Film thickness monitoring equipment convenient for online maintenance

Abstract

The utility model discloses a film thickness monitoring device convenient for online maintenance. The film thickness monitoring equipment convenient for online maintenance comprises a fixed disc, a fluted disc is rotatably arranged at the upper end of the fixed disc, a plurality of through holes are formed in the fluted disc, protective glasses are arranged in the through holes, a mounting seat is fixedly arranged on one side of the fixed disc, a motor is arranged on the mounting seat, a gear is arranged at the upper end of the motor, the gear is meshed with the fluted disc, and the fluted disc is fixedly arranged on the mounting seat. And a monitoring hole is formed in the fixed disc. According to the film thickness monitoring equipment convenient for online maintenance, the protective glasses are arranged at the front end of the monitoring probe in a blocking manner, so that the influence of a coating environment in the furnace body on the probe can be reduced, and meanwhile, the effect of switching the positions of the protective glasses is realized by related components such as the fluted disc and the motor; when the surface of the protective glasses is stained with a coating material, the protective glasses at other positions can be rapidly switched to protect the probe, the process is short in time consumption, and continuous work of the device is not affected.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, in particular to a film thickness monitoring device convenient for on-line maintenance. Background Art

[0002] A film thickness monitor is a measuring instrument used in the basic disciplines of physics, chemistry, engineering and technological sciences, and materials science, and is mainly used to detect the film thickness and rate of film coating in a vacuum coating machine under a relatively high vacuum degree.

[0003] The prior art discloses a monitoring instrument and device for monitoring film thickness and coating rate in a vacuum film coating machine. The device mainly includes a monitoring system, a control system and a working furnace body. The monitoring system includes a monitoring detector, a cavity and a sealing end cover. The monitoring detector is a long rod shape with a monitoring probe, and is telescopically and movably installed inside the cavity, and extends from one end of the cavity through the inside of the cavity to the other end.

[0004] When the above device works, the adaptation probe directly contacts the internal environment of the working furnace body. After using for a period of time, maintenance work such as replacement and repair of the monitoring probe is required. During maintenance, it still takes a certain amount of time to maintain the quartz monitoring probe, and at this time the device cannot work.

[0005] Therefore, it is necessary to provide a film thickness monitoring device convenient for on-line maintenance to solve the above technical problems. Summary of the Utility Model

[0006] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a film thickness monitoring device convenient for on-line maintenance, which can protect the monitoring probe.

[0007] To achieve the above object, the technical solution adopted by the utility model is as follows:

[0008] A film thickness monitoring device convenient for on-line maintenance, comprising: a fixed disk, a toothed disk is rotatably arranged at the upper end of the fixed disk, a plurality of through holes are arranged on the toothed disk, protective mirrors are arranged in the through holes, a mounting seat is fixedly arranged on one side of the fixed disk, a motor is arranged on the mounting seat, a gear is arranged at the upper end of the motor, the gear meshes with the toothed disk, and a monitoring hole is arranged on the fixed disk.

[0009] Preferably, a fixing ring is arranged at the upper end of the fixed disk, and covers are arranged at the positions corresponding to the protective mirrors except for the position corresponding to the monitoring hole on the fixing ring.

[0010] Preferably, sliding rails are arranged at the corresponding positions of the upper end of the fixed disk and the lower end of the toothed disk, and a plurality of steel balls are arranged in the sliding rails.

[0011] Preferably, the protective mirror is threadedly connected to the through hole on the toothed disk.

[0012] Preferably, a cleaning cloth is provided at the lower end of the cover plate.

[0013] Preferably, a quick connector is provided at the lower end of the position of the monitoring hole on the fixed disk.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] (1) By arranging a protective mirror in front of the monitoring probe, the utility model can reduce the influence of the coating environment in the furnace body on the probe. At the same time, relevant components such as the toothed disk and the motor can realize the switching effect of the positions of multiple protective mirrors. When the surface of the protective mirror is stained with coating material, the protective mirror at other positions can be quickly switched to protect the probe. This process takes a short time and does not affect the continuous operation of the device;

[0016] (2) By arranging a cover plate in front of the protective mirror, the utility model can prevent the protective mirror in the standby state, that is, the protective mirror outside the position corresponding to the monitoring hole, from being affected by the coating material in the furnace body, and prevent the coating material from sticking to the surface of the unused protective mirror and causing pollution;

[0017] (3) By arranging a number of steel balls, the utility model can reduce the friction force between the fixed disk and the toothed disk, and at the same time can support the fixed disk and the toothed disk, so that the toothed disk rotates more smoothly to ensure the accurate relative position between the monitoring hole and the protective mirror. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of a film thickness monitoring device for facilitating on-line maintenance provided by the utility model;

[0019] Figure 2 is an exploded view of the first perspective of the film thickness monitoring device for facilitating on-line maintenance provided by the utility model;

[0020] Figure 3 is an exploded view of the second perspective of the film thickness monitoring device for facilitating on-line maintenance provided by the utility model.

[0021] Among them, the names corresponding to the reference numerals are: 101, fixed disk; 102, toothed disk; 103, protective mirror; 104, monitoring hole; 105, rotating shaft; 106, motor; 107, gear; 108, mounting seat; 109, fixing ring; 110, cover plate; 111, slide rail; 112, steel ball; 113, quick connector. DETAILED DESCRIPTION OF THE INVENTION

[0022] The following further describes the utility model in conjunction with the drawings and embodiments. The implementation manners of the utility model include but are not limited to the following embodiments.

[0023] As Figures 1-3As shown in the figure, the film thickness monitoring device provided by the present utility model for facilitating on-line maintenance includes: a fixed disk 101, on the upper end of the fixed disk 101 there is a toothed disk 102, and the toothed disk 102 and the fixed disk 101 are connected by a rotating shaft 105 to achieve the effect of the toothed disk 102 rotating on the fixed disk 101. There are four through holes on the toothed disk 102, and a protective mirror 103 is arranged in each through hole. The protective mirror 103 is made of transparent glass material. On one side of the fixed disk 101, there is a fixed mounting seat 108. On the mounting seat 108, there is a motor 106. On the upper end of the motor 106, a gear 107 is installed. The gear 107 meshes with the toothed disk 102. There is a monitoring hole 104 on the fixed disk 101, and the position of the monitoring hole 104 corresponds to the position of the through holes on the toothed disk 102. A monitoring probe is installed at the position of the monitoring hole 104 (such as Figure 3 the position of the large arrow shown). The whole device is located inside the working furnace body. The monitoring probe observes the film coating situation inside the furnace body through the protective mirror 103. Among them, the fixed disk 101 is fixedly installed on the inner wall of the furnace body. When the motor 106 rotates, it drives the toothed disk 102 to rotate, and the protective mirror 103 on the toothed disk 102 rotates together with the toothed disk 102. When the protective mirror 103 close to the previous protective mirror 103 rotates to the position of the monitoring hole 104, the power supply of the motor 106 is cut off, and the toothed disk 102 stops rotating.

[0024] By arranging the protective mirror 103 in front of the monitoring probe, the influence of the film coating environment inside the furnace body on the probe can be reduced. At the same time, the toothed disk 102 and related components such as the motor 106 realize the switching effect of the positions of multiple protective mirrors 103. When the surface of the protective mirror 103 is stained with film coating material, the protective mirror 103 at other positions can be quickly switched to protect the probe. This process takes a short time and does not affect the continuous operation of the device.

[0025] Second embodiment:

[0026] As Figures 1-2 shown, a fixed ring 109 is provided on the upper end of the fixed disk 101. The fixed ring 109 is fixedly installed on the fixed disk 101. At the same time, the inner diameter of the fixed ring 109 is larger than the outer diameter of the toothed disk 102, so the two do not contact. Except for the position corresponding to the monitoring hole 104 on the fixed ring 109, cover plates 110 are provided at the positions corresponding to the protective mirrors 103. The cover plates 110 are larger than the protective mirrors 103 and can completely cover the protective mirrors 103.

[0027] By arranging the cover plates 110 in front of the protective mirrors 103, it can prevent the protective mirrors 103 in the standby state, that is, those outside the position corresponding to the monitoring hole 104, from being affected by the film coating materials inside the furnace body, and prevent the film coating materials from sticking to the surface of the unused protective mirrors 103 and causing pollution.

[0028] Third embodiment:

[0029] AsFigures 2-3 As shown in the figure, sliding rails 111 are provided at corresponding positions on the upper end of the fixed disk 101 and the lower end of the gear disk 102. The sliding rails 111 are two raised rings, and a number of steel balls 112 are provided inside the sliding rails 111. The steel balls 112 are located between the two raised rings. The structure of this part is similar to the connection method at the front end of the frame where the handlebar shaft of a bicycle or the like is connected.

[0030] By providing a number of steel balls 112, the friction between the fixed disk 101 and the gear disk 102 can be reduced, and at the same time, the fixed disk 101 and the gear disk 102 can be supported. When the gear disk 102 rotates, it is more stable to ensure the accurate relative position between the monitoring hole 104 and the protective mirror 103.

[0031] Fourth Embodiment:

[0032] As Figure 2 shown, the protective mirror 103 is provided with an outer frame, and threads are provided on the outer side of the outer frame. The protective mirror 103 is fixed inside the outer frame. At the same time, threads are also provided on the side wall of the through hole on the gear disk 102, and the threads of the two are adapted to each other. The protective mirror 103 is detachably installed on the gear disk 102 through the outer frame.

[0033] Through the detachable connection method between the protective mirror 103 and the gear disk 102, it is convenient to disassemble and clean the protective mirror after use. During actual operation, the staff only needs to disassemble the protective mirror 103 on the device, and there is no need to disassemble the entire device from the furnace body.

[0034] Fifth Embodiment:

[0035] To achieve the self-cleaning effect of the protective mirror, a cleaning cloth is provided at the lower end of the cover plate 110. At the same time, the position of the protective mirror 103 protrudes a certain distance above the upper surface of the gear disk 102. When the gear disk 102 drives the protective mirror 103 to rotate, it passes through the lower end of the cover plate 110 and contacts the cleaning cloth. During the contact process, the cleaning cloth can wipe the contaminants on the surface of the protective mirror 103, thereby keeping the surface of the protective mirror 103 clean.

[0036] Sixth Embodiment:

[0037] As Figure 3 shown, a quick connector 113 is provided at the lower end of the monitoring hole 104 on the fixed disk 101. The quick connector 113 corresponds to the quick connector on the monitoring probe. For example, the connection method same as that of a camera and a camera lens can be adopted.

[0038] Working Principle:

[0039] The whole device is located inside the working furnace body. The monitoring probe observes the coating situation inside the furnace through the protective mirror 103. Among them, the fixed disk 101 is fixedly installed on the inner wall of the furnace body. When the motor 106 rotates, it drives the gear disk 102 to rotate. The protective mirror 103 on the gear disk 102 rotates together with the gear disk 102. At the same time, the gear disk 102 and related components such as the motor 106 achieve the switching effect of the positions of multiple protective mirrors 103. When the surface of the protective mirror 103 is stained with coating material, the protective mirror 103 at other positions can be quickly switched to protect the probe.

[0040] The above embodiments are only one of the preferred embodiments of the present invention and should not be used to limit the protection scope of the present invention. Any meaningless changes or polish made on the main design concept and spirit of the present invention, as long as the technical problems solved are still the same as those of the present invention, should be included in the protection scope of the present invention.

Claims

1. A film thickness monitoring device that is easy to maintain online, characterized in that: include: A fixed disk (101) is rotatably provided with a toothed disk (102) at the upper end of the fixed disk (101), a plurality of through holes are provided on the toothed disk (102), and protective mirrors (103) are provided in the through holes; a mounting seat (108) is fixedly provided on one side of the fixed disk (101), a motor (106) is provided on the mounting seat (108), a gear (107) is provided at the upper end of the motor (106), and the gear (107) is meshed with the toothed disk (102); and a monitoring hole (104) is provided on the fixed disk (101).

2. The film thickness monitoring device that is easy to maintain online according to claim 1 is characterized in that: A fixing ring (109) is provided at the upper end of the fixing plate (101), and a cover plate (110) is provided at all positions of the fixing ring (109) corresponding to the protective mirror (103), except for the position corresponding to the monitoring hole (104).

3. The film thickness monitoring device that is easy to maintain online according to claim 1 is characterized in that: A slide rail (111) is provided at corresponding positions on the upper end of the fixed disk (101) and the lower end of the toothed disk (102), and a plurality of steel balls (112) are provided in the slide rail (111).

4. The film thickness monitoring device that is easy to maintain online according to claim 1 is characterized in that: The protective mirror (103) is threadedly connected to the through hole on the toothed disc (102).

5. The film thickness monitoring device that is convenient for online maintenance according to claim 2 is characterized in that: A cleaning cloth is provided at the lower end of the cover plate (110).

6. The film thickness monitoring device that is convenient for online maintenance according to claim 1 is characterized in that: A quick connector (113) is provided at the lower end of the monitoring hole (104) on the fixing plate (101).

Images