Sample tray of hand-operated machine table
By designing multiple ring grooves and thimbles on the sample tray of the manual machine table, the problems of cumbersome operation and inconsistent position of the existing sample tray are solved, the consistency of substrate position and simplification of the pick-up and placement process are achieved, and the experimental efficiency and reliability are improved.
Patent Information
- Application Number
- CN202422361834.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-09-25
AI Technical Summary
The existing manual machine sample trays have problems such as cumbersome operation, wasted time and inconsistent location during operation, resulting in process results errors and affecting the reliability and repetition of scientific research experiments.
A manual machine sample tray is designed, with a surface of a plurality of ring grooves that cooperate with substrates of different sizes, and a thimble is provided in the innermost ring groove area, which passes out from the surface of the tray in a vertical lifting manner to lift the substrate.
Through the matching of the ring groove and the thimble, we ensure that the substrate is placed in a consistent manner each time, simplify the pick-up and placement process, improve work efficiency, and reduce experimental errors and costs.
Smart Images
Figure CN223046179U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of semiconductor equipment and relates to a sample tray of a manual machine. Background Art
[0002] With the rapid development of the semiconductor industry and the continuous growth of market demand, the convenience and consistency of manufacturing processes have become urgent needs in the industry. Especially in new process development and small-batch scientific research experiments, manual machines are widely used due to their flexibility to facilitate fine process debugging. However, the sample trays equipped with manual machines currently have significant difficulties during operation.
[0003] Specifically, when operators pick up and place substrates, they often need to use tweezers to laboriously push the substrate to the corner of the tray, and carefully pick up the substrate with tweezers, while taking it out with the other hand. This process is not only cumbersome, but also greatly wastes time. In addition, when operators need to place small-sized substrates on large-sized sample trays, they cannot ensure the accuracy of the placement position each time. This inconsistency will directly lead to errors in process results, thereby affecting the reliability and repeatability of scientific research experiments.
[0004] Given the niche market demand for scientific research equipment, there are relatively few studies on the improvement of this type of sample tray. However, in order to improve the efficiency of process development, reduce the time cost of picking up and placing substrates, and ensure the consistency of the placement of substrates each time, thereby eliminating process errors, it is urgent to make innovative improvements to this type of sample tray. Utility Model Content
[0005] In view of this, the purpose of the utility model is to provide a sample tray for a manual machine, which ensures that the placement position of the substrate on the sample tray remains consistent in each experiment, so as to effectively shorten the time for taking and placing samples and improve work efficiency.
[0006] To achieve the above-mentioned purpose, the utility model provides a sample tray of a manual machine, wherein a plurality of annular grooves matching substrates of different sizes are provided on the surface of the sample tray, and the position of the substrate on the sample tray is limited by the annular grooves; the plurality of annular grooves are nested concentrically with each other, and a plurality of ejector pins for lifting the substrate are arranged in the area enclosed by the innermost annular grooves, and the ejector pins are arranged inside the sample tray in a vertical lifting manner, and the substrate placed on the sample tray is lifted when the ejector pins pass through the surface of the sample tray.
[0007] Optionally, an ejector pin tray is disposed inside the sample tray, and a plurality of ejector pins are disposed on the ejector pin tray.
[0008] Optionally, a slider that slides horizontally is provided inside the sample tray. The slider and the ejector pin tray are connected by a connecting rod. One end of the connecting rod is hinged to the slider, and the other end is hinged to the ejector pin tray. The horizontal sliding of the slider drives the connecting rod to rotate relative to the slider and the ejector pin tray, thereby pushing the ejector pin tray and the ejector pin to move vertically up and down.
[0009] Optionally, a cavity is provided inside the sample tray, and the ejector pin tray moves vertically up and down in the cavity. At least two guide blocks are provided at the edge of the ejector pin tray, and guide grooves that cooperate with the guide blocks are provided on the side wall of the cavity. The guide grooves extend vertically on the side wall of the cavity, and their upper edges are lower than the surface of the sample tray.
[0010] Optionally, a chute is provided near the bottom on the side of the sample tray, and the slider is slidably disposed in the chute.
[0011] Optionally, an ejector pin pusher is provided at the notch of the chute. One side edge of the ejector pin pusher is fixed to the side of the sample tray, and the other side edge opposite thereto is connected to the slider by a spring.
[0012] Press the ejector pin pusher towards the chute to push the ejector pin out from the surface of the sample tray through the slider and the connecting rod to lift the substrate. After removing the substrate, release the force applied to the ejector pin pusher. Under the action of the restoring force provided by the spring, both the slider and the ejector pin pusher quickly return to their original positions, and the ejector pin retracts from the surface of the sample tray.
[0013] Optionally, a push rod is fixed on the slider, and the spring is sleeved on the push rod. One end of the spring is connected to the ejector pin pusher, and the other end is fixed on the surface of the push rod.
[0014] Optionally, multiple ejector pins are evenly distributed within the circular area enclosed by the innermost ring groove. Multiple ejector pin holes corresponding to the number and shape of the ejector pins are provided on the surface of the sample tray for the ejector pins to pass through and retract.
[0015] Optionally, the sample tray is a disc with an inner diameter ≥ 150 mm.
[0016] Optionally, the depth of each ring groove is 1 - 2 mm, and the width is 2 - 3 mm.
[0017] Optionally, the multiple ring grooves provided on the surface of the sample tray at least include a first ring groove with an inner diameter of 50 mm, a second ring groove with an inner diameter of 75 mm, a third ring groove with an inner diameter of 100 mm, and a fourth ring groove with an inner diameter of 150 mm, corresponding to 2-inch substrates, 3-inch substrates, 4-inch substrates, and 6-inch substrates respectively.
[0018] The beneficial effects of the present utility model are as follows:
[0019] The utility model is provided with a plurality of annular grooves adapted to substrates of different sizes, which can ensure that the placement position of the substrate remains consistent in each experiment. This not only eliminates the influence of position deviation on the experimental results, but also effectively improves the repeatability and comparability of the experiments. Further, the substrate is ejected by a thimble, which greatly simplifies the process of taking and placing the substrate, thereby significantly improving the work efficiency. In addition, the combined use of the thimble and the annular groove makes the operation more convenient and accurate, not only effectively shortening the time for taking and placing samples, but also further reducing the probability of the tweezers accidentally touching the surface of the sample, thereby significantly reducing the clamping difficulty and experimental cost of the sample in the manual machine tool, helping to ensure the yield rate in process exploration, and providing a more efficient and reliable experimental tool for scientific researchers.
[0020] Other advantages, objectives and features of the utility model will be described to some extent in the subsequent specification, and to some extent, will be obvious to those skilled in the art based on the study of the following text, or can be taught from the practice of the utility model. The objectives and other advantages of the utility model can be achieved and obtained through the following specification. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] In order to make the objectives, technical solutions and advantages of the utility model more clear, the utility model will be described in detail preferably with reference to the accompanying drawings, where:
[0022] Figure 1 is a top view of the sample tray of the manual machine tool provided by the utility model;
[0023] Figure 2 is a cross-sectional view of the sample tray of the manual machine tool provided by the utility model;
[0024] Figure 3 is a cross-sectional view of the sample tray of the manual machine tool provided by the utility model along the A-A direction.
[0025] REFERENCE MARKS:
[0026] 1 - sample tray; 2 - thimble hole; 3 - first annular groove; 4 - second annular groove; 5 - third annular groove; 6 - fourth annular groove; 7 - thimble tray; 8 - thimble; 9 - thimble dial; 10 - spring; 11 - ejector rod; 12 - connecting rod; 13 - slider; 14 - chute; 15 - guide block; 16 - guide groove; 17 - cavity. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0027] The following describes the implementation modes of the present utility model through specific examples. Those skilled in the art can easily understand the other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation modes. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model. It should be noted that the diagrams provided in the following embodiments only illustrate the basic concept of the present utility model in a schematic manner. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.
[0028] Among them, the attached drawings are only for illustrative purposes, showing only schematic diagrams rather than physical diagrams, and should not be construed as a limitation to the present utility model; in order to better illustrate the embodiments of the present utility model, some components in the attached drawings will be omitted, enlarged or reduced, which does not represent the dimensions of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the attached drawings may be omitted.
[0029] In the attached drawings of the embodiments of the present utility model, the same or similar reference numerals correspond to the same or similar components; in the description of the present utility model, it should be understood that if there are terms such as "upper", "lower", "left", "right", "front", "rear", etc. indicating the orientation or position relationship, they are based on the orientation or position relationship shown in the attached drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the position relationship in the attached drawings are only for illustrative purposes and should not be construed as a limitation to the present utility model. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.
[0030] Referring to Figure 1 、 Figure 2 , the sample tray 1 of the manual machine platform of the present utility model, the sample tray 1 is of a disc structure, the inner diameter is greater than or equal to 150 mm, and it can accommodate substrates up to 6 inches at most. A plurality of annular grooves are provided on the surface of the sample tray 1, and the sizes of the annular grooves are matched with substrates of different sizes. Through the physical restriction of the annular grooves, it is ensured that the operator places the substrate at the same position on the sample tray 1 each time. The depth of the annular groove is designed to be 12 mm and the width is 23 mm, which can not only firmly fix the substrate but also cause no damage to the substrate. Further, the annular grooves opened on the surface of the sample tray 1 are arranged in a concentric nested manner, including a first annular groove 3 with an inner diameter of 50 mm, a second annular groove 4 with an inner diameter of 75 mm, a third annular groove 5 with an inner diameter of 100 mm, and a fourth annular groove 6 with an inner diameter of 150 mm, corresponding to substrates of 2 inches, 3 inches, 4 inches, and 6 inches respectively, thus meeting the usage requirements of substrates of different sizes.
[0031] Further, a plurality of ejector pins 8 are arranged within the area enclosed by the innermost annular groove. The ejector pins 8 are precisely arranged inside the sample tray 1 in a vertical lifting manner. When it is necessary to take out the substrate, the ejector pins 8 penetrate through the surface of the sample tray 1 and smoothly lift the substrate placed on the sample tray 1, greatly improving the convenience of taking and placing the substrate.
[0032] To achieve the vertical lifting function of the ejector pins 8, a cavity 17 is formed inside the sample tray 1. The ejector pin tray 7 vertically lifts and lowers within the cavity. All the ejector pins 8 are firmly arranged on the ejector pin tray 7, and the vertical movement of the ejector pin tray 7 is realized through a linkage mechanism. Specifically, a chute 14 is formed near the bottom on the side of the sample tray 1. A slider 13 is slidably arranged in the chute 14 and slides horizontally. One end of a connecting rod 12 is hinged to the ejector pin tray 7, and the other end is hinged to the slider 13. When the slider 13 moves horizontally, the connecting rod 12 rotates accordingly, thereby pushing the ejector pin tray 7 and the ejector pins 8 to perform vertical lifting.
[0033] For the convenience of operation, an ejector pin dial 9 is arranged at the notch of the chute 14. One side of the ejector pin dial 9 is fixed to the side of the sample tray 1, and the other side is connected to the slider 13 through a spring 10. When the operator presses the ejector pin dial 9 towards the chute 14, the slider 13 is subjected to a thrust force, and then the ejector pins 8 are pushed out from the surface of the sample tray 1 through the linkage mechanism to lift the substrate. After completing the taking and placing operation, the operator releases the ejector pin dial 9 and cancels the force applied to the ejector pin dial 9. The restoring force of the spring 10 causes the slider 13 and the ejector pin dial 9 to quickly return to the initial position, and the ejector pins 8 also retract from the surface of the sample tray 1 accordingly. Further, a push rod 11 is fixedly arranged on the slider 13, and the spring 10 is sleeved on the push rod 11. One end of the spring 10 is connected to the ejector pin dial 9, and the other end is connected to the surface of the push rod 11 to improve the working stability of the spring 10 and ensure the accuracy and reliability of the vertical lifting of the ejector pins 8.
[0034] In some alternative embodiments, such as Figure 3As shown, at least two guiding blocks 15 are provided at the edge of the thimble tray 7, and guiding grooves 16 that cooperate with the guiding blocks 15 are formed on the side wall of the cavity 17. Further, the guiding grooves 16 extend vertically on the side wall of the cavity 17, but the upper edge of the guiding grooves 16 is lower than the surface of the sample tray 1. In other words, the guiding grooves 16 do not penetrate the surface of the sample tray 1. The diameter of the cavity 17 is equal to the outer diameter of the thimble tray 7. On this basis, the cooperation of the guiding blocks 15 and the guiding grooves 16 can prevent the thimble tray 7 from swinging or tipping over when the connecting rod 12 drives the thimble tray 7 to move up and down. The fact that the upper edge of the guiding grooves 16 is lower than the surface of the sample tray 1 can prevent the thimble tray 7 from disengaging from the cavity 17, and can also prevent the notch formed by the guiding grooves 16 on the surface of the sample tray 1 from affecting the substrate placed on the sample tray 1. Further preferably, two guiding blocks 15 are provided at the edge of the thimble tray 7, and the two guiding blocks 15 are symmetrically distributed about the center of the thimble tray 7.
[0035] In some alternative embodiments, the multiple thimbles 8 are evenly distributed within the circular area enclosed by the innermost ring groove (i.e., the enclosed area of the first ring groove 3), and correspondingly, a plurality of thimble holes 2 that match the number and shape of the thimbles 8 are formed on the surface of the sample tray 1, providing the necessary movement space for the penetration and retraction of the thimbles 8.
[0036] In some alternative embodiments, the number of thimbles 8 is preferably 3, and they are evenly distributed along the circumference of the first ring groove 3. The thimble 8 is a frustum of a cone with a wide upper part and a narrow lower part, and its side surface has a high machining accuracy and a surface roughness Ra ≤ 0.1 μm.
[0037] In some alternative embodiments, the thimble holes 2 on the sample tray 1 are matched with the dimensions of the thimbles 8, and the inner surface roughness Ra of the thimble holes 2 ≤ 0.4 μm.
[0038] In some of the alternative embodiments described above, the material of the sample tray 1 is stainless steel or aluminum alloy. Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not restrictive. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the purpose and scope of the present technical solution, and they should all be covered by the scope of the claims of the present invention.
Claims
1. A sample tray for a manual machine, characterized in that: The surface of the sample tray (1) is provided with a plurality of annular grooves matching substrates of different sizes, and the position of the substrate on the sample tray (1) is limited by the annular grooves; the plurality of annular grooves are concentrically nested with each other, and a plurality of ejector pins (8) for lifting the substrate are arranged in the area enclosed by the innermost annular grooves; the ejector pins (8) are arranged inside the sample tray (1) in a vertically lifting manner, and the ejector pins (8) lift the substrate placed on the sample tray (1) when penetrating from the surface of the sample tray (1).
2. The sample tray according to claim 1, characterized in that: An ejector pin tray (7) is arranged inside the sample tray (1), and a plurality of ejector pins (8) are arranged on the ejector pin tray (7).
3. The sample tray according to claim 2, characterized in that: A cavity (17) is provided inside the sample tray (1), and the ejector tray (7) is vertically raised and lowered in the cavity (17); the diameter of the cavity (17) is equal to the outer diameter of the ejector tray (7); at least two guide blocks (15) are provided on the edge of the ejector tray (7); a guide groove (16) matching with the guide block (15) is provided on the side wall of the cavity (17); the guide groove (16) extends vertically on the side wall of the cavity (17), and its upper edge is lower than the surface of the sample tray (1).
4. The sample tray according to claim 3, characterized in that: A slider (13) that slides in a horizontal direction is arranged inside the sample tray (1). The slider (13) and the ejector tray (7) are connected via a connecting rod (12). One end of the connecting rod (12) is hinged to the slider (13), and the other end is hinged to the ejector tray (7). The slider (13) slides in a horizontal direction to drive the connecting rod (12) to rotate relative to the slider (13) and the ejector tray (7), thereby pushing the ejector tray (7) and the ejector (8) to rise and fall vertically.
5. The sample tray according to claim 4, characterized in that: A slide groove (14) communicating with the cavity (17) is provided on the side of the sample tray (1) near the bottom, and a slider (13) is slidably disposed in the slide groove (14).
6. The sample tray according to claim 5, characterized in that: The notch of the slide groove (14) is provided with an ejector pin (9), one side of the ejector pin (9) is fixed to the side of the sample tray (1), and the other side opposite thereto is connected to the slide block (13) via a spring (10).
7. The sample tray according to claim 6, characterized in that: A push rod (11) is fixedly arranged on the slider (13), a spring (10) is sleeved on the push rod (11), one end of the spring (10) is connected to the push pin paddle (9), and the other end is fixedly arranged on the surface of the push rod (11).
8. The sample tray according to any one of claims 1 to 7, characterized in that: A plurality of ejector pins (8) are evenly distributed in a circular area enclosed by the innermost ring groove, and a plurality of ejector pin holes (2) corresponding to the number and shape of the ejector pins (8) are provided on the surface of the sample tray (1).
9. The sample tray according to any one of claims 1 to 7, characterized in that: Each ring groove is 12mm deep and 23mm wide.
10. The sample tray according to any one of claims 1 to 7, characterized in that: The plurality of annular grooves formed on the surface of the sample tray (1) at least include a first annular groove (3) with an inner diameter of 50 mm, a second annular groove (4) with an inner diameter of 75 mm, a third annular groove (5) with an inner diameter of 100 mm, and a fourth annular groove (6) with an inner diameter of 150 mm, which correspond to 2-inch substrates, 3-inch substrates, 4-inch substrates, and 6-inch substrates, respectively.