Box clamping device and transplanter comprising same

Abstract

The utility model relates to the technical field of wafer cleaning equipment, in particular to a box clamping device and a transplanter comprising the box clamping device. Comprising a clamping assembly, a swing driving assembly and a lifting driving assembly. The material clamping assembly comprises a left swing part and a right swing part, the swing driving assembly is used for opening and closing the left swing part and the right swing part, and the lifting driving assembly is used for driving the swing driving assembly to ascend and descend. Each of the left swing part and the right swing part comprises a mounting seat, a rotating part, a connecting rod and a movable part, the mounting seats are arranged at the output end of the lifting driving assembly, the rotating parts are rotationally connected to the mounting seats, the two ends of each connecting rod are connected with the corresponding rotating part and the corresponding movable part respectively, and the swing driving assembly drives the corresponding movable part to ascend and descend; the purposes of low energy consumption and small installation size are achieved, and meanwhile the production safety meets the machining requirement.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer cleaning equipment, in particular to a box clamping device and a transfer machine containing the box clamping device. Background Art

[0002] The cleaning process of wafer chips is an essential and important link in the production process. During the wafer chip cleaning process, it is necessary to transfer the wafer chips from different cleaning pools. Usually, several wafer chips are placed in a material box, and a manipulator clamps the material box and transfers it at different workstations to meet the cleaning and processing requirements of the wafer chips. The existing material box clamping device has the characteristics of high energy consumption and large installation volume, resulting in high production costs and unable to meet the production and processing requirements, so it needs to be improved. Summary of the Invention

[0003] In order to overcome the disadvantages of the existing box clamping device with high energy consumption and large installation volume, resulting in high production costs, the purpose of the utility model is to provide a box clamping device and a transfer machine containing the box clamping device, which can reduce energy consumption, reduce the installation volume and lower the production cost.

[0004] To achieve the above purpose, the technical solution of the utility model is as follows:

[0005] A box clamping device includes a material clamping component, a swing driving component and a lifting driving component;

[0006] The material clamping component includes a left swing piece and a right swing piece. The swing driving component is used for opening and closing the left swing piece and the right swing piece, and the lifting driving component is used for driving the swing driving component to lift;

[0007] Both the left swing piece and the right swing piece include a mounting seat, a rotating piece, a connecting rod and a movable piece. The mounting seat is arranged at the output end of the lifting driving component. The rotating piece is rotatably connected to the mounting seat. Two ends of the connecting rod are respectively connected to the rotating piece and the movable piece. The swing driving component drives the movable piece to lift.

[0008] Further, the rotating piece includes a shaft body and a shaft sleeve. The shaft sleeve is fixedly connected to the shaft body. The connecting rod is fixedly connected to the shaft sleeve. The shaft body is rotatably connected to the mounting seat.

[0009] Further, the swing driving component includes a first driving source and a slider. The slider is slidably connected to the mounting seat. The sliding direction of the slider is parallel to the central axis of the shaft body. The slider is provided with a first inclined surface. The movable piece abuts against the first inclined surface.

[0010] Further, the movable piece includes a runner. The movable piece is rotatably connected to the connecting rod.

[0011] Further, the material clamping assembly further includes a reset member, and two ends of the reset member are respectively connected to the rotating members of the left swing member and the right swing member.

[0012] Further, both the left swing member and the right swing member include material clamping members, the material clamping members are fixedly connected to the rotating members, and the material clamping members extend in a direction away from the rotating members.

[0013] Further, the material clamping box device further includes a fiber optic sensor, the fiber optic sensor is arranged on the mounting base, and the fiber optic sensor is inclined towards the bottom end of the material clamping member.

[0014] A transplanter includes a material clamping box device, and further includes a transfer member, a lateral movement assembly and a material sensor. The transfer member is used to transfer an external material box to the material clamping assembly, and the lateral movement assembly is used to drive the lifting drive assembly to move laterally.

[0015] Further, the transplanter further includes a material sensor. The transfer member includes a material box, and the number of the material sensors is two groups. The two groups of material sensors are arranged up and down to sense the specifications of the materials in the material box.

[0016] The beneficial effects of the present utility model: By setting that both the left swing member and the right swing member include a structure composed of a mounting base, a rotating member, a connecting rod and a movable member, during the process of the swing drive assembly driving the movable member to move up and down, the swing of the rotating member is realized, so as to realize the opening and closing of the left swing member and the right swing member by the swing drive assembly, meeting the purpose of clamping an external material box.

[0017] Another beneficial effect of the present utility model: By setting a transplanter composed of a material clamping box device, a transfer member, a lateral movement assembly and a material sensor, the purpose of accurately sensing wafers to be cleaned with different specifications is realized. At the same time, the setting of the transfer member improves the production safety. Description of the Drawings

[0018] Figure 1-1 is a three-dimensional structural schematic diagram of the material clamping box device of the present utility model;

[0019] Figure 1-2 is a partial structural schematic diagram of the material clamping box device of the present utility model;

[0020] Figure 1-3 is a three-dimensional structural schematic diagram of the material clamping assembly and the swing drive assembly of the present utility model;

[0021] Figure 1-4 is a three-dimensional sectional structural schematic diagram of the material clamping assembly and the swing drive assembly of the present utility model;

[0022] Figure 2-1 is a first perspective structural schematic diagram of the transplanter of the present utility model;

[0023] Figure 2-2 This is a schematic diagram of the second perspective structure of the transplanter of the present utility model;

[0024] Figure 2-3 This is a schematic diagram of the intermediate member structure of the transplanter of the present utility model.

[0025] The reference numerals include:

[0026] 1—Material clamping assembly 11—Left swing member 12—Right swing member

[0027] 101—Mounting seat 102—Rotating member 1021—Shaft body

[0028] 1022—Bushing 103—Connecting rod 104—Movable member

[0029] 105—Reset member 106—Material clamping member 2—Swing driving assembly

[0030] 21—First driving source 22—Slider 221—First inclined surface

[0031] 3—Lifting driving assembly 4—Fiber sensing member 5—Intermediate member

[0032] 51—Material box 52—Horizontal driving source 53—Longitudinal driving source

[0033] 6—Transverse moving assembly 7—Material sensing member. Specific embodiments

[0034] For the convenience of those skilled in the art to understand, the present utility model will be further described below in conjunction with embodiments and the accompanying drawings. The content mentioned in the embodiments does not limit the present utility model.

[0035] Please refer to Figures 1-1 to 1-4 , a clamping device of the present utility model includes a material clamping assembly 1, a swing driving assembly 2 and a lifting driving assembly 3;

[0036] The material clamping assembly 1 includes a left swing member 11 and a right swing member 12. The swing driving assembly 2 is used to open and close the left swing member 11 and the right swing member 12, and the lifting driving assembly 3 is used to drive the swing driving assembly 2 to lift;

[0037] Both the left swing member 11 and the right swing member 12 include a mounting seat 101, a rotating member 102, a connecting rod 103 and a movable member 104. The mounting seat 101 is arranged at the output end of the lifting driving assembly 3. The rotating member 102 is rotatably connected to the mounting seat 101. The two ends of the connecting rod 103 are respectively connected to the rotating member 102 and the movable member 104. The swing driving assembly 2 drives the movable member 104 to lift.

[0038] Specifically, in this embodiment, the material clamping assembly 1 includes a left swing member 11 and a right swing member 12. The left swing member 11 and the right swing member 12 have the same structure. The swing driving assembly 2 is located between the left swing member 11 and the right swing member 12. Both the left swing member 11 and the right swing member 12 include a mounting seat 101, a rotating member 102, a connecting rod 103 and a moving member 104. The mounting seat 101 includes side plates and a bottom plate. The number of side plates is two. The two side plates are arranged in parallel at a certain distance. The side plates are processed with side through holes. The rotating member 102 passes through the side through holes and is rotatably connected to the side through holes. One end of the connecting rod 103 is fixedly connected to the rotating member 102, and the other end of the connecting rod 103 is fixedly connected to the moving member 104. The swing driving assembly 2 drives the moving member 104 to move up and down. During the up and down movement of the moving member 104, the rotating member 102 at the other end of the connecting rod 103 is driven to swing, and finally the swing driving assembly 2 drives the left swing member 11 and the right swing member 12 to open and close, meeting the purpose of clamping.

[0039] By setting that both the left swing member and the right swing member include a structure composed of a mounting seat, a rotating member, a connecting rod and a moving member, during the process of the swing driving assembly 2 driving the moving member 104 to move up and down, the swing of the rotating member 102 is realized, so as to realize the opening and closing of the left swing member 11 and the right swing member 12 by the swing driving assembly 2, meeting the purpose of clamping an external material box.

[0040] The rotating member 102 includes a shaft body 1021 and a shaft sleeve 1022. The shaft sleeve 1022 is fixedly connected to the shaft body 1021. The connecting rod 103 is fixedly connected to the shaft sleeve 1022. The shaft body 1021 is rotatably connected to the side plates of the mounting seat 101. The shaft sleeve 1022 is in a cube shape, which is convenient for connecting with the connecting rod 103.

[0041] The swing driving assembly 2 includes a first driving source 21 and a slider 22. The slider 22 is slidably connected to the bottom plate of the mounting seat 101. The sliding direction of the slider 22 is parallel to the central axis of the shaft body 1021. The slider 22 is provided with a first inclined surface 221. The first inclined surface 221 is arranged away from the bottom plate. The moving member 104 abuts against the first inclined surface 221. During the process of the first driving source 21 driving the slider 22 to slide, the moving member 104 realizes the purpose of moving up and down under the action of the first inclined surface 221.

[0042] The moving member 104 includes a rotating wheel. The moving member 104 is rotatably connected to the connecting rod 103. By setting the moving member 104 as a rotating wheel structure, the moving member 104 is in line contact with the first inclined surface 221, reducing the frictional resistance.

[0043] The material clamping assembly 1 further includes a reset member 105. Both ends of the reset member 105 are respectively connected to the rotating members 102 of the left swing member 11 and the right swing member 12. The reset member 105 adopts a tension spring structure to drive the left swing member 11 and the right swing member 12 to reset.

[0044] Both the left and right pendants 11 and 12 include a material clamping member 106. The material clamping member 106 is fixedly connected to the rotating member 102 and extends in a direction away from the rotating member 102.

[0045] The cassette clamping device further includes an optical fiber sensor 4. The optical fiber sensor 4 is disposed on the mounting base 101 and is inclined towards the bottom end of the material clamping member 106, for sensing whether the material clamping assembly 1 has clamped an external cassette, and at the same time sensing whether there are wafers to be processed in the external cassette.

[0046] Please refer to Figures 2-1 to 2-3 , a transplanter, including a cassette clamping device, further including a transfer member 5, a lateral movement assembly 6 and a material sensor 7. The transfer member 5 is used to transfer an external cassette to the material clamping assembly 1. The lateral movement assembly 6 is used to drive the lifting drive assembly 3 to move laterally. Preferably, the transfer member 5 is used to carry a cassette containing a number of wafers. The transfer member 5 includes a horizontal drive source 52 and a vertical drive source 53. Driven by the horizontal drive source 52 and the vertical drive source 53, the external cassette is transferred to the material clamping assembly 1, thereby avoiding direct contact between the operator and the material clamping assembly 1 and ensuring production safety. The lateral movement assembly 6 includes an upper guide rail, a lower guide rail and a servo motor. The servo motor drives the lifting drive assembly 3 to move horizontally along the upper guide rail and the lower guide rail.

[0047] By providing a transplanter composed of a cassette clamping device, a transfer member, a lateral movement assembly and a material sensor, the purpose of accurately sensing wafers to be cleaned of different specifications is achieved. At the same time, the setting of the transfer member improves production safety.

[0048] The transplanter further includes a material sensor 7. The transfer member 5 includes a cassette 51. The number of the material sensors 7 is two groups. The two groups of material sensors 7 are arranged up and down to sense the specifications of the materials in the cassette 51. When wafers of different heights are placed in the cassette 51, when the upper material sensor 7 and the lower material sensor 7 simultaneously sense the wafers, it indicates that larger - sized wafers are placed in the cassette 51. When only the lower material sensor 7 senses the wafers, it indicates that smaller - sized wafers are placed in the cassette 51.

[0049] The above content is only the preferred embodiment of the present utility model. For those of ordinary skill in the art, according to the idea of the present utility model, there will be changes in the specific implementation manner and application scope. The content of this specification should not be construed as a limitation to the present utility model.

Claims

1. A box clamping device, characterized in that: It comprises a material clamping assembly (1), a swing driving assembly (2) and a lifting driving assembly (3); The material clamping assembly (1) comprises a left swinging piece (11) and a right swinging piece (12); the swing driving assembly (2) is used to open and close the left swinging piece (11) and the right swinging piece (12); and the lifting driving assembly (3) is used to drive the swing driving assembly (2) to rise and fall; The left swing member (11) and the right swing member (12) both comprise a mounting seat (101), a rotating member (102), a connecting rod (103) and a movable member (104); the mounting seat (101) is arranged at the output end of the lifting drive assembly (3); the rotating member (102) is rotatably connected to the mounting seat (101); the two ends of the connecting rod (103) are respectively connected to the rotating member (102) and the movable member (104); and the swing drive assembly (2) drives the movable member (104) to rise and fall.

2. The box clamping device according to claim 1, characterized in that: The rotating member (102) comprises a shaft body (1021) and a shaft sleeve (1022), the shaft sleeve (1022) is fixedly connected to the shaft body (1021), the connecting rod (103) is fixedly connected to the shaft sleeve (1022), and the shaft body (1021) is rotatably connected to the mounting seat (101).

3. The box clamping device according to claim 2, characterized in that: The swing drive assembly (2) comprises a first drive source (21) and a slider (22); the slider (22) is slidably connected to the mounting seat (101); the sliding direction of the slider (22) is arranged parallel to the central axis of the shaft body (1021); the slider (22) is provided with a first inclined surface (221); and the movable member (104) is in contact with the first inclined surface (221).

4. The box clamping device according to claim 1, characterized in that: The movable member (104) comprises a rotating wheel, and the movable member (104) is rotatably connected to the connecting rod (103).

5. The box clamping device according to claim 1, characterized in that: The material clamping assembly (1) further comprises a reset member (105), the two ends of which are respectively connected to the rotating member (102) of the left swing member (11) and the rotating member (102) of the right swing member (12).

6. The box clamping device according to claim 1, characterized in that: The left swing member (11) and the right swing member (12) both include a material clamping member (106), wherein the material clamping member (106) is fixedly connected to the rotating member (102), and the material clamping member (106) extends in a direction away from the rotating member (102).

7. The box clamping device according to claim 6, characterized in that: The box clamping device further comprises an optical fiber sensing component (4), wherein the optical fiber sensing component (4) is arranged on the mounting seat (101), and the optical fiber sensing component (4) is inclined toward the bottom end of the material clamping component (106).

8. A transplanter, characterized in that: The box clamping device comprises the box clamping device as described in any one of claims 1 to 7, and further comprises a transfer member (5), a transverse moving assembly (6) and a material sensing member (7), wherein the transfer member (5) is used to transfer the external material box to the material clamping assembly (1), and the transverse moving assembly (6) is used to drive the lifting drive assembly (3) to move transversely.

9. The transplanter according to claim 8, characterized in that: The transplanter further comprises a material sensing component (7), the transfer component (5) comprises a material box (51), the material sensing components (7) are provided in two groups, and the two groups of material sensing components (7) are arranged up and down for sensing the specifications of the material in the material box (51).

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