Optical inspection system capable of accurately matching optimal conversion efficiency of laser crystal

Abstract

The utility model relates to the technical field of semiconductors, and discloses an optical inspection system capable of accurately matching the optimal conversion efficiency of a laser crystal, which comprises a test light source, a beam-expanding collimation module, a plane mirror, a to-be-tested crystal module, an optical observation screen, a temperature regulation and control module and a stress control module, the test light source is used for providing a light source for testing the to-be-tested laser crystal; the beam expanding and collimating module is used for collimating the light source; the plane mirror is used for simulating a laser excitation resonant cavity; the optical observation screen is used for feeding back the real-time temperature and the real-time stress of the to-be-tested laser crystal and confirming the temperature and stress states of the to-be-tested laser crystal when the conversion efficiency is optimal; the temperature regulation and control module is used for regulating and controlling the temperature of the laser crystal to be measured; the stress control module is used for controlling the stress actually borne by the laser crystal to be measured. According to the utility model, the laser crystal, the stress control module and the temperature regulation and control module are integrated, the transfer is convenient, the laser can be directly applied, and the actual debugging process of the laser is greatly simplified.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and more specifically, to an optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal. Background Art

[0002] Laser technology is an important part of modern science and industry and has a wide range of applications. A laser crystal is a crystal material synthesized or grown by a specific method with the ability to operate lasers. It is usually used as the gain medium of a solid-state laser and is the core component of a laser. The ability of a laser crystal to output laser is the most important parameter of a laser.

[0003] Laser crystals have excellent optical, electrical, and thermal properties, enabling high-power, high-efficiency, and high-reliability laser devices. With the widespread application of laser technology, the requirements for the mechanical properties, thermal properties, etc. of laser crystals are getting higher and higher. In practical applications, environmental temperature, installation stress, etc. will have a huge impact on the application of laser crystals.

[0004] At the same time, when high-power pumping is carried out, even for laser crystals with excellent quality at the factory, due to the influence of environmental temperature, installation stress, etc., there are serious thermal effects. The beam parameters will deteriorate as the power increases, which limits the performance improvement of the laser and even restricts the application of the laser.

[0005] Therefore, a system that can accurately confirm the optimal temperature and optimal stress of a laser crystal is needed to accurately match the optimal conversion efficiency of the laser crystal and improve the beam quality and power level of the laser. Summary of the Utility Model

[0006] In view of the problems in the related art, the present utility model proposes an optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal to overcome the above-mentioned technical problems existing in the existing related technologies.

[0007] For this purpose, the specific technical solution adopted by the present utility model is as follows:

[0008] An optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal includes a test light source, a beam expanding and collimating module, a plane mirror, a crystal module to be tested, an optical observation screen, a temperature control module, and a stress control module; the beam expanding and collimating module is arranged on one side of the test light source, the crystal module to be tested is arranged on the side of the beam expanding and collimating module away from the test light source, the optical observation screen is arranged on the side of the crystal module to be tested away from the beam expanding and collimating module, and plane mirrors are arranged between the crystal module to be tested and the beam expanding and collimating module and the optical observation screen. The two sides of the crystal module to be tested perpendicular to the plane mirror are respectively connected to the temperature control module and the stress control module;

[0009] Among them, the test light source is used to provide a light source for the test of the laser crystal to be tested;

[0010] A beam expanding and collimating module for collimating a light source and adjusting the optical path to be coaxial and at the same height;

[0011] A plane mirror for simulating the resonant cavity of a laser;

[0012] An optical observation screen for feeding back the real-time temperature and real-time stress of the laser crystal to be tested, and confirming the temperature and stress states at the optimal conversion efficiency of the laser crystal to be tested;

[0013] A temperature control module for controlling the temperature of the laser crystal to be tested;

[0014] A stress control module for controlling the actual stress on the laser crystal to be tested.

[0015] Preferably, the light source emitted by the test light source is linearly polarized light.

[0016] Preferably, the plane mirror is composed of a first plane mirror and a second plane mirror, the first plane mirror is located between the beam expanding and collimating module and the crystal module to be tested, and the second plane mirror is located between the crystal module to be tested and the optical observation screen.

[0017] Preferably, the crystal module to be tested includes a laser crystal to be tested, a crystal fixing member, a temperature sensor module, an overall fixing member and a crystal placement platform; wherein, an overall fixing member is arranged on the top of the crystal placement platform, a crystal fixing member is arranged inside the overall fixing member, and a temperature sensor module is arranged between the bottom of the crystal fixing member and the inside of the overall fixing member, and a laser crystal to be tested is arranged inside the crystal fixing member in cooperation with it. Limit blocks are arranged on both sides of the bottom of the overall fixing member, and the overall fixing member is fixed on the top of the crystal placement platform through the limit blocks. Both the crystal fixing member and the overall fixing member are L-shaped structures.

[0018] Preferably, when the temperature control module controls the temperature of the laser crystal to be tested, according to the temperature feedback data of the optical observation screen, the computer precisely controls the temperature of the laser crystal to be tested, and ensures that the temperature of the laser crystal to be tested is the optimal temperature at the optimal conversion efficiency.

[0019] Preferably, when the stress control module controls the actual stress on the laser crystal to be tested, according to the stress feedback data of the optical observation screen, the computer precisely controls the stress on the laser crystal to be tested, and ensures that the stress on the laser crystal to be tested is the optimal stress at the optimal conversion efficiency.

[0020] The beneficial effects of the present utility model are:

[0021] 1) The utility model integrates a laser crystal, a stress control module, and a temperature regulation module into a whole, which is convenient to transfer and can be directly applied to a laser, greatly simplifying the actual debugging process of the laser.

[0022] 2) The crystal module to be measured of the utility model is a whole. Under a high-precision optical inspection system, the overall optical-mechanical-electrical joint debugging is convenient and simple, with higher stability and stronger environmental adaptability.

[0023] 3) The utility model conducts an overall test on the crystal module to be measured. After the test is completed, the accurate crystal state can be finally confirmed and maintained unchanged, greatly improving the long-term reliability of the excellent beam quality and high power state of the laser.

[0024] 4) The temperature regulation module and the stress control module of the utility model can perform real-time refined control by using a computer according to the phenomena on the optical observation screen, with good real-time performance and high precision, ensuring the accurate matching of the optimal conversion efficiency of the laser crystal.

[0025] 4) The utility model uses the light screen to intuitively and real-time feedback the state of the laser crystal to be measured, greatly reducing the inspection error of the laser crystal. Description of the Drawings

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 is a structural block diagram of an optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to an embodiment of the present utility model;

[0028] Figure 2 is a structural schematic diagram of a crystal module to be measured in an optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to an embodiment of the present utility model.

[0029] In the figure:

[0030] 1. Test light source; 2. Beam expansion and collimation module; 3. Plane mirror; 4. Crystal module to be measured; 41. Laser crystal to be measured; 42. Crystal fixing member; 43. Temperature sensor module; 44. Overall fixing member; 45. Crystal placement platform; 46. Limit block; 5. Optical observation screen; 6. Temperature regulation module; 7. Stress control module. Detailed Embodiments

[0031] To further illustrate each embodiment, the present utility model provides attached drawings, which are a part of the disclosure of the present utility model. These drawings are mainly used to illustrate the embodiments and can be combined with the relevant descriptions in the specification to explain the operating principle of the embodiments. With reference to these contents, those of ordinary skill in the art should be able to understand other possible implementation manners and the advantages of the present utility model. The components in the drawings are not drawn to scale, and similar component symbols are usually used to represent similar components.

[0032] According to an embodiment of the present utility model, an optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal is provided. A high-precision sensor is introduced into the temperature control module, and precise temperature detection and temperature control are carried out using its own algorithm. The system response and accuracy are improved through an adaptive algorithm, and the system matching is enhanced. The stress control module uses a high-precision stress sensor and detection technology to achieve precise stress monitoring and measurement. At the same time, a precise feedback algorithm is used to feedback the real-time stress and make a matching response thereto, realizing real-time warning and protection to ensure that the crystal is at the most suitable stress level. Meanwhile, the combination of multiple systems such as the inspection module, temperature control, and stress control reduces the complexity and cost of the crystal debugging system and can overall improve the practical application performance and efficiency of the crystal.

[0033] The present utility model will be further described below in conjunction with the attached drawings and specific implementation manners. As Figure 1 - Figure 2 shown, an optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to an embodiment of the present utility model includes a test light source 1, a beam expanding and collimating module 2, a plane mirror 3, a crystal module to be tested 4, an optical observation screen 5, a temperature control module 6, and a stress control module 7;

[0034] A beam expanding and collimating module 2 is provided on one side of the test light source 1. A crystal module to be tested 4 is provided on the side of the beam expanding and collimating module 2 away from the test light source 1. An optical observation screen 5 is provided on the side of the crystal module to be tested 4 away from the beam expanding and collimating module 2. Plane mirrors 3 are provided between the crystal module to be tested 4 and the beam expanding and collimating module 2 and the optical observation screen 5 respectively. The two sides of the crystal module to be tested 4 perpendicular to the plane mirror 3 are respectively connected to the temperature control module 6 and the stress control module 7;

[0035] Among them, the test light source 1 is used to provide a light source for the test of the laser crystal to be tested;

[0036] Specifically, the light source emitted by the test light source 1 is linearly polarized light.

[0037] The beam expanding and collimating module 2 is used to collimate the light emitted by the test light source and at the same time adjust the optical path to be coaxial and at the same height;

[0038] The plane mirror 3 is used to simulate the laser resonator;

[0039] Specifically, the plane mirror 3 is composed of a first plane mirror and a second plane mirror. The first plane mirror is located between the beam expanding and collimating module 2 and the crystal module 4 to be measured, and the second plane mirror is located between the crystal module 4 to be measured and the optical observation screen 5.

[0040] The crystal module 4 to be measured includes a laser crystal 41 to be measured, a crystal fixing member 42, a temperature sensor module 43, an overall fixing member 44, and a crystal placement platform 45. Both the crystal fixing member 42 and the overall fixing member 44 are L-shaped structures.

[0041] Among them, the overall fixing member 44 is arranged on the top of the crystal placement platform 45. The crystal fixing member 42 is arranged inside the overall fixing member 44. A temperature sensor module 43 is arranged between the bottom of the crystal fixing member 42 and the inner side of the overall fixing member 44 to feed back the real-time temperature of the laser crystal to be measured by the temperature sensor module 43. The laser crystal 41 to be measured that matches it is arranged inside the crystal fixing member 42 (that is, the laser crystal 41 to be measured is fixed by the crystal fixing member 42). Limit blocks 46 are arranged on both sides of the bottom of the overall fixing member 44, and the position of the overall fixing member 44 is snap-fixed to the top of the crystal placement platform 45 through the limit blocks 46. In specific applications, according to the change of the material of the overall fixing member 44, the snap-fixing can also be magnetic attraction fixing.

[0042] The optical observation screen 5 is used to react to the working phenomenon of the laser crystal to be measured in real time, feed back the real-time temperature and real-time stress of the laser crystal to be measured, and finally confirm the temperature and stress states when the optimal conversion efficiency of the laser crystal to be measured is obtained.

[0043] In specific applications, the optical observation screen 5, the temperature control module 6, and the stress control module 7 give real-time feedback. The state with the best phenomenon is the state with the optimal crystal conversion efficiency, eliminating the influence of different people's operations at different times.

[0044] The temperature control module 6 is used to control the temperature of the laser crystal to be measured. Specifically, it includes: according to the temperature feedback data of the optical observation screen, using a computer to accurately control the temperature of the laser crystal to be measured and ensure that the temperature of the laser crystal to be measured is the most suitable temperature at the optimal conversion efficiency.

[0045] In specific applications, the temperature control module introduces a high-precision sensor, uses its own algorithm to combine environmental prediction data and crystal states to perform accurate temperature detection and temperature control, and can control the crystal temperature automatically through an adaptive algorithm in combination with environmental changes, improving the system response and accuracy, enhancing the system matching, and at the same time having a user interface for artificially setting and adjusting specific temperature parameters.

[0046] The stress control module 7 is used to control the stress actually applied to the laser crystal to be measured. Specifically, it includes: according to the stress feedback data of the optical observation screen, using a computer to precisely regulate the stress applied to the laser crystal to be measured, and ensuring that the stress applied to the laser crystal to be measured is the most suitable stress at the optimal conversion efficiency.

[0047] In specific applications, the stress control module uses high-precision stress sensors and detection technologies to achieve precise real-time stress monitoring and measurement. At the same time, it uses a feedback algorithm to feedback the real-time stress, and adjusts the position of the structural components according to the feedback data to perform real-time matching of the stress applied to the crystal, ensuring the most suitable stress magnitude for the crystal. Moreover, the stress can also be adjusted by artificially setting corresponding parameters, or directly manually adjusting the position of the mechanical structural components to perform manual intervention on the crystal stress, and then confirming whether the real-time stress applied to the crystal is appropriate through the feedback system.

[0048] In summary, by means of the above technical solutions of the present invention, the present invention forms an integrated whole of a laser crystal, a stress control module, and a temperature regulation module, which is convenient to transfer and can be directly applied to a laser, greatly simplifying the actual debugging process of the laser; the crystal module to be measured of the present invention is an integrated whole, and under a high-precision optical inspection system, the overall optical-mechanical-electrical joint debugging is convenient and simple, with higher stability and stronger environmental adaptability; the present invention conducts an overall test on the crystal module to be measured, and after the test is completed, the accurate crystal state can be finally confirmed and maintained unchanged, greatly improving the long-term reliability of the excellent beam quality and high-power state of the laser; the temperature regulation module and stress control module of the present invention can perform real-time refined control using a computer according to the phenomena on the optical observation screen, with good real-time performance and high precision, ensuring the accurate matching of the optimal conversion efficiency of the laser crystal; the present invention uses the optical screen to intuitively feedback the state of the laser crystal to be measured in real time, greatly reducing the inspection error of the laser crystal.

[0049] In the present invention, unless otherwise clearly defined and limited, terms such as "installation", "setting", "connection", "fixation", "swivel connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. Unless otherwise clearly defined, for those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. An optical inspection system that accurately matches the optimal conversion efficiency of a laser crystal, characterized in that: It comprises a test light source (1), a beam expansion and collimation module (2), a plane mirror (3), a crystal module to be tested (4), an optical observation screen (5), a temperature control module (6) and a stress control module (7); The beam expansion and collimation module (2) is arranged on one side of the test light source (1), the crystal module (4) to be tested is arranged on the side of the beam expansion and collimation module (2) away from the test light source (1), the optical observation screen (5) is arranged on the side of the crystal module (4) to be tested away from the beam expansion and collimation module (2), and the plane mirror (3) is arranged between the crystal module (4) to be tested, the beam expansion and collimation module (2) and the optical observation screen (5), and the crystal module (4) to be tested is connected to the temperature control module (6) and the stress control module (7) at two sides perpendicular to the plane mirror (3) respectively; Wherein, the test light source (1) is used to provide a light source for testing the laser crystal to be tested; The beam expansion and collimation module (2) is used to collimate the light source and adjust the optical path to be coaxial and of equal height; The plane mirror (3) is used to simulate the laser resonant cavity; The optical observation screen (5) is used to feed back the real-time temperature and stress of the laser crystal to be tested, and confirm the temperature and stress state of the laser crystal to be tested at the optimal conversion efficiency; The temperature control module (6) is used to control the temperature of the laser crystal to be tested; The stress control module (7) is used to control the actual stress exerted on the laser crystal to be tested.

2. An optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to claim 1, characterized in that: The light source emitted by the test light source (1) is linearly polarized light.

3. The optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to claim 1, characterized in that: The plane mirror (3) is composed of a first plane mirror and a second plane mirror, wherein the first plane mirror is located between the beam expansion and collimation module (2) and the crystal module (4) to be measured, and the second plane mirror is located between the crystal module (4) to be measured and the optical observation screen (5).

4. The optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to claim 1, characterized in that: The crystal module to be tested (4) comprises a laser crystal to be tested (41), a crystal fixing part (42), a temperature sensor module (43), an integral fixing part (44) and a crystal placement platform (45); An integral fixing part (44) is arranged on the top of the crystal placement platform (45), a crystal fixing part (42) is arranged on the inner side of the integral fixing part (44), a temperature sensor module (43) is arranged between the bottom of the crystal fixing part (42) and the inner side of the integral fixing part (44), and a laser crystal (41) to be measured that matches the crystal fixing part (42) is arranged on the inner side of the crystal fixing part (42).

5. The optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to claim 4, characterized in that: Limit blocks (46) are provided on both sides of the bottom of the integral fixing member (44), and the integral fixing member (44) is fixed to the top of the crystal placement platform (45) through the limit blocks (46).

6. The optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to claim 4, characterized in that: The crystal fixing member (42) and the integral fixing member (44) are both L-shaped structures.

7. The optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to claim 1, characterized in that: When regulating the temperature of the laser crystal to be measured, the temperature control module (6) uses a computer to accurately regulate the temperature of the laser crystal to be measured according to the temperature feedback data of the optical observation screen, and ensures that the temperature of the laser crystal to be measured is the optimal temperature for optimal conversion efficiency.

8. The optical inspection system for accurately matching the optimal conversion efficiency of a laser crystal according to claim 1, characterized in that: When controlling the actual stress on the laser crystal to be tested, the stress control module (7) uses a computer to accurately adjust the stress on the laser crystal to be tested based on stress feedback data from the optical observation screen, and ensures that the stress on the laser crystal to be tested is the optimal stress at the optimal conversion efficiency.

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