Torque wrench for disassembling and assembling brush head in wafer cleaning equipment

Abstract

The utility model provides a torque wrench for disassembling and assembling a brush head in wafer cleaning equipment, which comprises a head unit provided with an accommodating cavity, a brush head sleeve rotationally mounted is arranged in the accommodating cavity, and the inner circumferential surface of the brush head sleeve is in anti-rotation fit with the brush head, so that the brush head sleeve drives the brush head to rotate synchronously, and the brush head sleeve is driven to rotate synchronously; an outer tooth part is arranged on the outer peripheral surface of the brush head sleeve; the pawl structure is arranged in the containing cavity and comprises a supporting part, a first pawl part and a second pawl part, the first pawl part and the second pawl part are installed on the supporting part, the supporting part is installed on the head unit through a rotating shaft, the supporting part is externally connected with an external operation piece, and the supporting part is configured to rotate around the rotating shaft under driving of the external operation piece; the first pawl part and the second pawl part are selectively meshed with the outer tooth part; and the handle unit is connected with the head unit. By using the torque wrench in the embodiment, an operator does not need to penetrate through a cavity of the wafer cleaning equipment to disassemble or assemble the brush head by hand, so that potential safety hazards possibly suffered by the operator can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a torque wrench for disassembling and assembling a brush head in a wafer cleaning device. Background Art

[0002] With the development of semiconductor technology, the demand for wafers is increasing day by day, and at the same time, the requirement for the cleanliness of wafers is getting higher and higher. Usually, slag is generated during laser drilling of wafers, and the slag adheres to the surface of the wafers, so the wafers need to be cleaned. The existing cleaning methods are inefficient, and the wafers are not evenly cleaned. There is still liquid remaining on the surface of the wafers after cleaning, and stains are likely to form after natural drying, which affects the normal use of the wafers.

[0003] To improve the efficiency of wafer cleaning, in the existing brush-type wafer cleaning machine, a liquid medicine nozzle of a wafer cleaning device sprays liquid medicine on the surface of the wafer, and then a brush head is used to clean the wafer.

[0004] Among them, how to realize the convenient disassembly and assembly of the brush head is a topic generally considered in the industry.

[0005] It should be noted that the information disclosed in the above background art section is only used to enhance the understanding of the background of the present utility model, and therefore may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Utility Model

[0006] Aiming at the problems in the prior art, the purpose of the present utility model is to provide a torque wrench for disassembling and assembling a brush head in a wafer cleaning device, which overcomes the technical problem that the brush head is not convenient to disassemble in the related art.

[0007] An embodiment of the present disclosure provides a torque wrench for disassembling and assembling a wafer cleaning device, which includes:

[0008] A head unit having a receiving cavity, in which a brush head sleeve is rotatably installed. The inner circumferential surface of the brush head sleeve is in anti-rotation cooperation with the brush head, so that the brush head sleeve drives the brush head to rotate synchronously. The outer circumferential surface of the brush head sleeve is provided with an external tooth portion;

[0009] A ratchet structure is arranged in the receiving cavity, including a support portion and a first ratchet portion and a second ratchet portion installed on the support portion. The support portion is installed on the head unit through a rotating shaft. The support portion is externally connected to an external operating member. The support portion is configured to rotate around the rotating shaft under the drive of the external operating member, so that the first ratchet portion and the second ratchet portion selectively engage with the external tooth portion;

[0010] A handle unit connected to the head unit.

[0011] Optionally, the receiving cavity includes a first cavity for receiving the brush head sleeve, and a second cavity that is radially communicated with the first cavity and houses the ratchet structure.

[0012] Optionally, the brush head sleeve includes:

[0013] A sleeve body and a ratchet wheel axially connected, the external tooth portion is arranged on the ratchet wheel, and the brush head sleeve cooperates with the brush head through the inner peripheral surface of the inner space of the sleeve body.

[0014] Optionally, the torque wrench further includes: an elastic limiting mechanism, installed at the opening position of the brush head sleeve, the elastic limiting mechanism is configured to extend radially inwardly towards the brush head sleeve, and retract radially outwardly under the axial extrusion of the brush head, and when the brush head reaches inside the brush head sleeve, it abuts against the brush head radially.

[0015] Optionally, a plurality of the elastic limiting mechanisms are arranged circumferentially at the opening position of the brush head sleeve.

[0016] Optionally, a receiving cavity is provided at the bottom of the receiving cavity, an elastic mechanism is housed in the receiving cavity, and stoppers corresponding to the first ratchet portion and the second ratchet portion are provided at the bottom of the support portion. The elastic mechanism is compressed by the support portion when the support portion rotates, and when the support portion rotates to a position where the first ratchet portion or the second ratchet portion meshes with the external tooth portion, the elastic mechanism extends into the receiving cavity and abuts against the corresponding stopper corresponding to the engaged ratchet portion circumferentially around the rotation axis.

[0017] Optionally, the elastic mechanism includes an elastic member and a limiting member located on the side of the elastic member close to the receiving cavity.

[0018] Optionally, the handle unit includes:

[0019] An outer tube, the head unit is based on a flexible rod located inside the outer tube;

[0020] An outer cylinder sleeved outside the outer tube;

[0021] A threaded rod arranged inside the outer tube and installed with the outer cylinder, configured for rotational cooperation and axial sliding limit relative to the outer tube;

[0022] A sliding rod arranged inside the outer tube and threadedly connected to the threaded rod, the sliding rod is configured for rotational limit and axial sliding cooperation relative to the outer tube;

[0023] A spring member located between the flexible rod and the sliding rod, with both ends respectively abutting against the flexible rod and the sliding rod, and a slipping cooperation mechanism is formed between the spring member and the flexible rod.

[0024] Optionally, the handle unit further includes an inner rod located inside the outer tube. The inner rod is located at an end of the threaded rod axially away from the flexible rod, and the inner rod is arranged to be pulled out along the axial direction of the outer tube.

[0025] The torque wrench for disassembling and assembling the brush head in the wafer cleaning equipment according to the embodiments of the present disclosure has the following advantages:

[0026] The handle unit is for gripping. The head unit is sleeved outside the brush head through a brush head sleeve and maintains an anti-rotation fit, and drives the brush head to rotate together through the fit. The external operating member is used to toggle the support portion to rotate, thereby switching one of the first pawl portion and the second pawl portion to engage with the external tooth portion. Among them, the first pawl portion and the second pawl portion respectively correspond to different driving directions, and different driving directions correspond to disassembly and installation. Exemplarily, when the first pawl portion engages with the external tooth portion of the brush head sleeve, the corresponding driving direction is used to disassemble the brush head. When the second pawl portion engages with the external tooth portion, the corresponding driving direction is used to install the brush head.

[0027] During disassembly, the operator toggles the external operating member to make the brush head sleeve engage with the pawl portion at the corresponding disassembly position, then holds the torque wrench by hand, extends the arm to put the brush head into the brush head sleeve, and finally turns and screws to disassemble the brush head. Then, during installation, the brush head to be installed is placed into the brush head sleeve, the external operating member is toggled in the reverse direction to make the brush head sleeve engage with the pawl portion at the corresponding disassembly position, and again holds the torque wrench by hand, extends the arm to turn and screw the brush head with the corresponding structure configured at its installation position for installation. Therefore, when using the torque wrench of this embodiment, the operator does not need to pass through the cavity of the wafer cleaning equipment to manually disassemble or install the brush head, which can reduce the potential safety hazards that the operator may be exposed to. Moreover, using the torque wrench to disassemble and assemble the brush head can extend the service life of the wafer cleaning equipment. Description of the Drawings

[0028] Other features, objects, and advantages of the present utility model will become more apparent by reading the following detailed description of non-limiting embodiments with reference to the accompanying drawings.

[0029] Figure 1 Show the front view of the torque wrench for disassembling and assembling the brush head in the wafer cleaning equipment provided by the embodiments of the present disclosure;

[0030] Figure 2 Show Figure 1 Partial sectional view of the head unit of the shown torque wrench;

[0031] Figure 3 Show Figure 1 Cross-sectional view of the head unit of the shown torque wrench, the cross-section of which is perpendicular to the central axis of the brush head sleeve;

[0032] Figure 4 Show Figure 1 Rear view of the torque wrench shown;

[0033] Figure 5 Show Figure 1 Cross-sectional view of the torque wrench shown. Detailed implementation manner

[0034] The exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be implemented in various forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this utility model will be more complete and comprehensive, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The features, structures, or characteristics described may be combined in any suitable manner in one or more embodiments.

[0035] As shown in this application and the claims, unless the context clearly indicates otherwise, words such as "a", "an", "one", and / or "the" are not specifically singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. A method or device may also include other steps or elements.

[0036] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of this application. At the same time, it should be understood that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0037] In the description of this application, it should be understood that the orientation or positional relationships indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom" are usually based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing this application and simplifying the description. Without contrary description, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the protection scope of this application; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0038] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is merely for the convenience of differentiating the corresponding components. Without additional declaration, the above terms have no special meaning, and thus should not be construed as limiting the scope of protection of this application. In addition, although the terms used in this application are selected from well-known and commonly used terms, some of the terms mentioned in the specification of this application may be selected by the applicant according to his or her judgment, and their detailed meanings are described in the relevant parts of this description. In addition, it is required to understand this application not only through the actual terms used, but also through the meanings implied by each term.

[0039] It should be understood that when a component is referred to as "on another component", "connected to another component", "coupled to another component" or "in contact with another component", it can be directly on, connected to or coupled to, or in contact with the other component, or there may be an intervening component. In contrast, when a component is referred to as "directly on another component", "directly connected to", "directly coupled to" or "directly in contact with" another component, there is no intervening component.

[0040] In addition, the drawings are only schematic illustrations of the present utility model and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus repeated descriptions thereof will be omitted.

[0041] In the prior art, the staff needs to pass the upper body through the cavity of the wafer cleaning equipment and manually remove the brush head. On the one hand, it is inconvenient for the human body to pass through the cavity, and on the other hand, it also poses certain potential safety hazards to the body.

[0042] An embodiment of the present disclosure provides a torque wrench for disassembling and assembling the brush head in a wafer cleaning equipment, as Figure 1 shown, the torque wrench includes: a head unit 1 and a handle unit 3 connected to the head unit 1.

[0043] Combined with Figure 2 and Figure 3 shown, the head unit 1 has a receiving cavity 1a, and a brush head sleeve 11 is rotatably installed therein. The inner peripheral surface 111 ( Figure 3 not shown) of the brush head sleeve 11 and the brush head are in anti-rotation cooperation, so that the brush head sleeve 11 drives the brush head to rotate synchronously, and the outer peripheral surface of the brush head sleeve 11 is provided with an external tooth portion 112.

[0044] As Figure 3As shown, the torque wrench also includes a pawl structure 2, which is arranged in the accommodating cavity 1a, including a support portion 20 and a first pawl portion 21 and a second pawl portion 22 installed with the support portion 20, and the support portion 20 is connected to the first pawl portion 21 and the second pawl portion 22 by a rotating shaft 23 (combined with Figure 1 As shown) is installed in the head unit 1. Figure 1 As shown, the support portion 20 is externally connected to an external operating member 24 , and the support portion 20 is configured to rotate around the rotating shaft 23 driven by the external operating member 24 so that the first pawl portion 21 and the second pawl portion 22 selectively engage with the external tooth portion 112 .

[0045] In the disclosed embodiment, the handle unit 3 is used for holding, and the head unit 1 is sleeved on the outside of the brush head through the brush head sleeve 11 and maintains an anti-rotation fit, and drives the brush head to rotate together through the fit. The external operating member 24 is used to toggle the support portion 20 to rotate, and then switch one of the first pawl portion 21 and the second pawl portion 22 to engage with the outer tooth portion 112. Among them, the first pawl portion 21 and the second pawl portion 22 correspond to different driving directions, respectively, and different driving directions correspond to disassembly and installation. Exemplarily, when the first pawl portion 21 is engaged with the outer tooth portion 112 of the brush head sleeve 11, the corresponding driving direction is used to disassemble the brush head. When the second pawl portion 22 is engaged with the outer tooth portion 112, the corresponding driving direction is used to install the brush head.

[0046] During disassembly, the operator moves the external operating member 24 to engage the brush head sleeve 11 with the ratchet portion of the corresponding disassembly position, then holds the torque wrench, extends the arm to put the brush head into the brush head sleeve 11, and finally twists and removes the brush head. Next, during installation, put the brush head to be installed into the brush head sleeve 11, reversely move the external operating member 24 to engage the brush head sleeve 11 with the ratchet portion of the corresponding disassembly position, hold the torque wrench again, extend the arm to twist and install the brush head with the corresponding structure configured at its installation position. Therefore, when using the torque wrench of this embodiment, the operator does not need to pass through the cavity of the wafer cleaning equipment to manually disassemble or install the brush head, which can reduce the potential safety hazards that the operator may suffer.

[0047] In one embodiment, Figure 2 As shown, the brush head sleeve 11 includes:

[0048] The sleeve body 113 and the ratchet 114 are connected along the axial direction, and the outer tooth portion 112 is arranged on the ratchet 114. The brush head sleeve 11 is anti-rotationally matched with the brush head through the inner circumferential surface 111 of the inner space of the sleeve body 113.

[0049] The sleeve body 113 is installed with the ratchet 114. Exemplarily, the installation method can be bolt connection, welding or sleeving in the axial direction. For example, the sleeve body 113 is sleeved inside the ratchet 114 through the extension part. In this way, the ratchet 114 can drive the sleeve body 113 to rotate synchronously.

[0050] In an alternative manner, the sleeve body 113 and the ratchet 114 can also be an integral structure.

[0051] In another embodiment, the brush head sleeve itself is a ratchet, and the inner circumferential surface of the ratchet is designed to be anti-rotationally engaged with the brush head.

[0052] In an embodiment of the present disclosure, as Figure 4 shown, the cross-section of the inner circumferential surface 111 of the brush head sleeve 11 is elliptical, and the ellipse can achieve anti-rotationally engaged. In another embodiment, the inner circumferential surface can also be designed as an irregular shape, such as a polygon. In actual application, the inner circumferential surface of the brush head sleeve is designed according to the brush head.

[0053] As Figure 4 shown, the torque wrench further includes:

[0054] The elastic limiting mechanism 4 is installed at the opening position of the brush head sleeve 11. The elastic limiting mechanism 4 is configured to extend radially inwardly towards the brush head sleeve 11, and retract radially outwardly under the axial extrusion of the brush head, and abut against the brush head radially when the brush head reaches inside the brush head sleeve 11.

[0055] During disassembly, operate the torque wrench. When the brush head sleeve 11 and the brush head are axially aligned, continue to move the brush head sleeve 11 towards the brush head. The brush head squeezes the elastic limiting mechanism 4, causing the elastic limiting mechanism 4 to retract, creating a forward space for the brush head until the brush head is sleeved into the brush head sleeve 11. At this time, the elastic limiting mechanism 4 radially limits the brush head, improving the subsequent disassembly stability. Moreover, when the brush head is disassembled, the brush head can also be stably held inside the brush head sleeve 11 to prevent it from falling and damaging the wafer.

[0056] During installation, press the brush head into the brush head sleeve 11. During this process, the elastic limiting mechanism 4 retracts and finally abuts against the outer circumferential surface of the brush head, achieving the position stability of the brush head.

[0057] In one embodiment, the elastic limiting mechanism 4 includes an abutting member and a spring member located at the rear end of the abutting member. In the natural state, the spring member is in an extended state. When the abutting member is axially extruded, it also squeezes the spring member to contract towards the rear end until it reaches the retracted position. Finally, the brush head is radially limited by the compression force of the spring member.

[0058] As Figure 4As shown, a plurality of the elastic limiting mechanisms 4 arranged circumferentially are provided at the opening position of the brush head sleeve 11. This can perform more balanced and stable radial limiting on the brush head. In one embodiment, these elastic limiting mechanisms 4 are evenly distributed circumferentially to further enhance the stability of the brush head.

[0059] As Figure 3 shown, in one embodiment, a receiving cavity 1b is provided at the bottom of the accommodating cavity 1a, an elastic mechanism 5 is accommodated in the receiving cavity 1b, and stoppers (including a first stopper 31 and a second stopper 32) corresponding to the first pawl portion 21 and the second pawl portion 22 are provided at the bottom of the supporting portion 20. The elastic mechanism 5 is compressed by the supporting portion 20 when the supporting portion 20 rotates, and when the supporting portion 20 rotates to a position where the first pawl portion 21 or the second pawl portion 22 meshes with the external tooth portion 112, the elastic mechanism 5 extends into the accommodating cavity 1a and abuts against the corresponding stopper corresponding to the engaged pawl portion along the circumference around the rotating shaft 23.

[0060] The elastic mechanism 5 provides a meshing switching and positioning function. When the first pawl portion 21 meshes with the external tooth portion 112, the elastic mechanism 5 extends into the accommodating cavity 1a and abuts against the first stopper 31. When the supporting portion 20 rotates to expect the second pawl portion 22 to mesh with the external tooth portion 112, the elastic mechanism 5 is squeezed and retracted into the receiving cavity 1b by the supporting portion 20. When the second pawl portion 22 reaches the expected meshing position with the external tooth portion 112, the second stopper 32 is exactly located above the receiving cavity 1b, so that the elastic mechanism 5 rebounds and extends into the accommodating cavity 1a and abuts against the second stopper 32. At this time, if the supporting portion 20 is continued to be rotated, a certain resistance from the second stopper 32 will be encountered, so the rotation of the supporting portion 20 can be stopped to avoid excessive rotation.

[0061] When the supporting portion 20 is further rotated in the reverse direction, the second stopper 32 will not form an obstruction, so as to smoothly switch to the meshing of the first pawl portion 21 with the external tooth portion 112.

[0062] In the embodiment of the present disclosure, the elastic mechanism 5 includes an elastic member 51 and a limiting member 52 located near the accommodating cavity 1a of the elastic member 51. The elastic member 51 provides an elastic force to the limiting member 52, and the elastic member 51 can be elastically popped into the accommodating cavity 1a.

[0063] In the embodiment of the present disclosure, as Figure 5 shown, the handle unit 3 includes:

[0064] An outer tube 33, and the head unit 1 has a flexible rod 12 located inside the outer tube 33;

[0065] An outer cylinder 35 sleeved outside the outer tube 33;

[0066] A threaded rod 36 disposed within the outer tube 33 and installed with the outer cylinder 35 is configured for rotational mating with respect to the outer tube 33 and axial sliding limit;

[0067] A sliding rod 37 disposed within the outer tube 33 and threadedly connected to the threaded rod 36, the sliding rod 37 is configured for rotational limit and axial sliding mating with respect to the outer tube 33;

[0068] A spring member 38 located between the flexible rod and the sliding rod 37, with its two ends respectively abutting against the flexible rod 12 and the sliding rod 37, and a slipping and mating mechanism 39 is formed between the spring member 38 and the flexible rod 12.

[0069] When the outer cylinder 35 is rotated relative to the outer tube 33, driving the threaded rod 36 to rotate synchronously, since the threaded rod 36 is axially slidably limited and the sliding rod 37 is rotationally limited, its rotational motion is converted into the axial movement of the sliding rod 37 through the thread pair between the threaded rod 36 and the sliding rod 37. If the sliding rod 37 moves towards the spring member 38, it will squeeze the spring member 38 to deform, thereby enhancing the elastic force on the flexible rod 12. When the outer cylinder 35 is rotated in the reverse direction, finally the sliding rod 37 moves away from the spring member 38, causing the elastic force of the spring member 38 to be released, thereby reducing the elastic force on the flexible rod 12.

[0070] When the spring member 38 is in any position, it corresponds to a set torque of the torque wrench. After the brush head is installed and screwed in place, the brush head cannot rotate any further. When the flexible rod 12 continues to be subjected to the screwing force, overcoming the set torque, causing the slipping and mating mechanism 39 to separate and slip, it prompts the operator to stop screwing, preventing the brush head from falling off and damaging the wafer.

[0071] Then, the greater the set torque, the greater the screwing force required to cause the slipping and mating mechanism 39 to separate and slip, and vice versa.

[0072] Therefore, through the cooperation between the above structures, the function of adjusting the torque of the torque wrench can be achieved.

[0073] As above, the slipping and mating mechanism 39 includes a first protrusion structure 391 installed with the spring member 38 and a second protrusion structure 392 installed with the flexible rod 12. When the screwing force overcomes the torque, the second protrusion structure 392 laterally squeezes the first protrusion structure 391, overcoming the elastic force of the spring member 38, slides over the first protrusion structure 391, and generates vibration or even sound at the moment of sliding over the first protrusion structure 391, that is, the screwing is in place, and the operator stops the operation.

[0074] The first protrusion structure 391 and the second protrusion structure 392 are both balls. A ball socket for the first protrusion structure 391 is provided at the lifting portion 381 at the front end of the spring member 38, and a ball socket for accommodating the second protrusion structure 392 is provided at the front end of the deflection rod 12 to achieve assembly.

[0075] In another embodiment, the first protruding structure and the second protruding structure may also be structures of other shapes, which are not limited here.

[0076] In the disclosed embodiment, the handle unit 3 further comprises an inner rod 34 in the outer tube 33 , the inner rod 34 being located at one end of the threaded rod 36 axially away from the flexible rod 12 , and the inner rod 34 being configured to be pulled out axially of the outer tube 33 .

[0077] The inner rod 34 serves to extend the handle unit 3. When the brush head is disassembled, the inner rod 34 can be pulled out to solve the problem of insufficient arm length and improve operational reliability.

[0078] The above contents are further detailed descriptions of the present invention in combination with specific preferred implementations, and the specific implementation of the present invention cannot be considered to be limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.

Claims

1. A torque wrench for disassembling and assembling a brush head in a wafer cleaning device, characterized in that: include: The head unit has a receiving cavity, in which a rotatably mounted brush head sleeve is arranged, the inner circumference of the brush head sleeve and the brush head are anti-rotationally matched, so that the brush head sleeve drives the brush head to rotate synchronously, and the outer circumference of the brush head sleeve is arranged as an external tooth portion; A pawl structure, arranged in the accommodating cavity, comprising a support portion and a first pawl portion and a second pawl portion installed with the support portion, wherein the support portion is installed on the head unit via a rotating shaft, the support portion is externally connected to an external operating member, and the support portion is configured to rotate around the rotating shaft under the drive of the external operating member so that the first pawl portion and the second pawl portion selectively mesh with the external tooth portion; A handle unit is connected to the head unit.

2. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 1, characterized in that: The accommodating cavity includes a first cavity for accommodating the brush head sleeve, and a second cavity radially connected with the first cavity and accommodating the pawl structure.

3. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 1, characterized in that: The brush head sleeve comprises: The sleeve body and the ratchet are connected in the axial direction, the outer tooth portion is arranged on the ratchet, and the brush head sleeve cooperates with the brush head through the inner circumferential surface of the inner space of the sleeve body.

4. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 1, characterized in that: Also includes: An elastic limiting mechanism is installed at the opening position of the brush head sleeve. The elastic limiting mechanism is configured to extend radially toward the inner side of the brush head sleeve, and retract radially outward under the axial compression of the brush head, until the brush head arrives in the brush head sleeve and abuts against the brush head radially.

5. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 4, characterized in that: A plurality of the elastic limiting mechanisms arranged along the circumferential direction are provided at the opening position of the brush head sleeve.

6. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 1, characterized in that: A receiving cavity is provided at the bottom of the receiving cavity, an elastic mechanism is accommodated in the receiving cavity, and stop portions corresponding to the first pawl portion and the second pawl portion are provided at the bottom of the supporting portion, respectively. The elastic mechanism is compressed by the supporting portion when the supporting portion rotates, and when the supporting portion rotates until the first pawl portion or the second pawl portion is engaged with the external tooth portion, the elastic mechanism extends into the receiving cavity and abuts against the stop portion corresponding to the corresponding pawl portion in engagement along the circumferential direction around the rotating shaft.

7. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 6, characterized in that: The elastic mechanism includes an elastic member and a limiting member located on the elastic member close to the accommodating cavity.

8. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 1, characterized in that: The handle unit comprises: an outer tube, the head unit being based on a flexure rod located within the outer tube; An outer cylinder sleeved outside the outer tube; A threaded rod disposed in the outer tube and mounted with the outer cylinder, configured to be rotationally matched and axially slidably limited relative to the outer tube; A sliding rod disposed in the outer tube and threadedly connected to the threaded rod, wherein the sliding rod is configured to be rotationally limited and axially slidably matched relative to the outer tube; The spring component is located between the flexure rod and the sliding rod, and its two ends respectively abut against the flexure rod and the sliding rod, and a slip-off fitting mechanism is formed between the spring component and the flexure rod.

9. The torque wrench for disassembling and assembling a brush head in a wafer cleaning device according to claim 8, characterized in that: The handle unit further comprises an inner rod located in the outer tube, the inner rod being located at one end of the threaded rod axially away from the flexible rod, and the inner rod being configured to be withdrawn along the axial direction of the outer tube.

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