Tool for conveniently observing condition in part hole

By designing a tooling that includes a transparent countertop, a refractive mirror and a lamp source, the problem of inconvenient observation of the situation in the small holes of the semiconductor equipment is solved, and a convenient and safe inspection process is achieved.

CN223050854UActive Publication Date: 2025-07-01JINGJIANG PIONEER SEMICON TECH CO LTD
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Patent Information

Application Number
CN202422259356.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-14
Publication Date
2025-07-01
Estimated Expiration
2034-09-14

AI Technical Summary

Technical Problem

After cleaning the spray tray of the semiconductor device, it is difficult to easily observe the situation in the small hole, resulting in inconvenient inspection, low safety factor, and easy fatigue for operators.

Method used

A tooling is designed, including a transparent countertop, a refractive mirror and a lamp source. The lamp source illuminates the parts through the transparent countertop. The refractive mirror shows the situation in the hole of the part, which is convenient for inspection personnel to observe.

Benefits of technology

It realizes convenient observation of the situation in the hole of the part, convenient inspection, high safety factor, and reduces operator fatigue and safety risks.

✦ Generated by Eureka AI based on patent content.

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    Figure CN223050854U_ABST
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Abstract

The utility model discloses a tool for conveniently observing the condition in a part hole, which comprises a protective cover, a shell arranged on the lower side of the protective cover, a transparent table top arranged on the protective cover and used for placing a part, and a refractor arranged in the protective cover, the protective cover is arranged on the upper side of the transparent table top, and the lamp source is arranged in the shell. According to the tool, the light source irradiates the part, the refractor can display the condition in the hole of the part, inspection personnel can observe the condition conveniently, inspection is convenient and fast, and the safety coefficient is high.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, and in particular to a tooling for realizing convenient observation of the situation in a part hole. Background Art

[0002] Semiconductor equipment requires the use of a spray plate, which has multiple holes with a diameter of 0.4-1.5mm. After cleaning the spray plate, the situation inside the holes needs to be observed. Due to the small hole diameter, it is difficult to observe. In actual production, it needs to be lifted up by manpower for observation, or lifted up to face the light source. The inspector cannot see the situation inside the hole comfortably, quickly and conveniently. The inspection is not convenient, the safety factor is not high, it is easy to bump, and it is easy to make the operator tired. Therefore, a new technical solution is urgently needed to solve at least one of the above technical problems. Summary of the invention

[0003] The utility model aims to provide a tooling for realizing convenient observation of the situation inside a part hole. A light source illuminates the part through a transparent table, and a refractor can display the situation inside the part hole, which is convenient for inspection personnel to observe, and the inspection is convenient and has a high safety factor.

[0004] In order to achieve the above-mentioned technical purpose and meet the above-mentioned technical requirements, the technical solution adopted by the utility model is: a tooling for conveniently observing the situation inside a part hole, characterized in that it includes a protective cover, a shell arranged below the protective cover, a transparent table arranged on the upper side of the shell for placing parts, and a refractor arranged in the protective cover, the protective cover is arranged on the upper side of the transparent table, and a light source is arranged in the shell.

[0005] As a preferred technical solution, the protective cover includes a first side panel and a second side panel symmetrically arranged, an upper panel arranged on the upper sides of the first side panel and the second side panel, a rear panel arranged on the rear sides of the first side panel and the second side panel, and a lower panel arranged on the lower sides of the first side panel and the second side panel, the transparent table top is arranged on the upper side of the lower panel, and the lower panel is provided with an avoidance hole penetrating it vertically.

[0006] As a preferred technical solution, the rear plate is tilted, and the refractor is rotatably disposed on the inner side of the rear plate.

[0007] As a preferred technical solution, a hanging ear is provided on the inner side of the upper plate, a hanging hole is provided through the upper side of the refractor, and a hanging rope is passed through the hanging ear and the hanging hole.

[0008] As a preferred technical solution, a reflector is provided at the bottom of the shell.

[0009] As a preferred technical solution, the angle between the rear plate and the upper plate is 110°-130°.

[0010] As a preferred technical solution, the light source is a ring-shaped LED lamp.

[0011] As a preferred technical solution, a ring-shaped baffle is arranged on the upper side of the LED lamp.

[0012] As a preferred technical solution, the housing is cylindrical.

[0013] As a preferred technical solution, the transparent tabletop is made of transparent quartz glass.

[0014] The beneficial effects of the present utility model are as follows:

[0015] 1) The light source irradiates the parts through the transparent tabletop, and the refracting mirror can display the situation inside the holes of the parts, facilitating the inspection personnel to observe, with convenient inspection and high safety factor;

[0016] 2) The protective cover has a simple structure, protects the transparent tabletop and the parts, and the rear plate is inclined to limit the refracting mirror;

[0017] 3) The refracting mirror can rotate to adjust the angle to observe the situation inside the holes more comprehensively;

[0018] 4) The cooperation of the hanging rope and the hanging ear can limit the refracting mirror to prevent the refracting mirror from falling and colliding with the transparent tabletop or the parts;

[0019] 5) The cylindrical housing is matched with the ring-shaped LED;

[0020] 6) After a reflecting mirror is arranged at the bottom of the housing, the light of the LED lamp is reflected by the reflecting mirror and then irradiates the parts. Description of the Drawings

[0021] Figure 1 is a three-dimensional view of the tooling provided by an embodiment of the present utility model;

[0022] Figure 2 is a cross-sectional view of the tooling provided by an embodiment of the present utility model;

[0023] In Figure 1 - Figure 2 : 1. Protective cover; 101. First side plate; 102. Second side plate; 103. Rear plate; 104. Upper plate; 105. Lower plate; 1051. Avoidance hole; 2. Housing; 3. Transparent tabletop; 4. Refracting mirror; 5. Light source; 6. Reflecting mirror; 7. Sleeve; 8. Rotating shaft; 9. Insert sleeve; 10. Hanging ear; 11. Hanging rope; 12. Baffle. Detailed Embodiment

[0024] The present utility model will be further described below with reference to the drawings.

[0025] In the drawings of the embodiments of the present utility model, the same or similar reference numerals correspond to the same or similar components; in the description of the present utility model, it should be understood that if terms such as "head", "tail", "top", "bottom", "left", "right", "front", "rear", "inner", "outer", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present utility model, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms used to describe the positional relationship in the drawings are only for illustrative purposes and cannot be understood as a limitation of this patent. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0026] Please refer to Figure 1 - Figure 2 , an embodiment of the present utility model provides a tooling for conveniently observing the inside of a part hole, including a protective cover 1, a housing 2 arranged on the lower side of the protective cover 1, a transparent tabletop 3 arranged on the protective cover 1 for placing the part, a refractive mirror 4 arranged in the protective cover 1. The protective cover 1 is arranged on the upper side of the transparent tabletop 3, and a light source 5 arranged in the housing 2. The light source 5 irradiates the part through the transparent tabletop 3, and the refractive mirror 4 can display the situation inside the part hole, facilitating the inspection personnel to observe, with convenient inspection and high safety factor.

[0027] As Figure 1 - Figure 2 shown, the protective cover includes symmetrically arranged first side plates 101 and second side plates 102, an upper plate 104 arranged on the upper sides of the first side plates 101 and the second side plates 102, a rear plate 103 arranged on the rear sides of the first side plates 101 and the second side plates 102, and a lower plate 105 arranged on the lower sides of the first side plates 101 and the second side plates 102. The transparent tabletop 3 is arranged on the upper side of the lower plate 105, and the lower plate 105 is provided with an avoidance hole 1051 vertically penetrating it. The protective cover has a simple structure, protects the transparent tabletop 3 and the part, and the light can pass through the avoidance hole 1051 and the transparent tabletop 3 to irradiate the part.

[0028] As Figure 1 - Figure 2 shown, the rear plate 103 is inclined, and the refractive mirror 4 is rotatably arranged inside the rear plate 103. The inclined arrangement of the rear plate 103 limits the refractive mirror 4. Two bushings 7 are symmetrically arranged at the bottom of the rear plate 103. A rotating shaft 8 is rotatably inserted into the bushings 7. An insertion sleeve 9 is fixedly arranged on the outer peripheral side of the rotating shaft 8. The refractive mirror 4 is inserted into the insertion sleeve 9. The inspection personnel can rotate the refractive mirror 4 to adjust the angle and adjust according to different hole depths to observe the situation inside the hole without lifting the part, with easy and convenient operation, good inspection effect, and the inspection personnel are not easily fatigued.

[0029] As Figure 1 - Figure 2As shown, on the inner side of the upper plate 104, there are hanging ears 10. A hanging hole (not labeled) penetrates through the upper side of the refractive mirror 4. A hanging rope 11 is threaded through the hanging ears 10 and the hanging hole. The cooperation between the hanging rope 11 and the hanging ears 10 can limit the refractive mirror 4 to prevent it from falling and colliding with the transparent tabletop 3 or parts.

[0030] As Figure 1 - Figure 2 shown, a reflecting mirror 6 is provided at the bottom of the housing 2. After the reflecting mirror 6 is provided at the bottom of the housing 2, the light of the LED lamp is reflected by the reflecting mirror 6 and then irradiates the parts.

[0031] As Figure 1 - Figure 2 shown, the included angle between the rear plate 103 and the upper plate 104 is 110° - 130°. The rear plate 103 plays a role in positioning and limiting, determines the maximum opening angle of the refractive mirror 4, which is reasonable within this range and can also prevent excessive rotation of the refractive mirror 4 from affecting the inspection effect.

[0032] As Figure 1 - Figure 2 shown, the light source 5 is a ring-shaped LED lamp. In this way, the light reflected by the reflecting mirror 6 passes through the middle of the LED lamp. The LED lamp is installed on the housing 2 by cooperating with a common mounting plate through bolts, which will not be elaborated here. Further, a ring-shaped baffle 12 is provided on the upper side of the LED lamp. If the light of the LED lamp is too strong, it will instead affect the observation effect. The light using the reflecting mirror 6 can weaken the light and is relatively concentrated, with good observation effect.

[0033] As Figure 1 - Figure 2 shown, the housing 2 is cylindrical. The cylindrical housing 2 has a good cooperation effect with the ring-shaped LED.

[0034] As Figure 1 - Figure 2 shown, the transparent tabletop 3 is made of transparent quartz glass with a thickness of 10 - 15 mm, which can carry parts and has good light transmission effect.

[0035] The above embodiments are merely descriptions made to clearly illustrate the present invention and are not limitations on the implementation manners. For those skilled in the art, based on the above description, other different forms of changes or variations can be made. It is not necessary and impossible to enumerate all the implementation manners here, and the obvious changes or variations derived therefrom still fall within the protection scope of the present invention.

Claims

1. A tool for conveniently observing the situation inside a part hole, characterized in that: The invention comprises a protective cover, a shell arranged at the lower side of the protective cover, a transparent table arranged at the protective cover for placing parts, a refractor arranged in the protective cover, the protective cover is arranged at the upper side of the transparent table, and a light source is arranged in the shell.

2. A tool for conveniently observing the situation inside a part hole according to claim 1, characterized in that: The protective cover includes a first side plate and a second side plate symmetrically arranged, an upper plate arranged on the upper sides of the first side plate and the second side plate, a rear plate arranged on the rear sides of the first side plate and the second side plate, and a lower plate arranged on the lower sides of the first side plate and the second side plate, the transparent table top is arranged on the upper side of the lower plate, and the lower plate is provided with an avoidance hole penetrating it vertically.

3. A tool for conveniently observing the situation inside a part hole according to claim 2, characterized in that: The rear plate is tilted, and the refractor is rotatably arranged on the inner side of the rear plate.

4. The tooling for conveniently observing the situation inside a part hole according to claim 2, characterized in that: A hanging ear is arranged on the inner side of the upper plate, a hanging hole is arranged through the upper side of the refractor, and a hanging rope is passed through the hanging ear and the hanging hole.

5. The tooling for conveniently observing the situation inside a part hole according to claim 1, characterized in that: A reflector is arranged at the bottom of the shell.

6. The tooling for conveniently observing the situation inside a part hole according to claim 2, characterized in that: The included angle between the rear plate and the upper plate is 110°-130°.

7. The tooling for conveniently observing the situation inside a part hole according to claim 5, characterized in that: The light source is a ring-shaped LED light.

8. The tooling for conveniently observing the situation inside a part hole according to claim 7, characterized in that: An annular baffle is arranged on the upper side of the LED lamp.

9. The tooling for conveniently observing the situation inside a part hole according to claim 1, characterized in that: The shell is cylindrical.

10. A tool for conveniently observing the situation inside a part hole according to any one of claims 1 to 9, characterized in that: The transparent table top is made of transparent quartz glass.