Carrier

Abstract

The utility model provides a carrier which comprises a main body and a supporting block which are connected with each other, the main body is provided with a through hole, the supporting block is insulated and is arranged on the hole wall of the through hole, the supporting block comprises a peripheral part and a first protruding part, the top surface of the peripheral part is a first top surface, the first top surface is provided with a first groove, and the first groove is provided with a second protruding part. The bottom end of the first protruding part is connected with the bottom wall of the first groove, the first protruding part and the side wall of the first groove are arranged in a spaced mode, the top face of the first protruding part is a substrate supporting face, and the substrate supporting face is arranged above the first top face in a spaced mode. The carrier is beneficial for reducing the risk of arcing of the carrier and the substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, in particular to a carrier. Background Art

[0002] In the manufacturing process of solar photovoltaic cells, it is usually necessary to use a carrier to carry a substrate so that the equipment can process the substrate (for example, coat the substrate). When coating the substrate, some film layers to be deposited on the substrate may be conductive, and correspondingly, the target is also a conductor. During the coating process, in addition to being deposited on the substrate, the target particles will also be deposited on the carrier. Although the part of the carrier used to contact the substrate is insulated, after a large number of target particles are deposited on the carrier, the carrier and the substrate may be electrically connected to each other, resulting in an arcing phenomenon. Arcing will affect the coating quality of the substrate and may even damage the substrate. Summary of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a carrier, which is beneficial to reducing the risk of arcing when coating a substrate.

[0004] The carrier according to the embodiment of the utility model includes a main body and a support block connected to each other. The main body is provided with a through hole. The support block is an insulator and is arranged on the hole wall of the through hole. The support block includes: an outer peripheral part, the top surface of the outer peripheral part is a first top surface, and a first groove is arranged on the first top surface; a first protruding part, the bottom end of the first protruding part is connected to the bottom wall of the first groove, the first protruding part is spaced from the side wall of the first groove, the top surface of the first protruding part is a substrate support surface for supporting the substrate, and the substrate support surface is spaced above the first top surface.

[0005] The carrier according to the embodiment of the utility model has at least the following beneficial effects: Since the substrate support surface is spaced above the first top surface, when the substrate support surface supports the substrate, there is a gap between the bottom surface of the substrate and the first top surface. During the process of coating the bottom surface of the substrate, the target particles pass through the through hole from bottom to top, and a part of the target particles will enter from the gap between the first top surface and the bottom surface of the substrate and adhere to the outer peripheral surface and the first top surface of the first protruding part. However, since the first groove separates the outer peripheral surface of the first protruding part and the first top surface, the conduction path of "the bottom surface of the main body → the lower surface of the support block → the side surface of the first outer peripheral part → the first top surface → the outer peripheral surface of the first protruding part" is blocked by the first groove, and it is not easy for the substrate and the main body of the carrier to be directly conducted, so the risk of arcing of the substrate is relatively low.

[0006] According to some embodiments of the present utility model, the support block further includes a connecting portion, both the main body and the peripheral portion are connected to the connecting portion, the outer surface of the connecting portion includes a limiting surface, the limiting surface is used to limit the edge of the substrate, the limiting surface faces the first protruding portion, the bottom end of the limiting surface is connected to the first top surface, and a part of the limiting surface is disposed above the substrate support surface; the edge of the limiting surface includes a first side edge and a second side edge, the first side edge and the second side edge are spaced apart along a first horizontal direction, and in the first horizontal direction, both the first side edge and the second side edge are located between the two ends of the first protruding portion.

[0007] According to some embodiments of the present utility model, the connecting portion further includes a spaced surface, the spaced surface faces the first protruding portion, the bottom end of the spaced surface is connected to the first top surface, the spaced surface and the limiting surface are spaced apart along the first horizontal direction, and in the first horizontal direction, the spaced surface is located outside the two ends of the first protruding portion; in a second horizontal direction, the distance between the limiting surface and the center of the through hole is L1, and the distance between the spaced surface and the center is L2, L1 < L2; the first horizontal direction and the second horizontal direction are perpendicular to each other.

[0008] According to some embodiments of the present utility model, the connecting portion further includes a second groove, and the second groove separates the limiting surface and the spaced surface.

[0009] According to some embodiments of the present utility model, both the limiting surface and the spaced surface are vertical planes, and the limiting surface and the spaced surface are parallel to each other.

[0010] According to some embodiments of the present utility model, when observing the support block from a top view angle, the first groove is rectangular, and the first protruding portion is rectangular.

[0011] According to some embodiments of the present utility model, the side wall of the first groove includes a proximal end surface, the proximal end surface is located at one end of the first groove close to the center of the through hole, the proximal end surface faces the first protruding portion, and the proximal end surface is perpendicular to the bottom wall of the first groove.

[0012] According to some embodiments of the present utility model, the main body includes: a frame; a tray having the through hole, the tray and the frame are stacked, and the tray is located above the frame; a fastener passing through the frame and the tray, and the frame and the tray are detachably connected by the fastener.

[0013] According to some embodiments of the present utility model, the frame includes a first body portion and a second protruding portion. The top surface of the first body portion is a second top surface, and the top surface of the second protruding portion is a third top surface. The second top surface is provided with a third groove. The second protruding portion is located within the third groove and is connected to the bottom wall of the third groove. The outer peripheral surface of the second protruding portion is spaced apart from the side wall of the third groove. The main body further includes a first insulating member. The fastening member passes through the first insulating member and the second protruding portion. The first insulating member is clamped between the bottom surface of the tray and the third top surface. The first insulating member is located within the third groove and protrudes outward relative to the outer peripheral surface of the second protruding portion.

[0014] According to some embodiments of the present utility model, the tray is provided with a fourth groove with an upward opening. The main body further includes a second insulating member. The second insulating member includes a third body portion and a fourth body portion connected to each other. The third body portion is located above the fourth body portion, and the third body portion protrudes outward relative to the outer peripheral surface of the fourth body portion. The bottom surface of the fourth body portion abuts against the bottom wall of the fourth groove. The outer peripheral surface of the third body portion is spaced apart from the side wall of the fourth groove. The fastening member passes through the second insulating member.

[0015] Additional aspects and advantages of the present utility model will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0017] Figure 1 is a perspective view of a carrier carrying a substrate in an embodiment of the present utility model;

[0018] Figure 2 is a perspective view of the carrier from another perspective;

[0019] Figure 3 is a top view of the carrier carrying a substrate;

[0020] Figure 4 is a perspective view of the support block;

[0021] Figure 5 is a top view of the support block;

[0022] Figure 6 is a cross-sectional view of the support block along the A-A section;

[0023] Figure 7 is Figure 3 a cross-sectional view of the carrier shown along the B-B section;

[0024] Figure 8 is Figure 7 an enlarged view of region D in

[0025] Figure 9 is Figure 3 a sectional view of the vehicle shown along the C-C section;

[0026] Figure 10 is Figure 9 an enlarged view of region E in

[0027] Figure 11 is Figure 3 an enlarged view of region F in

[0028] Reference numerals: 101 - vehicle, 102 - substrate, 103 - main body, 104 - support block, 105 - through hole, 106 - frame, 107 - tray, 109 - cross beam, 110 - longitudinal beam, 111 - reinforcing member, 112 - connecting portion, 113 - peripheral portion, 114 - first protrusion, 115 - first groove, 116 - support surface, 117 - first top surface, 118 - spacer surface, 119 - limiting surface, 120 - second groove, 121 - proximal end surface, 122 - fastener, 123 - first insulating member, 124 - second insulating member, 125 - fourth groove, 126 - gap, 127 - third groove, 128 - first body portion, 129 - second protrusion, 130 - third top surface, 131 - third body portion, 132 - fourth body portion, 133 - tray bottom surface, 134 - second top surface, 135 - avoidance position, 136 - side surface. Detailed Description of the Specific Embodiment

[0029] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0030] In the description of the present invention, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0031] In the description of the present utility model, the meaning of "several" is more than one, the meaning of "multiple" is more than two, and understandings such as "greater than", "less than", "exceeding", etc. do not include the base number, and understandings such as "above", "below", "within", etc. include the base number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0032] In the description of the present utility model, unless otherwise clearly defined, words such as "arrangement", "installation", "connection", etc. should be understood in a broad sense, and those skilled in the relevant technical field can reasonably determine the specific meanings of the above words in the present utility model in combination with the specific content of the technical solution.

[0033] Figures 1 to 3 A vehicle 101 according to an embodiment of the present utility model is shown. The vehicle 101 is used to carry a substrate 102, and the substrate 102 may specifically be a silicon wafer. As Figure 1 and Figure 2 shown, the vehicle 101 includes a main body 103 and a support block 104 that are connected to each other. The main body 103 is provided with a through hole 105, and the support block 104 is arranged at the hole wall of the through hole 105. When the vehicle 101 carries the substrate 102, the substrate 102 is arranged at the through hole 105, the edge of the substrate 102 is supported by the support block 104, and the part of the substrate 102 exposed from the through hole 105 can be coated. An avoidance position 135 may be provided at the corner of the hole wall of the through hole 105 (as Figure 11 shown), the avoidance position 135 is generally circular, and the avoidance position 135 is used to avoid the corners of the substrate 102 so as not to damage the substrate 102.

[0034] As Figure 2As shown, in some embodiments, the main body 103 may include a frame 106 and a tray 107. The tray 107 and the frame 106 are stacked, with the tray 107 located above the frame 106. The through hole 105 may be provided on the tray 107. The frame 106 may include fasteners 122, multiple cross beams 109, and multiple longitudinal beams 110. The cross beams 109 and the longitudinal beams 110 intersect and are perpendicular to each other. The tray 107 and the frame 106 are detachably connected by the fasteners 122, and the fasteners 122 may be screws or bolts. The frame 106 may further include reinforcing members 111 for enhancing the structural strength and stiffness of the carrier 101. The reinforcing members 111 are provided between two adjacent longitudinal beams 110 or at the intersections of the cross beams 109 and the longitudinal beams 110. To improve the structural strength and stiffness of the carrier 101, the tray 107 and the frame 106 may be made of stainless steel or other types of metallic materials. The support block 104 is an insulator, and the substrate 102 contacts the support block 104. Under normal use conditions, the substrate 102 does not contact the tray 107 or the frame 106. Since the tray 107 and the frame 106 are detachably connected, after the carrier 101 has been used for a long time, a relatively large number of target particles will adhere to the surface of the tray 107, and the tray 107 may be damaged. At this time, the fasteners 122 can be removed first, and then a new tray 107 can be replaced. In this way, during the maintenance process of the carrier 101, it is not necessary to replace the entire carrier 101 (the frame 106 can be retained), and the maintenance or repair cost of the carrier 101 is relatively low.

[0035] Figures 4 to 6 The shape of the support block 104 is shown, as Figures 4 to 6 shown, the support block 104 includes a peripheral portion 113 and a first protruding portion 114. The top surface of the peripheral portion 113 is the first top surface 117, and the first top surface 117 is provided with a first groove 115. As Figure 6 shown, the bottom end of the first protruding portion 114 is connected to the bottom wall of the first groove 115, and the first protruding portion 114 is spaced from the side wall of the first groove 115. The top surface of the first protruding portion 114 is the substrate support surface 116, and the substrate support surface 116 is spaced above the first top surface 117. The substrate support surface 116 is used to support the substrate 102 (as Figure 8 shown). It should be noted that in the present utility model, when a certain surface is provided above another surface, it does not strictly limit that one surface is directly above the other surface. These two surfaces may be spaced from each other in the horizontal direction, as long as the position of one surface is higher than the position of the other surface.

[0036] The substrate 102 placed on the carrier 101 can be sent into a coating device and coated. As Figure 8As shown, during the process of coating the bottom surface of the substrate 102, the target particles pass through the through hole 105 from bottom to top, and the target particles will adhere to the bottom surface of the substrate 102. In addition, a part of the target particles will also adhere to the surface of the main body 103 and the surface of the support block 104. Since some charged particles will adhere to the surface of the main body 103 during the coating process, if the main body 103 and the substrate 102 are electrically connected, arcing may occur. However, the support block 104 of the present utility model can reduce the risk of arcing. Specifically, a part of the target particles will enter through the gap between the first top surface 117 and the bottom surface of the substrate 102 and adhere to the outer peripheral surface and the first top surface 117 of the first protrusion 114. However, since the first groove 115 separates the outer peripheral surface and the first top surface 117 of the first protrusion 114, the conduction path of "the bottom surface of the main body 103 → the lower surface of the support block 104 → the side surface of the first outer part 113 → the first top surface 117 → the outer peripheral surface of the first protrusion 114" is interrupted by the first groove 115, and it is not easy for the substrate 102 and the main body 103 of the carrier 101 to be directly electrically connected, and the risk of arcing of the substrate 102 is relatively low.

[0037] As Figure 8 shown, in some embodiments, the side wall of the first groove 115 includes a proximal end surface 121, and the proximal end surface 121 is located at one end of the first groove 115 close to the center of the through hole 105. That is, the proximal end surface 121 faces away from the center of the through hole 105. The proximal end surface 121 is arranged opposite to and spaced from the first protrusion 114, and the proximal end surface 121 is perpendicular to the bottom wall of the first groove 115. For example, the proximal end surface 121 is a vertical plane, and the bottom wall of the first groove 115 is a horizontal plane. Although the bottom wall of the first groove 115 may adhere to the target particles, the above setting can reduce the risk of the proximal end surface 121 adhering to the target particles, thereby reducing the risk of the substrate 102 and the carrier 101 being electrically connected according to the conduction path of "the bottom surface of the main body 103 → the lower surface of the support block 104 → the side surface 136 of the first outer part 113 → the first top surface 117 → the proximal end surface 121 → the bottom wall of the first groove 115 → the outer peripheral surface of the first protrusion 114", and further reducing the risk of arcing of the substrate 102. Moreover, compared with the setting where the proximal end surface 121 is inclined upward, the proximal end surface 121 being perpendicular to the bottom wall of the first groove 115 is beneficial to further reduce the risk of the target particles adhering to the proximal end surface 121. Among them, the "setting where the proximal end surface 121 is inclined upward" means that the top end of the proximal end surface 121 is closer to the center of the through hole 105 than the bottom end of the proximal end surface; if Figure 6 shown as the reference direction, the proximal end surface 121 being inclined upward means that the top end of the proximal end surface 121 is located on the right side of the bottom end of the proximal end surface 121.

[0038] As Figure 8As shown, in some embodiments, the support block 104 further includes a connecting portion 112, and both the main body 103 and the peripheral portion 113 are connected to the connecting portion 112. The connecting portion 112 and the main body 103 can be connected by screws, and the connecting portion 112, the peripheral portion 113, and the first protruding portion 114 can be integrally formed. The outer surface of the connecting portion 112 includes a limiting surface 119, and the limiting surface 119 is used to limit the edge of the substrate 102. The limiting surface 119 faces the first protruding portion 114. The bottom end of the limiting surface 119 is connected to the first top surface 117, and a part of the limiting surface 119 is disposed above the substrate support surface 116. The edge of the limiting surface 119 includes a first side edge and a second side edge, and the first side edge and the second side edge are spaced apart along the first horizontal direction. In the first horizontal direction, both the first side edge and the second side edge are located between the two ends of the first protruding portion 114. If Figure 5 is taken as an example, then the first horizontal direction is the front-rear direction, and the first side edge and the second side edge are respectively the front side edge and the rear side edge of the limiting surface 119, and both the front side edge and the rear side edge of the limiting surface 119 are located between the front and rear ends of the first protruding portion 114.

[0039] Figure 8 In, the limiting surface 119 and the edge of the substrate 102 are spaced apart, but during the actual use of the carrier 101, the limiting surface 119 and the edge of the substrate 102 often come into contact. If a large amount of target particles adhere to the limiting surface 119, the substrate 102 and the carrier 101 will conduct electricity and arc will occur. Since both the first side edge and the second side edge are located between the two ends of the first protruding portion 114, the first protruding portion 114 is wider than the limiting surface 119. During the movement of the target particles from the side surface 136 to the limiting surface 119, the target particles will be blocked by the first protruding portion 114, and the target particles mainly adhere to the right surface of the first protruding portion 114, and the target particles are not easily attached to the limiting surface 119. Therefore, the risk of arcing between the carrier 101 and the substrate 102 is relatively low.

[0040] Such as Figure 5As shown, for the convenience of processing, the two ends of the connecting portion 112 in the first horizontal direction are flush with the two ends of the peripheral portion 113 in the first horizontal direction respectively. The connecting portion 112 further includes a second groove 120 and a spacing surface 118. Both the spacing surface 118 and the limiting surface 119 face the first protruding portion 114, and the spacing surface 118 and the limiting surface 119 are spaced apart along the first horizontal direction. In the first horizontal direction, the spacing surface 118 is located outside the two ends of the first protruding portion 114. In this way, after the target particles move from right to left and cross the first protruding portion 114, the target particles are mainly attached to the lower part of the spacing surface 118 (the lower part of the spacing surface 118 refers to the part of the spacing surface 118 that is lower than the supporting surface 116). Although the spacing surface 118 with attached target particles is likely to be electrically connected to the first top surface 117 with attached target particles, since the limiting surface 119 and the spacing surface 118 are separated from each other, it is not easy for the limiting surface 119 and the spacing surface 118 to be electrically connected. Therefore, the risk of arcing between the carrier 101 and the substrate 102 is relatively low. Among them, the limiting surface 119 and the spacing surface 118 can be separated by the second groove 120. In some embodiments, there are two spacing surfaces 118 and two second grooves 120. The two spacing surfaces 118 are respectively arranged on both sides of the limiting surface 119, and the two second grooves 120 are respectively arranged on both sides of the limiting surface 119 to ensure that the front and rear ends of the limiting surface 119 are not electrically connected through the spacing surface 118.

[0041] In the second horizontal direction, the distance between the limiting surface 119 and the center of the through hole 105 is L1, and the distance between the spacing surface 118 and the center of the through hole 105 is L2, and L1 < L2. The center of the through hole 105, L1, and L2 are not shown in the drawings. If Figure 5 is taken as an example, the center of the through hole 105 is located on the right side of the support block 104. What the above relational expression intends to express is that the limiting surface 119 and the spacing surface 118 are also spaced apart in the second horizontal direction, and the limiting surface 119 is closer to the center of the through hole 105. Among them, the first horizontal direction and the second horizontal direction are perpendicular to each other. In Figure 5 , the first horizontal direction is the front-rear direction, and the second horizontal direction is the left-right direction. In this way, when the edge of the substrate 102 contacts the limiting surface 119, it is not easy for the spacing surface 118 to contact the edge of the substrate 102, thereby reducing the risk of arcing between the carrier 101 and the substrate 102.

[0042] Since the substrate 102 is rectangular, to adapt to the shape of the substrate 102 and reduce the processing difficulty of the support block 104, both the limiting surface 119 and the spacing surface 118 can be set as vertical planes, and the limiting surface 119 and the spacing surface 118 are parallel to each other. In addition, to reduce the processing difficulty of the support block 104, the first protruding portion 114 is cube-shaped, and the first groove 115 is a rectangular groove. That is, when observing the support block 104 from a top view angle, the first groove 115 is rectangular, and the first protruding portion 114 is rectangular (as Figure 5 shown).

[0043] As Figure 10 shown, for the mutually stacked frame 106 and the tray 107, there is a gap 126 therebetween. Target particles may enter from this gap 126 and adhere to the surfaces of the frame 106 and the tray 107. To reduce the risk of the frame 106 and the tray 107 being electrically connected to cause an arcing phenomenon, the present utility model provides a first insulating member 123.

[0044] As Figure 10 shown, the beam (cross beam 109 or longitudinal beam 110) of the frame 106 includes a first body portion 128 and a second protruding portion 129. The top surface of the first body portion 128 is the second top surface 134. The second top surface 134 is provided with a third groove 127. The second protruding portion 129 is located in the third groove 127 and is connected to the bottom wall of the third groove 127. The outer peripheral surface of the second protruding portion 129 is spaced from the side wall of the third groove 127. The third groove 127 can be a circular groove, and the second protruding portion 129 can be cylindrical. The top surface of the second protruding portion 129 is the third top surface 130. The main body 103 includes a first insulating member 123. The first insulating member 123 is clamped between the bottom surface of the tray 107 and the third top surface 130. The fastener 122 passes through the first insulating member 123 and the second protruding portion 129. The first insulating member 123 is located in the third groove 127, and the first insulating member 123 protrudes outward relative to the outer peripheral surface of the second protruding portion 129.

[0045] The following briefly describes how the first insulating member 123 insulates the frame 106 and the tray 107. Please refer to Figure 10, after the target particles enter the gap 126, they diffuse and move to the vicinity of the first insulating member 123. The target particles will mainly adhere to the bottom surface 133 of the tray, the second top surface 134, and the outer peripheral surface of the first insulating member 123. It is difficult for the target particles to adhere to the wall surface of the third groove 127, the outer peripheral surface of the second protrusion 129, and the bottom surface of the first insulating member 123. Even if there are some target particles adhering, the amount is extremely small and insufficient to conduct electricity. Moreover, the protruding part of the bottom surface of the first insulating member 123 (the part protruding relative to the outer peripheral surface of the second protrusion 129) is even less likely to be adhered to by the target particles because this protruding part of the bottom surface is arranged downward. Therefore, conduction cannot be achieved between the tray 107 and the frame 106 through the path of "the second top surface 134 → the wall surface of the third groove 127 → the outer peripheral surface of the second protrusion 129 → the bottom surface of the first insulating member 123 → the outer peripheral surface of the first insulating member 123 → the bottom surface of the tray 107", and the risk of arcing between the frame 106 and the tray 107 is relatively low.

[0046] As Figure 10 shown, in some embodiments, the main body 103 further includes a second insulating member 124, and the second insulating member 124 is used to prevent the tray 107 and the frame 106 from being conducted through the fastener 122 when coating the top surface of the substrate 102. The tray 107 is provided with a fourth groove 125 with an upward opening. The second insulating member 124 includes a third body portion 131 and a fourth body portion 132 that are connected to each other. The third body portion 131 is located above the fourth body portion 132, and the third body portion 131 protrudes outward relative to the outer peripheral surface of the fourth body portion 132. The bottom surface of the fourth body portion 132 abuts against the bottom wall of the fourth groove 125, and the outer peripheral surface of the third body portion 131 is spaced from the side wall of the fourth groove 125. The fastener 122 passes through the second insulating member 124. Briefly speaking, the second insulating member 124 is equivalent to being pressed against the bottom wall of the fourth groove 125 by the nut of the fastener 122.

[0047] The following briefly describes how the second insulating member 124 insulates the frame 106 and the tray 107. During the process of coating the top surface of the substrate 102, the target particles fall into the fourth groove 125 from top to bottom and adhere to the surface of the nut of the fastener 122, the wall surface of the fourth groove 125, the outer peripheral surface of the third body portion 131, and the top surface of the third body portion 131. However, the bottom surface of the third body portion 131 and the outer peripheral surface of the fourth body portion 132 are not easily adhered to by the target particles, and conduction cannot be achieved between the fastener 122 and the tray 107 through the path of "the wall surface of the fourth groove 125 → the outer surface of the second insulating member 124 → the fastener 122". Therefore, further speaking, conduction cannot be achieved between the tray 107 and the frame 106 through the fastener 122, and the risk of arcing between the frame 106 and the tray 107 is relatively low.

[0048] In the description of the present utility model, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.

Claims

1. A carrier, characterized in that: It comprises a main body and a supporting block connected to each other, the main body is provided with a through hole, the supporting block is an insulator, the supporting block is arranged on the hole wall of the through hole, and the supporting block comprises: A peripheral portion, wherein the top surface of the peripheral portion is a first top surface, and the first top surface is provided with a first groove; A first protrusion, wherein the bottom end of the first protrusion is connected to the bottom wall of the first groove, the first protrusion is spaced apart from the side wall of the first groove, the top surface of the first protrusion is a substrate supporting surface, the substrate supporting surface is used to support the substrate, and the substrate supporting surface is spaced apart above the first top surface.

2. The carrier according to claim 1, characterized in that: The support block further comprises a connecting portion, the main body and the peripheral portion are both connected to the connecting portion, the outer surface of the connecting portion comprises a limiting surface, the limiting surface is used to limit the edge of the substrate, the limiting surface faces the first protruding portion, the bottom end of the limiting surface is connected to the first top surface, and a part of the limiting surface is arranged above the substrate supporting surface; The edge of the limiting surface includes a first side edge and a second side edge, the first side edge and the second side edge are spaced apart along a first horizontal direction, and in the first horizontal direction, the first side edge and the second side edge are both located between two ends of the first protrusion.

3. The carrier according to claim 2, characterized in that: The connecting portion further includes a spacing surface, the spacing surface faces the first protruding portion, the bottom end of the spacing surface is connected to the first top surface, the spacing surface and the limiting surface are spaced apart along the first horizontal direction, and in the first horizontal direction, the spacing surface is located outside the two ends of the first protruding portion; In the second horizontal direction, the distance between the limiting surface and the center of the through hole is L1, the distance between the spacing surface and the center is L2, and L1<L2; the first horizontal direction and the second horizontal direction are perpendicular to each other.

4. The carrier according to claim 3, characterized in that: The connecting portion further includes a second groove, and the second groove separates the limiting surface and the spacing surface.

5. The carrier according to claim 3, characterized in that: The limiting surface and the spacing surface are both vertical planes, and the limiting surface and the spacing surface are parallel to each other.

6. The carrier according to claim 1, characterized in that: When observing the support block from a top view, the first groove is rectangular and the first protrusion is rectangular.

7. The carrier according to claim 1, characterized in that: The side wall of the first groove includes a proximal surface, which is located at an end of the first groove close to the center of the through hole, faces the first protrusion, and is perpendicular to the bottom wall of the first groove.

8. The carrier according to any one of claims 1 to 7, characterized in that: The subject includes: frame; A tray, the tray having the through hole, the tray and the frame being stacked and arranged above the frame; A fastener is provided through the frame and the tray, and the frame and the tray are detachably connected via the fastener.

9. The carrier according to claim 8, characterized in that: The frame includes a first body portion and a second protruding portion, the top surface of the first body portion is the second top surface, the top surface of the second protruding portion is the third top surface, the second top surface is provided with a third groove, the second protruding portion is located in the third groove and connected to the bottom wall of the third groove, and the outer peripheral surface of the second protruding portion is spaced apart from the side wall of the third groove; The main body also includes a first insulating member, the fastener passes through the first insulating member and the second protrusion, the first insulating member is clamped between the bottom surface of the tray and the third top surface, the first insulating member is located in the third groove, and the first insulating member protrudes outward relative to the outer circumference of the second protrusion.

10. The carrier according to claim 8, characterized in that: The tray is provided with a fourth groove opening upward, the main body also includes a second insulating member, the second insulating member includes a third main body portion and a fourth main body portion connected to each other, the third main body portion is located above the fourth main body portion, and the third main body portion protrudes outward relative to the outer circumference of the fourth main body portion, the bottom surface of the fourth main body portion abuts against the bottom wall of the fourth groove, the outer circumference of the third main body portion is spaced apart from the side wall of the fourth groove, and the fastener passes through the second insulating member.

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