Spectrum detection device with distance measurement function

Abstract

The utility model relates to the technical field of spectrum detection and analysis. The spectrum detection device with the distance measurement function comprises a spectrum detection module which comprises a pulse laser and a laser focus lens, and the pulse laser is used for emitting pulse laser to a sample to be detected; the laser focusing lens is used for focusing the pulse laser; the distance measuring module comprises a laser diode, a receiver and a distance measuring focus lens; the laser diode is used for emitting ranging laser coaxial with a light path of the pulse laser; the ranging focus lens is used for collecting diffuse reflection light of the ranging laser; the receiver is used for receiving the ranging laser and determining distance information between the to-be-measured sample and the laser focus lens; and the lifting platform is used for placing the sample to be tested and ascends and descends according to the distance information. According to the invention, the distance of the to-be-measured sample can be measured through the distance measuring module, the distance between the to-be-measured sample and the laser focus lens is ensured through the distance information obtained by the distance measuring module, the distance error caused by an indirect distance measuring method is avoided, the distance information can be directly obtained, the efficiency is higher, and the accuracy and reliability are higher.

Description

Technical Field

[0001] The present disclosure relates to the technical field of spectral detection and analysis, and particularly to a spectral detection device with a ranging function. Background Art

[0002] Laser-induced breakdown spectroscopy is an atomic emission spectroscopy technique. It generates plasma spectral signals by breaking down the surface material of a sample to be measured with a high-energy-density laser, and then detects the characteristic wavelength spectral lines and their intensities of various elements in the plasma spectral signals through a spectrometer, so as to obtain the elements present in the sample to be measured and the corresponding element concentrations. The size of the laser spot irradiated on the sample surface directly affects the intensity of the excited plasma spectral signal, and the size of the laser spot irradiated on the sample surface is mainly affected by the distance from the laser focusing lens to the sample surface. Currently, the distance from the laser focusing lens to the sample surface is determined by an indirect method, and the ranging method is complex and the ranging accuracy is low. Summary of the Utility Model

[0003] To overcome the problems existing in the related art, an exemplary embodiment of the present disclosure provides a spectral detection device with a ranging function for detecting the spectrum of a sample to be measured, including: a spectral detection module, including a pulsed laser and a laser focusing lens, where the pulsed laser is used to emit pulsed laser towards the sample to be measured; the laser focusing lens is arranged between the pulsed laser and the sample to be measured and is used to focus the pulsed laser so that the pulsed laser is focused into a laser spot on the surface of the sample to be measured;

[0004] a ranging module, including a laser diode, a receiver, and a ranging focusing lens; the laser diode is used to emit ranging laser towards the sample to be measured, and the optical path of the ranging laser is coaxial with that of the pulsed laser and irradiates the same position on the surface of the sample to be measured; the ranging focusing lens is arranged between the receiver and the sample to be measured and is used to collect the diffuse reflection light formed after the ranging laser irradiates the surface of the sample to be measured and focus it on the receiver; the receiver is used to receive the ranging laser reflected from the surface of the sample to be measured and determine the distance information between the sample to be measured and the laser focusing lens;

[0005] a lifting table, which is used to place the sample to be measured and lift according to the distance information so that the focus of the pulsed laser is located on the surface of the sample to be measured.

[0006] In some embodiments, the relative positions of the spectral detection module and the ranging module are fixed.

[0007] In some embodiments, there are multiple receivers located above the sample to be measured, avoiding the optical paths of the ranging laser and the pulsed laser, and configured to receive the ranging laser signals reflected from the surface of the sample to be measured from multiple angles.

[0008] In some embodiments, the lifting platform includes: a stepper motor, a transmission component, and a carrying platform; the carrying platform is used to place the sample to be measured, and the stepper motor controls the stepwise lifting of the carrying platform through the transmission component.

[0009] In some embodiments, the lifting platform further includes: a translation mechanism for translating the sample to be measured.

[0010] In some embodiments, the spectral detection module further includes: an optical fiber probe disposed above the sample to be measured, avoiding the optical path of the pulsed laser, and configured to collect the spectral signals generated by the sample to be measured excited by the pulsed laser; a spectrometer for detecting the spectral signals collected by the optical fiber probe.

[0011] In some embodiments, the spectral detection device includes: a dichroic mirror located above the laser focusing mirror, disposed on the optical paths of the pulsed laser and the ranging laser, and configured to couple the pulsed laser and the ranging laser into a coaxial light.

[0012] In some embodiments, the dichroic mirror, the laser diode, and the pulsed laser are orthogonally distributed, such that the pulsed laser emitted by the pulsed laser is reflected by the dichroic mirror to the surface of the sample to be measured, and the ranging laser emitted by the laser diode passes through the dichroic mirror and irradiates the surface of the sample to be measured.

[0013] In some embodiments, the spectral detection device further includes: a control unit, and the control unit is configured to control the lifting of the lifting platform according to the distance information.

[0014] In some embodiments, the control unit is configured to control the lifting platform according to the spectral information detected by the spectral detection module.

[0015] It should be understood that the above general description and the following detailed description are merely exemplary and explanatory, and cannot limit the present disclosure.

[0016] The spectral detection device with a ranging function provided by the embodiments of the present disclosure can make the optical paths of the ranging laser and the pulsed laser coaxial through the ranging module, enable the ranging laser and the pulsed laser to irradiate the same position on the surface of the sample to be measured, so that the ranging module and the spectral detection module can directly obtain the distance information between the sample to be measured and the receiver, can measure the distance of the sample to be measured through the ranging module, use the distance information obtained by the ranging module to ensure the distance between the sample to be measured and the laser focusing lens, avoid the distance error caused by the indirect ranging method, can directly obtain the distance information, with higher efficiency, as well as higher accuracy and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present disclosure can be better understood by describing the exemplary embodiments of the present disclosure in conjunction with the accompanying drawings. In the drawings:

[0018] Figure 1 is a schematic structural diagram of a spectral detection device with a ranging function shown in an exemplary embodiment of the present disclosure;

[0019] Figure 2 is a schematic structural diagram of the ranging module shown in an exemplary embodiment of the present disclosure;

[0020] Figure 3 is a schematic structural diagram of the spectral detection module shown in an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] The following will describe the specific embodiments of the present disclosure. It should be noted that in the specific description process of these embodiments, for the sake of concise description, the present specification may not describe all the features of the actual embodiments in detail. It should be understood that in the actual implementation process of any one of the embodiments, just as in the process of any engineering project or design project, in order to achieve the specific goals of the developer and to meet the system-related or business-related restrictions, various specific decisions are often made, and these will also change from one embodiment to another. In addition, it can also be understood that although the efforts made in this development process may be complex and lengthy, for those of ordinary skill in the art related to the content of the present disclosure, some design, manufacturing or production changes based on the technical content disclosed in the present disclosure are only conventional technical means and should not be understood as the content of the present disclosure being insufficient.

[0022] Unless otherwise defined, technical terms or scientific terms used in the claims and the description shall have the ordinary meanings understood by those of ordinary skill in the technical field to which this disclosure pertains. The terms "first", "second" and similar terms used in the description and claims of this utility model patent application do not denote any order, quantity or importance, but are merely used to distinguish different components. The terms "a" or "an" and similar terms do not denote a limitation of quantity, but rather denote the presence of at least one. The terms "comprising", "including" and similar terms mean that the elements or items appearing before "comprising" or "including" cover the elements or items listed after "comprising" or "including" and their equivalent elements, and do not exclude other elements or items. The terms "connected" or "coupled" and similar terms are not limited to physical or mechanical connections, nor are they limited to direct or indirect connections.

[0023] The method of element detection for the sample to be measured is carried out by spectral detection. Since the size of the laser spot irradiated on the sample surface will directly affect the intensity of the plasma spectral signal excited, it is necessary to determine the distance from the laser focusing lens to the surface of the sample to be measured, so as to obtain a laser spot with a smaller area and higher energy density on the surface of the sample to be measured. Currently, in some technologies, by means of imaging, an industrial camera is used to capture the surface image of the sample in real time, and the distance from the surface of the sample to the laser focusing lens is adjusted according to the image clarity; or a pointing laser is used to irradiate the surface of the sample, and then the spectral signal of the spot formed by the pointing laser on the sample surface is monitored by a spectrometer, and the distance from the surface of the sample to the laser focusing lens is adjusted according to the intensity of the spectral signal. In both cases, the distance from the surface of the sample to the laser focusing lens is determined indirectly, which requires multiple attempts and the combination of algorithms to calculate the distance from the surface of the sample to the laser focusing lens. Only then can the distance from the surface of the sample to the laser focusing lens required to obtain a laser spot with a smaller area and higher energy density on the surface of the sample to be measured be determined. The ranging method is complex and the ranging accuracy is low, resulting in a lower accuracy of spectral detection for the sample to be measured.

[0024] To solve the above problems, as Figure 1 shown, the present disclosure provides a spectral detection device 100 with a ranging function for detecting the spectrum of a sample to be measured 200, which may include: a spectral detection module 110, a ranging module 120, and a lifting platform 130.

[0025] The spectral detection module 110 includes a pulsed laser 111 and a laser focusing lens 112. The pulsed laser 111 can be used to emit pulsed laser towards the sample to be measured 200. The spectral detection module 110 can be used to perform spectral detection on the surface of the sample to be measured 200. The spectral detection module 110 can include a pulsed laser 111, and the pulsed laser 111 can provide energy for exciting the sample to be measured. The pulsed laser 111 can emit pulsed laser towards the surface of the sample to be measured 200, break through the surface substance of the sample to be measured 200 to generate a plasma spectral signal. The spectral detection module 110 can analyze the plasma spectral signal to determine the elements present in the sample to be measured 200 and the concentration of each element. The spectral detection module 110 can include a laser focusing lens 112, which can be arranged between the pulsed laser 111 and the sample to be measured 200, and is used to focus the pulsed laser so that the pulsed laser is focused into a laser spot on the surface of the sample to be measured 200. The laser focusing lens 112 can be a convex lens, arranged between the pulsed laser 111 and the sample to be measured 200. The pulsed laser emitted by the pulsed laser 111 can be focused by the laser focusing lens 112, so that the pulsed laser irradiating on the surface of the sample to be measured 200 forms a laser spot with a higher energy density and a smaller area, thereby exciting the surface of the sample to be measured 200 and making the sample to be measured 200 generate a stronger plasma spectral signal. By changing the distance between the laser focusing lens 112 and the sample to be measured 200, the size of the laser spot can be changed. When the pulsed laser passes through the laser focusing lens 112 and the focusing focus is on the surface of the sample to be measured 200, the pulsed laser irradiating on the surface of the sample to be measured 200 forms a laser spot with the highest energy density and the smallest area, and the plasma spectral signal generated by the sample to be measured 200 irradiated by the pulsed laser is the strongest.

[0026] The ranging module 120, such as Figure 2As shown in the figure, it includes a laser diode 121, a receiver 122, and a ranging focusing lens 123. The laser diode 121 is used to emit ranging laser towards the sample to be measured 200. The optical path of the ranging laser is coaxial with that of the pulsed laser, and it irradiates the same position on the surface of the sample to be measured 200. The receiver 122 is used to receive the ranging laser reflected from the surface of the sample to be measured 200 and is used to determine the distance information between the sample to be measured 200 and the laser focusing lens 112. The ranging module 120 can be used to detect the distance to the surface of the sample to be measured 200. The laser diode 121 can be used to emit ranging laser towards the surface of the sample to be measured 200, making the optical path of the ranging laser coaxial with that of the pulsed laser emitted by the pulsed laser device 111, so that the ranging laser and the pulsed laser irradiate the same position on the surface of the sample to be measured 200, and the center of the light spot formed by the ranging laser irradiating the surface of the sample to be measured 200 is the same as that of the light spot formed by the pulsed laser irradiating the surface of the sample to be measured 200. The ranging laser emitted by the laser diode 121 irradiates the surface of the sample to be measured 200. After being reflected by the sample to be measured 200, the ranging laser reflected by the surface of the sample to be measured 200 is received by the receiver 122. The receiver 122 can be a linear array CCD (Charge - coupled Device). The receiver 122 can determine the distance information between the sample to be measured 200 and the laser diode 121 that emits the ranging laser through the reflected ranging laser. Since the ranging laser emitted by the laser diode 121 is coaxial with the pulsed laser focused by the laser focusing lens 112, and after the pulsed laser is focused by the laser focusing lens 112, it can form a light spot and be reflected at the same position on the surface of the sample to be measured 200 as the ranging laser. It can be considered that the distance information obtained by the receiver 122 after receiving the ranging laser is the distance between the laser focusing lens 112 and the sample to be measured 200. Therefore, the distance information between the sample to be measured 200 and the laser focusing lens 112 can be determined according to the receiver 122. The ranging module 120 may further include: a ranging focusing lens 123, which is disposed between the receiver 122 and the sample to be measured 200 and is used to collect the diffuse reflection light formed after the ranging laser irradiates the surface of the sample to be measured 200 and focus it on the receiver 122. The ranging focusing lens 123 can be disposed between the receiver 122 and the sample to be measured 200. The ranging focusing lens 123 can be a convex lens. Since the ranging laser irradiates the surface of the sample to be measured 200 and undergoes diffuse reflection, when the receiver 122 directly receives the diffuse reflection light, the light is poor, and the diffuse reflection light may escape and cannot be received by the receiver 122, which easily leads to ranging errors. By setting the ranging focusing lens 123, the diffuse reflection light generated by the ranging laser irradiating the surface of the sample to be measured 200 can be focused, and the focusing focus is located on the receiver 122, so that more diffuse reflection light irradiates the receiver 122, which can effectively improve the accuracy of ranging.

[0027] The lifting platform 130 is used to place the sample 200 to be measured and lift according to the distance information so that the focus of the pulsed laser is located on the surface of the sample 200 to be measured. The lifting platform 130 can lift according to the distance information, so as to raise or lower the sample 200 to be measured, thereby changing the distance between the sample 200 to be measured and the laser focusing lens 112. Among them, the lifting of the lifting platform 130 is not limited to rising or falling in the earth coordinate system, but relative to the laser focusing lens 112, when the lifting platform 130 rises, the distance between the sample 200 to be measured and the laser focusing lens 112 decreases, and when the lifting platform 130 descends, the distance between the sample 200 to be measured and the laser focusing lens 112 increases.

[0028] The sample 200 to be measured can be detected by the spectral detection device 100 with a ranging function provided by the present disclosure. First, the lifting platform 130 can be lifted and lowered multiple times. At different lifting heights, pulsed laser is emitted to the same position on the surface of the sample 200 to be measured through the spectral detection module 110, and the spectral data at the same position at different lifting heights is detected. A set of reference data can be determined from multiple sets of spectral data. The reference data can be a set of data with the strongest spectral signal in the spectral data, and the spectral data is clearer and more comprehensive; the set of spectral data with the best signal-to-noise ratio can be determined as the reference data according to the signal-to-noise ratio of the spectral data. The focus of the pulsed laser corresponding to the reference data can be located on the surface of the sample 200 to be measured. The lifting platform 130 is set at the lifting height corresponding to the reference data, and the ranging module 120 is turned on. The distance information between the sample 200 to be measured and the laser focusing lens 112 under the reference data can be measured by the ranging module 120 as the reference distance. When the sample 200 to be measured is moved, the distance between another position on the surface of the sample 200 to be measured and the receiver 122 can be detected by the ranging module 120. By lifting and lowering the lifting platform 130, another position on the surface of the sample 200 to be measured can be moved to a suitable position so that the distance between another position on the surface of the sample 200 to be measured determined by the receiver 122 and the laser focusing lens 112 is equal to the reference distance. At this time, spectral data is acquired for this position on the sample surface, and the strongest spectral signal can be obtained, making the spectral data clearer and more comprehensive.

[0029] With the spectral detection device 100 with a ranging function according to this embodiment, through the ranging module 120, the distance information between the sample to be measured 200 and the laser focusing lens 112 can be detected, and then the reference distance that can make the spectral data the clearest and most comprehensive can be determined, thereby improving the accuracy and reliability of the spectral detection of the sample to be measured 200. The ranging laser emitted by the ranging module 120 is coaxial with the optical path of the pulsed laser, so that the spots of the ranging laser and the pulsed laser irradiating on the sample to be measured 200 are located at the same position on the surface of the sample to be measured 200, ensuring the effectiveness of the ranging position. By ranging the sample to be measured 200 with the ranging module 120, the distance between the sample to be measured 200 and the laser focusing lens 112 is ensured based on the distance information obtained by the ranging module 120, guaranteeing the quality of spectral detection. The ranging module 120 can directly output the detected distance information through laser ranging, without detecting other position information and can calculate the distance information, directly determining the distance between the laser focusing lens 112 and the sample to be measured 200, which can avoid the distance error caused by indirect ranging, making the ranging method simple and having higher ranging efficiency and ranging accuracy.

[0030] In some embodiments, as Figure 3 shown, the spectral detection module 110 may further include: an optical fiber probe 113 and a spectrometer 114.

[0031] The optical fiber probe 113 can be arranged above the sample to be measured 200, arranged to avoid the optical path of the pulsed laser, and is used to collect the spectral signals generated by the sample to be measured 200 excited by the pulsed laser. The optical fiber probe 113 can be arranged above the sample to be measured 200, avoiding the optical path of the pulsed laser, which can enable the pulsed laser to irradiate on the surface of the sample to be measured 200 and cause the pulsed laser to excite the sample to be measured 200 to generate plasma spectral signals, and the plasma spectral signals are received by the optical fiber probe 113.

[0032] The spectrometer 114 can be used to detect the spectral signals collected by the optical fiber probe 113. The spectrometer 114 can be communicatively connected to the optical fiber probe 113, receive the spectral signals collected by the optical fiber probe 113, and analyze the spectral data according to the spectral signals.

[0033] Through this exemplary embodiment, the pulsed laser emitted by the pulsed laser 111 can be focused by the laser focusing lens 112, so that the pulsed laser irradiates the surface of the sample to be measured 200 to form a laser spot with a higher energy density and a smaller area. The spectral signal generated by the sample to be measured 200 excited by the pulsed laser is stronger, making the spectral data clearer and more comprehensive. By focusing the pulsed laser emitted by the pulsed laser 111 through the laser focusing lens 112, the pulsed laser can be made coaxial with the ranging laser, so that the ranging laser and the pulsed laser irradiate the same position on the surface of the sample to be measured 200, and the spot formed on the surface of the sample to be measured 200 by the ranging laser has the same center as the spot formed on the surface of the sample to be measured 200 by the pulsed laser. The distance between the laser focusing lens 112 and the sample to be measured 200 can be ensured by the distance determined by the ranging module 120, so as to ensure that the focus of the pulsed laser focused by the laser focusing lens 112 is located on the surface of the sample to be measured 200.

[0034] In some embodiments, there may be multiple receivers 122, located above the sample to be measured 200, avoiding the optical paths of the ranging laser and the pulsed laser, and used to receive the ranging laser signals reflected from the surface of the sample to be measured 200 from multiple angles. In some cases, the surface of the sample to be measured 200 is uneven, which may cause the optical path of the ranging laser reflected onto the receiver 122 to be blocked by the protruding surface of the sample to be measured 200 after the ranging laser irradiates the sample to be measured 200, resulting in the receiver 122 being unable to receive the reflected light of the ranging laser or receiving less reflected light of the ranging laser, resulting in poor ranging accuracy. Multiple receivers 122 can be set above the sample to be measured 200, avoiding the optical paths of the ranging laser and the pulsed laser, and capable of receiving the ranging laser reflected from the surface of the sample to be measured 200 from multiple different angles, avoiding the ranging error caused by the blocked reflected light of the ranging laser that cannot be received by the receiver 122. The multiple receivers 122 can be arranged on the same plane, and the angles set for each receiver 122 can be the same, so that the distances determined by each receiver 122 according to the received reflected light of the ranging laser are the same. Through the multiple receivers 122 of this embodiment, the ranging error caused by the blocked reflected light of the ranging laser that cannot be received by the receiver 122 can be avoided, improving the ranging accuracy.

[0035] In some embodiments, the lifting stage 130 may include: a stepper motor, a transmission component, and a carrying platform; the carrying platform is used to place the sample 200 to be measured, and the stepper motor is used to control the stepper lifting of the carrying platform through the transmission component. The lifting stage 130 may include a stepper motor for enabling the lifting stage 130 to perform stepper lifting. Through multiple liftings of the lifting stage 130, at different lifting heights, the spectral data of the same position of the sample 200 to be measured at different lifting heights is detected by the spectral detection module 110. During the lifting process, the lifting distance of each lift of the lifting stage 130 can be controlled by the stepper motor, and the lifting distance can be 0.1 mm. The stepper motor can be used to control the lifting stage 130 more precisely. The carrying platform can be used to place the sample 200 to be measured, and the transmission component can be connected to the stepper motor and the carrying platform to transmit power between the stepper motor and the carrying platform, so that the stepper motor controls the lifting distance of the carrying platform, thereby controlling the lifting of the sample 200 to be measured and changing the distance between the sample 200 to be measured and the laser focusing lens 112, facilitating the determination of the positional relationship between the focus of the laser focusing lens 112 and the sample 200 to be measured. By using the stepper motor to make the lifting stage 130 perform stepper lifting, the distance between the sample 200 to be measured and the laser focusing lens 112 can be changed with a smaller step size. Thus, during the process of emitting pulsed laser at the same position on the surface of the sample 200 to be measured by the spectral detection module 110, detecting the spectral data of the same position at different lifting heights to determine the reference data, and determining the reference distance by the ranging module 120, there can be more data samples, making the reference distance more accurate and the spectral data corresponding to the reference distance better, and improving the accuracy and reliability of ranging and spectral analysis.

[0036] In some embodiments, such as Figure 1As shown in the figure, the lifting table 130 may further include: a translation mechanism 131 for translating the sample to be measured 200. The lifting table 130 may further include a translation mechanism 131. After determining the reference distance between the surface of the sample to be measured 200 and the laser focusing mirror 112, the sample to be measured 200 can be moved by the translation mechanism 131, and then the distance between other positions on the surface of the sample to be measured 200 and the laser focusing mirror 112 can be detected by the distance measuring module 120. By lifting the lifting table 130, the distance between other positions on the surface of the sample to be measured 200 and the laser focusing mirror 112 is made equal to the reference distance, and then the spectral data of other positions on the surface of the sample to be measured 200 can be obtained by the spectral detection module 110. The spectral detection device 100 with distance measuring function can perform spectral detection and analysis on multiple different positions of the sample to be measured 200 through the translation mechanism 131, so as to determine the spectral data of the sample to be measured 200 at multiple different positions. Through the translation mechanism 131, spectral data detection and analysis can be performed on multiple different positions of the sample to be measured 200, and by combining the distance measuring mechanism with the translation mechanism 131, the translated sample to be measured 200 is adjusted according to the reference distance detected by the distance measuring mechanism by lifting the lifting table 130, so that the distance detected by the distance measuring mechanism after the translation of the sample to be measured 200 is consistent with the reference distance, thereby ensuring that the spectral data detected at different positions of the sample to be measured 200 remains clear after being translated by the translation mechanism 131, and improving the accuracy of spectral detection.

[0037] In some embodiments, the spectral detection device 100 may include: a dichroic mirror 140, located above the laser focusing mirror 112 and disposed on the optical paths of the pulsed laser and the ranging laser, to couple the pulsed laser and the ranging laser into coaxial light. The dichroic mirror 140 can divide the light beam into two parts according to the wavelength of the light, and can reflect or transmit different lights. The dichroic mirror 140 may be disposed above the laser focusing mirror 112 and on the optical paths of the pulsed laser and the ranging laser. The wavelengths of the pulsed laser and the ranging laser may be different, so that the dichroic mirror 140 reflects or transmits the pulsed laser and the ranging laser respectively. After being reflected or transmitted by the dichroic mirror 140, the pulsed laser and the ranging laser can be coupled into coaxial light. Through the dichroic mirror 140, the pulsed laser and the ranging laser can be coupled into coaxial light, so that the pulsed laser and the ranging laser irradiate the same position on the surface of the sample to be measured 200, and thus the distance to the sample to be measured 200 can be measured by the ranging module 120, and the distance information obtained by the ranging module 120 is used to ensure the distance between the sample to be measured 200 and the laser focusing mirror 112. Through the dichroic mirror 140, the accuracy of the distance information obtained by the ranging module 120 can be improved, so as to ensure the accuracy of the distance between the sample to be measured 200 and the laser focusing mirror 112, make the distance between the sample to be measured 200 and the laser focusing mirror 112 appropriate, and enable the pulsed laser to form a laser spot with a higher energy density and a smaller area on the surface of the sample to be measured 200, improving the accuracy and reliability of spectral detection.

[0038] In some embodiments, the dichroic mirror 140, the laser diode 121, and the pulsed laser 111 may be orthogonally distributed, so that the pulsed laser emitted by the pulsed laser 111 is reflected by the dichroic mirror 140 to the surface of the sample to be measured 200, and the ranging laser emitted by the laser diode 121 passes through the dichroic mirror 140 and irradiates the surface of the sample to be measured 200. The dichroic mirror 140, the laser diode 121, and the pulsed laser 111 may be orthogonally distributed. As Figure 1 shown, the dichroic mirror 140 may be tilted at a certain angle, so that the pulsed laser emitted by the pulsed laser 111 irradiates the dichroic mirror 140 and is reflected by the dichroic mirror 140 to the surface of the sample to be measured 200, and is perpendicularly incident on the surface of the sample to be measured 200. The laser diode 121 may be perpendicularly disposed with respect to the dichroic mirror 140 and perpendicular to the sample to be measured 200, so that the ranging laser emitted by the laser diode 121 passes through the dichroic mirror 140 and perpendicularly irradiates the surface of the sample to be measured 200, making the optical paths of the pulsed laser reflected by the dichroic mirror 140 and the ranging laser passing through the dichroic mirror 140 coaxial, and enabling the distance between the sample to be measured 200 and the laser focusing mirror 112 to enable the pulsed laser to form a laser spot with a higher energy density and a smaller area on the surface of the sample to be measured 200, improving the accuracy and reliability of spectral detection.

[0039] In some embodiments, the relative positions of the spectral detection module 110 and the ranging module 120 can be fixed. The spectral detection module 110 and the ranging module 120 can be fixed by a bracket. The pulsed laser 111 and the laser diode 121 can be fixed by a bracket at the same time, so that the optical path of the pulsed laser emitted by the pulsed laser 111 and the optical path of the ranging laser emitted by the laser diode 121 are relatively fixed. Or they can be fixed by multiple different brackets respectively for the spectral detection module 110 and the ranging module 120, and the multiple brackets are relatively fixed to ensure that there is no relative offset between the multiple brackets, so as to ensure the relative positions of the spectral detection module 110 and the ranging module 120 are fixed. The pulsed laser 111 of the spectral detection module 110 and the laser diode 121 of the ranging module 120 can be relatively fixedly arranged, so that the optical path of the pulsed laser emitted by the pulsed laser 111 and the optical path of the ranging laser emitted by the laser diode 121 are both fixed optical paths, and the distances from the pulsed laser optical path and the ranging laser optical path to the sample to be measured 200 are fixed values, and the optical paths can be kept fixed; thus, the pulsed laser emitted by the pulsed laser 111 and the ranging laser emitted by the laser diode 121 are kept coaxial, and the pulsed laser forms a pulsed laser spot on the surface of the sample to be measured 200 after being focused by the laser focusing lens 112, which is in the same position as the ranging laser spot formed when the ranging laser irradiates the surface of the sample to be measured 200, so as to facilitate the ranging module 120 to more accurately measure the distance information between the sample to be measured 200 and the laser focusing lens 112 and improve the accuracy of ranging.

[0040] In some embodiments, the spectral detection device 100 may further include: a control unit 150, and the control unit 150 is used to control the lifting of the lifting table 130 according to the distance information. The control unit 150 can be respectively communicatively connected to the lifting table 130 and the ranging module 120. Through the control unit 150, after measuring the distance information between the sample to be measured 200 and the laser focusing lens 112 under the reference data by the ranging module 120 as the reference distance, during the process of performing spectral detection on multiple different positions of the sample to be measured 200, through the control unit 150, according to the reference distance determined by the ranging module 120, the control unit 150 controls the lifting table 130 to rise or fall, so as to change the distance between the sample to be measured 200 and the receiver 122 of the ranging module 120 until the distance between the sample to be measured 200 and the laser focusing lens 112 is consistent with the reference distance, so that when the spectral detection device 100 performs spectral detection on different positions of the sample to be measured 200, the distances between the sample to be measured 200 and the receiver 122 of the ranging module 120 are all the same, thus ensuring that the distances between the laser focusing lens 112 and the sample to be measured 200 are the same, and improving the accuracy of the ranging module 120 and the reliability of spectral detection.

[0041] In some embodiments, the control unit 150 can be used to control the lifting platform 130 according to the spectral information detected by the spectral detection module 110. The control unit 150 can be communicatively connected to the spectral detection module 110 and can obtain the spectral information detected by the spectral detection module 110. During multiple liftings of the lifting platform 130, at different lifting heights, the spectral detection module 110 emits pulsed laser at the same position on the surface of the sample 200 to be measured. During the process of detecting the spectral data at the same position at different lifting heights, for each time the control unit 150 detects the spectral information detected by the spectral detection module 110, it can control the lifting platform 130 to perform a stepwise lift and then perform spectral detection again. During the process of determining the reference data and the reference distance based on multiple sets of spectral data, the control unit 150 can determine the data with the strongest signal-to-noise ratio in the spectral data as the reference data, and based on the reference data, determine the height of the lifting platform 130 when obtaining this reference data. The control unit 150 can move the lifting platform 130 to the determined height when obtaining this reference data, so as to facilitate subsequent determination of the reference distance by the ranging module 120, thereby improving the accuracy of the reference distance.

[0042] This application uses specific terms to describe the embodiments of this application. Such as "one embodiment", "an embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that the "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be combined appropriately.

[0043] In the context of this application, unless the context clearly indicates an exception, the words "a", "an", "one", and / or "the" etc. do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0044] Similarly, it should be noted that, in order to simplify the expression of this application disclosure and thus help the understanding of one or more application embodiments, in the previous description of the embodiments of this application, sometimes multiple features are merged into one embodiment, drawing, or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than those mentioned in the claims. In fact, the features of the embodiment are less than all the features of the single embodiment disclosed above.

[0045] The basic concepts have been described above. Obviously, for those skilled in the art, the above disclosure is only an example and does not constitute a limitation to this application. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are proposed in this application, so such modifications, improvements, and corrections still fall within the spirit and scope of the embodiments of this application.

Claims

1. A spectrum detection device with a ranging function, used to detect the spectrum of a sample to be tested, comprising: A spectrum detection module, comprising a pulse laser and a laser focusing mirror, wherein the pulse laser is used to emit pulse laser to the sample to be tested; The laser focusing mirror is arranged between the pulse laser and the sample to be tested, and is used to focus the pulse laser so that the pulse laser is focused into a laser spot on the surface of the sample to be tested; The ranging module comprises a laser diode, a receiver and a ranging focusing mirror; the laser diode is used to emit a ranging laser to the sample to be measured, the ranging laser is coaxial with the optical path of the pulse laser, and irradiates the same position on the surface of the sample to be measured; the ranging focusing mirror is arranged between the receiver and the sample to be measured, and is used to collect diffuse reflected light formed after the ranging laser is irradiated on the surface of the sample to be measured, and focus it on the receiver; the receiver is used to receive the ranging laser reflected by the surface of the sample to be measured, and is used to determine the distance information between the sample to be measured and the laser focusing mirror; The lifting platform is used to place the sample to be tested, and is lifted or lowered according to the distance information so that the focus of the pulse laser is located on the surface of the sample to be tested.

2. The spectrum detection device with ranging function according to claim 1, wherein: The relative positions of the spectrum detection module and the distance measurement module are fixed.

3. The spectrum detection device with ranging function according to claim 1, wherein: There are multiple receivers, which are located above the sample to be tested and avoid the optical path of the ranging laser and the pulse laser, and are used to receive the ranging laser signal reflected by the surface of the sample to be tested from multiple angles.

4. The spectrum detection device with ranging function according to claim 1, wherein: The lifting platform comprises: a stepping motor, a transmission component, and a bearing platform; the bearing platform is used to place the sample to be tested, and the stepping motor is used to control the stepping and lifting of the bearing platform through the transmission component.

5. The spectrum detection device with ranging function according to claim 4, wherein: The lifting platform further comprises: a translation mechanism for translating the sample to be tested.

6. The spectrum detection device with ranging function according to claim 1, wherein: The spectrum detection module also includes: An optical fiber probe is disposed above the sample to be tested, avoiding the optical path of the pulse laser, and is used to collect the spectral signal generated by the sample to be tested when excited by the pulse laser; A spectrometer is used to detect the spectral signal collected by the optical fiber probe.

7. The spectrum detection device with ranging function according to claim 1, wherein: The spectrum detection device comprises: a dichroic mirror, which is located above the laser focusing mirror and is arranged on the optical path of the pulse laser and the ranging laser, so that the pulse laser and the ranging laser are coupled into coaxial light.

8. The spectrum detection device with ranging function according to claim 7, wherein: The dichroic mirror, the laser diode and the pulse laser are orthogonally distributed, so that the pulse laser emitted by the pulse laser is reflected by the dichroic mirror to the surface of the sample to be measured, and the ranging laser emitted by the laser diode passes through the dichroic mirror to irradiate the surface of the sample to be measured.

9. The spectrum detection device with ranging function according to claim 1, wherein: The spectrum detection device further includes: a control unit, and the control unit is used to control the lifting and lowering of the lifting platform according to the distance information.

10. The spectrum detection device with ranging function according to claim 9, wherein: The control unit is used to control the lifting platform according to the spectrum information detected by the spectrum detection module.

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