Full-automatic furnace tube cleaning machine

Abstract

The full-automatic furnace tube cleaning machine comprises a moving assembly and a cleaning assembly, the moving assembly comprises a mechanical arm and a moving module, the mechanical arm is electrically connected with the moving module, and the mechanical arm is used for moving a furnace tube along the x axis, the y axis and the z axis under the control of the moving module; the cleaning assembly comprises a cleaning tank and a motor module, a valve is arranged on the cleaning tank, the cleaning tank comprises an inner tank, a middle tank and an outer tank, the inner tank is used for cleaning the furnace tube by using an acid solution under the control of the motor module, and the middle tank and the outer tank are used for cleaning the furnace tube by using clear water under the control of the motor module; in the cleaning process, the inner tank, the middle tank and the outer tank can be used at the same time. Through cooperation of the moving assembly and the cleaning assembly, a plurality of pipelines can be used at the same time, the working efficiency is improved, the cost expenditure is saved, the environmental pollution caused by a chemical agent is reduced, the labor intensity of operators is reduced, and the health of the operators is guaranteed.

Description

Technical Field

[0001] This application relates to the field of semiconductor device diffusion, and more particularly, to a fully automatic furnace tube cleaning machine. Background Art

[0002] In the semiconductor device diffusion industry, the particle size of the quartz pipeline and silicon carbide pipeline of the diffusion furnace is an important process index. To ensure the particle size of the diffusion furnace tube, the diffusion furnace tube is regularly cleaned. When cleaning, the furnace tube is placed in the cleaning machine, first rinsed with pure water, then the prepared acidic solution is manually poured into the pipeline for soaking and rinsing, and then rinsed with pure water to wash off the acidic solution attached to the surface. Finally, nitrogen is used to dehydrate the moisture on the inner and outer walls of the diffusion furnace pipeline.

[0003] From an economic perspective, since only one diffusion furnace pipeline can be cleaned at a time, it greatly wastes manpower and time; from an environmental perspective, the acid-containing solvent is a chemical solvent, which causes certain pollution to the environment; from a safety perspective, since the operator needs to manually pour the acid-containing solvent onto the inner and outer walls of the diffusion furnace pipeline, the volatility and irritation of the acid-containing solvent are very large. Prolonged close contact by the operator is also harmful to the operator's body and is prone to safety hazards such as personal injury. Utility Model Content

[0004] In order to overcome the above deficiencies in the prior art, a fully automatic furnace tube cleaning machine provided by this application is characterized in that the fully automatic furnace tube cleaning machine includes a motion component and a cleaning component.

[0005] The motion component includes a robotic arm and a motion module. The robotic arm is electrically connected to the motion module, and the robotic arm is used to move the furnace tube along the x-axis, y-axis, and z-axis under the control of the motion module.

[0006] The cleaning component includes a cleaning tank and a motor module. A valve is provided on the cleaning tank. The cleaning tank includes an inner tank, a middle tank, and an outer tank. The inner tank is used to clean the furnace tube with an acidic solution under the control of the motor module, and the middle tank and the outer tank are used to clean the furnace tube with clean water under the control of the motor module.

[0007] During the cleaning process, the inner tank, the middle tank, and the outer tank can be used simultaneously.

[0008] In a possible implementation, rollers are further provided in the cleaning tank. The rollers are used to rotate the furnace tube evenly in the tank, and the rollers are electrically connected to the motor module.

[0009] In a possible implementation, the valve on the cleaning tank includes a solenoid valve.

[0010] In a possible implementation, the full-automatic furnace tube cleaning machine further includes a liquid recovery component, which includes a chemical agent recovery valve, at least two liquid storage tanks, and a recovery module. The chemical agent recovery valve is electrically connected to the recovery module, and the chemical agent recovery valve is used to recover the rinsing liquid to the liquid storage tank under the control of the recovery module after the use of the rinsing liquid is completed.

[0011] In a possible implementation, the full-automatic furnace tube cleaning machine further includes an audible and visual alarm, which is used to give an audible and visual alarm when the equipment has an abnormality.

[0012] In a possible implementation, the full-automatic furnace tube cleaning machine further includes a manual control panel, which is used to manually control the operation of the motion component, the cleaning component, the liquid recovery component, and the audible and visual alarm.

[0013] In a possible implementation, the full-automatic furnace tube cleaning machine further includes a display screen, which is electrically connected to the human-machine interaction module. The human-machine interaction module is electrically connected to the motion component, the cleaning component, the liquid recovery component, and the audible and visual alarm. The human-machine interaction module is at least used to set the rinsing liquid and rinsing time when the cleaning component operates.

[0014] In a possible implementation, the full-automatic furnace tube cleaning machine further includes a changeover switch, which is used to switch between the manual mode and the automatic mode. The manual mode is used to implement individual operation of each step.

[0015] In a possible implementation, the full-automatic furnace tube cleaning machine further includes a nitrogen dryer, which is used to dry the furnace tube after the cleaning of the furnace tube is completed.

[0016] In a possible implementation, the outside of the nitrogen dryer and the outside of the cleaning tank are welded and encapsulated with polypropylene plates.

[0017] Compared with the prior art, the present application has the following beneficial effects:

[0018] A full-automatic furnace tube cleaning machine provided by the present application includes a motion component and a cleaning component. The diffusion furnace pipeline cleaning machine designed in combination with the actual situation on site can be used for multiple pipelines at the same time, without chemical agent dehydration, which increases the work efficiency, saves cost expenditure, reduces the environmental pollution caused by chemical agents, reduces the labor intensity of operators, and also avoids operators contacting volatile chemical agents for a long time, thereby ensuring the health of operators. Description of the Drawings

[0019] To more clearly illustrate the technical solution of this embodiment, the following will briefly introduce the drawings required in the embodiment. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as a limitation of the scope. For those of ordinary skill in the art, without creative efforts, other relevant drawings can also be obtained based on these drawings.

[0020] Figure 1 Front view of the fully automatic furnace tube cleaning machine provided in this embodiment;

[0021] Figure 2 Schematic diagram of the moving components of the fully automatic furnace tube cleaning machine provided in this embodiment;

[0022] Figure 3 Internal top view of the fully automatic furnace tube cleaning machine provided in this embodiment;

[0023] Figure 4 Schematic diagram of the programmable touch screen of the fully automatic furnace tube cleaning machine provided in this embodiment.

[0024] Figure 5 Schematic diagram of the liquid recovery component of the fully automatic furnace tube cleaning machine provided in this embodiment.

[0025] Icons: 10 - Fully automatic furnace tube cleaning machine, 100 - Moving components, 110 - Robot arm, 120 - Motion module, 200 - Cleaning components, 210 - Cleaning tank, 211 - Inner tank, 212 - Middle tank, 213 - Outer tank, 214 - Roller, 215 - Solenoid valve, 220 - Motor module, 300 - Liquid recovery component, 310 - Catalyst recovery valve, 320 - Liquid storage tank, 400 - Acoustic and optical alarm, 510 - Manual control panel, 511 - Toggle switch, 520 - Display screen. Detailed implementation manners

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application claimed, but merely represents the selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts belong to the scope of protection of the present application.

[0028] It should be noted that like reference numerals and letters refer to like items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0029] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the figures, or the orientation or positional relationship in which the product of this application is usually placed when in use. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0030] In addition, terms such as "horizontal", "vertical", "overhanging", etc. do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0031] In the description of the present application, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "install", "connect", "couple" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0032] The following will specifically describe the embodiments of the present application with reference to the accompanying drawings.

[0033] A fully automatic furnace tube cleaning machine 10 provided by the present application, please refer to Figure 1 , which is characterized in that it includes a motion component 100 and a cleaning component 200.

[0034] Please refer to Figure 2 , the motion component 100 includes a robotic arm 110 and a motion module 120. The robotic arm 110 is electrically connected to the motion module 120. The robotic arm 110 is used to move the furnace tube along the x-axis, y-axis, and z-axis under the control of the motion module 120.

[0035] The cleaning component 200 includes a cleaning tank 210 and a motor module 220, please refer to Figure 3, a valve is provided on the cleaning tank 210. The cleaning tank 210 includes an inner tank 211, a middle tank 212, and an outer tank 213. Please refer to Figure 4 , the inner tank 211 is used to clean the furnace tube with an acidic solution under the control of the motor module 220, and the middle tank 212 and the outer tank 213 are used to clean the furnace tube with clean water under the control of the motor module 220.

[0036] During the cleaning process, the inner tank 211, the middle tank 212, and the outer tank 213 can be used simultaneously.

[0037] In this embodiment, the fully automatic furnace tube cleaning machine 10 can not only clean multiple pipes simultaneously, but also automatically clean inside the closed machine, reducing environmental pollution and harm to the operator's body. At the same time, it has economic and safety benefits.

[0038] For example, when using the fully automatic furnace tube cleaning machine 10, the operator controls the robotic arm 110 to move forward and backward, up and down through the control panel on the right side of the outer shell. After raising the robotic arm 110 to the upper limit position, move it to the front limit position, place the diffusion furnace pipe on the bracket of the moving robotic arm 110, use the control panel to move the robotic arm 110 backward to the rear limit position, lower it into the specified tank position, control the start of the acid solvent flushing program through the operation of the control panel, lower the fishing platform of the robotic arm 110 in manual or touch screen automatic mode, the diffusion furnace pipe rotates uniformly in the tank, control the diaphragm pump to pump the acidic solution into the inner tank 211 through time control, the diaphragm pump stops operating after reaching the specified timing time or limit position, the diffusion furnace pipe continues to rotate, when the acidic solution flushing program ends, the control unit issues an alarm, raise the robotic arm 110 to the upper limit position through the control panel and then move it above the middle tank 212, then lower the robotic arm 110 to the specified position for flushing and spraying, drain the water after reaching the time, when the liquid level is higher than the limit liquid level, close the flushing solenoid valve 215, and the excessive water will be discharged from the overflow port at the bottom of the tank to drain the water in the tank. Repeat the 7 - time repeated flushing and outer wall spraying to clean the acidic solution on the inner and outer walls of the diffusion furnace pipe. After the flushing program ends, the alarm on the control unit will emit a beeping sound, and at the same time, the robotic arm 110 moves to the initial position.

[0039] In some possible implementation manners, please refer to Figure 3 , a roller 214 is further provided in the cleaning tank 210. The roller 214 is used to rotate the furnace tube uniformly in the tank, and the roller 214 is electrically connected to the motor module 220.

[0040] In this embodiment, in order to clean the diffusion furnace tube thoroughly, a roller 214 is provided in the cleaning tank 210. For example, when the fully automatic furnace tube cleaning machine 10 is working, the roller 214 drives the furnace tube to rotate uniformly.

[0041] In a possible implementation manner, please refer to Figure 3 The valve on the cleaning tank includes a solenoid valve 215.

[0042] In this embodiment, the valve of the cleaning tank 210 uses a solenoid valve 215, and its opening and closing are controlled by a control module; the inner tank 211 further includes a diaphragm pump. The diaphragm pump is a new type of conveying machinery that can convey various corrosive liquids, liquids with particles, liquids with high viscosity, volatile, flammable, and highly toxic liquids. To protect the personal safety of operators and extend the service life of the equipment, the inner tank 211 uses a diaphragm pump to convey an acidic solution as a furnace tube cleaning agent. In this equipment, the diaphragm pump is controlled by the control module to spray the acidic solution into the tank.

[0043] In some possible implementation manners, please refer to Figure 5 The fully automatic furnace tube cleaning machine 10 further includes a liquid recovery assembly 300. The liquid recovery assembly 300 includes a chemical agent recovery valve 310, at least two liquid storage tanks 320, and a recovery module. The chemical agent recovery valve 310 is electrically connected to the recovery module, and the chemical agent recovery valve 310 is used to recover the rinsing liquid to the liquid storage tank 320 under the control of the recovery module after the use of the rinsing liquid is completed.

[0044] In this embodiment, for different diffusion furnace tubes, the acidic solutions used in the inner tank 211 are also different; the cleaning liquid uses a highly concentrated acidic solution and can be used multiple times. Therefore, the fully automatic furnace tube cleaning machine 10 further includes the liquid recovery assembly 300. After the furnace tube cleaning is completed, the chemical agent recovery valve 310 is opened to pump the acidic solution in the cleaning tank 210 back to the liquid storage tank 320 for repeated use. At least two liquid storage tanks 320 are prepared to store different types of acidic solutions. For example, when using the fully automatic furnace tube cleaning machine 10, the operator supplies and recovers different acidic solutions one by one through the operation panel or touch screen, and can clean the pipes of special diffusion furnaces such as polycrystalline, TEOS, desilicated silicon, and boron phosphorus at the same time, and the chemical agent is reused to reduce the chemical agent cost.

[0045] In some possible implementation manners, please refer to Figure 1 The fully automatic furnace tube cleaning machine 10 further includes an audible and visual alarm 400, and the audible and visual alarm 400 is used to give an audible and visual alarm when an abnormality occurs in the equipment.

[0046] In this embodiment, to protect the personal safety of operators and extend the service life of the equipment, an audible and visual alarm 400 is provided on the fully automatic furnace tube cleaning machine 10, which gives warnings by sound and light when abnormalities occur in the movement component 100, the cleaning component 200 or the liquid recovery component 300 of the equipment; in addition, the fully automatic furnace tube cleaning machine 10 is also provided with an emergency stop switch. When problems occur in the equipment, the operator can press the emergency stop switch to end the operation.

[0047] In some possible implementation manners, please refer to Figure 1 , the fully automatic furnace tube cleaning machine 10 further includes a manual control panel 510, and the manual control panel 510 is used to manually control the operations of the movement component 100, the cleaning component 200, the liquid recovery component 300 and the audible and visual alarm 400.

[0048] In this embodiment, the fully automatic furnace tube cleaning machine 10 further includes a manual control panel 510, and the manual control panel 510 is connected to the movement component 100, the cleaning component 200, the liquid recovery component 300 and the audible and visual alarm 400, and can manually control the operations of the above components. For example, when the fully automatic furnace tube cleaning machine 10 is operating, the operator can directly control the movement of the furnace tube along the x-axis, y-axis and z-axis through the manual control panel 510.

[0049] In some possible implementation manners, please refer to Figure 1 , the fully automatic furnace tube cleaning machine 10 further includes a display screen 520, the display screen 520 is electrically connected to the human-machine interaction module, the human-machine interaction module is electrically connected to the movement component 100, the cleaning component 200, the liquid recovery component 300 and the audible and visual alarm 400, and the human-machine interaction module is at least used to set the flushing liquid and flushing time when the cleaning component 200 is operating.

[0050] For example, when the fully automatic furnace tube cleaning machine 10 is operating, the operator can set parameters such as the flushing liquid and flushing time through the display screen 520, which is convenient for targeted cleaning of different diffusion furnace tubes.

[0051] For example, please refer to Figure 4, the main components of the fully automatic diffusion furnace tube use a PLC (Programmable Logic Controller), a touch screen, and a servo motor driver as the control part. The input part of the PLC is respectively the forward, backward, upward, downward movement of the robotic arm 110 and the limit switches. Among them, the automatic forward, backward, upward, and downward movements are respectively connected to relays, which convert the voltage signal into the digital quantity required by the PLC to achieve the purpose of automatic program control. The output part of the PLC is a 24V limit interlock signal. The PLC signal point is connected to the motor through the driver, and the 24V switching power supply is connected to the driver and the power switch lamp wire. Use 110V alternating current as the power supply. Start the main power switch, and the touch screen and PLC start the working mode. Close the main power supply and the power switch button of the manual control panel 510, and the entire control circuit enters the working mode. Through the switching switch 511 button, the corresponding buttons on the touch screen of the dual-system that can achieve separate manual and automatic control can enter each working step operation interface and the main interface, where the cleaning time and cleaning times can be edited. When programming automatic cleaning on the main control panel of the system, return the robotic arm 110 to the front limit. At this time, the position of the robotic arm 110 is the initial position, otherwise the program is prohibited from running. After meeting the above conditions, run the automatic cleaning program. The signal circuit of the robotic arm 110 makes the automatic forward relay work, converts it into a PLC input signal, and the PLC outputs to the motor driver to drive the stepper motor to rotate. The robotic arm 110 starts to move backward until it stops at the rear limit switch. At this time, the 24V interlock of the front position limit takes effect, otherwise an alarm and beeping prompt will be generated. After the robotic arm 110 runs to the rear limit, the in-place signal is triggered through the relay. The robotic arm 110 starts to descend to the lower limit, and the relay in-place signal is triggered. The motor of the inner tank 211 drives two transmission shafts to act and inject acidic solution into the inner tank 211 through the diaphragm pump at the same time. After the cleaning of the inner tank 211 is completed, the robotic arm 110 slowly rises to the upper limit.

[0052] In some possible implementation manners, please refer to Figure 1 , the fully automatic furnace tube cleaning machine 10 further includes a switching switch 511, and the switching switch 511 is used to switch between the manual mode and the automatic mode. The manual mode is used to implement separate operations for each step.

[0053] In this embodiment, the fully automatic furnace tube cleaning machine 10 can select the automatic or manual mode. The automatic mode can automatically perform various steps such as furnace tube movement, acidic solution flushing, clean water flushing, and furnace tube drying; the manual mode can implement separate operations for each step. Through the above steps, full automation can be achieved to avoid the long-term close contact of operators and reduce the personal injury to operators; the manual mode can implement each step separately according to the adjusted parameters.

[0054] In some possible embodiments, the fully automatic furnace tube cleaning machine 10 further includes a nitrogen dryer, which is used to dry the furnace tube after the cleaning is completed.

[0055] In this embodiment, in order to remove the residual liquid on the cleaned furnace tube, the fully automatic furnace tube cleaning machine 10 further includes the nitrogen dryer.

[0056] In some possible embodiments, the outside of the nitrogen dryer and the outside of the cleaning tank 210 are welded and encapsulated with polypropylene plates.

[0057] In this embodiment, to protect the personal safety of the operator, extend the service life of the equipment, and reduce the corrosion of the equipment by the acidic solution, the outside of the nitrogen dryer and the outside of the cleaning tank 210 are welded and encapsulated with polypropylene plates.

[0058] In summary, a fully automatic furnace tube cleaning machine 10 provided by the present application includes a motion component 100 and a cleaning component 200. The motion component 100 includes a robotic arm 110 and a motion module 120. The robotic arm 110 is electrically connected to the motion module 120, and the robotic arm 110 is used to move the furnace tube along the x-axis, y-axis, and z-axis under the control of the motion module 120. The cleaning component 200 includes a cleaning tank 210 and a motor module 220. A valve is provided on the cleaning tank 210. The cleaning tank 210 includes an inner tank 211, a middle tank 212, and an outer tank 213. The inner tank 211 is used to clean the furnace tube with an acidic solution under the control of the motor module 220, and the middle tank 212 and the outer tank 213 are used to clean the furnace tube with clean water under the control of the motor module 220. During the cleaning process, the inner tank 211, the middle tank 212, and the outer tank 213 can be used simultaneously. Through the cooperation of the motion component 100 and the cleaning component 200, the present application can use multiple pipes simultaneously, increasing the working efficiency, saving cost expenditures, reducing the environmental pollution caused by chemical agents, reducing the labor intensity of the operators, and ensuring the health of the operators.

[0059] The above are only the preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A fully automatic furnace tube cleaning machine, characterized in that: Including motion components and cleaning components; The motion assembly includes a mechanical arm and a motion module, the mechanical arm is electrically connected to the motion module, and the mechanical arm is used to move the furnace tube along the x-axis, y-axis and z-axis under the control of the motion module; The cleaning assembly includes a cleaning tank and a motor module, the cleaning tank is provided with a valve, the cleaning tank includes an inner tank, a middle tank and an outer tank, the inner tank is used to clean the furnace tube with an acid solution under the control of the motor module, and the middle tank and the outer tank are used to clean the furnace tube with clean water under the control of the motor module; During the cleaning process, the inner tank, the middle tank and the outer tank can be used simultaneously.

2. The fully automatic furnace tube cleaning machine according to claim 1, characterized in that: A roller is also provided in the cleaning tank, and the roller is used to rotate the furnace tube at a uniform speed in the tank, and the roller is electrically connected to the motor module.

3. The fully automatic furnace tube cleaning machine according to claim 1, characterized in that: The valve on the cleaning tank includes a solenoid valve.

4. The fully automatic furnace tube cleaning machine according to claim 1, characterized in that: The fully automatic furnace tube cleaning machine also includes a liquid recovery component, which includes a chemical recovery valve, at least two liquid storage tanks and a recovery module. The chemical recovery valve is electrically connected to the recovery module. The chemical recovery valve is used to recover the flushing liquid to the liquid storage tank under the control of the recovery module after the flushing liquid is used.

5. The fully automatic furnace tube cleaning machine according to claim 1, characterized in that: The fully automatic furnace tube cleaning machine also includes an audible and visual alarm, which is used to send out an audible and visual alarm when an abnormality occurs in the equipment.

6. The fully automatic furnace tube cleaning machine according to claim 1, characterized in that: The fully automatic furnace tube cleaning machine also includes a manual control panel, which is used to manually control the operation of the movement component, the cleaning component, the liquid recovery component and the sound and light alarm.

7. The fully automatic furnace tube cleaning machine according to claim 1, characterized in that: The fully automatic furnace tube cleaning machine also includes a display screen, which is electrically connected to a human-computer interaction module. The human-computer interaction module is electrically connected to the motion component, the cleaning component, the liquid recovery component and the sound and light alarm. The human-computer interaction module is at least used to set the flushing liquid and flushing time when the cleaning component is running.

8. The fully automatic furnace tube cleaning machine according to claim 7, characterized in that: The fully automatic furnace tube cleaning machine also includes a switching switch, which is used to switch between a manual mode and an automatic mode, and the manual mode is used to implement individual operation of each step.

9. The fully automatic furnace tube cleaning machine according to claim 1, characterized in that: The fully automatic furnace tube cleaning machine also includes a nitrogen dryer, which is used to dry the furnace tube after cleaning.

10. The fully automatic furnace tube cleaning machine according to claim 9, characterized in that: The outside of the nitrogen dryer and the outside of the cleaning tank are welded and packaged with polypropylene sheets.

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