Rotating shaft base

Abstract

The utility model belongs to the field of semiconductor manufacturing, and particularly relates to a rotating shaft base which comprises a base body and a rotating shaft body. A mounting groove is formed in the middle of the top of the base body, the rotating shaft body is vertically mounted in the mounting groove, mounting holes are uniformly formed in the side wall of the base body, the mounting holes are communicated with the mounting groove, fixing bolts are mounted in the mounting holes in a threaded mode, and the ends of the fixing bolts abut against the side wall of the rotating shaft body; the fixing bolts are installed in the installation holes evenly formed in the side wall of the base body in a threaded mode, so that the ends of the fixing bolts abut against the side wall of the rotating shaft body so as to limit the rotating shaft body, installation of the rotating shaft body is firmer, and the rotating shaft is stable and does not shake during rotation.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and specifically relates to a rotating shaft base. Background Art

[0002] The rotating shaft and the rotating frame of the epitaxial machine are important components in the semiconductor manufacturing process, mainly used for thin film deposition and wafer processing.

[0003] After the rotating shaft and the rotating frame of the epitaxial machine are installed, due to the long length of the rotating shaft, there will be a problem of left - right shaking during rotation, and each time it is necessary to reinstall and fix or replace the rotating shaft.

[0004] Therefore, in view of the above problems, a rotating shaft base is proposed. Content of the Utility Model

[0005] In order to make up for the deficiencies of the prior art and solve the problem that after the rotating shaft and the rotating frame of the epitaxial machine are installed, due to the long length of the rotating shaft, there will be a problem of left - right shaking during rotation, and each time it is necessary to reinstall and fix or replace the rotating shaft, the utility model proposes a rotating shaft base.

[0006] The technical solution adopted by the utility model to solve its technical problems is: a rotating shaft base described in the utility model includes a base body and a rotating shaft body; a mounting groove is opened in the middle of the top of the base body, the rotating shaft body is vertically installed in the mounting groove, mounting holes are uniformly opened on the side wall of the base body, the mounting holes communicate with the mounting groove, fixing bolts are threadedly installed in the mounting holes, and the end of the fixing bolt abuts against the side wall of the rotating shaft body.

[0007] Preferably, a mounting block is installed in the mounting groove, the mounting block is adapted to the mounting groove, a groove is opened in the middle of the mounting block, a plug rod is fixedly connected in the middle of the groove, and a jack is opened in the middle of the bottom end of the rotating shaft body, and the plug rod is movably inserted into the jack.

[0008] Preferably, there are three groups of the mounting holes and the fixing bolts, and each group is distributed at an angle of 120 degrees with respect to each other on the side of the rotating shaft body.

[0009] Preferably, a limiting block is fixedly installed on the outer side wall of the mounting block, a limiting groove is opened on the inner wall of the mounting groove, and the limiting block is slidably arranged in the limiting groove.

[0010] Preferably, through holes are opened on the side wall of the mounting block, the through holes correspond to the mounting holes one by one, and the end of the fixing bolt passes through the through hole and abuts against the rotating shaft body.

[0011] Preferably, there are multiple groups of fixing holes on the base body.

[0012] Preferably, an internal thread is provided on the inner wall of the jack, and an external thread is provided on the outside of the plug rod. The plug rod is spirally installed inside the jack.

[0013] The beneficial effects of the present utility model are as follows:

[0014] 1. By evenly arranging mounting holes on the side wall of the base body of the present utility model and threadedly installing fixing bolts in the mounting holes, and screwing in the fixing bolts, the end of the fixing bolt abuts against the side wall of the rotating shaft body, so as to limit the rotating shaft body and make it stable and non-shaking during rotation.

[0015] 2. By arranging a mounting block in the mounting groove, and through the cooperation of the plug rod and the jack, the rotating shaft body is stably installed in the middle of the mounting block and kept in a vertical state, further limiting the rotating shaft body. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0017] Figure 1 It is a three-dimensional structural schematic diagram of Embodiment 1;

[0018] Figure 2 It is a partial cross-sectional view of Embodiment 1;

[0019] Figure 3 For A in Embodiment 1 Figure 2 It is an enlarged schematic diagram of the structure at A;

[0020] Figure 4 It is a structural schematic diagram of the mounting block and the fixing bolt of Embodiment 1;

[0021] Figure 5 It is a structural schematic diagram of the mounting block of Embodiment 1.

[0022] In the figure: 1, base body; 11, mounting groove; 12, limiting groove; 2, rotating shaft body; 21, jack; 3, mounting block; 31, limiting block; 32, through hole; 33, groove; 34, plug rod; 4, mounting hole; 5, fixing hole; 6, fixing bolt. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0024] Embodiment 1

[0025] Please refer to Figures 1-5 As shown, a rotating shaft base includes a base body 1 and a rotating shaft body 2; a mounting groove 11 is provided in the middle of the top of the base body 1, the rotating shaft body 2 is vertically installed in the mounting groove 11, mounting holes 4 are evenly provided on the side wall of the base body 1, the mounting holes 4 communicate with the mounting groove 11, a fixing bolt 6 is threadedly installed in the mounting holes 4, and the end of the fixing bolt 6 abuts against the side wall of the rotating shaft body 2; during operation, the rotating shaft body 2 is vertically installed in the mounting groove 11, and then the fixing bolt 6 is threadedly installed in the mounting holes 4, and the fixing bolt 6 is screwed in so that the end of the fixing bolt 6 abuts against the side wall of the rotating shaft body 2, so as to limit the rotating shaft body 2 and make it stable and non-shaking when rotating.

[0026] An installation block 3 is installed in the installation groove 11, the installation block 3 is adapted to the installation groove 11, a groove 33 is provided in the middle of the installation block 3, a plug rod 34 is fixedly connected in the middle of the groove 33, a jack 21 is provided in the middle of the bottom end of the rotating shaft body 2, and the plug rod 34 is movably inserted into the jack 21; during operation, during installation, first snap the installation block 3 into the installation groove 11, and at the same time make the plug rod 34 inserted into the jack 21, so that the rotating shaft body 2 is stably installed in the middle of the installation block 3 and keeps a vertical state.

[0027] There are three groups of the mounting holes 4 and the fixing bolts 6, and each group is distributed at an angle of 120 degrees with each other on the side of the rotating shaft body 2; during operation, the end of the fixing bolt 6 evenly abuts against the side of the rotating shaft body 2, and the rotating shaft body 2 is evenly stressed and not easy to shake during rotation.

[0028] A limiting block 31 is fixedly installed on the outer side wall of the installation block 3, a limiting groove 12 is provided on the inner wall of the installation groove 11, and the limiting block 31 is slidably arranged in the limiting groove 12; during operation, align the limiting block 31 with the limiting groove 12, and then insert the installation block 3 into the installation groove 11. Through the cooperation of the limiting block 31 and the limiting groove 12, the limiting block 31 can be limited so that the installation block 3 is stably installed in the installation groove 11 and will not rotate.

[0029] A through hole 32 is formed in the side wall of the mounting block 3, and the through holes 32 correspond to the mounting holes 4 one by one. The end of the fixing bolt 6 passes through the through hole 32 and abuts against the rotating shaft body 2. During operation, the end of the fixing bolt 6 passes through the through hole 32 and then abuts against the side wall of the rotating shaft body 2. The mounting block 3 is limited by the fixing bolt 6, so that the mounting block 3 is stably mounted inside the mounting groove 11, and then the rotating shaft body 2 is stably mounted on the base body 1. In addition, when the fixing bolt 6 is rotated in the reverse direction, the end of the fixing bolt 6 is withdrawn from the through hole 32. At this time, the restriction of the fixing bolt 6 on the mounting block 3 is removed, so that the mounting block 3 can be taken out of the mounting groove 11, so as to realize the disassembly, replacement of the mounting block 3 and the rotating shaft body 2.

[0030] There are multiple fixing holes 5 on the base body 1. During operation, the base body 1 can be fixedly mounted on the equipment through bolts.

[0031] Embodiment 2

[0032] Please refer to Figure 2 As shown, compared with Embodiment 1, as another implementation manner of the present invention, an internal thread is provided on the inner wall of the jack 21, and an external thread is provided on the outside of the plug rod 34. The plug rod 34 is spirally installed inside the jack 21. During operation, by rotating the rotating shaft body 2, the plug rod 34 is spirally installed into the jack 21, and then the rotating shaft body 2 can be stably installed in the middle groove 33 of the mounting block 3, further avoiding the shaking of the rotating shaft body 2 during rotation.

[0033] Working principle: During assembly, first align the limiting block 31 and the limiting groove 12, and then insert the mounting block 3 into the mounting groove 11. At the same time, the plug rod 34 is inserted into the jack 21, so that the rotating shaft body 2 is stably installed in the middle of the mounting block 3 and keeps a vertical state. Then, the fixing bolt 6 is threadedly installed in the mounting hole 4, and the fixing bolt 6 is screwed in so that the end of the fixing bolt 6 abuts against the side wall of the rotating shaft body 2, so as to limit the rotating shaft body 2 and make it stable and non-shaking during rotation. In addition, by rotating the rotating shaft body 2, the plug rod 34 is spirally installed into the jack 21, and then the rotating shaft body 2 can be stably installed in the middle groove 33 of the mounting block 3, further avoiding the shaking of the rotating shaft body 2 during rotation.

[0034] In the description of this specification, the descriptions referring to terms such as "one embodiment", "example", "specific example", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0035] The above shows and describes the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments, and what is described in the above embodiments and the specification only illustrates the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed.

Claims

1. A rotating shaft base, characterized in that: The invention comprises a base body (1) and a rotating shaft body (2); a mounting groove (11) is provided in the middle of the top of the base body (1); the rotating shaft body (2) is vertically installed in the mounting groove (11); mounting holes (4) are evenly provided on the side wall of the base body (1); the mounting holes (4) are connected to the mounting groove (11); fixing bolts (6) are threadedly installed in the mounting holes (4); and the ends of the fixing bolts (6) abut against the side wall of the rotating shaft body (2).

2. The rotating shaft base according to claim 1, characterized in that: A mounting block (3) is installed in the mounting groove (11), the mounting block (3) is adapted to the mounting groove (11), a groove (33) is provided in the middle of the mounting block (3), an insertion rod (34) is fixedly connected in the middle of the groove (33), a plug hole (21) is provided in the middle of the bottom end of the rotating shaft body (2), and the plug rod (34) is movably inserted in the plug hole (21).

3. The rotating shaft base according to claim 2, characterized in that: The mounting holes (4) and fixing bolts (6) are each provided in three groups, and each group is distributed on the side of the rotating shaft body (2) at an angle of 120 degrees to each other.

4. The rotating shaft base according to claim 3, characterized in that: A limiting block (31) is fixedly mounted on the outer wall of the mounting block (3), a limiting groove (12) is provided on the inner wall of the mounting groove (11), and the limiting block (31) is slidably disposed in the limiting groove (12).

5. The rotating shaft base according to claim 4, characterized in that: A through hole (32) is provided on the side wall of the mounting block (3), the through hole (32) corresponds to the mounting hole (4) one by one, and the end of the fixing bolt (6) passes through the through hole (32) and abuts against the rotating shaft body (2).

6. The rotating shaft base according to claim 5, characterized in that: The base body (1) has multiple groups of fixing holes (5).

7. The rotating shaft base according to claim 6, characterized in that: The inner wall of the insertion hole (21) is provided with an internal thread, the outer surface of the insertion rod (34) is provided with an external thread, and the insertion rod (34) is screw-mounted inside the insertion hole (21).

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