Optical coating machine dust-free air inlet device based on sensing control

Abstract

The utility model provides a dust-free gas inlet device of an optical coating machine based on sensing control. The dust-free gas inlet device comprises a coating machine body, a gas impurity removal module, a gas dehumidification module and a gas adjusting module, the gas outlet end of the gas impurity removal module is sequentially connected with the gas inlet ends of the gas dehumidification module, the gas adjusting module and the coating machine body; wherein the gas dust removal module comprises a gas inlet pipeline, a water tank, a stirrer and a sensor group; the air inlet pipeline is communicated with the water tank; a plurality of air outlets are formed in the top of the water tank; the stirrer and the sensor group are arranged in the water tank. Suspended particles and soluble impurities entering gas are removed through the gas impurity removal module, moisture in the gas is removed through the gas dehumidification module, and the dehumidified gas is conveyed to the gas adjustment module for gas state adjustment, so that the stability and the uniformity of the coating process are improved, and the coating quality is improved. And the gas purification efficiency of the dust-free gas inlet device is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machine equipment, and in particular to a dust-free air intake device of an optical coating machine based on sensor control. Background Art

[0002] In modern science and industry, optical coating technology plays a vital role. It precisely controls the reflection, transmission, beam splitting, color separation, filtering and polarization of light by coating one or more layers of metal or dielectric films on the surface of optical components. At present, optical coating technology is widely used in many fields such as mobile phones, automobiles, new energy, aerospace and military industry, and has a significant impact on improving product performance and user experience.

[0003] In the optical coating process, the vacuum environment is one of the key factors to ensure the quality of the coating. At present, vacuum coating technology is mainly divided into three categories: evaporation coating, sputtering coating and ion coating, and each technology requires a highly stable vacuum environment to avoid interference from impurities and ensure the purity and uniformity of the coating. Although traditional vacuum systems, such as a combination of a mechanical pump and a diffusion pump, can effectively achieve the required vacuum degree, the pressure relief process after the coating is completed often causes external air to carry impurity particles into the equipment instantly, which may not only affect the coating quality of subsequent products, but also cause damage or blockage to the precision instruments inside the coating machine. Therefore, how to carry out dust-free treatment of the gas during the pressure relief process has become an important technical issue in this field.

[0004] In order to solve this problem, the patent with publication number CN201621306532.9 discloses an air intake device for a vacuum coating machine, which removes impurities in the gas through an aqueous solution and removes moisture in the gas by heating with a resistance wire. Although this method is effective, it may consume the life of the heater, and when there are many impurities in the gas, the impurities may be adsorbed on the resistance wire and cause a short circuit. The patent with publication number CN202320696589.8 discloses a dust-free air intake structure for an optical coating machine, which processes the gas through multiple units and can effectively purify the gas, but the device occupies a large area and the cost of removing impurities through a negative ion generator is high.

[0005] Based on this, technical personnel in this field urgently need a dust-free air intake device for an optical coating machine based on sensor control. Summary of the invention

[0006] In view of the deficiencies in the prior art, the utility model provides a dust-free air intake device for an optical coating machine based on sensor control, which is used to solve the problems of low gas purification efficiency and high cost of the existing dust-free air intake device.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] An air intake device for an optical coating machine based on sensing control, including a coating machine body, further comprising:

[0009] A gas impurity removal module, connected to the gas dehumidification module, for removing suspended particulate matter and soluble impurities in the gas and transmitting the gas after impurity removal to the gas dehumidification module;

[0010] A gas dehumidification module, connected to the gas regulation module, for removing moisture in the gas and transmitting the dehumidified gas to the gas regulation module;

[0011] A gas regulation module, connected to the coating machine body, for regulating the pressure, flow rate and velocity of the gas and transmitting the gas to the coating machine body;

[0012] Among them, the gas dust removal module includes an intake pipe, a water tank, a stirrer, and a sensor group; the intake pipe is communicated with the water tank; several air outlets are provided at the top of the water tank, and at least one water outlet is provided at the lower side of the water tank;

[0013] The stirrer and the sensor group are both arranged inside the water tank, and the sensor group and the stirrer are communicatively connected.

[0014] Optionally, the gas dehumidification module includes a heater, a gas transmission pipe, at least two adsorption columns and at least two humidity sensors;

[0015] The adsorption column includes an adsorption column body, an adsorption core, an intake pipe, an outlet pipe and a screw cap; one end of the intake pipe is communicated with the adsorption column body, and the other end is threadedly connected to the air outlet of the water tank through the screw cap; one end of the outlet pipe is communicated with the adsorption column body, and the other end is connected to the intake end of the heater through the gas transmission pipe;

[0016] The adsorption core is arranged in the inner cavity of the adsorption column body, and its interior is filled with adsorption filler for dehumidifying the gas entering the inner cavity of the adsorption column body;

[0017] The humidity sensor is arranged inside the outlet pipe; the output ends of the at least two humidity sensors are communicatively connected to the input end of the heater.

[0018] Optionally, the gas regulation module includes a gas pressure pump, an electromagnetic switch valve, a speed regulating valve and a filtering mechanism;

[0019] The intake end of the gas pressure pump is connected to the gas dehumidification module, and the outlet end of the gas pressure pump is sequentially connected to the intake ends of the electromagnetic switch valve, the speed regulating valve and the filtering mechanism; the outlet end of the filtering mechanism is connected to the air intake port of the coating machine.

[0020] Optionally, the gas impurity removal module further includes a liquid storage tank, a water conveying valve and a water outlet valve;

[0021] The liquid storage tank is arranged outside the water tank. The liquid storage tank is provided with a liquid outlet, and the liquid outlet of the liquid storage tank is communicated with the water tank through a water delivery valve; the water outlet valve is arranged at the water outlet of the water tank.

[0022] Optionally, a metal filter screen is arranged at the port of the air inlet end of the air inlet pipe for pre-removing impurities from the gas; the air outlet end of the air inlet pipe extends below the liquid level inside the water tank.

[0023] Optionally, the sensor group includes a water quality sensor, a first water level sensor and a second water level sensor; the water quality sensor and the water level sensor are both arranged on the inner wall of the water tank;

[0024] The output end of the water quality sensor is respectively communicatively connected with the input ends of the water outlet valve and the stirrer; the output end of the first water level sensor is respectively communicatively connected with the input ends of the water delivery valve and the water outlet valve; the output end of the second water level sensor is communicatively connected with the water delivery valve.

[0025] Optionally, the front surface of the inner cavity of the adsorption column body is open, and a door is hinged to the front surface of the inner cavity of the adsorption column body through a hinge for replacing the adsorption core in the inner cavity of the adsorption column body.

[0026] Optionally, a control valve is arranged at the connection part of the air inlet pipe and the air outlet of the water tank; the input end of the control valve is communicatively connected with the output end of the humidity sensor.

[0027] Optionally, a sealing ring is arranged at the connection part of the air outlet pipe and the gas transmission pipe.

[0028] Optionally, the gas regulation module further includes at least one support rod. One end of the support rod is fixedly connected with the heater, and the other end is fixedly connected with the surface of the coating machine body for supporting the heater to be suspended.

[0029] The beneficial effects provided by the embodiments of the present utility model:

[0030] The present utility model first removes suspended particles and soluble impurities in the incoming gas through the gas impurity removal module, then removes moisture in the gas through the gas dehumidification module, and transmits the dehumidified gas to the gas regulation module for gas state regulation, ensuring that the gas reaches the best process state before entering the coating machine body, improving the stability and uniformity of the coating process, and effectively enhancing the gas purification efficiency of the dust-free air intake device.

[0031] The utility model precisely controls the aqueous solution used for adsorbing gas impurities through a water quality sensor and a water level sensor. The water quality sensor can be used to monitor the relative content of impurities in the water, and the water level sensor is used to monitor the water level of the aqueous solution in the water tank. The impurities deposited at the bottom are stirred by a stirrer, so that the impurities are discharged through the water outlet of the water tank, and the aqueous solution can be replaced in time, improving the impurity removal efficiency. Brief Description of the Drawings

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0033] Figure 1 Shows a schematic structural diagram of a dust-free air intake device provided according to an embodiment of the present specification;

[0034] Figure 2 Shows a schematic cross-sectional view of an adsorption column provided according to an embodiment of the present specification;

[0035] Figure 3 Shows a schematic structural diagram of an adsorption core provided according to an embodiment of the present specification;

[0036] Figure 4 Shows a top view of the connection between the water tank and the adsorption column provided according to an embodiment of the present specification;

[0037] Figure 5 Shows a three-dimensional external view of an adsorption column provided according to an embodiment of the present specification;

[0038] Among them, 1 is a water tank; 2 is an intake pipe; 3 is a liquid storage tank; 4 is a stirrer; 5 is a water outlet valve; 6 is a water delivery valve; 7 is a metal filter screen; 8 is a water quality sensor; 9 is a first water level sensor; 10 is a second water level sensor; 11 is a first adsorption column; 111 is an adsorption column body; 112 is an adsorption core; 113 is an intake pipe; 114 is an outlet pipe; 115 is a screw cap; 116 is an adsorption filler; 117 is a door; 118 is a handle; 12 is a second adsorption column; 13 is a first control valve; 14 is a second control valve; 15 is a first humidity sensor; 16 is a second humidity sensor; 17 is a sealing ring; 18 is a gas transmission pipe; 19 is a heater; 20 is a support rod; 21 is a gas pressure pump; 22 is an electromagnetic on-off valve; 23 is a speed control valve; 24 is a filtering mechanism; 25 is a coating machine body. Detailed Embodiments

[0039] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the following detailed description, many specific details are set forth in order to provide a thorough understanding of the present utility model. However, it will be apparent to those skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is only intended to provide a better understanding of the present application by showing examples of the present application.

[0040] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or a communication connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0041] Embodiment 1

[0042] Figure 1 The structural schematic diagram of a dust-free intake device provided according to an embodiment of this specification is shown;

[0043] As Figure 1 shown, this embodiment discloses a dust-free intake device for an optical coating machine based on sensing control, including a coating machine, and further including:

[0044] A gas impurity removal module, connected to the gas dehumidification module, for removing suspended particulate matter and soluble impurities in the gas, and transmitting the gas after impurity removal to the gas dehumidification module;

[0045] A gas dehumidification module, connected to the gas regulation module, for removing moisture in the gas, and transmitting the gas after dehumidification to the gas regulation module;

[0046] A gas regulation module, connected to the coating machine, for regulating the pressure, flow rate and velocity of the gas, and transmitting the gas to the coating machine body 25;

[0047] In some embodiments, the gas dust removal module includes a water tank 1, an intake pipe 2, a liquid storage tank 3, a stirrer 4, a sensor group, a water delivery valve 6 and a water outlet valve 5;

[0048] Exemplarily, a metal filter screen 7 is provided at the port of the intake end of the intake pipe 2 for pre-removing impurities from the gas; the outlet end of the intake pipe 2 is communicated with the water tank 1 and extends below the liquid level inside the water tank 1;

[0049] Exemplarily, a plurality of air outlets are provided at the top of the water tank 1, and at least one water outlet is provided at the lower side of the water tank 1; the water outlet valve 5 is arranged at the water outlet of the water tank 1; wherein, the liquid storage tank 3 is arranged outside the water tank 1, a liquid outlet is provided on the liquid storage tank 3, and the liquid outlet of the liquid storage tank 3 is communicated with the water tank 1 through a water conveying valve 6;

[0050] Exemplarily, the sensor group includes a water quality sensor 8, a first water level sensor 9 and a second water level sensor 10;

[0051] The water quality sensor 8 is arranged on the inner wall of the water tank 1, and the output end of the water quality sensor 8 is respectively in communication connection with the input ends of the water outlet valve 5 and the stirrer 4, so as to monitor the relative content of impurities in the water body, and when the relative content of impurities reaches a preset threshold value, drive the stirrer 4 to stir the impurities deposited at the bottom of the water, and at the same time open the water outlet valve 5 to discharge the aqueous solution in the water tank 1 through the water outlet of the water tank 1;

[0052] The first water level sensor 9 and the second water level sensor 10 are respectively arranged on the circumferential inner wall of the water tank 1, and the vertical distance from the second water level sensor 10 to the bottom wall of the water tank 1 is higher than that of the first water level sensor 9;

[0053] Wherein, the output end of the first water level sensor 9 is respectively in communication connection with the input ends of the water conveying valve 6 and the water outlet valve 5, so as to when the water level in the water tank 1 is lower than a preset minimum water level threshold value, the first water level sensor 9 will open the water conveying valve 6 to supplement water to the water tank 1 through the liquid storage tank 3, and at the same time close the water outlet valve 5 to stop draining the water tank 1; the output end of the second water level sensor 10 is in communication connection with the water conveying valve 6, so as to when the water level in the water tank 1 is higher than a preset maximum water level threshold value, the second water level sensor 10 opens the water conveying valve 6 to supplement water to the water tank 1 through the liquid storage tank 3.

[0054] Figure 2 The cross-sectional schematic diagram of the adsorption column provided by the embodiment of the present specification is shown;

[0055] As Figure 2 shown, in some embodiments, the gas dehumidification module includes a heater 19, a gas transmission pipeline 18, a first adsorption column 11, a second adsorption column 12, a first humidity sensor 15, a second humidity sensor 16, a first control valve 13 and a second control valve 14;

[0056] Exemplarily, the adsorption column includes an adsorption column body 111, an adsorption core 112, an air inlet pipe 113, an air outlet pipe 114 and a screw cap 115;

[0057] Specifically, one end of the intake pipe 113 is connected to the adsorption column body 111, and the other end is threadedly connected to the air outlet of the water tank 1 through the screw cap 115; one end of the outlet pipe 114 is connected to the adsorption column body 111, and the other end is connected to the intake end of the heater 19 through the gas transmission pipeline 18; wherein, a sealing ring 17 is provided at the connection between the outlet pipe 114 and the gas transmission pipeline 18;

[0058] Figure 3 Fig. shows a schematic structural diagram of an adsorption core provided according to an embodiment of the present specification;

[0059] As Figure 3 shown, specifically, the adsorption core 112 is arranged in the inner cavity of the adsorption column body 111, and the adsorption core 112 is filled with adsorption packing 116 for dehumidifying the gas entering the inner cavity of the adsorption column body 111;

[0060] Among them, the adsorption packing 116 includes one or more of activated carbon, silica gel, activated alumina, and quicklime.

[0061] Exemplarily, the heater 19 includes a resistance wire for heating the passing gas to effectively remove moisture in the gas;

[0062] Specifically, the first control valve 13 is arranged at the connection between the first adsorption column 11 and the air outlet of the water tank 1; the second control valve 14 is arranged at the connection between the second adsorption column 12 and the air outlet of the water tank 1; the first humidity sensor 15 is arranged inside the outlet pipe 114 of the first adsorption column 11; the second humidity sensor 16 is arranged inside the outlet pipe 114 of the second adsorption column 12;

[0063] Figure 4 Fig. shows a top view of the connection between the water tank and the adsorption column provided according to an embodiment of the present specification;

[0064] As Figure 4 shown, in some embodiments, the output end of the first humidity sensor 15 is respectively communicatively connected to the input ends of the first control valve 13 and the second control valve 14 for selectively opening the first control valve 13 and / or the second control valve 14 according to the humidity inside the first adsorption column 11; the output end of the second humidity sensor 16 is communicatively connected to the input end of the heater 19 for selectively turning on the heater 19 according to the humidity inside the second adsorption column 12;

[0065] Figure 5 Fig. shows a three-dimensional view of the appearance of the adsorption column provided according to an embodiment of the present specification;

[0066] As Figure 5As described above, in some embodiments, the front of the inner cavity of the adsorption column body 111 is open, and a door 117 is hinged to the front of the inner cavity of the adsorption column body 111 through a hinge for replacing the adsorption core 112 in the inner cavity of the adsorption column body 111;

[0067] Specifically, a handle 118 is fixedly connected to the front of the door 117, and a set of anti-slip lines arranged at equal intervals are provided on the outer surface of the handle 118;

[0068] It should be noted that in this embodiment, the connection method between the door 117 and the front of the inner cavity of the adsorption column body 111 includes but is not limited to being hinged through a hinge, being slidably connected through a sliding track, being magnetically adsorbed and connected, etc.

[0069] In some embodiments, a locking device is provided between the door 117 and the adsorption column body 111 to prevent external pollutants from entering the inner cavity of the adsorption column body; wherein, the locking device includes a lock catch and a lock block, the lock catch is fixedly installed on one side of the adsorption column body 111, and the lock block is fixedly installed on the surface of the door 117, and the lock block is clamped inside the lock catch.

[0070] In some embodiments, the gas regulation module includes a gas booster pump 21, an electromagnetic switch valve 22, a speed regulating valve 23, a filtering mechanism 24 and at least one support rod 20; wherein, the filtering mechanism 24 includes one or more of activated carbon, filter cotton, and molecular sieve.

[0071] Exemplarily, the intake end of the gas booster pump 21 is connected to the outlet end of the heater 19, and the outlet end of the gas booster pump 21 is sequentially connected to the intake ends of the electromagnetic switch valve 22, the speed regulating valve 23 and the filtering mechanism 24; the outlet end of the filtering mechanism 24 is connected to the intake port of the coating machine.

[0072] Exemplarily, one end of the support rod 20 is fixedly connected to the heater 19, and the other end is fixedly connected to the surface of the coating machine body 25 to support the heater 19 in suspension.

[0073] The implementation principle of this embodiment is as follows: The gas enters the intake pipe 2 in the gas dust removal module, and the gas is pretreated through the metal filter screen 7 at the intake end of the intake pipe 2 to remove impurities such as suspended particulate matter in the gas. Then, the gas enters the water tank 1 through the intake pipe 2, and the soluble impurities are removed through the aqueous solution in the water tank 1; when the relative content of impurities in the aqueous solution reaches the preset threshold, the water quality sensor 8 drives the stirrer 4 to stir the impurities deposited at the bottom of the water, and at the same time opens the water outlet valve 5 to discharge the aqueous solution in the water tank 1 through the water outlet of the water tank 1;

[0074] The gas after impurity removal enters the adsorption column in the gas dehumidification module through the channel of the top valve 117 of the water tank 1. The humidity in the first adsorption column 11 is detected in real time by the first humidity sensor 15, and the humidity in the second adsorption column 12 is detected in real time by the second humidity sensor 16. When the humidity in the first adsorption column 11 does not reach the preset humidity threshold, the first control valve 13 is opened and the second control valve 14 is closed to allow the gas to enter only the first adsorption column 11. When the humidity in the first adsorption column 11 reaches the preset humidity threshold, the first control valve 13 is closed and the second control valve 14 is opened to allow the gas to enter only the second adsorption column 12. When the humidity in the second adsorption column 12 reaches the preset humidity threshold, the second humidity sensor 16 turns on the heater 19 to heat-treat the gas to remove the moisture in the gas.

[0075] The gas after impurity removal and dehumidification sequentially passes through the gas pressure pump 21, electromagnetic switch valve 22, speed regulating valve 23 and filtering mechanism 24 in the gas control module. The gas pressure pump 21 first pressurizes the gas so that it can quickly enter the coating machine. The electromagnetic switch valve 22 and the speed regulating valve 23 respectively adjust the flow rate and flow velocity of the gas to control them at a suitable value. Next, the filtering mechanism 24 performs the final impurity removal, dehumidification and purification on the gas and also plays a buffering role. After the gas is processed by the gas dust removal module, gas dehumidification module and gas control module, the impurity content and humidity are greatly reduced, meeting the requirements for entering the optical coating machine.

[0076] In summary, the utility model can effectively control the aqueous solution for adsorbing gas impurities through the water quality sensor and the water level sensor. The water quality sensor can monitor the relative content of impurities in the water, and combined with the water level sensor, the aqueous solution can be replaced in time to improve the impurity removal efficiency.

[0077] The utility model can effectively monitor the humidity of the gas through the humidity sensor, adsorb the gas layer by layer, and when the adsorption column is saturated, the heater will be turned on to remove the moisture in the gas by using the resistance wire heating method, which can not only improve the moisture removal rate but also reduce the energy consumption. In addition, using multiple adsorption columns to process the gas can reduce the frequency of packing replacement to a certain extent.

[0078] The utility model controls the gas flow rate and flow velocity through the electromagnetic switch valve and the speed regulating valve, and finally adsorbs the gas with filter cotton to further improve the gas purification effect and also play a buffering role to prevent the gas from impacting the optical coating machine and damaging the internal parts of the instrument.

[0079] The above are only the preferred embodiments of the present utility model. For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above-described exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, it is intended to embrace all changes falling within the meaning and scope of the equivalent elements of the claims in the present utility model.

Claims

1. A dust-free air intake device for an optical coating machine based on sensor control, comprising a coating machine body, characterized in that: Also includes: A gas impurity removal module is connected to the gas dehumidification module to remove suspended particles and soluble impurities in the gas and transmit the impurity-removed gas to the gas dehumidification module; A gas dehumidification module, connected to the gas regulation module, for removing moisture from the gas and transmitting the dehumidified gas to the gas regulation module; A gas regulating module is connected to the coating machine body to regulate the pressure, flow rate and flow velocity of the gas and transmit the gas to the coating machine body; The gas dust removal module includes an air intake pipe, a water tank, an agitator, and a sensor group; the air intake pipe is connected to the water tank; a plurality of air outlets are provided on the top of the water tank, and at least one water outlet is provided on the lower side of the water tank; The agitator and the sensor group are both arranged inside the water tank, and the sensor group is communicatively connected with the agitator.

2. The device according to claim 1, characterized in that The gas dehumidification module includes a heater, a gas pipeline, at least two adsorption columns and at least two humidity sensors; The adsorption column comprises an adsorption column body, an adsorption core, an air inlet pipe, an air outlet pipe and a screw cap; one end of the air inlet pipe is connected to the adsorption column body, and the other end is threadedly connected to the air outlet of the water tank through the screw cap; one end of the air outlet pipe is connected to the adsorption column body, and the other end is connected to the air inlet end of the heater through the gas pipeline; The adsorption core is arranged in the inner cavity of the adsorption column body, and is filled with adsorption fillers to dehumidify the gas entering the inner cavity of the adsorption column body; The humidity sensor is arranged inside the air outlet pipe; the output ends of the at least two humidity sensors are both communicatively connected with the input end of the heater.

3. The device according to claim 1, characterized in that The gas regulating module includes a gas pressure pump, an electromagnetic switch valve, a speed regulating valve and a filtering mechanism; The air inlet of the gas pressure pump is connected to the gas dehumidification module, and the air outlet of the gas pressure pump is connected to the air inlet of the electromagnetic switch valve, the speed regulating valve and the filtering mechanism in sequence; the air outlet of the filtering mechanism is connected to the air inlet of the coating machine.

4. The device according to claim 1, characterized in that The gas impurity removal module also includes a liquid storage tank, a water delivery valve and a water outlet valve; The liquid storage box is arranged outside the water tank, and a liquid outlet is arranged on the liquid storage box. The liquid outlet of the liquid storage box is connected with the water tank through a water delivery valve; and the water outlet valve is arranged at the water outlet of the water tank.

5. The device according to claim 1, characterized in that A metal filter is provided at the port of the air inlet end of the air inlet pipe to pre-remove impurities from the gas; the air outlet end of the air inlet pipe extends below the liquid level inside the water tank.

6. The device according to claim 4, characterized in that The sensor group includes a water quality sensor, a first water level sensor and a second water level sensor; the water quality sensor and the water level sensor are both arranged on the inner wall of the water tank; The output end of the water quality sensor is communicatively connected to the input end of the water outlet valve and the agitator respectively; the output end of the first water level sensor is communicatively connected to the input end of the water supply valve and the water outlet valve respectively; the output end of the second water level sensor is communicatively connected to the water supply valve.

7. The device according to claim 2, characterized in that The front side of the inner cavity of the adsorption column body is open, and a door is hingedly connected to the front side of the inner cavity of the adsorption column body through hinges, so as to replace the adsorption core in the inner cavity of the adsorption column body.

8. The device according to claim 2, characterized in that A control valve is provided at the connection between the air inlet pipe and the air outlet of the water tank; the input end of the control valve is communicatively connected with the output end of the humidity sensor.

9. The device according to claim 2, characterized in that A sealing ring is provided at the connection between the air outlet pipe and the air delivery pipeline.

10. The device according to claim 3, characterized in that The gas regulating module further comprises at least one supporting rod, one end of which is fixedly connected to the heater, and the other end of which is fixedly connected to the surface of the coating machine body, so as to support the heater to be suspended in the air.

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