Driving assembly and vacuum gate valve

Abstract

The utility model discloses a driving assembly and a vacuum gate valve, and relates to the technical field of vacuum gate valves, the driving assembly comprises a base and a driving piston, the base is of an integrally formed structure, and the base is provided with a driving groove and a first fluid channel; the driving piston is arranged in the driving groove in a sliding mode and shields a groove opening of the driving groove, and the driving piston and the bottom wall of the driving groove define a first pressure adjusting cavity; and the first fluid channel is communicated with the first pressure regulating cavity. According to the technical scheme provided by the utility model, the problem that the use effect of the vacuum gate valve is influenced due to the fact that a plurality of pushing cylinders are connected with a plurality of sections of pipelines in the long-term use process of the pipelines due to the risks of deformation and air leakage of the traditional vacuum valve can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum valves, and particularly relates to a driving assembly and a vacuum valve. Background Art

[0002] In a vacuum coating production line, vacuum valves are usually required to isolate different coating chambers; during the coating process, a vacuum valve is needed to isolate the vacuum coating chamber of the parts to be exchanged from other vacuum coating chambers to ensure that the vacuum coating chambers do not affect each other. The vacuum valve can adjust the pressure in each chamber to an appropriate level suitable for part exchange. During the part exchange process, the vacuum valve can serve as a safety release mechanism. When an abnormal situation is detected, it can quickly cut off the connection between the chamber and the system to prevent gas leakage or contamination. In a multi-chamber system, the vacuum valve is used to control the process of transferring parts from one chamber to another. For example, when a wafer is transferred between different coating process steps, a transfer valve (a special type of vacuum valve) can be opened to allow the wafer to pass through. The vacuum valve can also be used to control the type and flow rate of gas entering the chamber to maintain a specific coating environment, such as chemical vapor deposition (CVD) or physical vapor deposition (PVD) under a specific atmosphere. In an emergency, such as equipment failure or process parameters exceeding a predetermined range, the vacuum valve can quickly cut off the problematic chamber to protect the equipment and the ongoing process.

[0003] Traditional vacuum valves generally include a housing, a valve plate assembly, and a lifting assembly and a driving assembly for controlling the movement of the valve plate. The driving assembly of a traditional vacuum valve generally consists of multiple driving cylinders. The multiple driving cylinders are connected by pipes and the air pressure in the cylinders is controlled, thereby achieving the effect of controlling the valve plate to block the valve opening of the vacuum valve; due to the connection of multiple pushing cylinders and multiple sections of pipes, during long-term use, the pipes are at risk of deformation and air leakage, which in turn affects the use effect of the vacuum valve. Summary of the Utility Model

[0004] The main purpose of the present utility model is to propose a driving assembly and a vacuum valve, aiming to solve the problem that in a traditional vacuum valve, due to the connection of multiple pushing cylinders and multiple sections of pipes, during long-term use, the pipes are at risk of deformation and air leakage, which in turn affects the use effect of the vacuum valve.

[0005] To achieve the above object, the driving assembly proposed by the present utility model includes: a base and a driving piston. The base is an integrally formed structure, and the base is provided with a driving groove and a first fluid passage; the driving piston is slidably disposed in the driving groove and blocks the notch of the driving groove. The driving piston and the bottom wall of the driving groove enclose a first pressure regulating chamber; wherein, the first fluid passage is communicated with the first pressure regulating chamber.

[0006] In one embodiment, a first diversion groove is formed in the bottom wall of the driving groove, and the first diversion groove communicates with the first fluid passage.

[0007] In one embodiment, a seal is provided at the notch of the driving groove. A second pressure regulating chamber is formed by enclosing the seal and the driving piston. The base is further provided with a second fluid passage, and the second fluid passage communicates with the second pressure regulating chamber.

[0008] In one embodiment, a second diversion groove is formed at one end of the base close to the notch of the driving groove, and the second diversion groove communicates with the second fluid passage.

[0009] In one embodiment, the driving assembly further includes a channel joint and a main pipeline. The channel joint is detachably connected to the base, and the channel joint is used to communicate the first fluid passage and the second fluid passage with the main pipeline respectively.

[0010] In one embodiment, a corrugated pipe is provided between the seal and the driving piston, and two ends of the corrugated pipe are respectively connected to the seal and the driving piston.

[0011] In one embodiment, an elastic member is provided between the seal and the driving piston close to the seal, and two ends of the elastic member are elastically abutted against the seal and the driving piston respectively.

[0012] In one embodiment, a guiding boss is provided at the bottom of the driving groove, and a guiding groove is provided at one end of the driving piston close to the bottom of the driving groove. The guiding boss is slidably inserted into the guiding groove.

[0013] In one embodiment, at least two driving pistons and a plurality of driving grooves are included. Two driving pistons slidably connected to the driving groove are provided in each driving groove, and a partition is provided in each driving groove and located between the two driving pistons.

[0014] The present utility model further provides a vacuum valve. The vacuum valve includes: a housing, a lifting assembly and a driving assembly. A vacuum chamber is formed in the housing, and two valve openings are formed in the vacuum chamber; the lifting assembly is located on one side of the housing, and the lifting assembly has an output end extending into the vacuum chamber; the driving assembly is located in the vacuum chamber, the driving assembly is detachably connected to the output end of the lifting assembly, and baffles are respectively provided at two movable ends of the driving assembly; wherein, the lifting assembly is used to drive the driving assembly between the two valve openings, and the driving assembly is used to push the two baffles to block the valve openings.

[0015] The technical solution of the present utility model designs a driving component, which includes a base and a driving piston. The base is the structural foundation of the driving component. The base is an integrally formed structure, and a driving groove and a first fluid passage are provided inside it. The driving groove is the inner cavity where the driving piston slides, and the first fluid passage is used to adjust the pressure acting on the driving piston. The driving piston is slidably arranged in the driving groove, and the driving piston and the bottom wall of the driving groove enclose a first pressure regulating cavity. By adjusting the pressure change in the first fluid passage, the pressure change in the first pressure regulating cavity is controlled, and the position of the driving piston is adjusted, so that the driving component can realize the driving function through the movement of the driving piston. Through the integrated design, the problem of possible deformation and air leakage of the pipeline caused by the split connection of the push cylinder and the pipeline is avoided. The integrated design of the driving groove and the first fluid passage reduces the risk of air leakage in the pipeline or the cylinder block during long-term use, and improves the reliability and use effect of the vacuum valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on the structures shown in these drawings.

[0017] Figure 1 Structural schematic diagram of an embodiment of the driving component provided by the present utility model;

[0018] Figure 2 Structural schematic diagram of another embodiment of the driving component provided by the present utility model;

[0019] Figure 3 Structural schematic diagram of yet another embodiment of the driving component provided by the present utility model;

[0020] Figure 4 Structural schematic diagram of still another embodiment of the driving component provided by the present utility model;

[0021] Figure 5 Structural schematic diagram of an embodiment of the base provided by the present utility model;

[0022] Figure 6 Enlarged structural schematic diagram of the base of the present utility model at C;

[0023] Figure 7 Structural schematic diagram of an embodiment of the vacuum valve provided by the present utility model.

[0024] Explanation of the reference numerals in the drawings:

[0025] 100. Driving component; 1. Base; 1a. Driving groove; 1b. First fluid passage; 1c. Second fluid passage; 1d. First diversion groove; 1f. Second diversion groove; 11. Driving piston; 11a. First pressure regulating chamber; 11b. Second pressure regulating chamber; 11c. Guide groove; 12. Passage joint; 13. Guide boss; 14. Partition board; 2. Seal; 3. Bellows; 4. Elastic member.

[0026] The realization, functional features and advantages of the purpose of the present utility model will be further described in conjunction with the embodiments with reference to the accompanying drawings. Specific embodiments

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0028] It should be noted that if there are directional indications (such as up, down, left, right, front, back,...) involved in the embodiments of the present utility model, the directional indications are only used to explain the relative position relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0029] In addition, if there are descriptions such as "first" and "second" involved in the embodiments of the present utility model, the descriptions of "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, if "and / or" or "and / or" appears throughout the text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or a solution where A and B are satisfied simultaneously. In addition, the technical solutions between the embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.

[0030] The present utility model proposes a driving component 100.

[0031] Please refer to Figures 1 to 7, in an embodiment of the present utility model, the drive assembly 100 includes: a base 1 and a drive piston 11. The base 1 is an integrally formed structure, and the base 1 is provided with a drive groove 1a and a first fluid passage 1b; the drive piston 11 is slidably disposed in the drive groove 1a and blocks the notch of the drive groove 1a. The drive piston 11 and the bottom wall of the drive groove 1a enclose a first pressure regulating chamber 11a; wherein, the first fluid passage 1b communicates with the first pressure regulating chamber 11a.

[0032] In one embodiment, the base 1 is the basic support structure of the drive assembly 100 to ensure the stability of the drive assembly 100 during operation; the base 1 adopts an integrally formed manufacturing process, such as metal casting or machining, to ensure no seams and provide better airtightness. The base 1 can be designed in different shapes and sizes to adapt to specific application requirements. It can be in the shape of a flat plate, a cylindrical structure or other geometric shapes. The base 1 can be made of materials such as steel or aluminum alloy, mainly considering the airtightness and wear resistance of the materials used; one or more drive grooves 1a and one or more first fluid passages 1b can be formed in the base 1 by pouring or machining. The drive grooves 1a are independent of each other and are connected through the first fluid passage 1b for fluid exchange. The fluid inside the base 1 can be compressed air, water or hydraulic oil and other fluids, which can provide good pressure for the drive assembly 100; the base 1 must be able to withstand the static and dynamic loads applied by the equipment, including weight, vibration and air pressure shock. The design of the base 1 also needs to consider environmental factors, such as temperature, humidity, corrosive substances, etc., to ensure long-term stability and durability.

[0033] In this embodiment, the driving piston 11 is a common component in mechanical and hydraulic systems. It achieves linear motion through the action of pressure and then converts it into mechanical work. The driving piston 11 is slidably disposed in the driving groove 1a and blocks the notch of the driving groove 1a. The driving piston 11 and the bottom wall of the driving groove 1a enclose a first pressure regulating chamber 11a. The first fluid passage 1b is communicated with the first pressure regulating chamber 11a, and the pressure inside the first pressure regulating chamber 11a is regulated through the first fluid passage 1b. The main function of the driving piston 11 is to convert the pressure energy of the fluid (usually hydraulic oil or air pressure) into the mechanical energy of linear motion. The driving piston 11 is usually designed to be cylindrical, and its diameter and length are determined according to the required force and stroke. The piston needs good sealing performance to prevent fluid leakage, and the sealing element is generally a piston ring or a sealing ring. The driving piston 11 is usually equipped with a piston rod, which transmits the motion of the driving piston 11 to the outside and is connected to the component that needs to be driven. The pressure received by the driving piston 11 and the area of the driving piston 11 jointly determine the thrust or pull force that the piston can generate. The material selection of the driving piston 11 and the piston rod is usually based on strength, wear resistance and chemical resistance, and the commonly used materials include steel, aluminum alloy or special plastics. In order to reduce friction and wear, the piston and the piston rod need appropriate lubrication. The driving piston 11 is widely used in hydraulic cylinders, air cylinders, engines and other devices that require linear motion. The motion of the driving piston 11 is controlled by the fluid pressure controlled by the first pressure regulating chamber 11a, and precise speed and position control can be achieved.

[0034] The technical solution of the present utility model designs a driving assembly 100, and the driving assembly 100 includes a base 1 and a driving piston 11. The base 1 is the structural basis of the driving assembly 100. The base 1 is an integrally formed structure, and a driving groove 1a and a first fluid passage 1b are provided inside it. The driving groove 1a is the inner cavity where the driving piston 11 slides, and the first fluid passage 1b is used to regulate the pressure acting on the driving piston 11. The driving piston 11 is slidably disposed in the driving groove 1a, and the driving piston 11 and the bottom wall of the driving groove 1a enclose a first pressure regulating chamber 11a. By adjusting the pressure change in the first fluid passage 1b, and then controlling the pressure change in the first pressure regulating chamber 11a, the position of the driving piston 11 is adjusted, so that the driving assembly 100 can achieve the driving function through the motion of the driving piston 11. Through the integrated design, the problem of possible deformation and air leakage of the pipeline caused by the split connection of the push cylinder and the pipeline is avoided. The integrated design of the driving groove 1a and the first fluid passage 1b reduces the risk of air leakage of the pipeline or the cylinder block during long-term use, and improves the reliability and use effect of the vacuum valve.

[0035] In the embodiment of the present utility model, as Figure 2 and Figure 6As shown, a first diversion channel 1d is formed in the bottom wall of the driving groove 1a, and the first diversion channel 1d communicates with the first fluid channel 1b.

[0036] In one embodiment, a first diversion channel 1d is formed in the bottom wall of the driving groove 1a. This design can ensure the flow of fluid between the driving piston 11 and the bottom wall of the driving groove 1a to achieve precise control of the driving piston 11. The first diversion channel 1d is connected to the first fluid channel 1b. By providing the first diversion channel 1d, the contact area between the fluid in the first fluid channel 1b and the driving piston 11 is increased, thereby increasing the pressure between the fluid and the driving piston 11. The first diversion channel 1d can be formed by precision machining techniques such as CNC milling, electrical discharge machining, or laser cutting on the integrally formed structure of the base 1. The first diversion channel 1d is connected to the first fluid channel 1b, and the first fluid channel 1b is designed as a channel for transporting control fluid to the first diversion channel 1d. When the control fluid flows into the first diversion channel 1d through the first fluid channel 1b, the fluid will be distributed along the path of the first diversion channel 1d and then act on the bottom of the driving piston 11 to generate an upward or downward force, causing the piston to slide within the driving groove 1a to achieve the required driving function. This design not only improves the utilization rate of the fluid but also enhances the control accuracy of the piston movement.

[0037] In the embodiment of the present utility model, as Figure 1 and Figure 4 shown, a seal 2 is provided at the notch of the driving groove 1a. The seal 2 and the driving piston 11 enclose a second pressure regulating chamber 11b, and the base 1 is further provided with a second fluid channel 1c, and the second fluid channel 1c communicates with the second pressure regulating chamber 11b.

[0038] In this embodiment, a seal 2 is designed at the notch of the driving groove 1a. The contact surfaces of the seal 2 and the driving piston 11 jointly enclose a closed space, that is, the second pressure regulating chamber 11b. The function of this second pressure regulating chamber 11b is to provide an independent control area for regulating and controlling the pressures acting on different sides of the driving piston 11. The seal 2 can be made of wear-resistant materials such as stainless steel or aluminum alloy, which have good sealing performance to ensure a tight seal with the driving piston 11 and prevent fluid leakage. A second fluid channel 1c is formed inside the base 1, and the second fluid channel 1c is responsible for controlling the input or output of fluid to the second pressure regulating chamber 11b. The user can adjust the pressure in the second pressure regulating chamber 11b by controlling the fluid pressure in the second fluid channel 1c. This pressure adjustment can affect the movement of the driving piston 11. Increasing the pressure in the second pressure regulating chamber 11b can push the piston in one direction, while reducing the pressure can cause the piston to retract. The connection design of the second fluid channel 1c and the second pressure regulating chamber 11b makes the structure of the entire driving assembly 100 more compact, improving the overall integration and reliability.

[0039] In an embodiment of the present utility model, as Figure 6 shown, one end of the base 1 close to the notch of the drive groove 1a is provided with a second diversion groove 1f, and the second diversion groove 1f is communicated with the second fluid passage 1c.

[0040] In one embodiment, the base 1 is provided with a second diversion groove 1f at one end close to the notch of the drive groove 1a, and the second diversion groove 1f is communicated with the second fluid passage 1c. This layout allows for effective distribution and regulation of the fluid near the drive groove 1a to achieve more precise control of the drive piston 11. The second diversion groove 1f can be formed on the integrally formed structure of the base 1 through precision machining techniques. These machining techniques may include, but are not limited to, CNC milling, electrical discharge machining, or laser cutting, etc., to ensure the accuracy and surface finish of the diversion groove. The connection design between the second diversion groove 1f and the second fluid passage 1c allows the control fluid to flow into the second diversion groove 1f through the second fluid passage 1c or flow out of the second fluid passage 1c from the second diversion groove 1f. This connection method can achieve the required movement of the drive piston 11 by controlling the fluid direction. In the design of the second diversion groove 1f, the fluid flow rate, pressure loss, and fluid dynamics effects are also considered to ensure that the fluid can flow smoothly into and fill the second diversion groove 1f, thereby generating a uniform pressure distribution on the drive piston 11 and achieving precise force control. The second diversion groove 1f not only optimizes the fluid flow path but also improves the response speed and control accuracy of the entire drive assembly 100 through its connection with the second fluid passage 1c, ensuring the stable movement and high-efficiency drive effect of the drive piston 11.

[0041] In an embodiment of the present utility model, as Figure 2 shown, the drive assembly 100 further includes a channel joint 12 and a main pipeline. The channel joint 12 is detachably connected to the base 1, and the channel joint 12 is used to communicate the first fluid passage 1b and the second fluid passage 1c with the main pipeline respectively.

[0042] In one embodiment, the channel joint 12 is a key connecting component, which is used to detachably connect the first fluid channel 1b and the second fluid channel 1c to the main pipeline respectively. This design provides convenience for installation, maintenance and replacement, and also ensures the sealing performance and connection reliability between the fluid channel and the main pipeline. The channel joint 12 can adopt a standardized interface design, such as threaded connection, quick connector or other mechanical locking mechanisms, to achieve quick disassembly and connection with the base 1. The structure of the channel joint 12 may include one or more fluid interfaces, which are aligned and connected with the corresponding fluid channels on the base 1. The design of the channel joint 12 also includes sealing elements, such as O-rings or special gaskets, to prevent fluid leakage and ensure the sealing integrity of the system. The material selection of the channel joint 12 may involve considerations of corrosion resistance and pressure resistance to adapt to different fluid media and working pressures. Through this design, the drive assembly 100 not only provides a flexible and reliable fluid connection solution, but also realizes the exchange of internal fluid with the outside through the detachable channel joint 12, improving the practicability and maintainability of the entire drive assembly 100.

[0043] In an embodiment of the present utility model, as Figure 4 shown, a bellows 3 is provided between the seal 2 and the drive piston 11, and both ends of the bellows 3 are respectively connected to the seal 2 and the drive piston 11.

[0044] In an embodiment of the present utility model, in order to improve the sealing performance and allow the drive piston 11 to reciprocate in the drive groove 1a, a bellows 3 is provided between the seal 2 and the drive piston 11. As a flexible element, the bellows 3 can provide the necessary freedom of movement while maintaining the seal. The bellows 3 is made of materials with good elasticity and durability, such as stainless steel, polytetrafluoroethylene (PTFE) or other engineering plastics. The design of the bellows 3 usually includes a series of alternating ridges and grooves, forming a corrugated structure, which endows the bellows 3 with excellent bending and telescopic capabilities. One end of the bellows 3 is connected to the seal 2, which can be achieved by mechanical clamping, welding, bonding or integral molding, etc., to ensure a firm and reliable seal between the bellows 3 and the seal 2. The other end of the bellows 3 is connected to the drive piston 11, and the connection method can be similar. The key is to ensure the stability and sealing of the connection, allowing the piston to move smoothly inside the bellows 3. During the operation of the drive assembly 100, the bellows 3 will expand and contract as the drive piston 11 moves, while maintaining a tight fit with the seal 2, preventing fluid from leaking from the high-pressure side to the low-pressure side, or preventing contaminants from entering the drive assembly 100. The use of the bellows 3 significantly improves the sealing performance of the system, reduces the maintenance requirements, and extends the service life of the drive assembly 100.

[0045] In an embodiment of the present utility model, as Figure 4 shown, an elastic member is provided between the seal member 2 and the driving piston 11 close to the seal member 2, and both ends of the elastic member are elastically abutted against the seal member 2 and the driving piston 11 respectively.

[0046] In one embodiment, in order to ensure a certain pressure is maintained between the seal member 2 and the driving piston 11, and at the same time allow the piston to perform precise reciprocating motion within the driving groove 1a, an elastic member is provided between the seal member 2 and the driving piston 11. The elastic member 4, as a force buffering element, mainly functions to provide a stable thrust or pulling force during the piston movement process, ensure the sealing effect of the seal member 2, and absorb the impacts and vibrations that may occur during the movement process. The elastic member can be in the form of a compression spring or a torsion spring, etc., and the specific shape and size are determined according to the required elastic force, movement range, and installation space. When the driving assembly 100 is working, the elastic deformation of the elastic member can provide a stable restoring force to the piston, helping the piston to quickly return to the initial position.

[0047] In an embodiment of the present utility model, as Figure 4 shown, a guiding boss 13 is provided at the bottom of the driving groove 1a, and a guiding groove 11c is provided at one end of the driving piston 11 close to the bottom of the driving groove 1a, and the guiding boss 13 is slidably inserted into the guiding groove 11c.

[0048] In one embodiment, in order to ensure the driving piston 11 performs smooth and linear reciprocating motion within the driving groove 1a, a guiding boss 13 is designed at the bottom of the driving groove 1a. The guiding boss 13 is integrally formed with the bottom of the driving groove 1a and precisely mates with the guiding groove 11c on the driving piston 11 to provide a stable guiding function. The guiding boss 13 can be formed by integrally molding with the driving groove 1a or by post-processing. The shape of the guiding boss 13 can be cylindrical, square, or other shapes suitable for the guiding groove 11c. The size and position of the guiding boss 13 are designed according to the size and movement trajectory of the driving piston 11 to ensure that it can provide effective guidance during the piston movement process. The driving piston 11 is provided with a guiding groove 11c at one end close to the bottom of the driving groove 1a, and the shape and size of this groove match those of the guiding boss 13 to ensure that the guiding boss 13 can be smoothly inserted and slide within the guiding groove 11c. The guiding groove 11c can be a part of the piston or formed by post-processing such as CNC milling or casting. When the driving assembly 100 is working, the guiding boss 13 slides within the guiding groove 11c, and the cooperation between the guiding boss 13 and the groove ensures the linear movement of the piston, reduces the lateral force and friction, thereby improving the efficiency and service life of the driving assembly 100. In addition, this guiding structure also helps to reduce the vibration and noise during the piston movement process and improves the stability of the system.

[0049] In an embodiment of the present utility model, asFigure 4 As shown, it includes at least two driving pistons 11 and a plurality of driving grooves 1a. Each driving groove 1a is provided with two driving pistons 11 slidably connected to the driving groove 1a, and each driving groove 1a is provided with a partition 14, and the partition 14 is located between the two driving pistons 11.

[0050] In this embodiment, the driving assembly 100 includes at least two driving pistons 11 and a corresponding plurality of driving grooves 1a. Each driving groove 1a is designed to accommodate two slidably connected driving pistons 11, and the two pistons are arranged oppositely within the same driving groove 1a to achieve bidirectional or balanced driving force output. A partition 14 is provided within each driving groove 1a, and the partition 14 is precisely positioned between the two driving pistons 11. The function of the partition 14 is to divide the internal space of the driving groove 1a into two independent chambers, and each chamber cooperates with one driving piston 11. In this way, each piston can independently respond to the change of fluid pressure to achieve precise control. A connection hole is provided on the partition 14 to connect the two driving grooves 1a, and the reciprocating movement of the driving pistons is achieved by controlling the air pressure between the two driving pistons.

[0051] The present utility model also proposes a vacuum valve, which includes: a housing, a lifting assembly, and a driving assembly 100. A vacuum chamber is formed within the housing, and the vacuum chamber is provided with two valve openings; the lifting assembly is located on one side of the housing, and the lifting assembly has an output end extending into the vacuum chamber; the driving assembly 100 is located within the vacuum chamber, the driving assembly 100 is detachably connected to the output end of the lifting assembly, and baffles are respectively provided at two movable ends of the driving assembly 100; wherein, the lifting assembly is used to drive the driving assembly 100 between the two valve openings, and the driving assembly 100 is used to push the two baffles to block the valve openings.

[0052] The present utility model also proposes a vacuum valve, which includes a housing, a lifting assembly, and a driving assembly 100. The specific structure of the driving assembly 100 refers to the above embodiment. Since this vacuum valve adopts all the technical solutions of the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, and will not be elaborated herein one by one. Among them, a vacuum chamber is formed within the housing, and the vacuum chamber is provided with two valve openings; the lifting assembly is located on one side of the housing, and the lifting assembly has an output end extending into the vacuum chamber; the driving assembly 100 is located within the vacuum chamber, the driving assembly 100 is detachably connected to the output end of the lifting assembly, and baffles are respectively provided at two movable ends of the driving assembly 100; wherein, the lifting assembly is used to drive the driving assembly 100 between the two valve openings, and the driving assembly 100 is used to push the two baffles to block the valve openings.

[0053] In an embodiment of the present utility model, the driving assembly 100 provides efficient and reliable driving functions. The outer shell is the main structure of the vacuum valve, and a vacuum chamber is formed inside it. This vacuum chamber is the key space for realizing the valve function and can form and maintain the required vacuum environment therein. The vacuum chamber is designed with two valve openings, which are the channels for parts to enter and exit. Their opening and closing are jointly controlled by the lifting assembly and the driving assembly 100. The lifting assembly is located on one side of the outer shell and has an output end extending into the vacuum chamber. This output end is detachably connected to the driving assembly 100, allowing the lifting assembly to be operated outside the outer shell while its effect is reflected in the vacuum chamber. This design enables the lifting assembly to be conveniently maintained and replaced while maintaining the airtightness of the vacuum chamber. The driving assembly 100 is located inside the vacuum chamber and is connected to the output end of the lifting assembly. Two movable ends of the driving assembly 100 are respectively provided with baffles, which are the key components for realizing the opening and closing of the valve. By being connected to the output end of the lifting assembly, the driving assembly 100 can move to the two valve openings, and the driving assembly 100 uses the baffles at its movable ends to thus realize the occlusion or opening of the valve openings. According to the instructions of the control system, the lifting assembly drives the driving assembly 100 to move inside the vacuum chamber, so that the baffles can accurately occlude or leave the corresponding valve openings. When the driving assembly 100 drives the baffle to occlude the valve opening, the valve closes, and when the baffle leaves the valve opening, the valve opens to allow parts to be transferred. Through this design, the vacuum valve realizes precise isolation, ensuring the reliability and durability of valve operation.

[0054] The above description is only an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformation made under the technical concept of the present utility model by using the content of the specification and drawings of the present utility model, or any direct / indirect application in other related technical fields is included in the patent protection scope of the present utility model.

Claims

1. A drive assembly, characterized in that: include: A base (1), the base (1) being an integrally formed structure, the base (1) being provided with a driving groove (1a) and a first fluid channel (1b); and A driving piston (11), the driving piston (11) being slidably disposed in the driving groove (1a) and covering the notch of the driving groove (1a), the driving piston (11) and the bottom wall of the driving groove (1a) enclosing to form a first pressure regulating chamber (11a); Wherein, the first fluid channel (1b) is connected to the first pressure regulating chamber (11a).

2. The drive assembly according to claim 1, characterized in that The bottom wall of the driving groove (1a) is provided with a first guide groove (1d), and the first guide groove (1d) is connected to the first fluid channel (1b).

3. The drive assembly according to claim 1, characterized in that: The groove opening of the driving groove (1a) is provided with a sealing member (2), and the sealing member (2) and the driving piston (11) are combined to form a second pressure regulating chamber (11b). The base (1) is also provided with a second fluid channel (1c), and the second fluid channel (1c) is connected to the second pressure regulating chamber (11b).

4. The drive assembly according to claim 3, characterized in that: A second guide groove (1f) is provided at one end of the base (1) close to the groove opening of the driving groove (1a), and the second guide groove (1f) is connected to the second fluid channel (1c).

5. The drive assembly according to claim 3, characterized in that: The drive assembly further comprises a channel joint (12) and a main pipeline, wherein the channel joint (12) is detachably connected to the base (1), and the channel joint (12) is used to respectively connect the first fluid channel (1b) and the second fluid channel (1c) to the main pipeline.

6. The drive assembly according to claim 3, characterized in that: A bellows (3) is provided between the sealing member (2) and the driving piston (11), and two ends of the bellows (3) are respectively connected to the sealing member (2) and the driving piston (11).

7. The drive assembly according to claim 3, characterized in that: An elastic member (4) is provided between the sealing member (2) and the driving piston (11) close to the sealing member (2), and two ends of the elastic member (4) are elastically in contact with the sealing member (2) and the driving piston (11) respectively.

8. The drive assembly according to claim 1, characterized in that: The bottom of the driving groove (1a) is provided with a guide boss (13), one end of the driving piston (11) close to the bottom of the driving groove (1a) is provided with a guide groove (11c), and the guide boss (13) is slidably inserted in the guide groove (11c).

9. The drive assembly according to any one of claims 1 to 8, characterized in that: The invention comprises at least two driving pistons (11) and a plurality of driving grooves (1a), each of the driving grooves (1a) being provided with two driving pistons (11) slidably connected to the driving grooves (1a), each of the driving grooves (1a) being provided with a partition plate (14), and the partition plate (14) being located between the two driving pistons (11).

10. A vacuum gate valve, characterized in that: include: A housing, wherein a vacuum chamber is formed in the housing, and the vacuum chamber is provided with two valve openings; A lifting assembly, the lifting assembly is located at one side of the housing, and the lifting assembly has an output end extending into the vacuum chamber; as well as The driving assembly according to any one of claims 1 to 9, wherein the driving assembly is located in the vacuum chamber, the driving assembly is detachably connected to the output end of the lifting assembly, and baffles are respectively provided at two movable ends of the driving assembly; Wherein, the lifting assembly is used to drive the driving assembly to between the two valve openings, and the driving assembly is used to push the two baffles to cover the valve openings.

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