Wafer boat box transportation shock-proof trolley

Abstract

The utility model discloses a crystal boat box transportation shock-proof trolley, which comprises a transportation mechanism, wherein a moving mechanism is arranged below the transportation mechanism; a vibration isolation mechanism is mounted at the corner of the upper surface of the moving mechanism and used for elastically supporting the conveying mechanism, and the vibration isolation mechanism comprises a limiting cylinder mounted on the moving mechanism; the penetrating seat is connected with the limiting cylinder in a sliding and penetrating manner; the connecting plate is mounted at the top of the inserting seat, and the connecting plate is mounted at the bottom of the conveying mechanism; and a spring. The arrangement mode that the conveying mechanism and the moving mechanism are matched is utilized, movement of the conveying mechanism can be conveniently limited through penetrating sliding between the limiting barrel and the penetrating base, the conveying mechanism can only move in the vertical direction relative to the moving mechanism, and then the penetrating base is elastically supported through the spring, so that the conveying mechanism is more convenient to move. And therefore, vibration isolation can be conveniently carried out on the relative position between the transportation mechanism and the moving mechanism, and wafer transportation is safer.

Description

Technical Field

[0001] The utility model relates to the field of shock-absorbing trolleys, in particular to a shock-absorbing trolley for transporting a wafer cassette. Background Technique

[0002] A wafer cassette is a box used to store and protect wafers. In the semiconductor manufacturing process, wafers need to go through multiple process flows, such as lithography, etching, deposition, etc. In order to avoid wafers being contaminated, damaged or lost, wafers are usually placed in a wafer cassette for storage and transportation. The wafer cassette is usually made of plastic or metal, and has good sealing performance and shock-proof performance, which can effectively protect the wafers. The design of the wafer cassette usually considers the size and shape of the wafers to ensure that the wafers can be firmly placed in the box and are not affected by the outside world. In the semiconductor manufacturing process, the wafer cassette is widely used. It can not only protect the wafers, but also improve production efficiency and product quality.

[0003] The existing wafer cassette transport vehicle generally consists of a flatbed truck and a box body. The wafer cassette can be transported by directly placing the wafer cassette inside the box body. However, since there is no vibration isolation device provided between the flatbed truck and the box body in the existing technology, effective shock-absorbing measures cannot be taken, which may cause serious damage or quality problems to the wafers in the wafer cassette. Wafers are very sensitive in semiconductor manufacturing and are very sensitive to vibration and mechanical shock. If the transport vehicle does not have appropriate shock-absorbing measures during driving, the vibration and shock may cause damage to the microscopic structure on the surface or inside of the wafers, affecting their electrical performance or mechanical strength. Content of the Utility Model

[0004] The purpose of the utility model is to provide a shock-absorbing trolley for transporting a wafer cassette to solve the problems put forward in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A shock-absorbing trolley for transporting a wafer cassette, comprising:

[0006] A transport mechanism, with a moving mechanism arranged below the transport mechanism;

[0007] Vibration isolation mechanisms are installed at the corners of the upper surface of the moving mechanism. The vibration isolation mechanisms are used for elastic support of the transport mechanism. The vibration isolation mechanisms include:

[0008] A limit cylinder, which is installed on the moving mechanism;

[0009] A socket, which is slidably inserted into the limit cylinder;

[0010] A connecting plate, which is installed at the top of the socket and is also installed at the bottom of the transport mechanism;

[0011] A spring, which is installed inside the limit cylinder and is used for elastically supporting the socket.

[0012] Preferably, the socket is arranged in an inverted T shape.

[0013] Preferably, the vibration isolation mechanism further includes:

[0014] A sliding limit ring, which is arranged at the bottom of the spring;

[0015] An insertion and connection rod, which is respectively connected to both sides of the sliding limit ring. Insertion slots are symmetrically arranged at the centers of both sides of the limit cylinder, and the insertion and connection rod is slidably inserted into the inner cavity of the insertion slot.

[0016] Preferably, the insertion slot is composed of a sliding slot and a clamping slot. The sliding slot is vertically arranged, the clamping slot is arranged in an L shape, and the inner cavity of the clamping slot communicates with that of the sliding slot.

[0017] Preferably, the vibration isolation mechanism further includes an insertion guiding rod. One end of the insertion guiding rod is connected to the moving mechanism, the other end of the insertion guiding rod is slidably inserted into the bottom of the socket, and the insertion guiding rod is movably sleeved with both the sliding limit ring and the spring.

[0018] Preferably, the transportation mechanism includes:

[0019] A vehicle body, which is arranged in a box shape;

[0020] A carrier, which is installed inside the vehicle body and is arranged horizontally;

[0021] A wafer cassette positioning plate, which is installed on the bottom of the vehicle body and the carrier.

[0022] Preferably, the moving mechanism includes:

[0023] A moving base, which is arranged horizontally;

[0024] Rollers, which are installed at the corners of the lower surface of the moving base.

[0025] The technical effects and advantages of the present utility model:

[0026] The utility model utilizes the setting mode of the cooperation between the transportation mechanism and the moving mechanism. Through the insertion and sliding between the limiting cylinder and the socket, the movement of the transportation mechanism can be conveniently limited, so that the transportation mechanism can only move in the up and down directions relative to the moving mechanism. Then, through the elastic support of the spring on the socket, the relative position between the transportation mechanism and the moving mechanism can be conveniently isolated from vibration, so as to prevent the wafers carried on the wafer boat positioning plate from being severely damaged or having quality problems, making the transportation of the wafers safer. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0028] Figure 2 It is a schematic diagram of the internal structure of the utility model I.

[0029] Figure 3 It is a schematic diagram of the internal structure of the utility model II.

[0030] Figure 4 It is a schematic diagram of the internal front structure of the utility model.

[0031] Figure 5 It is a schematic diagram of the internal structure at the elastic support mechanism of the utility model.

[0032] Figure 6 It is a schematic diagram of the structure at the socket of the utility model.

[0033] Figure 7 It is a schematic diagram of the structure at the limiting cylinder of the utility model.

[0034] In the figure: 1. Transportation mechanism; 11. Vehicle body; 12. Carrier; 13. Wafer boat positioning plate; 2. Moving mechanism; 21. Moving base; 22. Roller; 3. Vibration isolation mechanism; 31. Limiting cylinder; 301. Sliding groove; 302. Card slot; 32. Socket; 33. Connecting plate; 34. Spring; 35. Sliding limiting ring; 36. Inserting and overlapping rod; 37. Inserting and guiding rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0035] Next, the technical solutions in the embodiments of the utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the utility model.

[0036] The utility model provides as Figure 1-7A wafer boat box transportation shock-absorbing trolley as shown, comprising: a transportation mechanism 1, and a moving mechanism 2 is arranged below the transportation mechanism 1; vibration isolation mechanisms 3 are installed at the corners of the upper surface of the moving mechanism 2, and the vibration isolation mechanisms 3 are used for elastic support of the transportation mechanism 1. The vibration isolation mechanisms 3 include: a limit cylinder 31, and the limit cylinder 31 is installed on the moving mechanism 2; a socket 32, and the socket 32 is slidably inserted and connected with the limit cylinder 31; a connecting plate 33, and the connecting plate 33 is installed at the top of the socket 32 and the connecting plate 33 is installed at the bottom of the transportation mechanism 1; a spring 34, and the spring 34 is installed inside the limit cylinder 31, and the spring 34 is used for elastic support of the socket 32. Through the interpenetrating and sliding between the limit cylinder 31 and the socket 32, the movement of the transportation mechanism 1 can be limited, so that the transportation mechanism 1 can only move in the up and down direction relative to the moving mechanism 2. Then, through the elastic support of the spring 34 on the socket 32, the relative position between the transportation mechanism 1 and the moving mechanism 2 can be vibration-isolated, so as to prevent the wafers carried on the wafer boat box positioning plate 13 from being severely damaged or having quality problems, making the transportation of the wafers safer. The socket 32 is arranged in an inverted T shape, and the large-diameter head of the socket 32 is slidably arranged inside the limit cylinder 31, thus preventing the socket 32 from sliding upward excessively and sliding out of the inner cavity of the limit cylinder 31, and making the relative sliding between the transportation mechanism 1 and the moving mechanism 2 more stable.

[0037] Among them, the vibration isolation mechanism 3 further includes: a sliding limit ring 35, which is arranged at the bottom of the spring 34; an insertion and connection rod 36, which is respectively connected to both sides of the sliding limit ring 35. Insertion grooves are symmetrically arranged at the centers of both sides of the limit cylinder 31, and the insertion and connection rod 36 is slidably inserted into the inner cavity of the insertion groove. The insertion groove is composed of a sliding groove 301 and a clamping groove 302. The sliding groove 301 is vertically arranged, the clamping groove 302 is arranged in an L shape, and the clamping groove 302 communicates with the inner cavity of the sliding groove 301. By arranging the sliding groove 301, it is convenient for the insertion and connection rod 36 to slide upward to provide a sliding space, so as to adjust the position of the sliding limit ring 35 in the inner cavity of the limit cylinder 31. Through the socket 32, it is convenient to limit and carry the insertion and connection rod 36. After the spring 34 has been used for a long time, its elasticity becomes smaller, and it is necessary to further compress the spring 34 so that the spring 34 can better support the socket 32. At this time, by pushing the insertion and connection rod 36 to move, the insertion and connection rod 36 can synchronously drive the upward movement of the sliding limit ring 35, so that the sliding limit ring 35 can upwardly squeeze the bottom of the spring 34 to change the deformation degree of the spring 34. After the insertion and connection rod 36 is pushed to move upward in the inner cavity of the sliding groove 301 for a certain distance and then rotated in the direction of the clamping groove 302, it can be rotated into the inner cavity of the clamping groove 302. By placing the insertion and connection rod 36 in the inner cavity of the clamping groove 302, it is convenient to limit the position of the insertion and connection rod 36 to ensure the stability of the position of the sliding limit ring 35 after movement.

[0038] Among them, the vibration isolation mechanism 3 further includes an insertion and guiding rod 37. One end of the insertion and guiding rod 37 is connected to the moving mechanism 2, and the other end of the insertion and guiding rod 37 is slidably inserted into the bottom of the socket 32. The insertion and guiding rod 37 is movably sleeved with both the sliding limit ring 35 and the spring 34. Through the sliding insertion between the insertion and guiding rod 37 and the sliding limit ring 35, the linear sliding of the sliding limit ring 35 becomes more stable.

[0039] Among them, the transportation mechanism 1 includes: a vehicle body 11, which is arranged in a box shape; a carrier 12, which is installed inside the vehicle body 11 and is horizontally arranged; a cassette positioning plate 13, which is installed on the bottom of the vehicle body 11 and the carrier 12. Through the vehicle body 11, it is convenient to provide airtight protection for the wafers. Through the carrier 12, it is convenient to install the cassette positioning plate 13. Through the cassette positioning plate 13, it is convenient to place and carry the cassettes.

[0040] Among them, the moving mechanism 2 includes: a moving base 21, which is horizontally arranged; rollers 22, which are installed at the corners of the lower surface of the moving base 21. Through the rolling of the rollers 22, it is convenient for the transportation mechanism 1 to move.

[0041] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A shock-absorbing trolley for transporting a wafer boat box, comprising: A transport mechanism (1), wherein a moving mechanism (2) is arranged below the transport mechanism (1); The invention is characterized in that: a vibration isolation mechanism (3) is installed at the corner of the upper surface of the moving mechanism (2), and the vibration isolation mechanism (3) is used to elastically support the transportation mechanism (1), and the vibration isolation mechanism (3) comprises: A limiting cylinder (31), wherein the limiting cylinder (31) is mounted on the moving mechanism (2); A through socket (32), wherein the through socket (32) is slidably and interlacedly connected with the limiting cylinder (31); A connecting plate (33), the connecting plate (33) being mounted on the top of the socket (32), and the connecting plate (33) being mounted on the bottom of the transport mechanism (1); A spring (34), wherein the spring (34) is installed inside the limiting cylinder (31), and the spring (34) is used for elastically supporting the through socket (32); A sliding stop ring (35), wherein the sliding stop ring (35) is arranged at the bottom of the spring (34); The interpenetrating rod (36) is respectively connected to the two sides of the sliding limit ring (35), and the two sides of the limit tube (31) are centrally symmetrically provided with through slots, and the interpenetrating rod (36) is slidably interpenetratingly connected with the inner cavity of the through slots.

2. A shock-absorbing trolley for transporting wafer boat boxes according to claim 1, characterized in that: The through socket (32) is arranged in an inverted T-shape.

3. The shock-absorbing trolley for transporting wafer boat boxes according to claim 1, characterized in that: The through-slot slot is composed of a sliding slot (301) and a clamping slot (302); the sliding slot (301) is vertically opened, the clamping slot (302) is L-shaped, and the clamping slot (302) is in communication with the inner cavity of the sliding slot (301).

4. The shock-absorbing trolley for transporting wafer boat boxes according to claim 1, characterized in that: The vibration isolation mechanism (3) further comprises an interpenetrating guide rod (37), one end of which is connected to the moving mechanism (2), and the other end of which is connected to the bottom of the interpenetrating socket (32) in a sliding interpenetrating manner, and the interpenetrating guide rod (37) is movably sleeved with the sliding limit ring (35) and the spring (34).

5. The shock-absorbing trolley for transporting wafer boat boxes according to claim 1, characterized in that: The transport mechanism (1) comprises: A vehicle body (11), wherein the vehicle body (11) is arranged in a box shape; A load-bearing frame (12), the load-bearing frame (12) being installed inside the vehicle body (11), and the load-bearing frame (12) being arranged horizontally; A wafer boat box positioning plate (13), wherein the wafer boat box positioning plate (13) is installed on the bottom of the vehicle body (11) and the supporting frame (12).

6. The shock-absorbing trolley for transporting wafer boat boxes according to claim 1, characterized in that: The moving mechanism (2) comprises: A movable base (21), wherein the movable base (21) is arranged horizontally; A roller (22), wherein the roller (22) is installed at the corner of the lower surface of the movable base (21).

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