provided with a first screw hole and a second screw hole corresponding to the connection hole and the arc-shaped adjustment hole respectively.

[0013] Preferably, in the visual observation device for the dicing machine, the first adjustment plate is L-shaped, and a through hole is provided on its horizontal part. The air inlet end of the through hole is connected with a first air nozzle, and the air outlet end of the through hole faces downward.

[0014] Preferably, in the visual observation device for the dicing machine, the air outlet end of the through hole is connected with a flexible blow pipe.

[0015] Preferably, in the visual observation device for the dicing machine, a defogging hole is provided on the lens. The outer end of the defogging hole is connected with a second air nozzle, and the inner end of the defogging hole faces the outer surface of the lens of the lens.

[0016] The dicing machine includes the visual observation device for the dicing machine as described in any one of the above.

[0017] The advantages of the technical solution of the present invention are mainly reflected in:

[0018] The present invention changes the conventional way of setting a ring light source below the lens, adopts a bar light source assembly, and sets it on the adjustment mechanism, which can illuminate the side of the lens and can adjust the irradiation angle and installation position of the light source assembly according to the needs of different workpieces, so as to ensure the accuracy of visual observation, and can effectively meet the observation needs of different workpieces, with a wide application range and flexible adjustment.

[0019] A nozzle can be directly set on the adjustment mechanism of the present invention to blow air on the surface of the workpiece, which is easier to implement. At the same time, the flexible blow pipe can conveniently adjust the blowing position and can better adapt to different processing needs.

[0020] A defogging hole is provided at the lower end of the lens of the present invention, which can effectively remove the water mist on the surface of the lens of the lens by blowing air, so as to ensure the quality of the collected image and is beneficial to improving the observation accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a partial perspective view of the visual observation device for the dicing machine of the present invention;

[0022] Figure 2 It is a schematic diagram of the connection between the second adjustment member of the present utility model and the side plate and the first adjustment member;

[0023] Figure 3 It is a partial three-dimensional view of the first adjustment member of the vision observation device for a dicing machine of the present utility model, which is L-shaped and provided with a jet structure. Detailed implementation manners

[0024] The purpose, advantages and features of the present utility model will be illustrated and explained through the non-restrictive description of the following preferred embodiments. These embodiments are only typical examples of applying the technical solutions of the present utility model, and any technical solutions formed by equivalent replacement or equivalent transformation fall within the scope of protection required by the present utility model.

[0025] In the description of the solution, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of description and simplification of the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0026] The vision observation device for a dicing machine disclosed by the present utility model will be described below with reference to the drawings. As shown in the attached drawings Figure 1 As shown, it includes a camera 100 and a lens 200 which are arranged on a bracket and shoot downward. A strip light source assembly 300 is also arranged on the bracket at the side of the lens 200. The strip light source assembly 300 is connected to an adjustment mechanism 400 arranged on the bracket. The adjustment mechanism 400 is used to adjust the irradiation angle of the strip light source assembly 300, and the adjustment mechanism 400 is also used to adjust at least one of the installation height and the horizontal position of the strip light source assembly 300.

[0027] As shown in the attached drawings Figure 1 As shown, a mounting seat 600 is screwed at the inner wall of a side plate 500 of the bracket. The mounting seat 600 includes a fixing block 610 screwed on the side plate 500 and a locking block 620 screwed to the fixing block 610. The fixing block 610 and the locking block 620 cooperate to form a circular receiving space. The lens 200 passes through the receiving space and is clamped and fixed by the fixing block 610 and the locking block 620. The camera 100 is connected above the lens 200.

[0028] A defogging hole (not shown in the figure) is also provided at a position near the lower end of the lens 200. The outer end of the defogging hole is connected to a second air nozzle 210. The inner end of the defogging hole is lower than the lens of the lens and faces the outer surface of the lens of the lens 200. By connecting an external air supply pipeline through the second air nozzle 210, air can be blown to the outer surface of the lens, thereby removing water mist and dirt on the outer surface of the lens.

[0029] The bar-shaped light source assembly 300 can be a known feasible structure, which will not be elaborated here. Its installation position can be designed according to needs. As shown in the attached Figure 1 figure, the bar-shaped light source assembly 300 is located below the side of the lens 200.

[0030] As shown in the attached Figure 1 figure, the adjustment mechanism 400 includes a first adjustment plate 410. A first adjustment hole 411 is provided on the first adjustment plate 410. The first adjustment hole 411 is a strip-shaped hole extending in the vertical direction or the radial direction of the lens 200. When the first adjustment hole 411 extends in the vertical direction, the first adjustment plate 410 can adjust the installation height of the bar-shaped light source assembly 300. When the first adjustment hole 411 extends in the radial direction of the lens 200, the first adjustment plate 410 is used to adjust the horizontal position of the bar-shaped light source assembly 300.

[0031] At this time, the first adjustment plate 410 can be directly screwed to the side plate 500 where the camera 100 and the lens 200 are located. At the same time, the bar-shaped light source assembly 300 is screwed to the first adjustment plate 410 and is located on the side of the first adjustment plate 410 facing away from the side plate 500. In order to facilitate the adjustment of the irradiation angle of the bar-shaped light source assembly 300, a connection hole 412 is provided below the first adjustment hole 411 on the first adjustment plate 410, and an arc-shaped adjustment hole 413 concentric with the connection hole 412 is provided on the side of the connection hole 412. A first screw hole (not shown in the figure) and a second screw hole (not shown in the figure) corresponding to the connection hole 412 and the arc-shaped adjustment hole 413 are provided on one side of the bar-shaped light source assembly 300. By adjusting the corresponding position of the screw connecting the second screw hole and the arc-shaped adjustment hole 413 in the arc-shaped adjustment hole 413, the irradiation angle of the bar-shaped light source assembly 300 can be conveniently adjusted.

[0032] As shown in the attached Figure 1 figure, in order to have greater adjustment flexibility, the first adjustment plate 410 is connected to the bracket through a second adjustment plate 420. The second adjustment plate 420 is connected to the side plate in a manner that can adjust the horizontal position or the installation height. Moreover, among the first adjustment plate 410 and the second adjustment plate 420, one is used to adjust the installation height of the bar-shaped light source assembly 300, and the other is used to adjust the horizontal position of the bar-shaped light source assembly 300.

[0033] Preferably, the first adjustment plate is used to adjust the installation height of the strip light source assembly 300, and the second adjustment plate 420 is used to adjust the horizontal position of the strip light source assembly 300, and the adjustment direction of the second adjustment plate 420 is parallel to the side plate 500 where the lens 200 is located.

[0034] As shown in the appendix Figure 2 As shown, to ensure the structural stability, the second adjustment plate 420 includes a connecting plate 421 and an adapter plate 422. Among the connecting plate 421 and the side plate 500 where the lens 200 is located, at least two horizontal strip holes are provided on one of them, and through holes corresponding to the horizontal strip holes are provided on the other, so that the connecting plate can be translated relative to the side plate 500 to realize the horizontal position adjustment of the strip light source assembly. The adapter plate 422 is vertically inserted into a slot 423 on the outer side surface (the side surface facing away from the side plate 500) of the adapter plate 422, and the two are connected by screws 424. The other end of the adapter plate 422 is vertically connected to the upper convex portion 414 of the first adjustment plate, and a screw hole corresponding to the first adjustment hole 411 on the upper convex portion 414 is provided at the end surface of the other end of the adapter plate 422. The first adjustment plate 410 and the adapter plate 422 are fixed by screws passing through the first adjustment hole 411 and the corresponding screw hole.

[0035] As shown in the appendix Figure 3 As shown, the first adjustment plate 410 is L-shaped, which includes a vertical portion 415 and a horizontal portion 416. The horizontal portion 416 extends horizontally from the vertical portion towards the lens 200. At the same time, the width of the outer end region of the horizontal portion is larger than that of other parts. Through holes are provided in the outer end region of the horizontal portion. The air inlet end of the through hole can be provided at the top or side of the outer end region and is connected with a first air nozzle 430. The first air nozzle 430 is provided on the top of the horizontal portion. The air outlet end of the through hole faces downwards, so that the surface of the workpiece can be blown, and the part to be imaged can be cleaned so as to collect more accurate image information. The air outlet end of the through hole is connected with a flexible blow pipe 440.

[0036] Embodiment 2

[0037] This embodiment discloses a dicing saw, including the visual observation device for the dicing saw as described in any one of the above.

[0038] There are still various implementation manners of the present utility model. All technical solutions formed by equivalent transformation or equivalent substitution fall within the protection scope of the present utility model.

Claims

1. A visual observation device for a dicing machine, comprising a camera and a lens arranged on a bracket and shooting downward, characterized in that: The bracket is also provided with a strip light source assembly located on the side of the lens, and the strip light source assembly is connected to an adjustment mechanism provided on the bracket, and the adjustment mechanism is used to adjust the illumination angle of the strip light source assembly, and the adjustment mechanism is also used to adjust at least one of the installation height and horizontal position of the strip light source assembly.

2. The visual observation device for a dicing machine according to claim 1, characterized in that: The adjustment mechanism comprises a first adjustment plate, a first adjustment hole is arranged on the first adjustment plate, the first adjustment plate is connected to the bracket through the first adjustment hole, and the first adjustment hole is a strip hole extending along the vertical direction or the radial direction of the lens.

3. The visual observation device for a dicing machine according to claim 2, characterized in that: The first adjustment plate is connected to the bracket via a second adjustment plate, and the second adjustment plate is connected to the bracket to adjust the horizontal position or the installation height.

4. The visual observation device for a dicing machine according to claim 3, characterized in that: One of the first adjustment plate and the second adjustment plate is used to adjust the installation height of the bar-shaped light source assembly, and the other is used to adjust the horizontal position of the bar-shaped light source assembly.

5. The visual observation device for a dicing machine according to claim 2, characterized in that: The strip light source assembly is screwed onto the first adjustment plate, and the first adjustment plate is provided with a connecting hole located below the first adjustment hole and an arc-shaped adjustment hole located on the side of the connecting hole and concentric with the connecting hole. One side of the strip light source assembly is provided with a first screw hole and a second screw hole corresponding to the connecting hole and the arc-shaped adjustment hole respectively.

6. The visual observation device for a dicing machine according to claim 2, characterized in that: The first adjustment plate is L-shaped, and a through hole is arranged on the horizontal portion thereof. The air inlet end of the through hole is connected to the first air nozzle, and the air outlet end of the through hole faces downward.

7. The visual observation device for a dicing machine according to claim 6, characterized in that: The air outlet end of the through hole is connected with a flexible air blowing pipe.

8. The visual observation device for a dicing machine according to any one of claims 1 to 7, characterized in that: The lens is provided with a defogger hole, the outer end of the defogger hole is connected with a second air nozzle, and the inner end of the defogger hole faces the outer surface of the lens of the lens.

9. A dicing machine, characterized in that: It comprises a visual observation device for a dicing machine as described in any one of claims 1-8.

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