Cooling pump flange welding tool structure

By designing the cold pump flange welding tool structure of positioning discs and tooling components, the precise positioning and flexible rotation of the cold pump flange and the pump body is achieved, solving the problem of difficult to control the assembly accuracy of the flange and the pump body in the prior art, and improving the stability and convenience of welding.

CN223043965UActive Publication Date: 2025-07-01XIAMEN JUNMO CORE SEMICON CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202422135425.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-02
Publication Date
2025-07-01
Estimated Expiration
2034-09-02

AI Technical Summary

Technical Problem

The existing cold pump flanges lack specific tooling structures during welding, resulting in the assembly accuracy of the flange and pump body that is uncontrollable, and it is easy to be misaligned or run.

Method used

A cold pump flange welding tool structure is designed, including a positioning disc, a vertical rod, a tool rack and a tool assembly. The pump body is fixed by the positioning disc, and the tool assembly is fixed by the flange, and the flange is precisely positioned and flexible rotation of the flange and the pump body is achieved by rotatable tool assembly and fixture.

Benefits of technology

The tooling stability and reliability of cold pump flange welding is improved, the convenience of each angle area of ​​the weld seam is improved, and the problem of easy dislocation between the flange and the pump body in the prior art is solved.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223043965U_ABST
    Figure CN223043965U_ABST
Patent Text Reader

Abstract

The utility model relates to the technical field of welding tool devices, in particular to a cold pump flange welding tool structure which comprises a bottom plate, a positioning disc used for fixedly placing a cold pump body is arranged on the bottom plate, a set of vertical rods are arranged on the two sides of the positioning disc, and a tool frame with the height capable of being adjusted up and down is arranged on the vertical rods. The tool frame is provided with a tool assembly located above the positioning disc, the bottom of the tool assembly is provided with a clamping structure matched with the outer contour of a flange, the distance between the tool assembly and the positioning disc is matched with the welding tool distance between a pump body of the cold pump and the flange, the positioning disc is movably connected with the bottom plate, and the tool assembly is movably connected with the tool frame. The tool assembly and the positioning disc have the same longitudinal rotating center line and can rotate around the longitudinal center line. The utility model is favorable for solving the problem of poor fixture fixing effect when some existing cold pump flanges are welded.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of welding tooling devices, in particular to a welding tooling structure for a cold pump flange. Background Art

[0002] A cryopump is a vacuum pump that uses a cryogenic surface to condense gases, also known as a cold pump, a condensation pump, etc. Cryopumps can obtain a clean vacuum with the largest pumping speed and the lowest ultimate pressure, and are widely used in the research and production of semiconductors and integrated circuits, as well as in molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, and space simulation devices.

[0003] The structures of most existing cryopumps are as shown in the content of patent CN220791429U. A flange is provided at the pump port of the pump body. In most current manufacturing processes, the pump body is placed with the pump port facing upward, and the flange is manually placed at the pump port. After adjusting the alignment, the connection between the flange and the pump body is welded and fixed. Or the flange is placed on the floor, and the pump body with the pump port facing downward is placed on the flange, and then the connection is welded and fixed. Due to the lack of a specific tooling structure in these two processing methods, the assembly accuracy of the flange cannot be effectively controlled. During welding, the flange and the pump body are prone to dislocation or displacement. Summary of the Utility Model

[0004] The utility model provides a welding tooling structure for a cold pump flange, which is beneficial to solving the problem of poor tooling fixation effect during welding of some existing cold pump flanges.

[0005] The utility model is implemented as follows:

[0006] A welding tooling structure for a cold pump flange includes a bottom plate. A positioning disk for fixedly placing the cryopump body is provided on the bottom plate. A group of vertically arranged upright rods are provided on both sides of the positioning disk. A tooling frame capable of adjusting the height up and down is provided on the upright rods. A tooling component is provided above the positioning disk on the tooling frame. A clamping structure adapted to the outer contour of the flange is provided at the bottom of the tooling component. The distance between the tooling component and the positioning disk is adapted to the welding tooling distance between the pump body and the flange of the cryopump. The positioning disk is movably connected to the bottom plate, and the tooling component is movably connected to the tooling frame. The tooling component and the positioning disk have the same longitudinal rotation center line and can rotate around this longitudinal rotation center line.

[0007] On the basis of the above technical solution, a first track is provided at the bottom of the upright rods on the bottom plate. The first track is located on the front and back sides of the positioning disk. A first slider is connected to the first track, and a locking structure for controlling the sliding state of the first slider is provided on the first slider. The bottom of the upright rod is fixedly provided on the first slider, and the upright rod can be horizontally adjusted in position along the first track by means of the first slider.

[0008] On the basis of the above technical solution, a second slider is provided between the tooling rack and the vertical rod. The second slider is slidably sleeved on the vertical rod, and the second slider is provided with a locking structure for controlling the sliding state of the second slider.

[0009] On the basis of the above technical solution, the tooling rack is a "mouth"-shaped crossbeam structure, and its front and rear sides are fixedly connected to the inner ends of the second sliders. Second tracks are provided on the left and right inner sidewalls of the tooling rack. The track path of the second tracks is perpendicular to the track path of the first tracks. A third slider is connected to the second tracks. The third slider can slide back and forth along the second tracks, and the third slider is provided with a locking structure for controlling the sliding state of the third slider. The tooling assembly is connected to the bottom of the third slider through a bearing.

[0010] On the basis of the above technical solution, the tooling assembly includes a horizontally arranged tooling beam. The top of the tooling beam is connected to the bottom of the third slider through a bearing. Two clamps are arranged on the tooling beam at intervals left and right. Claw jaws are provided at the bottom of the clamps. The claw jaws on the left and right clamps cooperate to form a clamping structure adapted to the outer contour of the flange.

[0011] On the basis of the above technical solution, the claw jaw is of an arc-shaped structure.

[0012] On the basis of the above technical solution, the clamp is slidably connected to the tooling beam, and the clamp is provided with a locking structure for controlling the sliding state of the clamp.

[0013] On the basis of the above technical solution, a sleeve rod with a spring is provided between the tooling beam and the third slider. The tooling assembly can perform longitudinal elastic displacement relative to the third slider.

[0014] On the basis of the above technical solution, the clamping structure is a clamping groove provided on the inner sidewall of the claw. The clamping groove can perform upper and lower bilateral limit constraints on the flange after tooling.

[0015] Compared with the prior art, the present utility model has at least the following advantages:

[0016] The present utility model fixes the pump body of the cold pump by setting a positioning disk, and fixes the flange by setting a tooling assembly, replacing the existing manual operation of flange welding and fixing control method, so that the cold pump flange has better tooling stability and reliability during welding. By setting a positioning disk and a tooling assembly that can rotate coaxially, the workpiece can rotate flexibly during welding, improving the welding convenience in each angular region of the weld seam, which is beneficial to solving the problem of poor tooling fixation effect of some existing cold pump flanges during welding. Description of the Drawings

[0017] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a schematic perspective view of the structure of a cold pump flange welding tooling in an embodiment;

[0019] Figure 2 It is Figure 1 a side view of;

[0020] Figure 3 It is Figure 1 a partial structural schematic view of the first claw in;

[0021] Figure 4 It is a schematic view of the structure of a sleeve rod and a spring in another embodiment;

[0022] Figure 5 It is a schematic view of the structure of the second claw in an embodiment;

[0023] Figure 6 It is a schematic view of the structure of a clamping block in an embodiment.

[0024] Reference numerals in the figure: 1, base plate; 2, positioning disk; 21, bearing platform; 22, rotating shaft; 3, first track; 31, first slider; 4, vertical rod; 41, second slider; 42, fixing block; 43, perforation; 44, clamping block; 45, locking knob; 5, tooling frame; 51, second track; 52, third slider; 6, tooling beam; 61, sleeve rod; 62, spring; 7, fixture; 71, first claw; 711, limiting sunk platform; 72, second claw; 721, clamping groove; a, flange. Specific embodiments

[0025] To make the purpose, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model. Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the claimed present utility model, but merely represents the selected embodiments of the present utility model.

[0026] In the description of the present utility model, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more, unless otherwise specifically defined.

[0027] It should be noted that when an element is referred to as being "fixedly provided on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to an element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation.

[0028] The present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] Embodiment 1: In combination with Figures 1 - 3 , this embodiment discloses a cold pump flange welding tooling structure for replacing the manual restraint of the flange during the existing cold pump flange welding. The tooling structure includes a bottom plate 1, and the bottom plate 1 is a horizontally arranged rectangular plate structure for connecting and fixing with an external machine frame. The bottom plate 1 mainly plays a role of bearing and supporting.

[0030] A positioning disk 2 for fixedly placing the cold pump body is provided at the central position on the bottom plate 1. A sinking groove is provided at the top of the positioning disk 2, and its inner contour is adapted to the outer contour of the bottom of the pump body. When the pump body of the cold pump is placed on the positioning disk 2, it can remain stable and immovable, which is beneficial to providing good basic conditions for subsequent welding operations.

[0031] In order to improve the bearing capacity of the positioning disk 2, the positioning disk 2 is arranged on a bearing platform 21 through a bearing. The bottom of the bearing platform 21 is connected and fixed to the bottom plate 1 through support rods around. The role of the bearing platform 21 is to improve the structural and positional stability of the positioning disk 2, and to cooperate with the positioning disk 2 to form a more powerful chassis support structure.

[0032] Further, a rotating shaft 22 is connected to the bottom of the positioning disk 2. As Figure 2 shown, the rotating shaft 22 is connected to the bottom plate 1 through a bearing, and its role is to further improve the bearing capacity of the positioning disk 2 and the rotational stability. In other embodiments, the bottom of the rotating shaft 22 can be drivingly connected to an external reduction motor, so that the rotational movement of the workpiece during welding is an active rotation.

[0033] A set of vertically arranged uprights 4 are provided on the front and rear sides of the positioning plate 2. A tooling frame 5 capable of adjusting the height up and down is provided on the uprights 4. A tooling assembly is provided on the tooling frame 5 above the positioning plate 2. A clamping structure adapted to the outer contour of flange a is provided at the bottom of the tooling assembly. The spacing between the tooling assembly and the positioning plate 2 is adapted to the welding tooling spacing between the pump body and flange a of the cold pump. The positioning plate 2 is movably connected to the base plate 1, and the tooling assembly is movably connected to the tooling frame 5. The tooling assembly and the positioning plate 2 have the same longitudinal rotation center line and can rotate around the longitudinal rotation center line. When working, the positioning plate 2 is used to fix the pump body, with the pump port of the pump body facing upwards, and the tooling assembly is used to fix flange a. In the tooling state, the bottom of flange a abuts against the top of the pump body to meet the welding positioning requirements.

[0034] Specifically, the bottom plate 1 is provided with a first track 3 at the bottom of the vertical rod 4, and the two first tracks 3 are respectively located at the front and rear sides of the positioning disk 2, and the track path of the first track 3 is parallel to the left and right directions. The first slider 31 is connected to the first track 3, and the first slider 31 is provided with a locking structure for controlling the sliding state of the first slider 31 (the locking structure in this embodiment adopts a locking bolt, and in the locked state, the inner end of the locking bolt firmly abuts the first track 3, so that the relative position of the first slider 31 and the first track 3 remains fixed), and the bottom of the vertical rod 4 is fixed on the first slider 31, and the vertical rod 4 can be adjusted laterally along the first track 3 with the help of the first slider 31. This structure enables the gantry frame composed of the vertical rod 4, the tooling frame 5 and the tooling assembly to move forward and backward laterally relative to the positioning disk 2, and when retreating outward, more space can be freed up to facilitate the loading and unloading operations of the pump body and the flange a.

[0035] The vertical pole 4 on each side is composed of two parallel vertical rods spaced apart from each other, and a fixing block 42 is set on the top to fix the structure.

[0036] A second slider 41 is provided between the tooling frame 5 and the vertical rod 4. The second slider 41 is a block structure with a through hole 43 adapted to the structure of the vertical rod 4. The second slider 41 is slidably mounted on the vertical rod 4 through the through hole 43, and the second slider 41 is provided with a locking structure for controlling the sliding state of the second slider 41 (the locking structure in this embodiment adopts a locking bolt. In the locked state, the inner end of the locking bolt is firmly abutted against the outer wall of the vertical rod 4, so that the relative position of the second slider 41 and the vertical rod 4 remains fixed). This structure can help the tooling beam 6 to flexibly adjust the up and down position to meet the tooling position accuracy requirements between the flange a and the pump body.

[0037] From a top view, the tooling frame 5 is a "mouth"-shaped beam structure, and some space is vacated in the middle area for connecting the tooling assembly. Its front and rear sides are connected and fixed to the inner side ends of the second slider 41. A second track 51 is provided on the left and right inner side walls of the tooling frame 5. The track path of the second track 51 is perpendicular to the track path of the first track 3. In this embodiment, the second track 51 is parallel to the front and rear directions. A third slider 52 is connected to the second track 51. The third slider 52 can slide forward and backward along the second track 51, and the third slider 52 is provided with a locking structure for controlling the sliding state of the third slider 52 (its structure and working principle are similar to the locking structure on the first slider 31). The tooling assembly is connected to the bottom of the third slider 52 through a bearing. This enables the tooling assembly to move forward and backward, facilitates fine adjustment of the tooling position of the flange a, and achieves high-precision tooling position control in conjunction with the lateral displacement of the vertical rod 4.

[0038] Furthermore, the tooling assembly includes a horizontally arranged tooling beam 6, which is parallel to the left and right directions. The top of the tooling beam 6 is connected to the bottom of the third slider 52 through a bearing. Two clamps 7 are provided on the tooling beam 6 and are spaced apart from each other. The clamp 7 is an "L"-shaped structure as a whole. A transverse through hole is provided on the top of the clamp 7, which is used to be mounted on the tooling beam 6 to form a track slide structure. Therefore, the clamp 7 can be slidably connected to the tooling beam 6, and the clamp 7 is provided with a locking structure for controlling the sliding state of the clamp 7 (its structure and working principle are similar to the locking structure on the first slider 31). The bottom of the clamp 7 extends inward and is provided with a first claw 71. The first claws 71 on the left and right clamps 7 cooperate to form a clamping structure that matches the outer contour of the adapter flange a.

[0039] Specifically, from a longitudinal perspective, the first clamping claw 71 is an arc-shaped structure, and from a transverse perspective, the first clamping claw 71 has an "L"-shaped longitudinal profile, with a limiting sink 711 formed on the inner side. The limiting sink 711 serves as the positioning structure, and the first clamping claws 71 on both sides work together to support the flange a, and the left and right outer ends of the flange a are abutted and fixed on the limiting sink 711.

[0040] During the specific implementation process, each component is pre-adjusted to a reasonable position or height, the pump body of the cold pump is placed on the positioning plate 2 to keep its structure relatively fixed, and the flange a is clamped on the first claw 71, and the vertical rod 4 is pulled to slide to the target position on the first track 3 and fixed, so that the flange a is opposite to the pump port position on the top of the pump body, and then the welding operation is carried out. First, the flange a and the pump body on one side are initially fixed by electric welding, and then the pump body is rotated while welding. The flange a and the tooling assembly will rotate synchronously until the welding is completed, and the first claw 71 is controlled to disengage from the flange a, and the vertical rod 4 is pushed outward to make room for the pump body and flange a after welding.

[0041] Example 2: Based on Example 1,Figure 4 As shown in the figure, a sleeve rod 61 with a configured spring 62 is provided between the tooling beam 6 and the third slider 52. The sleeve rod 61 is composed of double-barrel tubes that are movably sleeved inside and outside, and is provided with a stroke limiting structure. Specifically, radially protruding nuts are provided on the bottom of the inner tube body and the inner wall of the outer tube body to prevent the outer tube body from sliding down without limit. The bottom of the outer tube body is fixedly connected to the tooling beam 6, and the spring 62 is abutted between its top and the third slider 52. Due to the elastic characteristics of the spring 62, the tooling assembly can perform longitudinal elastic displacement relative to the third slider 52. This structure enables a stable downward pressing force to be exerted when the flange a is at the top of the pump body, helping the flange a to stably abut against the pump body, thereby improving the position stability and reliability of the tooling.

[0042] It should be noted that in this embodiment, the second jaw 72 is used as the jaw. Figure 5 As shown in the figure, the positioning structure is a card slot 721 provided on the inner side wall of the second jaw 72. The card slot 721 can perform upper and lower double-sided limit constraints on the flange a after tooling, so that the tooling position of the flange a can act simultaneously with the downward pressing force provided by the spring 62.

[0043] In another implementation process, as shown in Figure 6 the figure, the through hole 43 of the second slider 41 is a strip-shaped through hole structure. A clamping block 44 is arranged in the through hole 43. The outer end of the clamping block 44 is pivotally connected to the locking knob 45, and the locking knob 45 is meshed and connected to the threaded hole on the side wall of the second slider 41. When the locking knob 45 is tightened, it can drive the clamping block 44 to closely abut against the outer side wall of the vertical rod 4. The positioning constraint between the second slider 41 and the vertical rod 4 obtained by surface contact is more stable and reliable, and can also improve the bearing capacity of the tooling rack 5 for the flange a.

[0044] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A cold pump flange welding tooling structure, characterized in that: The invention comprises a base plate (1), a positioning plate (2) for fixing a pump body of a cold pump is provided on the base plate (1), a group of vertically arranged upright poles (4) are provided on both sides of the positioning plate (2), a tooling frame (5) capable of adjusting the height up and down is provided on the upright poles (4), the tooling frame (5) is located above the positioning plate (2) and is provided with a tooling assembly, a clamping structure adapted to the outer contour of a flange is provided at the bottom of the tooling assembly, the spacing between the tooling assembly and the positioning plate (2) is adapted to the welding tooling spacing between the pump body and the flange of the cold pump, the positioning plate (2) is movably connected to the base plate (1), the tooling assembly is movably connected to the tooling frame (5), and the tooling assembly and the positioning plate (2) have the same longitudinal rotation center line and can rotate around the longitudinal rotation center line.

2. The cold pump flange welding tooling structure according to claim 1 is characterized in that: The bottom plate (1) is provided with a first track (3) at the bottom of the vertical rod (4), the first track (3) is located at the front and rear sides of the positioning plate (2), the first track (3) is connected to the first slider (31), and the first slider (31) is provided with a locking structure for controlling the sliding state of the first slider (31), the bottom of the vertical rod (4) is fixed on the first slider (31), and the vertical rod (4) can be adjusted in lateral position along the first track (3) with the help of the first slider (31).

3. The cold pump flange welding tooling structure according to claim 2 is characterized in that: A second slider (41) is provided between the tooling frame (5) and the vertical rod (4); the second slider (41) is slidably sleeved on the vertical rod (4), and the second slider (41) is provided with a locking structure for controlling the sliding state of the second slider (41).

4. The cold pump flange welding tooling structure according to claim 3 is characterized in that: The tooling frame (5) is a "mouth"-shaped beam structure, the front and rear sides of which are connected and fixed to the inner side ends of the second slider (41), the left and right inner side walls of the tooling frame (5) are provided with second tracks (51), the track path of the second track (51) is in a perpendicular relationship to the track path of the first track (3), the second track (51) is connected to a third slider (52), the third slider (52) can slide forward and backward along the second track (51), and the third slider (52) is provided with a locking structure for controlling the sliding state of the third slider (52), and the tooling assembly is connected to the bottom of the third slider (52) through a bearing.

5. The cold pump flange welding tooling structure according to claim 4 is characterized in that: The tooling assembly comprises a horizontally arranged tooling beam (6), the top of the tooling beam (6) being connected to the bottom of the third slider (52) via a bearing, two clamps (7) spaced apart from each other are arranged on the tooling beam (6), the bottom of the clamps (7) are provided with clamping claws, and the clamping claws on the left and right clamps (7) cooperate to form a clamping structure adapted to the outer contour of the flange.

6. The cold pump flange welding tooling structure according to claim 5 is characterized in that: The clamping claw is an arc-shaped structure.

7. The cold pump flange welding tooling structure according to claim 5 is characterized in that: The clamp (7) is slidably connected to the tooling beam (6), and the clamp (7) is provided with a locking structure for controlling the sliding state of the clamp (7).

8. The cold pump flange welding tooling structure according to claim 5 is characterized in that: A sleeve rod (61) equipped with a spring (62) is provided between the tooling beam (6) and the third slide block (52), and the tooling assembly can perform longitudinal elastic displacement relative to the third slide block (52).

9. The cold pump flange welding tooling structure according to claim 8, characterized in that: The clamping structure is a clamping groove (721) arranged on the inner wall of the clamping claw, and the clamping groove (721) can limit the flange on both sides after the tooling.