Ejector pin module, supporting assembly and vacuum drying system
By designing a thimble module with magnetic connection and flexible position adjustment, the position deviation of the thimble through the bearing plate and the support of the printing area in the vacuum drying equipment is solved, and the film formation quality of the substrate is improved.
Patent Information
- Application Number
- CN202422137984.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-08-30
AI Technical Summary
In the existing vacuum drying equipment, the position deviation between the thimble and the bearing plate makes it difficult for the thimble to pass through the bearing plate, and the thimble is easy to support the printing area of the substrate, affecting the film formation quality.
A thimble module is designed, including a base, an adjustment seat and a needle body. The adjustment seat is magnetically connected to the support surface of the base, allowing the needle body to move at will and be fixed at any position on the horizontal surface, ensuring that the needle body can accurately pass through the carrier plate and avoid the printing area.
By adjusting the magnetic connection between the base and the base and the flexible position adjustment of the needle body, the position deviation problem of the thimble passing through the carrier plate is solved, and the support of the printing area is avoided, thereby improving the film formation quality of the substrate.
Smart Images
Figure CN222995389U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of vacuum drying, and particularly relates to a thimble module, a support assembly and a vacuum drying system. Background Art
[0002] In the existing manufacturing processes of OLED devices or QLED devices, an inkjet printing process has been adopted. Among them, some functional materials can be processed by inkjet printing. For example, functional materials such as a hole injection layer (HIL), a hole transport layer (HTL), and an emissive layer material (EML) can be processed by inkjet printing, and other functional layers that can be inkjet printed are equally applicable. That is, for the existing pixel pits, the functional layer material ink is injected into the pixel pits by inkjet printing.
[0003] Regarding various influencing factors of the efficiency of OLED devices, the film forming uniformity of each functional layer material is a very important consideration. Generally, a vacuum drying device is used to dry and form a film on a substrate.
[0004] In related technologies, in some vacuum drying devices, a combination of a thimble assembly and a carrier plate is adopted. The thimble assembly includes a thimble plate and a plurality of thimbles. The plurality of thimbles are fixed on the thimble plate. The thimbles pass through the carrier plate, and the carrier plate or the thimble plate can be lifted and lowered. The substrate is supported at multiple points by the plurality of thimbles, so that the substrate is suspended above the carrier plate, and it is convenient to lift the substrate from below. When the substrate is dried, the carrier plate rises relative to the thimbles, and the carrier plate is used to support the substrate. In some vacuum drying devices, a plurality of thimbles are directly used to support the substrate at multiple points to facilitate lifting the substrate from below the substrate.
[0005] However, when using the combination of the thimble assembly and the carrier plate to support the substrate, since the number of thimbles is large and all need to pass through the carrier plate, there is an easy deviation between the positions of the thimbles and the positions of the openings on the carrier plate, and some thimbles cannot pass through the carrier plate. In addition, when only a plurality of thimbles are used to support the substrate, the thimbles are likely to support the printing area on the substrate, which is likely to cause a mura phenomenon and have an adverse effect on the film forming quality of the substrate surface. Summary of the Utility Model
[0006] The embodiments of the present application provide a thimble module, a support assembly and a vacuum drying system to solve the technical problems in related technologies that there are deviations between the positions of some thimbles and the openings of the carrier plate, it is difficult for the thimbles to pass through the carrier plate, and some thimbles are likely to support the printing area of the substrate, which is likely to have an adverse effect on the film forming quality of the substrate surface.
[0007] In a first aspect, a thimble module is provided, including:
[0008] A base, the base includes a support surface;
[0009] Adjusting base, the adjusting base is placed on the supporting surface, and the adjusting base is slidably arranged on the supporting surface;
[0010] Needle body, the needle body is connected to the adjusting base; wherein,
[0011] Part or all of the component structures of at least one of the base and the adjusting base include magnetic materials, so that the adjusting base is magnetically connected to the supporting surface of the base.
[0012] In some embodiments, the base includes a magnetic block, and the adjusting base is magnetically connected to the supporting surface.
[0013] In some embodiments, the base includes a base body and a magnetic sheet, the magnetic sheet and the base body are stacked and fixed, and the adjusting base is magnetically connected to the supporting surface through the magnetic sheet.
[0014] In some embodiments, the adjusting base includes a magnetic base, and the magnetic base is magnetically connected to the supporting surface.
[0015] In some embodiments, the adjusting base includes a mounting base and a magnetic plate, the magnetic plate is mounted on the mounting base, and the mounting base is magnetically connected to the supporting surface through the magnetic plate.
[0016] In some embodiments, the thimble module further includes a locking member. The adjusting base is provided with a mounting hole for inserting the needle body, a locking hole communicating with the mounting hole is opened on the side surface of the adjusting base, the locking member is threadedly inserted into the locking hole, and the locking member abuts against the circumferential side surface of the needle body.
[0017] In some embodiments, the needle body includes:
[0018] Fixed section, the fixed section is inserted into the adjusting base;
[0019] Movable section, the movable section is threadedly connected to the top of the fixed section; wherein,
[0020] Rotating the movable section relative to the fixed section to change the height of the top end of the movable section relative to the fixed section.
[0021] The beneficial effects brought by the technical solutions provided in this application include:
[0022] The embodiment of the present application provides a thimble module. Since the adjusting seat is magnetically connected to the supporting surface of the base, the adjusting seat and the needle body can be fixed together at various positions on the supporting surface of the base at will, and the positions of the adjusting seat and the needle body can be moved relative to the base, and the positions of the adjusting seat and the needle body relative to the base can be fixed under the action of magnetic force, so as to realize the adjustment and fixation of the positions of the adjusting seat and the needle body. Therefore, when multiple needle bodies on the thimble plate all pass through the bearing plate, the positions of the corresponding needle bodies can be adjusted, and the moving direction of the needle bodies is not restricted, ensuring that all the needle bodies can be respectively aligned with multiple through holes on the bearing plate one by one, so as to facilitate all the needle bodies to accurately pass through the bearing plate.
[0023] In addition, since the positions of the needle bodies can be moved at will on the horizontal plane and can be fixed at any position, when the substrate is supported by multiple needle bodies at multiple points, due to the flexibility of the positions of the needle bodies, the printing area of the substrate can be avoided for support, and the support of substrates with various different printing area distributions can be adapted, ensuring that the needle bodies can avoid the printing area, reducing the possibility of mura, and ensuring the film forming quality on the substrate.
[0024] In a second aspect, a support assembly is provided, including the thimble module as described above.
[0025] In some embodiments, the support assembly further includes a support plate, and multiple said thimble modules are all installed on the support plate.
[0026] Another embodiment of the present application provides a support assembly. Since this support assembly includes the above-mentioned thimble module, the beneficial effects of this support assembly are the same as those of the above-mentioned thimble module, and will not be elaborated here.
[0027] In a third aspect, a vacuum drying system is provided, including the thimble module as described above, and / or the support assembly as described above.
[0028] Another embodiment of the present application provides a vacuum drying system. Since this vacuum drying system includes the above-mentioned thimble module, and / or the support assembly as described above, the beneficial effects of this vacuum drying system are the same as those of the above-mentioned thimble module or the above-mentioned support assembly, and will not be elaborated here. Description of the Drawings
[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0030] Figure 1 It is a schematic diagram of the thimble module provided by the embodiment of the present application;
[0031] Figure 2 Exploded view of the ejector pin module provided by the embodiment of the present application;
[0032] Figure 3 Front view of the ejector pin module provided by the embodiment of the present application;
[0033] Figure 4 Front view of the ejector pin module with the base being a seat body and a magnetic sheet provided by another embodiment of the present application;
[0034] Figure 5 Front view of the ejector pin module with the adjusting seat being a mounting seat and a magnetic plate provided by another embodiment of the present application;
[0035] Figure 6 Schematic diagram of the base and the adjusting seat both having magnetism provided by another embodiment of the present application;
[0036] Figure 7 Schematic diagram of the support assembly provided by another embodiment of the present application.
[0037] In the figure: 1, base; 11, seat body; 12, magnetic sheet; 1a, support surface; 2, adjusting seat; 21, mounting seat; 22, magnetic plate; 2a, mounting hole; 2b, locking hole; 3, needle body; 31, fixed section; 32, movable section; 4, locking member; 5, support plate; A, ejector pin module. Specific embodiments
[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some, rather than all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the scope of protection of the present application.
[0039] The embodiment of the present application provides an ejector pin module, a support assembly, and a vacuum drying system. The needle body in the ejector pin module can slide freely relative to the base on the support surface along with the adjusting seat and is fixed on the base under the action of magnetic force. Thus, the position of the needle body can be conveniently adjusted, facilitating the synchronous penetration of multiple needle bodies through the carrier plate. Also, by adjusting the position of the needle body, the printing area of the substrate can be avoided to support the substrate, ensuring the film-forming quality of the substrate. The present application solves the technical problems in the related art that there are deviations between the positions of some ejector pins and the openings of the carrier plate, making it difficult to penetrate the carrier plate, and that some ejector pins are prone to supporting the printing area of the substrate, which is likely to have an adverse impact on the film-forming quality of the substrate surface.
[0040] Refer to Figure 1 and Figure 2, a thimble module, comprising a base 1, an adjusting seat 2 and a needle body 3. The needle body 3 is connected to the adjusting seat 2, and the adjusting seat 2 is slidably disposed on the base 1 and magnetically connected to the base 1, so as to realize the arbitrary adjustment of the position of the needle body 3 relative to the base 1, and under the action of magnetic force, the adjusting seat 2 and the needle body 3 are arbitrarily fixed at any position on the base 1.
[0041] Among them, the base 1 is used to be installed on an external plate body or a frame body, and the bases 1 of multiple thimble modules can be pre-installed on the external plate body or the frame body to provide an installation position for the adjusting seat 2 and the needle body 3.
[0042] Refer to Figures 1-3 , the base 1 includes a supporting surface 1a. In this embodiment, the supporting surface 1a is the top surface of the base 1. The adjusting seat 2 is placed on the supporting surface 1a, and the adjusting seat 2 is slidably disposed on the supporting surface 1a, and the adjusting seat 2 can slide to any position on the supporting surface 1a. The adjusting seat 2 is magnetically connected to the base 1, and under the action of magnetic force, the adjusting seat 2 is fixed at any position on the supporting surface 1a.
[0043] Refer to Figures 1-3 , the needle body 3 is rod-shaped, and the needle body 3 is installed on the adjusting seat 2, that is, the needle body 3 can slide arbitrarily on the supporting surface 1a along with the adjusting seat 2, and can be fixed at any position on the supporting surface 1a. In this embodiment, the needle body 3 is arranged perpendicular to the supporting surface 1a, and the needle body 3 is used to support the substrate.
[0044] With such a setting, when it is necessary to pass multiple needle bodies 3 on the thimble plate through the carrier plate, the positions of the corresponding needle bodies 3 can be adjusted, and the moving direction of the needle bodies 3 is not restricted, ensuring that all the needle bodies 3 can be respectively aligned with multiple through holes on the carrier plate one by one, so as to facilitate all the needle bodies 3 to accurately pass through the carrier plate. In addition, since the positions of the needle bodies 3 can be arbitrarily moved on the horizontal plane and fixed at any position, when supporting the substrate by multiple needle bodies 3 at multiple points, due to the flexibility of the positions of the needle bodies 3, the printing area of the substrate can be avoided for support, and the support of substrates with various different printing area distributions can be adapted, ensuring that the needle bodies 3 can avoid the printing area, reducing the possibility of mura, and ensuring the film forming quality on the substrate.
[0045] Refer to Figures 1-3 , specifically, an installation hole 2a is formed on the top surface of the adjusting seat 2, and the needle body 3 passes through the installation hole 2a. A locking hole 2b communicating with the installation hole 2a is formed on the side surface of the adjusting seat 2. The thimble module further includes a locking member 4, the locking member 4 is threadedly disposed through the locking hole 2b, and the locking member 4 abuts against the circumferential side surface of the needle body 3. By tightening the locking member 4, the needle body 3 can be fixed by using the locking member 4 to abut against the needle body 3. In this embodiment, the locking member 4 includes a locking bolt.
[0046] The needle body 3 is inserted into the adjustment seat 2 and fixed by the locking member 4. When the needle body 3 is damaged, the needle body 3 can be quickly replaced. In addition, when the needle body 3 is not needed at some positions, the needle body 3 can be pulled out from the adjustment seat 2.
[0047] Reference Figures 1-3 Further, the needle body 3 includes a fixed section 31 and a movable section 32. The fixed section 31 is inserted into the adjustment seat 2, and the movable section 32 is threadedly connected to the top of the fixed section 31. The movable section 32 is rotated relative to the fixed section 31 to change the height of the top of the movable section 32 relative to the fixed section 31.
[0048] With this arrangement, by adjusting the height of the top of the movable section 32, the height of the top of the needle body 3 of multiple ejector pin modules can be adjusted to be consistent. When multiple ejector pin modules synchronously support the substrate, the support heights of various parts of the substrate are ensured to be consistent, so as to evenly support the substrate, reduce the occurrence of mura, and ensure the film quality.
[0049] Part or all of the structure of at least one of the base 1 and the adjustment base 2 includes magnetic material, so that the adjustment base 2 is magnetically connected to the support surface 1 a of the base 1 .
[0050] Reference Figures 1-3 In this embodiment, the base 1 includes a magnetic block, that is, the base 1 is made of a magnetic material. In this embodiment, the adjustment seat 2 is partially or entirely made of a ferromagnetic material. Preferably, the entire adjustment seat 2 is made of a ferromagnetic material, specifically, stainless steel.
[0051] With this arrangement, after the base 1 is mounted on the external plate or frame, part of the plate or frame becomes magnetic, which facilitates determining the position where the adjustment seat 2 can be installed, so as to facilitate preliminary positioning of the needle body 3 .
[0052] Reference Figure 4 In some embodiments, the base 1 includes a base body 11 and a magnetic sheet 12, and the magnetic sheet 12 and the base body 11 are stacked and fixed. The magnetic sheet 12 and the base body 11 are fixed by bolts or adhesives. The adjustment seat 2 is magnetically connected to the support surface 1a through the magnetic sheet 12. The adjustment seat 2 is partially or entirely made of ferromagnetic material. Preferably, the entire adjustment seat 2 is made of ferromagnetic material, specifically, it can include stainless steel.
[0053] In this way, by integrating the magnetic sheet 12 on the seat body 11 and giving the seat body 11 magnetism, the magnetic connection between the base 1 and the adjustment seat 2 can be achieved.
[0054] Reference Figure 3, in some embodiments, the adjusting base 2 includes a magnetic base, that is, the adjusting base 2 is made of a magnetic material. In this embodiment, part or all of the base 1 is made of a ferromagnetic material. Preferably, the entire base 1 is a ferromagnetic material. Specifically, it may include stainless steel.
[0055] With such a setting, since the adjusting base 2 is made of a magnetic material, the adjusting base 2 can be flexibly fixed to the external frame, thereby improving the flexibility of the position of the needle body 3.
[0056] Furthermore, the needle body 3 is made of a ferromagnetic material, and the needle body 3 can be magnetically connected to the adjusting base 2, which facilitates the installation and removal of the needle body 3.
[0057] Refer to Figure 5 , in some embodiments, the adjusting base 2 includes a mounting base 21 and a magnetic plate 22. The magnetic plate 22 is mounted on the mounting base 21, and the mounting base 21 is magnetically connected to the supporting surface 1a through the magnetic plate 22. In this embodiment, the magnetic plate 22 is fixed to the bottom surface of the mounting base 21, and the mounting base 21 is connected to the needle body 3. The magnetic plate 22 contacts the supporting surface 1a. In this embodiment, part or all of the base 1 is made of a ferromagnetic material. Preferably, the entire base 1 is a ferromagnetic material. Specifically, it may include stainless steel.
[0058] Specifically, the magnetic plate 22 and the mounting base 21 are fixedly connected by bolts or adhesives.
[0059] With such a setting, by adding a magnetic plate 22 to the mounting base 21, the adjusting base 2 is given magnetism, and the magnetic connection between the adjusting base 2 and the base 1 can be realized.
[0060] Refer to Figure 3 and Figure 6 , in some embodiments, part or all of the adjusting base 2 and the base 1 have magnetism. That is, the adjusting base 2 includes a magnetic base, or the adjusting base 2 includes a mounting base 21 and a magnetic plate 22; the base 1 includes a magnetic block, or the base 1 includes a base body 11 and a magnetic sheet 12.
[0061] With such a setting, since both the adjusting base 2 and the base 1 have magnetism, the magnetic connection between the adjusting base 2 and the base 1 is more firm, and the adjusting base 2 is not likely to slide randomly relative to the base 1, ensuring that the position of the needle body 3 does not change.
[0062] An embodiment of the present application provides a thimble module. Since the adjusting seat 2 is magnetically connected to the supporting surface 1a of the base 1, the adjusting seat 2 and the needle body 3 can be fixed together at various positions on the supporting surface 1a of the base 1 at will, and the positions of the adjusting seat 2 and the needle body 3 can be moved relative to the base 1, and the positions of the adjusting seat 2 and the needle body 3 relative to the base 1 can be fixed under the action of magnetic force, so as to realize the position adjustment and fixation of the adjusting seat 2 and the needle body 3. Therefore, when multiple needle bodies 3 on the thimble plate all pass through the bearing plate, the positions of the corresponding needle bodies 3 can be adjusted, and the moving directions of the needle bodies 3 are not restricted, ensuring that all the needle bodies 3 can be respectively aligned with multiple through holes on the bearing plate one by one, so that it is convenient for all the needle bodies 3 to accurately pass through the bearing plate.
[0063] In addition, since the position of the needle body 3 can be moved freely on the horizontal plane and can be fixed at any position, when the substrate is supported by multiple needle bodies 3 at multiple points, due to the flexibility of the position of the needle body 3, the printing area of the substrate can be avoided for support, and the support of substrates with various different printing area distributions can be adapted, ensuring that the needle body 3 can avoid the printing area, reducing the possibility of mura, and ensuring the film forming quality on the substrate.
[0064] Another embodiment of the present application provides a support assembly, including the thimble module as described above.
[0065] Referring to Figure 7 , the support assembly further includes a support plate 5, and multiple thimble modules A are all installed on the support plate 5. Specifically, according to the shape of the substrate and the position of the printing area on the substrate, multiple thimble modules A are arranged at positions on the support plate 5 that avoid the printing area. When the multiple thimble modules A support the substrate, the printing area is avoided to support the substrate.
[0066] Another embodiment of the present application provides a support assembly. Since the support assembly includes the above-mentioned thimble module, the beneficial effects of the support assembly are the same as those of the above-mentioned thimble module, and will not be repeated here.
[0067] Another embodiment of the present application provides a vacuum drying system, including the thimble module as described above, and / or, the support assembly as described above.
[0068] Another embodiment of the present application provides a vacuum drying system. Since the vacuum drying system includes the above-mentioned thimble module, and / or, the support assembly as described above, the beneficial effects of the vacuum drying system are the same as those of the above-mentioned thimble module or the above-mentioned support assembly, and will not be repeated here.
[0069] In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "upper" and "lower" is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application. Unless otherwise clearly specified and defined, the terms "installed", "connected" and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.
[0070] It should be noted that in the present application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprise", "include" or any other variation thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device including the said element.
[0071] The above are only specific embodiments of the present application, enabling those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to these embodiments shown herein, but rather to the broadest scope consistent with the principles and novel features claimed herein.
Claims
1. A ejector module, characterized in that: It includes: a base, the base comprising a support surface; An adjustment seat, the adjustment seat is placed on the support surface, and the adjustment seat is slidably arranged on the support surface; A needle body, the needle body is connected to the adjustment seat; wherein, Part or all of the structure of at least one of the base and the adjustment seat includes a magnetic material, so that the adjustment seat is magnetically connected to the support surface of the base.
2. The ejector module according to claim 1, characterized in that: The base comprises a magnetic block, and the adjustment seat is magnetically connected to the support surface.
3. The ejector module according to claim 1, characterized in that: The base comprises a base body and a magnetic sheet, the magnetic sheet and the base body are stacked and fixed, and the adjustment base is magnetically connected to the support surface through the magnetic sheet.
4. The ejector module according to claim 2 or 3, characterized in that: The adjustment seat comprises a magnetic seat, and the magnetic seat is magnetically connected to the supporting surface.
5. The ejector module according to claim 2 or 3, characterized in that: The adjustment seat comprises a mounting seat and a magnetic plate, the magnetic plate is mounted on the mounting seat, and the mounting seat is magnetically connected to the supporting surface through the magnetic plate.
6. The ejector module according to claim 1, characterized in that: It also includes a locking piece, the adjustment seat is provided with a mounting hole for inserting the needle body, the side of the adjustment seat is provided with a locking hole connected to the mounting hole, the locking piece is threadedly passed through the locking hole, and the locking piece is pressed against the circumferential side of the needle body.
7. The ejector module according to claim 1, characterized in that: The needle body comprises: A fixing section, the fixing section being inserted into the adjusting seat; A movable section, the movable section is threadedly connected to the top of the fixed section; wherein, The movable section is rotated relative to the fixed section to change the height of the top end of the movable section relative to the fixed section.
8. A support assembly, characterized in that: The invention comprises the ejector pin module according to any one of claims 1 to 7.
9. The support assembly according to claim 8, characterized in that: It also includes a support plate, and the plurality of ejector modules are mounted on the support plate.
10. A vacuum drying system, characterized in that: The invention comprises the ejector module according to any one of claims 1 to 7, and / or the support assembly according to claim 8 or 9.