Multi-chamber flame hydrolysis deposition device

Abstract

The utility model belongs to the technical field of flame hydrolysis deposition, and particularly discloses a multi-chamber flame hydrolysis deposition device which comprises a deposition equipment body, a reaction gas box and a waste gas treatment unit, a reaction chamber, a sample objective table and a power unit for driving the sample objective table to rotate are arranged in the deposition equipment body, the sample objective table is located at the bottom of the reaction chamber and comprises an inner ring objective table and an outer ring objective table which are coaxially arranged, a plurality of inner ring sample areas are distributed on the inner ring objective table in the circumferential direction of the inner ring objective table, and a plurality of outer ring sample areas are distributed on the outer ring objective table in the circumferential direction of the outer ring objective table; a reaction spray gun is arranged in the reaction chamber; the reaction gas box can provide reaction gas for the reaction chamber, and the waste gas treatment box can treat waste gas generated by flame hydrolysis of the reaction chamber. According to the utility model, samples with different sizes can be deposited at the same time, and the compatibility is stronger.

Description

Technical Field

[0001] The utility model relates to the technical field of flame hydrolysis deposition, and particularly relates to a multi-chamber flame hydrolysis deposition device. Background Technique

[0002] At present, the silicon-based silica planar optical waveguide circuit technology has developed rapidly and is often used to manufacture various optical active / passive devices. The flame hydrolysis method for preparing silicon-based silica materials has the advantages of fast deposition speed and good process repeatability, and is the preferred process for preparing silicon-based silica optical waveguide devices at present. However, the existing flame hydrolysis deposition equipment has low production efficiency and poor compatibility, and cannot deposit samples of different sizes simultaneously on the same equipment. In addition, the regulation of some process parameters is mainly based on experience mode, which is not conducive to the optimization of thin film processes. Summary of the Utility Model

[0003] The utility model provides a multi-chamber flame hydrolysis deposition device, aiming at realizing the simultaneous deposition of samples of different sizes and having stronger compatibility.

[0004] The utility model is realized by the following technical solutions: A multi-chamber flame hydrolysis deposition device includes a deposition equipment body, a reaction gas tank and an exhaust gas treatment unit. A reaction chamber, a sample carrier and a power unit for driving the rotation of the sample carrier are arranged in the deposition equipment body. The sample carrier is located at the bottom of the reaction chamber, and a heating table is arranged at the bottom of the sample carrier. The sample carrier includes an inner ring carrier and an outer ring carrier arranged coaxially. A plurality of inner ring sample areas are distributed along the circumferential direction of the inner ring carrier, and a plurality of outer ring sample areas are distributed along the circumferential direction of the outer ring carrier.

[0005] A reaction spray gun is arranged in the reaction chamber. The reaction gas tank can provide reaction gas for the reaction chamber, and the exhaust gas treatment tank can treat the exhaust gas generated by the flame hydrolysis in the reaction chamber.

[0006] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0007] In this solution, the sample carrier is divided into an inner ring carrier and an outer ring carrier. In this way, inner ring sample areas and outer ring sample areas with different size specifications can be set on the inner ring carrier and the outer ring carrier, so as to realize the simultaneous deposition of samples of different sizes and have stronger compatibility.

[0008] In this solution, the reaction gas required is mixed in the reaction gas tank and transmitted to the reaction spray gun in the reaction chamber for spraying, while the exhaust gas treatment tank collects and treats the exhaust gas generated in the reaction chamber to avoid pollution.

[0009] Furthermore, a plurality of flame measurement scale rings with different diameters are provided on the sample stage, and the flame measurement scale rings are used to measure the diameter of the flame ring ejected by the reaction spray gun.

[0010] Beneficial effects: Since the shape projected by the spray gun during combustion on the sample stage needs to be adjusted to a circular shape, in this solution, circular rings with scales and different diameters are provided on the sample stage. The flame measurement scale rings can more easily ensure that the flame shape is circular, which is convenient for the later driving unit to adjust the horizontal position of the reaction spray gun and is beneficial to controlling the coating process.

[0011] Furthermore, a driving unit is provided on the deposition equipment body, and the driving unit can drive the reaction spray gun to move horizontally.

[0012] Beneficial effects: The shape projected by the spray gun during combustion on the stage needs to be adjusted to a circular shape. Therefore, circular rings with scales and different diameters can be designed at the vacant positions around the stage, and then the diameter D of the spray gun flame ring can be measured. Based on this diameter, the driving unit can be used to control the moving step length L of the spray gun burner as L = 1 / 2D, so as to quantitatively control the process parameters and achieve the best coating effect. The driving unit in this solution can drive the reaction spray gun to move, thereby changing the spraying position of the reaction spray gun and facilitating the precise adjustment of the film-forming process.

[0013] Furthermore, a partition is connected to the middle position of the reaction chamber. The partition is located above the sample stage. The partition divides the reaction chamber into a left chamber and a right chamber, and the reaction spray guns are provided in both the left chamber and the right chamber.

[0014] Beneficial effects: In this solution, the reaction chamber is divided into two chambers by the partition. Compared with a single chamber, the double chamber can increase the production efficiency of the coated samples.

[0015] Furthermore, exhaust vents are connected to the tops of both the left chamber and the right chamber, and exhaust valves are installed on the exhaust vents.

[0016] Beneficial effects: The exhaust vents in this solution are convenient for discharging waste gas to the waste gas treatment box, and the exhaust valves are convenient for controlling the exhaust volume according to the actual situation.

[0017] Furthermore, a flow meter is also installed on the exhaust vent.

[0018] Beneficial effects: The exhaust vents, the left ventilation port and the right ventilation port can control the wind speed field distribution inside the chamber, and then affect the shape of the flame during the combustion of the spray gun. Through the settings of the flow meter and the exhaust valve in this solution, the air output can be quantitatively controlled, which is beneficial to quantitatively and precisely controlling the flame shape instead of controlling the flame shape in an empirical mode.

[0019] Further, there are two exhaust vents at the top of the left chamber, namely a first exhaust vent and a second exhaust vent, and the first exhaust vent and the second exhaust vent are respectively located at the left and right parts of the left chamber; there are two exhaust vents at the top of the right chamber, namely a third exhaust vent and a fourth exhaust vent, and the third exhaust vent and the fourth exhaust vent are respectively located at the left and right parts of the right chamber.

[0020] Advantageous effects: In this solution, there are two exhaust vents on both the left chamber and the right chamber, which is more convenient for precisely controlling the air volume and the evenness of the air outlet.

[0021] Further, a left chamber door and a right chamber door are respectively connected to one side of the left chamber and the right chamber. A left ventilation opening is provided on the left chamber door, and a right ventilation opening is provided on the right chamber door. There are two left ventilation openings and two right ventilation openings respectively. The two left ventilation openings are respectively located at the lower left corner and the lower right corner of the left chamber door, and the two right ventilation openings are respectively located at the lower left corner and the lower right corner of the right chamber door;

[0022] A damper is slidably fitted on both the left ventilation opening and the right ventilation opening. The air intake volume of the left ventilation opening or the right ventilation opening is adjusted by sliding the damper, and scales are provided at both the left ventilation opening and the right ventilation opening.

[0023] Advantageous effects: The air intake volume of the left ventilation opening or the right ventilation opening can be adjusted by sliding the damper to control the wind speed. Scales are provided at the left ventilation opening and the right ventilation opening, which can show the specific sizes of the openings of the left ventilation opening and the right ventilation opening. Furthermore, it is convenient to quantitatively control the size of the damper, which is beneficial for quantitatively and precisely regulating the flame shape.

[0024] Further, rollers are installed at the bottom of the deposition equipment body.

[0025] Advantageous effects: The setting of the rollers facilitates the movement of the entire device.

[0026] Further, a lighting lamp is installed at the top of the deposition equipment body.

[0027] Advantageous effects: The setting of the lighting lamp facilitates observing the deposition reaction situation in the reaction chamber after it is turned on. Description of the Drawings

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts. In the drawings:

[0029] Figure 1This is a partial cross-sectional view after opening the left chamber door and the right chamber door in an embodiment of a multi-chamber flame hydrolysis deposition device of the present utility model;

[0030] Figure 2 This is a partial cross-sectional view after closing the left chamber door and the right chamber door in an embodiment of a multi-chamber flame hydrolysis deposition device of the present utility model;

[0031] Figure 3 This is a schematic structural diagram of a sample stage in a top-down direction in an embodiment of a multi-chamber flame hydrolysis deposition device of the present utility model;

[0032] Figure 4 This is a schematic structural diagram of an air door and an air door handle in an embodiment of a multi-chamber flame hydrolysis deposition device of the present utility model;

[0033] Figure 5 This is a schematic system structure diagram in an embodiment of a multi-chamber flame hydrolysis deposition device of the present utility model.

[0034] Reference numerals in the drawings and corresponding component names:

[0035] Deposition equipment body 1, reaction chamber 2, left chamber 201, left chamber door 2011, left ventilation opening 2012, right chamber 202, right chamber door 2021, right ventilation opening 2022, drive unit 3, reaction spray gun 4, first exhaust opening 5, second exhaust opening 6, third exhaust opening 7, fourth exhaust opening 8, exhaust valve 9, flowmeter 10, partition 11, sample stage 12, inner ring stage 121, outer ring stage 122, inner ring sample area 123, outer ring sample area 124, lighting lamp 13, air door 14, air door handle 141, roller 15, flame measurement scale ring 16. Detailed implementation manners

[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the present utility model claimed, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0038] It should be noted that similar reference numerals and letters denote similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0039] In the description of the present utility model, it should be noted that the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0040] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0041] As Figures 1 - 5 shown, Embodiment 1 of the present invention provides a multi-chamber flame hydrolysis deposition device, including a deposition equipment body 1, a reaction gas tank, and an exhaust gas treatment unit. A reaction chamber 2, a sample stage 12, and a power unit for driving the rotation of the sample stage 12 are provided inside the deposition equipment body 1. The sample stage 12 is located at the bottom of the reaction chamber 2. A heating stage is provided at the bottom of the sample stage 12, and a heating unit is provided inside the heating stage for heating the sample on the sample stage 12 to maintain the temperature. As Figure 3 shown, an inner ring stage 121 and an outer ring stage 122 are coaxially arranged on the sample stage 12. A plurality of inner ring sample areas 123 are circumferentially distributed on the inner ring stage 121, and a plurality of outer ring sample areas 124 are circumferentially distributed on the outer ring stage 122. The inner ring sample areas 123 and the outer ring sample areas 124 are circular grooves for placing samples. The size specifications of the inner ring sample areas 123 and the outer ring sample areas 124 are different. For example, a 6-inch sample is placed in the inner ring sample area 123, and an 8-inch sample is placed in the outer ring sample area 124. In this way, samples of different sizes can be deposited simultaneously, and the compatibility is strong.

[0042] The power unit in this embodiment can adopt a motor and a reducer, and the motor drives the rotation of the sample stage 12.

[0043] A reaction spray gun 4 is provided inside the reaction chamber 2. In this embodiment, a partition 11 is connected to the middle position of the reaction chamber 2. The partition 11 is located above the sample stage 12, which can avoid affecting the normal rotation of the sample stage 12. The partition 11 divides the reaction chamber 2 into a left chamber 201 and a right chamber 202. The above-mentioned reaction spray guns 4 are installed in both the left chamber 201 and the right chamber 202. The reaction spray gun 4 in the left chamber 201 corresponds to the inner ring sample area 123 on the inner ring stage 121, and the reaction spray gun 4 in the right chamber 202 corresponds to the outer ring sample area 124 on the outer ring stage 122. In this way, the samples on the inner ring sample area 123 are deposited with a thin film by the left chamber 201, and the samples on the outer ring sample area 124 are deposited with a thin film by the right chamber 202.

[0044] As Figure 1 shown, exhaust vents are connected to the tops of both the left chamber 201 and the right chamber 202, and exhaust valves 9 are installed on the exhaust vents. In this embodiment, there are two exhaust vents at the top of the left chamber 201, namely the first exhaust vent 5 and the second exhaust vent 6, and the first exhaust vent 5 and the second exhaust vent 6 are respectively located at the left and right parts of the left chamber 201; there are two exhaust vents at the top of the right chamber 202, which are respectively located at the third exhaust vent 7 and the fourth exhaust vent 8, and the third exhaust vent 7 and the fourth exhaust vent 8 are respectively located at the left and right parts of the right chamber 202.

[0045] A flow meter 10 is installed on each exhaust vent. The flow meter 10 can detect the wind speed. The exhaust vents can be quantitatively controlled through the flow meter 10 and the exhaust valve 9, which is beneficial to quantitatively and precisely regulating the shape and size of the flame.

[0046] Combined with Figure 2 and Figure 4 shown, a left chamber door 2011 and a right chamber door 2021 are respectively connected to one side of the left chamber 201 and the right chamber 202. A left ventilation opening 2012 is provided on the left chamber door 2011, and a right ventilation opening 2022 is provided on the right chamber door 2021. There are two left ventilation openings 2012 and two right ventilation openings 2022 respectively. The two left ventilation openings 2012 are respectively located at the lower left corner and the lower right corner of the left chamber door 2011, and the two right ventilation openings 2022 are respectively located at the lower left corner and the lower right corner of the right chamber door 2021. Air doors 14 are slidably fitted on the left ventilation opening 2012 and the right ventilation opening 2022. An air door handle 141 is installed on the air door 14. The air door 14 is slid by the air door handle 141 to adjust the air intake of the left ventilation opening 2012 or the right ventilation opening 2022. In this embodiment, by sliding the air door 14 left and right, the wind speed of the incoming air is controlled. In this embodiment, scales can be set at the left ventilation opening 2012 and the right ventilation opening 2022, so that the specific opening sizes of the left ventilation opening and the right ventilation opening can be displayed, which is beneficial to quantitatively and precisely regulating the flame shape.

[0047] In this solution, the different flow rates of the exhaust port and the ventilation port will directly affect the wind speed field distribution in the reaction chamber, and further affect the flame shape of the spray gun combustion. Therefore, one of the key points of this embodiment is to control the flame shape by quantitatively adjusting the flow rates of the exhaust port and the ventilation port, rather than controlling the flame shape in an empirical mode, which is more accurate and facilitates achieving the best coating effect.

[0048] In this embodiment, the reaction gas box can provide reaction gases for the reaction chamber 2, and the waste gas treatment box can treat the waste gases generated by the flame hydrolysis in the reaction chamber 2. As Figure 5 shown, after mixing multiple gases in the reaction gas box, mixed gas 1, mixed gas 2, and mixed gas 3 are formed, and enter the reaction spray gun 4 in the reaction chamber 2 through pipelines for combustion reaction spraying. The waste gases generated in the reaction chamber 2 are then discharged through pipelines into the waste gas treatment box for waste gas treatment and then discharged.

[0049] In this embodiment, mixed gas 1 is formed by mixing SiCl4, POCL3, BCL3, and He, mixed gas 2 is formed by mixing He and O2, and mixed gas 3 is formed by mixing He and H2. Mixed gas 1, mixed gas 2, and mixed gas 3 are respectively input into the reaction spray gun through pipelines. In this embodiment, the raw materials BCl3, SiCl4, POCl3, H2, O2 are supplied by the system and mixed and burned in proportion. Through the flame hydrolysis method, a powder mixture of B2O3, SiO2, and P2O5 is uniformly covered on the surface of the wafer, and then through the subsequent annealing process, the powder is melted into a film and firmly bonded to the wafer to complete the coating function.

[0050] The specific reaction equations are as follows:

[0051] 2H2 + O2 = H2O↑;

[0052] 2BCl3 + 3H2O = B2O3↓ + 6HCl↑;

[0053] SiCl4 + 2H2O = SiO2↓ + 4HCl↑;

[0054] 2POCl3 + 3H2O = P2O5↓ + 6HCl↑.

[0055] In this embodiment, four rollers 15 are installed at the bottom of the deposition equipment body 1, and the four rollers 15 are respectively installed at the four corners of the deposition equipment body 1. The setting of the rollers 15 facilitates the movement of the entire equipment, which is more labor-saving and convenient.

[0056] In this embodiment, a lighting lamp 13 is installed at the top of the deposition equipment body 1 to facilitate observing the reaction situation inside the reaction chamber 2.

[0057] A driving unit 3 is provided on the deposition equipment body 1. The driving unit 3 can drive the reaction spray gun 4 to move horizontally, thereby adjusting the position of the reaction spray gun 4. In this embodiment, the driving unit 3 includes a stepping motor and a lead screw pair. The stepping motor drives the rotation of the lead screw in the lead screw pair. The lead screw pair is a prior art, including a lead screw and a slider. The rotation of the lead screw drives the horizontal movement of the slider in the lead screw pair. The reaction spray gun 4 is installed on the slider. In this way, the slider can drive the reaction spray gun 4 to move horizontally to change its position, which is convenient for changing the position of the reaction spray gun 4 according to the actual situation to match and adjust the moving step of the flame torch, which is beneficial to quantitatively and accurately adjusting the film-forming process.

[0058] In this embodiment, the working process of the entire deposition device is as follows:

[0059] First, fix the position of the reaction spray gun, and let the sample stage rotate at least one full circle to complete the film coating at one position. Then, horizontally move the position of the reaction spray gun 4 through the driving unit, and then let the sample stage 12 rotate at least one full circle to complete the film coating at this position. By analogy, the entire range of the sample on the sample stage is coated.

[0060] Embodiment 2. The difference between this embodiment and Embodiment 1 is that the shape projected by the combustion of the reaction spray gun on the sample stage needs to be adjusted to a circular shape. In this embodiment, three flame measurement scale rings 3 with different diameters and scales are provided on the sample stage 1. The flame measurement scale ring 3 is used to measure the diameter D of the flame ring ejected by the reaction spray gun 4. By comparing the size of the flame ring ejected by the reaction spray gun 4 with that of the flame measurement scale ring 3, the diameter of the flame ring can be determined, and based on this diameter, the stepping motor can be used to control the moving step L of the reaction spray gun torch to be L = 1 / 2D, so as to quantitatively control the process parameters and achieve the best film coating effect.

[0061] The double-chamber flame hydrolysis deposition system device in the present utility model includes three parts: a gas supply tank, a flame hydrolysis deposition reaction chamber, and a tail gas treatment tank. The gas supply tank is mainly used to provide various reaction gases for the reaction chamber 2. The reaction chamber is mainly used to control the flame hydrolysis deposition reaction process. The tail gas treatment tank is mainly used to treat the waste gas generated by the flame hydrolysis in the reaction chamber 2. The double-chamber design can improve the film coating efficiency, and at the same time, different-sized samples can be deposited simultaneously, with higher compatibility.

[0062] Through the adjustable design of the sizes of the air inlet and the air outlet, the quantitative control of the air inlet and the air outlet volume can be realized, which is beneficial to quantitatively and accurately regulating the flame shape.

[0063] The specific embodiments described above further elaborate on the purpose, technical solution, and beneficial effects of the present utility model. It should be understood that the above description is only for the specific embodiments of the present utility model and is not used to limit the protection scope of the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A multi-chamber flame hydrolysis deposition device, comprising a deposition device body, a reaction gas box and an exhaust gas treatment unit, characterized in that: The deposition device body is provided with a reaction chamber, a sample stage and a power unit for driving the sample stage to rotate, the sample stage is located at the bottom of the reaction chamber, a heating platform is provided at the bottom of the sample stage, an inner ring stage and an outer ring stage are coaxially arranged on the sample stage, a plurality of inner ring sample areas are distributed along its circumference on the inner ring stage, and a plurality of outer ring sample areas are distributed along its circumference on the outer ring stage; A reaction spray gun is arranged in the reaction chamber; the reaction gas box can provide reaction gas to the reaction chamber, and the waste gas treatment unit can treat waste gas generated by flame hydrolysis in the reaction chamber.

2. A multi-chamber flame hydrolysis deposition device according to claim 1, characterized in that: The sample stage is provided with a plurality of flame measuring scale rings of different diameters, and the flame measuring scale rings are used to measure the diameter of the flame ring sprayed by the reaction spray gun.

3. A multi-chamber flame hydrolysis deposition device according to claim 1 or 2, characterized in that: The deposition equipment body is provided with a driving unit, and the driving unit can drive the reaction spray gun to move horizontally.

4. The multi-chamber flame hydrolysis deposition device according to claim 1, characterized in that: A partition is connected to the middle of the reaction chamber, and the partition is located above the sample stage. The partition divides the reaction chamber into a left chamber and a right chamber, and the reaction spray guns are both arranged in the left chamber and the right chamber.

5. The multi-chamber flame hydrolysis deposition device according to claim 4, characterized in that: The top ends of the left chamber and the right chamber are both connected with exhaust ports, and exhaust valves are installed on the exhaust ports.

6. The multi-chamber flame hydrolysis deposition device according to claim 5, characterized in that: A flow meter is also installed on the air outlet.

7. The multi-chamber flame hydrolysis deposition device according to claim 5, characterized in that: There are two exhaust outlets at the top of the left chamber, namely the first exhaust outlet and the second exhaust outlet, and the first exhaust outlet and the second exhaust outlet are respectively located at the left and right parts of the left chamber; there are two exhaust outlets at the top of the right chamber, namely the third exhaust outlet and the fourth exhaust outlet, and the third exhaust outlet and the fourth exhaust outlet are respectively located at the left and right parts of the right chamber.

8. A multi-chamber flame hydrolysis deposition device according to any one of claims 4 to 7, characterized in that: A left cavity door and a right cavity door are connected to one side of the left cavity door and the right cavity door, respectively. A left vent is provided on the left cavity door, and a right vent is provided on the right cavity door. Two left vents and two right vents are provided respectively. The two left vents are located at the lower left corner and the lower right corner of the left cavity door, respectively. The two right vents are located at the lower left corner and the lower right corner of the right cavity door, respectively. The left vent and the right vent are both slidably fitted with dampers, and the air intake of the left vent or the right vent is adjusted by sliding the dampers. The left vent and the right vent are both provided with scales.

9. The multi-chamber flame hydrolysis deposition device according to claim 1, characterized in that: A roller is installed at the bottom of the deposition equipment body.

10. The multi-chamber flame hydrolysis deposition device according to claim 1, characterized in that: A lighting lamp is installed on the top of the deposition equipment body.

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