Silicon wafer basket lifting device

Abstract

The utility model discloses a silicon wafer basket lifting device, a basket is provided with a first positioning part, a lifting part comprises a vertical part and a transverse part, the vertical part is provided with a first clamping part, the first clamping part is configured to clamp the first positioning part, the transverse part is provided with a second positioning part and a second clamping part, and the second clamping part is configured to clamp the second positioning part. The second positioning part and the second clamping part are oppositely arranged, the second positioning part is configured to abut against the flower basket, the second clamping part is configured to push the flower basket towards the second positioning part so as to limit the flower basket between the second positioning part and the second clamping part, the driving part is connected with the lifting part, and the driving part is configured to drive the lifting part to ascend and descend. The lifting device is low in cost and low in failure rate.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic, in particular to a silicon wafer flower basket lifting device. Background Art

[0002] In the production process of photovoltaic cells, silicon wafers need to be loaded into a flower basket in multiple processes, and a lifting device is used in this process. The lifting device is provided with two sets of rotary clamping cylinders, and the two sets of rotary clamping cylinders are respectively clamped on the opposite sides of the flower basket to clamp and fix the flower basket. The setting of the two sets of cylinders has a complex structure, high cost, and high failure rate.

[0003] The above information disclosed in this background art is only used to increase the understanding of the background art of this application. Therefore, it may include prior art that is not known to those of ordinary skill in the art. Summary of the Invention

[0004] In view of the problems pointed out in the background art, the utility model provides a silicon wafer flower basket lifting device with low cost and low failure rate.

[0005] To achieve the above utility model purpose, the utility model adopts the following technical solutions:

[0006] In some embodiments, a silicon wafer flower basket lifting device is provided, including:

[0007] A flower basket configured to place silicon wafers, and a first positioning portion is provided on the flower basket;

[0008] A lifting portion including a vertical portion and a horizontal portion. A first clamping portion is provided on the vertical portion, and the first clamping portion is configured to clamp the first positioning portion. A second positioning portion and a second clamping portion are provided on the horizontal portion. The second positioning portion and the second clamping portion are arranged opposite to each other. The second positioning portion is configured to abut against the flower basket, and the second clamping portion is configured to push the flower basket in a direction close to the second positioning portion to limit the flower basket between the second positioning portion and the second clamping portion;

[0009] A driving portion connected to the lifting portion, and the driving portion is configured to drive the lifting portion to lift and lower.

[0010] In some embodiments, the first positioning portion is a columnar structure, and the first clamping portion is a finger cylinder.

[0011] In some embodiments, a first opening is provided on the vertical portion, and the finger cylinder clamps the first positioning portion through the first opening.

[0012] In some embodiments, the first positioning portion is disposed at an end of the flower basket, the transverse portion is disposed at an end of the vertical portion, and the first positioning portion and the transverse portion are disposed opposite to each other.

[0013] In some embodiments, the transverse portion includes a first transverse segment, a second transverse segment, and a third transverse segment. One end of the second transverse segment is provided with the first transverse segment, and the other opposite end is provided with the third transverse segment. The first transverse segment and the third transverse segment extend toward the same side of the second transverse segment;

[0014] The second positioning portion is disposed on one of the first transverse segment and the third transverse segment, and the second clamping portion is disposed on the other;

[0015] The second positioning portion is configured to abut against one side of the flower basket, and the second clamping portion is configured to abut against the other opposite side of the flower basket.

[0016] In some embodiments, the second positioning portion is fixed to the first transverse segment through a connecting member. The first transverse segment is provided with a second opening, and the connecting member passes through the second opening. The connecting member moves along the length direction of the second opening to adjust the position of the second positioning portion.

[0017] In some embodiments, the second clamping portion includes a first air cylinder. The first air cylinder is fixed to the third transverse segment. A clamping portion is disposed at a power output end of the first air cylinder. The clamping portion is configured to abut against the flower basket, and the clamping portion moves in a direction close to or away from the second positioning portion under the drive of the first air cylinder.

[0018] In some embodiments, the clamping portion includes a first connecting portion. The first connecting portion is fixed to the power output end of the first air cylinder. An adjusting portion is disposed on the first connecting portion. The adjusting portion abuts against the flower basket.

[0019] In some embodiments, the lifting device further includes a buffer portion. The buffer portion includes a second air cylinder. The second air cylinder is fixedly installed on the vertical portion. A second connecting portion is disposed at a power output end of the second air cylinder. An abutting portion is disposed on the second connecting portion. The abutting portion extends along the height direction of the vertical portion. The second air cylinder is configured to drive the abutting portion to move in a direction close to or away from the flower basket;

[0020] A third opening is provided on the vertical portion, and the abutting portion abuts against the silicon wafer in the flower basket through the third opening.

[0021] In some embodiments, the driving part includes a vertical column, on which a driving member and a sliding part are arranged. The driving member is configured to drive the sliding part to move along the height direction of the vertical column, and the sliding part is fixedly connected to the vertical part.

[0022] Compared with the prior art, the advantages and positive effects of the present utility model are as follows:

[0023] In the wafer carrier lifting device disclosed in the present application, through the cooperation between the second clamping part and the second positioning part, the carrier is bilaterally limited and clamped. Since only one set of power driving mechanism, namely the second clamping part, is adopted and the second positioning part is a fixed structure, the cost of the lifting device is low and the failure rate is low.

[0024] The top and bottom of the carrier are both configured with limiting structures, which improves the placement stability of the carrier on the lifting part and avoids shaking.

[0025] After reading the specific embodiments of the present utility model in conjunction with the accompanying drawings, other features and advantages of the present utility model will become clearer. Description of the Drawings

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0027] Figure 1 A structural diagram of a wafer carrier lifting device according to some embodiments;

[0028] Figure 2 Another structural diagram of a wafer carrier lifting device according to some embodiments;

[0029] Figure 3 For Figure 2 The enlarged view of part A in

[0030] Figure 4 A structural diagram of a wafer carrier lifting device without a carrier placed according to some embodiments;

[0031] Figure 5 A structural diagram of a carrier according to some embodiments;

[0032] Figure 6 A structural diagram of a lifting part according to some embodiments;

[0033] Figure 7 Another structural diagram of a lifting part according to some embodiments;

[0034] Figure 8 Another structural diagram of the lifting part according to some embodiments;

[0035] Figure 9 A structural diagram of the buffer part according to some embodiments;

[0036] Reference numerals:

[0037] 100, flower basket; 110, top frame; 120, bottom frame; 130, vertical frame;

[0038] 200, lifting part; 210, vertical part; 211, first opening; 212, third opening; 213, fixing part; 220, horizontal part; 221, first section of the horizontal part; 222, second section of the horizontal part; 223, third section of the horizontal part; 224, second opening; 225, fourth opening;

[0039] 300, driving part; 310, column; 320, driving member; 330, sliding part;

[0040] 400, buffer part; 410, second cylinder; 420, second connecting part; 430, abutting part; 440, third connecting part;

[0041] 500, first positioning part;

[0042] 600, first clamping part; 610, finger cylinder;

[0043] 700, second positioning part; 710, inclined surface; 720, connecting member;

[0044] 800, second clamping part; 810, first cylinder; 820, clamping part; 821, first connecting part; 822, adjusting part;

[0045] 900, drag chain. Detailed implementation manners

[0046] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0047] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.

[0048] The terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0049] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected" and "coupled" shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application may be understood according to specific circumstances.

[0050] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.

[0051] The following disclosure provides many different embodiments or examples for implementing different structures of the present utility model. To simplify the disclosure of the present utility model, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present utility model. In addition, the present utility model may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present utility model provides examples of various specific processes and materials, but those of ordinary skill in the art can realize the application of other processes and / or the use of other materials.

[0052] In some embodiments, a wafer carrier lifting device is provided. Referring to Figures 1 to 4 , wherein Figure 1 is a structural diagram of the lifting device observed from one side, Figure 2 is a structural diagram of the lifting device observed from another opposite side, Figure 3 is Figure 2 an enlarged view of part A in Figure 4 is a structural diagram of the lifting device without the wafer carrier 100 placed thereon.

[0053] The lifting device includes a wafer carrier 100. Figure 5 is a structural diagram of the wafer carrier 100. The wafer carrier 100 is configured to place wafers. A first positioning portion 500 is provided on the wafer carrier 100.

[0054] The wafer carrier 100 includes a top frame 110, a bottom frame 120, and a vertical frame 130. The vertical frame 130 is connected between the top frame 110 and the bottom frame 120. The top frame 110 and the bottom frame 120 are U-shaped plate-like structures. The wafer carrier 100 forms a receiving space for placing wafers. One side of the receiving space is open, and the wafers are loaded into the wafer carrier 100 through the open side.

[0055] The lifting device includes a lifting portion 200. Figure 6 is a structural diagram of the lifting portion 200 observed from one side, Figure 7 is a structural diagram of the lifting portion 200 observed from the bottom side, Figure 8 is a structural diagram of the lifting portion 200 observed from another opposite side.

[0056] The lifting portion 200 includes a vertical portion 210 and a horizontal portion 220. The vertical portion 210 and the horizontal portion 220 are an integral structure. The horizontal portion 220 is provided at the bottom of the vertical portion 210. The horizontal portion 220 extends toward one side of the vertical portion 210. The vertical portion 210 is a vertical structure, and the horizontal portion 220 is a flat structure.

[0057] A first clamping portion 600 is provided on the vertical portion 210. The first clamping portion 600 is configured to clamp the first positioning portion 500.

[0058] A second positioning portion 700 and a second clamping portion 800 are provided on the transverse portion 220. The second positioning portion 700 and the second clamping portion 800 are arranged oppositely. The second positioning portion 700 is configured to abut against the flower basket 100. The second clamping portion 800 is configured to push the flower basket 100 in a direction close to the second positioning portion 700, so as to limit the flower basket 100 between the second positioning portion 700 and the second clamping portion 800.

[0059] During use, the flower basket 100 is placed on the lifting portion 200. Specifically, the bottom frame 120 of the flower basket 100 is placed on the transverse portion 220. The flower basket 100 is located in the area between the second positioning portion 700 and the second clamping portion 800. The transverse portion 220 bears the flower basket 100, and the flower basket 100 is in a vertical placement posture;

[0060] The second clamping portion 800 acts. The second clamping portion 800 moves in a direction close to the flower basket 100 until the second clamping portion 800 abuts against the flower basket 100. The second clamping portion 800 continues to push the flower basket 100 in a direction close to the second positioning portion 700 until one side of the flower basket 100 abuts against the second positioning portion 700, and the other opposite side of the flower basket 100 abuts against the second clamping portion 800. The flower basket 100 is limited between the second positioning portion 700 and the second clamping portion 800;

[0061] The first clamping portion 600 acts, and the first clamping portion 600 clamps the first positioning portion 500;

[0062] At this point, the placement of the flower basket 100 on the lifting frame is completed. Through the cooperation between the second clamping portion 800 and the second positioning portion 700, and between the first clamping portion 600 and the first positioning portion 500, the position of the flower basket 100 on the lifting portion 200 is stabilized, and the flower basket 100 is prevented from shaking.

[0063] Through the cooperation between the second clamping portion 800 and the second positioning portion 700, bilateral limiting clamping is performed on the flower basket 100. Since only one set of power driving mechanisms such as the second clamping portion 800 is adopted and the second positioning portion 700 is a fixed structure, the cost of the lifting device is low and the failure rate is low.

[0064] In some embodiments, referring to Figure 1 , the lifting device includes a driving portion 300. The driving portion 300 is connected to the lifting portion 200. The driving portion 300 is configured to drive the lifting portion 200 to lift and lower, and the lifting portion 200 drives the flower basket 100 to lift and lower.

[0065] In some embodiments, referring to Figure 5 , the first positioning portion 500 is provided at the end of the flower basket 100. The first clamping portion 600 and the first positioning portion 500 form a limiting structure at one end of the flower basket 100.

[0066] The horizontal portion 220 is disposed at the end of the vertical portion 210. For example, the horizontal portion 220 is disposed at the bottom of the vertical portion 210. The horizontal portion 220 and the first positioning portion 500 are oppositely arranged, and the second clamping portion 800 and the second limiting portion form a limiting structure at the other opposite end of the flower basket 100.

[0067] In this way, limiting structures are arranged at both opposite ends of the flower basket 100, improving the placement stability of the flower basket 100 on the lifting portion 200 and avoiding shaking.

[0068] In some embodiments, referring to Figure 5 , the first positioning portion 500 is a columnar structure. Referring to Figure 6 , the first clamping portion 600 is a finger cylinder 610. The finger cylinder 610 clamps the first positioning portion 500. By adopting the finger cylinder 610, the structure of the lifting device is simplified and the reliability of the lifting device is improved.

[0069] In some embodiments, referring to Figure 6 , a first opening 211 is provided on the vertical portion 210, and the first opening 211 is provided at an upper position of the vertical portion 210. The finger cylinder 610 is fixedly installed at the first opening 211. The finger cylinder 610 clamps the first positioning portion 500 via the first opening 211.

[0070] In some embodiments, referring to Figure 6 , the horizontal portion 220 includes a horizontally-extended portion one 221, a horizontally-extended portion two 222, and a horizontally-extended portion three 223 which are of an integral structure. One end of the horizontally-extended portion two 222 is provided with the horizontally-extended portion one 221, and the other opposite end is provided with the horizontally-extended portion three 223. The horizontally-extended portion one 221 and the horizontally-extended portion three 223 extend toward the same side of the horizontally-extended portion two 222. The horizontal portion 220 is a U-shaped structure. The opening direction surrounded by the horizontal portion 220 is the same as the opening direction of the flower basket 100.

[0071] A second positioning portion 700 is provided on one of the horizontally-extended portion one 221 and the horizontally-extended portion three 223, and a second clamping portion 800 is provided on the other. For example, the second positioning portion 700 is provided on the horizontally-extended portion one 221, and the second clamping portion 800 is provided on the horizontally-extended portion three 223.

[0072] The second positioning portion 700 is configured to abut against one side of the flower basket 100, and the second clamping portion 800 is configured to abut against the other opposite side of the flower basket 100. For example, the second positioning portion 700 abuts against one side of the bottom frame 120, and the second clamping portion 800 abuts against the other opposite side of the bottom frame 120.

[0073] The horizontal portion 220 not only serves to carry the flower basket 100, but also makes the placement of the flower basket 100 on the horizontal portion 220 more stable by arranging the second clamping portion 800 and the second positioning portion 700 on the horizontal portion 220. Since the horizontal portion 220 is disposed at the bottom, the bottom of the flower basket 100 is reliably limited, which helps to improve the placement stability of the flower basket 100.

[0074] In some embodiments, referring to Figure 6 and Figure 7 , the second positioning portion 700 is a strip-shaped structure, and the second positioning portion 700 extends along the length direction of a section 221 of the horizontal portion, increasing the contact area between the second positioning portion 700 and the bottom frame 120 of the flower basket 100, which helps to improve the limit reliability.

[0075] In some embodiments, the second positioning portion 700 is fixed to a section 221 of the horizontal portion through a connecting member 720 (such as a bolt).

[0076] A second opening 224 is provided on a section 221 of the horizontal portion, and the second opening 224 extends along the width direction of a section 221 of the horizontal portion. The connecting member 720 passes through the second opening 224, and the connecting member 720 moves along the length direction of the second opening 224 to adjust the position of the second positioning portion 700, that is, to adjust the position of the second positioning portion 700 along the width direction of a section 221 of the horizontal portion. By adjusting the position of the second positioning portion 700, the lifting device is adapted to flower baskets 100 of different specifications and sizes.

[0077] In some embodiments, a plurality of second openings 224 are provided, and the plurality of second openings 224 extend along the length direction of a section 221 of the horizontal portion. The second positioning portion 700 is fixed to a section 221 of the horizontal portion through a plurality of connecting members 720, which helps to improve the installation reliability of the second positioning portion 700.

[0078] In some embodiments, referring to Figure 8 , a slope 710 is provided at the top of the second positioning portion 700, which plays a guiding role in the placement of the flower basket 100.

[0079] In some embodiments, referring to Figure 7 and Figure 8 , the second clamping portion 800 includes a first cylinder 810, and the first cylinder 810 is fixed to a third section 223 of the horizontal portion. A clamping portion 820 is provided at the power output end of the first cylinder 810, and the clamping portion 820 is configured to abut against the flower basket 100. For example, the clamping portion 820 abuts against the side portion of the bottom frame 120. The clamping portion 820 moves in a direction approaching or departing from the second positioning portion 700 under the drive of the first cylinder 810.

[0080] When the clamping part 820 moves towards the second positioning part 700 under the drive of the first cylinder 810, the flower basket 100 is pushed towards the second positioning part 700, so that the bottom frame 120 of the flower basket 100 is limited between the second positioning part 700 and the clamping part.

[0081] When the clamping part 820 moves away from the second positioning part 700 under the drive of the first cylinder 810, the bottom limit of the flower basket 100 is released.

[0082] In some embodiments, the second cylinder 410 is fixedly arranged at the bottom of the three-section transverse part 223. A fourth opening 225 is arranged on the side of the three-section transverse part 223, and the power output end of the first cylinder 810 is connected to the clamping part 820 through the fourth opening 225.

[0083] In some embodiments, referring to Figure 3 and Figure 8 , the clamping part 820 includes a first connecting part 821. The first connecting part 821 is fixed to the power output end of the first cylinder 810. An adjusting part 822 is arranged on the first connecting part 821, and the adjusting part 822 abuts against the flower basket 100. For example, the adjusting part 822 abuts against the side of the bottom frame 120 of the flower basket 100.

[0084] The first connecting part 821 is in a plate-like structure. For example, the first connecting part 821 is in an L-shaped plate-like structure. The first connecting part 821 is located on the side of the three-section transverse part 223.

[0085] The adjusting part 822 is in a rod-like structure, and the end of the rod-like structure abuts against the side of the bottom frame 120 of the flower basket 100.

[0086] A plurality of adjusting parts 822 are arranged. The plurality of adjusting parts 822 extend along the length direction of the three-section transverse part 223. The plurality of adjusting parts 822 form multi-point abutment against the bottom frame 120, which helps to improve the limiting reliability of the flower basket 100.

[0087] In some embodiments, referring to Figure 2 and Figure 9 , the lifting device further includes a buffer part 400. The buffer part 400 includes a second cylinder 410. The cylinder body of the second cylinder 410 is fixedly connected with a third connecting part 440. The third connecting part 440 is fixedly installed on the vertical part 210 through bolts or the like, so as to fixedly install the second cylinder 410 on the vertical part 210.

[0088] The power output end of the second cylinder 410 is provided with a second connection part 420. The second connection part 420 is provided with a support part 430, which is a vertical rod-shaped structure and extends in the height direction of the vertical part 210. The second cylinder 410 is configured to drive the support part 430 to move toward or away from the flower basket 100.

[0089] The vertical portion 210 is provided with a third opening 212 , which extends along the height direction of the vertical portion 210 . The abutting portion 430 abuts against the silicon wafer in the flower basket 100 through the third opening 212 .

[0090] When the flower basket 100 is placed on the lifting part 200 , the abutting part 430 is located away from the flower basket 100 , that is, the abutting part 430 moves in a direction away from the flower basket 100 under the driving of the second cylinder 410 .

[0091] After the flower basket 100 is placed, the abutting portion 430 moves towards the flower basket 100 under the drive of the second cylinder 410. At this time, when the silicon wafer is placed in the flower basket 100, the back side of the silicon wafer abuts against the abutting portion 430, which plays a buffering role and prevents the silicon wafer from colliding with the back side of the flower basket 100 at high speed and causing damage to the silicon wafer.

[0092] The abutting portion 430 is made of silicone to avoid damaging the silicon wafer.

[0093] In some embodiments, reference Figure 1 The driving part 300 includes a column 310, and a driving member 320 and a sliding part 330 are arranged on the column 310. The driving member 320 is, for example, a lifting motor. The driving member 320 is fixedly arranged on the top of the column 310.

[0094] The sliding part 330 is a fixed plate structure. A slideway is provided on the column 310, and the sliding part 330 is connected with the slideway. Figure 6 A fixing portion 213 is provided on the vertical portion 210, and the sliding portion 330 is fixedly connected to the fixing portion 213 by bolts or the like.

[0095] The power output end of the driving member 320 is connected to the sliding part 330, and the driving member 320 is configured to drive the sliding part 330 to move along the height direction of the column 310, so as to realize the lifting and lowering of the lifting part 200, and the lifting part 200 drives the flower basket 100 placed thereon to rise and fall synchronously.

[0096] In some embodiments, reference Figure 1 The lifting device also includes a drag chain 900, one end of the drag chain 900 is arranged on the column 310, and the other end is arranged on the vertical part 210, and the drag chain 900 is used for wiring.

[0097] In the description of the above embodiments, specific features, structures, materials, or characteristics may be combined in any one or more embodiments or examples in a suitable manner.

[0098] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed by the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A silicon wafer basket lifting device, characterized in that: include: A flower basket is configured to place silicon wafers, and a first positioning portion is provided on the flower basket; The lifting part includes a vertical part and a horizontal part, the vertical part is provided with a first clamping part, the first clamping part is configured to clamp the first positioning part, the horizontal part is provided with a second positioning part and a second clamping part, the second positioning part and the second clamping part are arranged opposite to each other, the second positioning part is configured to abut against the flower basket, and the second clamping part is configured to push the flower basket in a direction close to the second positioning part, so as to limit the flower basket between the second positioning part and the second clamping part; The driving unit is connected to the lifting unit, and is configured to drive the lifting unit to move up and down.

2. The silicon wafer basket lifting device according to claim 1, characterized in that: The first positioning portion is a column structure, and the first clamping portion is a finger cylinder.

3. The silicon wafer basket lifting device according to claim 2, characterized in that: The vertical portion is provided with a first opening, and the finger cylinder clamps the first positioning portion via the first opening.

4. The silicon wafer basket lifting device according to claim 1, characterized in that: The first positioning portion is arranged at the end of the flower basket, the transverse portion is arranged at the end of the vertical portion, and the first positioning portion and the transverse portion are arranged opposite to each other.

5. The silicon wafer basket lifting device according to claim 1, characterized in that: The transverse portion includes a first transverse portion, a second transverse portion, and a third transverse portion, wherein the first transverse portion is disposed at one end of the second transverse portion, and the third transverse portion is disposed at the other opposite end, and the first transverse portion and the third transverse portion extend toward the same side of the second transverse portion; The second positioning portion is disposed on one of the first section of the transverse portion and the third section of the transverse portion, and the second clamping portion is disposed on the other section; The second positioning portion is configured to abut against one side of the flower basket, and the second clamping portion is configured to abut against another opposite side of the flower basket.

6. The silicon wafer basket lifting device according to claim 5, characterized in that: The second positioning portion is fixed to a section of the transverse portion through a connecting piece, a second opening is provided on the section of the transverse portion, the connecting piece passes through the second opening, and the connecting piece moves along the length direction of the second opening to adjust the position of the second positioning portion.

7. The silicon wafer basket lifting device according to claim 5, characterized in that: The second clamping part includes a first cylinder, which is fixed to the third section of the transverse part. A clamping part is provided at the power output end of the first cylinder, and the clamping part is configured to abut against the flower basket. The clamping part moves toward or away from the second positioning part under the drive of the first cylinder.

8. The silicon wafer basket lifting device according to claim 7, characterized in that: The clamping part includes a first connecting part, the first connecting part is fixed to the power output end of the first cylinder, and the first connecting part is provided with an adjusting part, and the adjusting part abuts against the flower basket.

9. The silicon wafer basket lifting device according to any one of claims 1 to 8, characterized in that: The lifting device further includes a buffer portion, the buffer portion includes a second cylinder, the second cylinder is fixedly mounted on the vertical portion, a second connecting portion is provided at a power output end of the second cylinder, a supporting portion is provided on the second connecting portion, the supporting portion extends along the height direction of the vertical portion, and the second cylinder is configured to drive the supporting portion to move toward or away from the flower basket; The vertical portion is provided with a third opening, and the abutting portion abuts against the silicon wafer in the flower basket via the third opening.

10. The silicon wafer basket lifting device according to any one of claims 1 to 8, characterized in that: The driving part includes a column, and a driving member and a sliding part are arranged on the column. The driving member is configured to drive the sliding part to move along the height direction of the column, and the sliding part is fixedly connected to the vertical part.

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