Stainless steel tube for high-purity semiconductor

Abstract

The utility model discloses a stainless steel tube for a high-purity semiconductor, which comprises a first tube body and a second tube body arranged at the bottom of the first tube body, the locking assembly used for locking is arranged between the first pipe body and the second pipe body; threads are arranged on the inner side of the bottom of the first pipe body and the outer side of the top of the second pipe body, and the first pipe body and the second pipe body are connected through the threads. The locking assembly comprises a first gasket and a second gasket, the first gasket is fixedly connected to the bottom end of the first pipe body, and a plurality of sawteeth are fixedly connected to the first gasket; and the second gasket is fixedly connected outside the second pipe body. According to the utility model, through the arrangement of the locking assembly, the locking glue enters the inner space of the ring body from the discharge groove and is adhered to the plurality of sawteeth, and the first gasket and the second gasket are fixedly connected together after solidification, so that creep deformation or looseness caused by long-term work under high temperature or dynamic load is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of stainless steel pipes, in particular to a stainless steel pipe for high-purity semiconductors. Background Art

[0002] The stainless steel pipe for semiconductors is an essential key component in the semiconductor industry. It is mainly used in the conveying systems of high-purity fluids (such as gases, chemical solvents). These pipes have extremely strong corrosion resistance and can resist various corrosive chemicals used in the semiconductor manufacturing process, ensuring the purity of the fluid and the stability of the process. At the same time, the stainless steel pipe also has good high-temperature resistance and can adapt to the high-temperature process environment that may be involved in semiconductor manufacturing. In addition, it is also used to construct a stable structure to support semiconductor equipment, such as cylinders, etc., to ensure the operation safety and efficiency of the overall equipment. In short, the stainless steel pipe for semiconductors plays an important role in ensuring the quality and production safety of semiconductor products with its excellent performance.

[0003] The utility model with the authorization publication number of CN220506070U provides a high-strength semiconductor polishing stainless steel pipe, which belongs to the technical field of "stainless steel pipes". The protected claims are: "It includes a steel pipe main body and an installation component. A connecting ring is fixedly connected to the outer wall of the steel pipe main body. The installation component is located on the outer wall of the steel pipe main body. The installation component includes a sliding rod, a round block, a return spring, an inclined cutting block, a connecting sleeve and a slot. Four groups of sliding rods are slidably installed on the connecting ring and are distributed in a circular array. One end of the sliding rod is fixedly connected to a round block, and the other end of the sliding rod is fixedly connected to an inclined cutting block. One end of the inclined cutting block is fixedly connected to a return spring, and a damper is arranged on the return spring. When the inclined cutting block is squeezed, it drives the sliding rod to move to one side. This utility model can connect and install multiple groups of steel pipe main bodies. Compared with the way of fixing with screws, it does not require the staff to perform the repeated action of screwing screws, making the fixation more convenient."

[0004] In this device, although a locking mechanism is set for fixed installation, even with the use of the locking structure, working under high temperature or dynamic load for a long time will cause creep or relaxation. For this reason, we propose a stainless steel pipe for high-purity semiconductors. Content of the Utility Model

[0005] The purpose of the utility model is to provide a stainless steel pipe for high-purity semiconductors to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the utility model provides the following technical solutions:

[0007] A stainless steel pipe for high-purity semiconductors, comprising:

[0008] A first pipe body, and a second pipe body is arranged at the bottom of the first pipe body;

[0009] Locking assembly, a locking assembly for locking is provided between the first pipe body and the second pipe body.

[0010] Preferably: Threads are provided on the inner side of the bottom of the first pipe body and the outer side of the top of the second pipe body, and the first pipe body and the second pipe body are connected by threads.

[0011] Preferably: The locking assembly includes:

[0012] A first washer, the first washer is fixedly connected to the bottom end of the first pipe body, and a plurality of sawteeth are fixedly connected to the first washer;

[0013] A second washer, the second washer is fixedly connected outside the second pipe body, a plurality of sawteeth are fixedly connected to the second washer, and the second washer and the first washer are snap-connected through a plurality of sawteeth;

[0014] A blocking ring, the blocking ring is fixedly connected to the bottom of the second washer;

[0015] A ring body, the ring body is fixedly connected outside the first pipe body, a bladder is fixedly arranged inside the ring body, a needle body is movably inserted into the ring body, and a plurality of discharge grooves are formed through the inner side of the ring body.

[0016] Preferably: The sawteeth on the first washer and the second washer are in opposite directions, and the two groups of sawteeth are rotationally snap-connected.

[0017] Preferably: The outer diameter of the blocking ring is larger than the inner diameter of the ring body.

[0018] Preferably: A filling valve is fixedly connected to the outer side of the ring body.

[0019] Preferably: The blocking ring is made of rubber material.

[0020] Compared with the prior art, the beneficial effects of the present utility model are:

[0021] 1. By providing a locking assembly, the first pipe body and the second pipe body are connected together by threads. When the connection is in place, the sawteeth on the first washer and the sawteeth on the second washer will rotate and snap together to avoid thread slipping. At the same time, the blocking ring catches the inner ring of the ring body, forming a space inside the ring body. Then, press the needle body to pierce the bladder, release the locking glue in the bladder, and the locking glue enters the inner space of the ring body from the discharge groove, adheres to a plurality of sawteeth, and after solidification, the first washer and the second washer are fixedly connected together, avoiding creep or relaxation caused by long-term working under high temperature or dynamic load.

[0022] 2. By setting the first washer and the second washer, the first pipe body and the second pipe body are connected together by threads. When the connection is in place, the serrations on the first washer and the serrations on the second washer will rotate and engage with each other to avoid slipping of the threads, and cooperate with the locking component for double locking, thereby increasing the fixing effect. Brief Description of the Drawings

[0023] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0024] Figure 2 is a cross-sectional view of the internal structure of the present utility model;

[0025] Figure 3 is in the present utility model Figure 1 exploded view;

[0026] Figure 4 is in the present utility model Figure 3 bottom view.

[0027] In the figure: 1. First pipe body; 2. Second pipe body; 3. Locking component; 11. Thread; 31. First washer; 311. Serrations; 32. Second washer; 33. Blocking ring; 34. Ring body; 341. Bladder; 342. Needle body; 343. Drainage groove; 4. Injection valve. Detailed Description of the Embodiments

[0028] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0029] Embodiment 1

[0030] As Figures 1-4 shown, in this embodiment, a stainless steel pipe for high-purity semiconductors includes a first pipe body 1 and a locking component 3. A second pipe body 2 is provided at the bottom of the first pipe body 1; a locking component 3 for locking is provided between the first pipe body 1 and the second pipe body 2 to prevent creep or relaxation caused by long-term operation under high temperature or dynamic load;

[0031] The locking component 3 includes: a first washer 31, the first washer 31 is fixedly connected to the bottom end of the first pipe body 1, and a plurality of sawteeth 311 are fixedly connected to the first washer 31, ; a second washer 32, the second washer 32 is fixedly connected outside the second pipe body 2, and a plurality of sawteeth 311 are fixedly connected to the second washer 32, the second washer 32 and the first washer 31 are clamped through a plurality of sawteeth 311, and the two groups of sawteeth 311 are staggered with each other, and the sawteeth 311 on the first washer 31 and the sawteeth 311 on the second washer 32 will be rotationally clamped together to avoid slipping of the threads, and the two groups of sawteeth 311; a blocking ring 33, the blocking ring 33 is fixedly connected to the bottom of the second washer 32; a ring body 34, the ring body 34 is fixedly connected outside the first pipe body 1, a bladder 341 is fixedly arranged inside the ring body 34, a needle body 342 is movably inserted into the ring body 34, and a plurality of discharge grooves 343 are formed through the inner side of the ring body 34, and the locking glue enters the inner space of the ring body 34 from the discharge grooves 343 and adheres to a plurality of sawteeth 311, and after solidification, the first washer 31 and the second washer 32 are fixedly connected together.

[0032] As Figure 1 shown, in this embodiment, a filling valve 4 is fixedly connected to the outer side of the ring body 34. By providing the filling valve 4, the locking glue can be directly injected into the ring body 34 without relying on the bladder 341.

[0033] In addition, it should be noted that the locking glue and the bladder 341 can withstand high temperatures, and the surface of the device is treated to add an anti-rust and anti-corrosion coating to improve the corrosion resistance and wear resistance of the threaded connection 11.

[0034] During specific implementation, the first pipe body 1 and the second pipe body 2 are connected together through the thread 11. When the connection is in place, the sawteeth 311 on the first washer 31 and the sawteeth 311 on the second washer 32 will be rotationally clamped together to avoid slipping of the threads. At the same time, the blocking ring 33 clamps the inner ring of the ring body 34 to form a space inside the ring body 34. Then, the needle body 342 is pressed down to pierce the bladder 341 to release the locking glue in the bladder 341. The locking glue enters the inner space of the ring body 34 from the discharge grooves 343 and adheres to a plurality of sawteeth 311. After solidification, the first washer 31 and the second washer 32 are fixedly connected together to avoid creep or relaxation caused by long-term operation under high temperature or dynamic load.

[0035] Embodiment Two

[0036] As Figure 3 shown, in this embodiment, threads 11 are provided on the inner side of the bottom of the first pipe body 1 and the outer side of the top of the second pipe body 2. The first pipe body 1 and the second pipe body 2 are connected through the thread 11, and it is necessary to connect the first pipe body 1 and the second pipe body 2 together through the thread 11.

[0037] During specific implementation, the first tube body 1 and the second tube body 2 are connected together through the thread 11. When the connection is in place, the serrations 311 on the first washer 31 and the serrations 311 on the second washer 32 will rotate and engage with each other to avoid thread slipping, cooperate with the locking assembly 3, and double-lock to enhance the fixing effect.

[0038] Working principle: First, the first tube body 1 and the second tube body 2 are connected together through the thread 11. When the connection is in place, the serrations 311 on the first washer 31 and the serrations 311 on the second washer 32 will rotate and engage with each other to avoid thread slipping. At the same time, the blocking ring 33 catches the inner ring of the ring body 34, forming a space inside the ring body 34. Then, the needle body 342 is pressed to pierce the capsule body 341, releasing the locking glue inside the capsule body 341. The locking glue enters the inner space of the ring body 34 from the discharge groove 343 and adheres to the multiple serrations 311. After solidification, the first washer 31 and the second washer 32 are fixedly connected together.

[0039] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and the present utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0040] In addition, it should be understood that although this specification is described according to the embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A high-purity semiconductor stainless steel tube, characterized in that: include: A first tube body (1), wherein a second tube body (2) is arranged at the bottom of the first tube body (1); A locking assembly (3), wherein a locking assembly (3) for locking is arranged between the first tube body (1) and the second tube body (2).

2. The high-purity semiconductor stainless steel tube according to claim 1, characterized in that The inner side of the bottom of the first tube body (1) and the outer side of the top of the second tube body (2) are both provided with threads (11), and the first tube body (1) and the second tube body (2) are connected via the threads (11).

3. The high-purity semiconductor stainless steel tube according to claim 1, characterized in that: The locking assembly (3) comprises: A first gasket (31), the first gasket (31) being fixedly connected to the bottom end of the first tube body (1), and a plurality of saw teeth (311) being fixedly connected to the first gasket (31); A second gasket (32), the second gasket (32) being fixedly connected to the outside of the second tube body (2), a plurality of saw teeth (311) being fixedly connected to the second gasket (32), and the second gasket (32) and the first gasket (31) being clamped together via the plurality of saw teeth (311); A blocking ring (33), wherein the blocking ring (33) is fixedly connected to the bottom of the second gasket (32); A ring body (34) is fixedly connected to the outside of the first tube body (1), a capsule (341) is fixedly arranged inside the ring body (34), a needle body (342) is movably inserted on the ring body (34), and a plurality of discharge grooves (343) are opened through the inner side of the ring body (34).

4. The high-purity semiconductor stainless steel tube according to claim 3, characterized in that: The saw teeth (311) on the first washer (31) and the second washer (32) are in opposite directions, and the two groups of saw teeth (311) are rotatably engaged with each other.

5. The high-purity semiconductor stainless steel tube according to claim 3, characterized in that: The outer diameter of the blocking ring (33) is greater than the inner diameter of the ring body (34).

6. The high-purity semiconductor stainless steel tube according to claim 3, characterized in that: The outer side of the ring body (34) is fixedly connected with an injection valve (4).

7. The high-purity semiconductor stainless steel tube according to claim 3, characterized in that: The blocking ring (33) is made of rubber material.

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