Automatic leveling and discharging device
By designing an automatic leveling and laying device, the problems of complex structure and troublesome operation in the prior art are solved, and the precise exposure of the workpiece and the efficient operation of the lithography process are achieved.
Patent Information
- Application Number
- CN202421846951.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-31
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-07-31
AI Technical Summary
The existing calibration mechanism has complex structure, troublesome operation, affects the lithography effect, and slow operation speed.
An automatic leveling and laying device is designed, including a discharge mechanism, a positioning mechanism, a level adjustment mechanism and a lifting and adjusting mechanism. Through the combination of these mechanisms, the position of the workpiece can be accurately adjusted to ensure the effect of the lithography process.
It realizes accurate exposure of workpieces, improves the efficiency and effect of the lithography process, simplifies the operation process, and improves the adjustment accuracy.
Smart Images
Figure CN223051638U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chip production, in particular to an automatic leveling and feeding device. Background Art
[0002] Lithography is the most complex and crucial process step in the semiconductor chip production process, which takes a long time and has high costs. The difficulty and key point in semiconductor chip production lie in how to fabricate the target circuit pattern on the silicon wafer, which is achieved through lithography. The process level of lithography directly determines the process level and performance level of the chip. In the lithography process, it is necessary to use exposure and development to engrave geometric graphic structures on the photoresist layer, and then transfer the patterns on the template to the substrate through the etching process. The substrate mentioned here not only includes silicon wafers, but also can be other metal layers and dielectric layers, such as sapphire in glass and SOS.
[0003] The substrate material is placed below the template and the exposure light source. If the placement of the substrate material cannot be well aligned with the template, it will affect the lithography effect. Therefore, it is necessary to make the placement of the substrate material parallel to the template to prevent the exposure pattern on the substrate material from being offset and affecting the forming effect. Most of the existing correction mechanisms have complex structures and need to adjust the position of the substrate material in three-axis directions, which is relatively troublesome to operate and has a slow operation speed.
[0004] Therefore, it is necessary to provide an automatic leveling and feeding device with a simpler structure and more convenient operation. Summary of the Utility Model
[0005] The purpose of the utility model is to provide an automatic leveling and feeding device with a simpler structure and more convenient operation.
[0006] To achieve the above purpose, the utility model provides an automatic leveling and feeding device, including:
[0007] A feeding mechanism for placing workpieces, including a feeding component and an arc adjustment component. The feeding component is arranged on the arc adjustment component, and the arc adjustment component acts to drive the feeding component to move and adjust within a preset range;
[0008] A positioning mechanism connected to the feeding mechanism for positioning the feeding mechanism at a preset position;
[0009] A horizontal adjustment mechanism connected to the positioning mechanism for adjusting the position of the feeding mechanism in the horizontal direction;
[0010] A lifting adjustment mechanism connected to the horizontal adjustment mechanism and the positioning mechanism for adjusting the position of the feeding mechanism in the vertical direction.
[0011] Compared with the prior art, the automatic leveling and feeding device of the present utility model can adjust the position of the workpiece according to actual needs, so that the workpiece can better perform the lithography process operation. The automatic leveling and feeding device includes a feeding mechanism, a positioning mechanism, a horizontal adjustment mechanism, and a lifting adjustment mechanism, which are arranged in sequence from top to bottom. Among them, the feeding mechanism is used to place the workpiece, and the feeding mechanism includes a feeding component and an arc adjustment component. The feeding component is arranged on the arc adjustment component, and the arc adjustment component acts to drive the feeding component to move and adjust within a preset range. The arc adjustment component can automatically find and adjust the position to adjust the feeding component to a suitable position. The positioning mechanism is connected to the feeding mechanism and is used to position the feeding mechanism at a preset position. When the position of the feeding mechanism is adjusted to a suitable position, the feeding mechanism is locked by the positioning mechanism to prevent the feeding mechanism from shifting again. The horizontal adjustment mechanism is connected to the positioning mechanism and is used to adjust the position of the feeding mechanism in the horizontal direction. The horizontal adjustment mechanism can move and adjust the position of the feeding mechanism in the front-back direction and the left-right direction, and the horizontal adjustment mechanism can also rotate in the circumferential direction to adjust the position of the feeding mechanism. The structural layout is reasonable and the adjustment accuracy is high. The lifting adjustment mechanism is connected to the horizontal adjustment mechanism and the positioning mechanism and is used to adjust the position of the feeding mechanism in the vertical direction. The lifting adjustment mechanism can drive the horizontal adjustment mechanism, the positioning mechanism, and the feeding mechanism thereon to rise to a suitable height, and then act on the positioning mechanism and the feeding mechanism to further adjust the lifting height of the feeding mechanism, so that the workpiece on the feeding mechanism can better perform exposure. The automatic leveling and feeding device of the present utility model has a simple structure, convenient operation, and high adjustment accuracy, resulting in good exposure effect of the workpiece.
[0012] Preferably, a first adsorption component is arranged in the feeding component, and the workpiece can be fixed on the feeding component by means of the first adsorption component.
[0013] Preferably, the arc adjustment component includes a base and an arc adjustment member. An arc groove is formed on the base. The arc adjustment member is provided with an arc portion and a mounting portion. The arc portion is mounted in the arc groove and can rotate at multiple angles in the arc groove. The feeding component is mounted on the mounting portion and can move along with the arc portion in the arc groove.
[0014] Preferably, the positioning mechanism includes a mounting seat. The base is slidably mounted on the mounting seat. The positioning mechanism further includes a plurality of positioning cylinders mounted on the mounting seat. The plurality of positioning cylinders act to position the base on the mounting seat.
[0015] Preferably, the positioning mechanism further includes multiple groups of limiting components arranged on the mounting seat. A plurality of limiting grooves cooperating with the limiting components are formed on the feeding component. One end of the limiting component is located in the limiting groove. The cooperation between the limiting component and the limiting groove prevents the feeding component from detaching from the arc adjustment component.
[0016] Preferably, the positioning mechanism further includes a second adsorption component disposed in the base, and the arc-shaped adjusting member is adsorbed and fixed in the arc-shaped groove by the second adsorption component.
[0017] Preferably, an elastic adjusting component is disposed between the base and the mounting seat. When the feeding component is stressed and presses the arc-shaped adjusting component, the base can be elastically adjusted on the mounting seat by means of the elastic adjusting component.
[0018] Preferably, an installation groove is provided on the feeding component for installing a sealing member, and a sealed exposure area can be formed on the feeding component by means of the sealing member.
[0019] Preferably, the horizontal adjustment mechanism includes a support seat and a plurality of horizontal adjustment components disposed on the support seat. The plurality of horizontal adjustment components are all connected to the positioning mechanism, and the positioning mechanism can be moved or rotated in the horizontal direction on the support seat by means of the plurality of horizontal adjustment components.
[0020] Preferably, the lifting adjustment mechanism includes a support bottom plate, a lifting component, and a plurality of guiding components. One end of each of the plurality of guiding components is mounted on the support bottom plate, and the other end is connected to the support seat; the lifting component is mounted on the support bottom plate and connected to the support seat, and one end of the lifting component passes through the support seat. When the lifting component acts, it drives the horizontal adjustment mechanism and the positioning mechanism and the feeding mechanism thereon to rise within a first height range, and when the lifting component continues to act, it drives the positioning mechanism and the feeding mechanism to rise within a second height range. Description of the Drawings
[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0022] Figure 1 is a structural diagram of an automatic leveling and feeding device provided by an embodiment of the present invention.
[0023] Figure 2 is Figure 1 a structural diagram of the cooperation between the feeding mechanism and the positioning mechanism in
[0024] Figure 3 is Figure 2 a partial exploded structural diagram of
[0025] Figure 4 is Figure 3 a structural diagram of the feeding component in
[0026] Figure 5 is Figure 4 an exploded structural diagram of
[0027] Figure 6 is Figure 3 The exploded view of the arc adjustment component and the positioning mechanism in
[0028] Figure 7 is Figure 6 The structure diagram of the arc adjustment part in
[0029] Figure 8 is Figure 1 The structure diagram of the horizontal adjustment mechanism in
[0030] Figure 9 is Figure 1 The structure diagram of the lifting adjustment mechanism in
[0031] Explanation of reference numerals:
[0032] 100, Automatic leveling and feeding device;
[0033] 10, Feeding mechanism; 11, Feeding component; 101, Feeding seat; 102, Lamp board; 103, Lithium board; 104, Suction board; 111, Installation groove; 112, Exposure area; 12, Arc adjustment component; 121, Base; 1211, Arc groove; 122, Arc adjustment part; 1221, Arc part; 1222, Installation part; 13, First adsorption component; 131, First adsorption hole; 132, First air hole; 133, Second air hole; 14, Sliding component; 15, Elastic adjustment component;
[0034] 20, Positioning mechanism; 201, Mounting seat; 21, Positioning cylinder; 22, Limit component; 221, Limit groove; 222, Limit seat; 223, Limiting piece; 23, Second adsorption component; 231, Second adsorption hole; 232, Vent hole;
[0035] 30, Horizontal adjustment mechanism; 301, Support seat; 3011, Upper support plate; 3012, Lower support plate; 3013, Connecting piece; 31, Horizontal adjustment component; 32, Movable connection component;
[0036] 40, Lifting adjustment mechanism; 401, Support bottom plate; 41, Guide component; 42, Lifting component. Detailed implementation mode
[0037] In order to elaborate on the technical content and structural features of the present utility model in detail, the following further description is provided in conjunction with the implementation modes and accompanied by the drawings.
[0038] Please refer to Figures 1 to 6, the present utility model provides an automatic leveling and feeding device 100, which includes a feeding mechanism 10, a positioning mechanism 20, a horizontal adjustment mechanism 30 and a lifting adjustment mechanism 40. The feeding mechanism 10 is used for placing workpieces. The feeding mechanism 10 includes a feeding component 11 and an arc adjustment component 12. The workpiece can be a silicon wafer, or other metal layers and dielectric layers, such as glass, sapphire in SOS, etc., which can be exposed and formed into a target circuit pattern. The feeding component 11 is arranged on the arc adjustment component 12, and the arc adjustment component 12 acts to drive the feeding component 11 to move and adjust within a preset range. The preset range refers to the range in which the arc adjustment member 122 in the arc adjustment component 12 can freely move within the base 121. The positioning mechanism 20 is connected to the feeding mechanism 10 and is used to position the feeding mechanism 10 at a preset position. The preset position is a suitable position for the feeding mechanism 10 to be adjusted to perform exposure. The positioning mechanism 20 positions the feeding mechanism 10 so that the workpiece on the feeding mechanism 10 can be exposed. The horizontal adjustment mechanism 30 is connected to the positioning mechanism 20 and is used to adjust the position of the feeding mechanism 10 in the horizontal direction. The lifting adjustment mechanism 40 is connected to the horizontal adjustment mechanism 30 and the positioning mechanism 20 and is used to adjust the position of the feeding mechanism 10 in the vertical direction. Through the horizontal adjustment mechanism 30, the lifting adjustment mechanism 40 and the arc adjustment component 12, the feeding component 11 can be accurately adjusted to a suitable position so that the workpiece on the feeding component 11 can be accurately exposed.
[0039] Compared with the prior art, the automatic leveling and feeding device 100 of the present utility model can adjust the position of the workpiece according to actual needs, so that the workpiece can better perform the lithography process operation. The automatic leveling and feeding device 100 includes a feeding mechanism 10, a positioning mechanism 20, a horizontal adjustment mechanism 30, and a lifting adjustment mechanism 40, which are arranged in sequence from top to bottom. Among them, the feeding mechanism 10 is used to place the workpiece, and the feeding mechanism 10 includes a feeding component 11 and an arc adjustment component 12. The feeding component 11 is arranged on the arc adjustment component 12, and the arc adjustment component 12 acts to drive the feeding component 11 to move and adjust within a preset range. The arc adjustment component 12 can automatically find and adjust the position to adjust the feeding component 11 to a suitable position. The positioning mechanism 20 is connected to the feeding mechanism 10 and is used to position the feeding mechanism 10 at a preset position. When the position of the feeding mechanism 10 is adjusted to a suitable position, the feeding mechanism 10 is locked by the positioning mechanism 20 to prevent the feeding mechanism 10 from shifting again. The horizontal adjustment mechanism 30 is connected to the positioning mechanism 20, and the horizontal adjustment mechanism 30 is used to adjust the position of the feeding mechanism 10 in the horizontal direction. The horizontal adjustment mechanism 30 can move and adjust the position of the feeding mechanism 10 in the front-back direction and the left-right direction, and the horizontal adjustment mechanism 30 can also rotate and adjust the position of the feeding mechanism 10 in the circumferential direction. The structural layout is reasonable and the adjustment accuracy is high. The lifting adjustment mechanism 40 is connected to the horizontal adjustment mechanism 30 and the positioning mechanism 20 and is used to adjust the position of the feeding mechanism 10 in the vertical direction. The lifting adjustment mechanism 40 can drive the horizontal adjustment mechanism 30, the positioning mechanism 20, and the feeding mechanism 10 thereon to rise to a suitable height, and then act on the positioning mechanism 20 and the feeding mechanism 10 to further adjust the lifting height of the feeding mechanism 10, so that the workpiece on the feeding mechanism 10 can better perform exposure. The automatic leveling and feeding device 100 of the present utility model has a simple structure, is convenient to operate, and has high adjustment accuracy, resulting in good exposure effect of the workpiece.
[0040] Please refer to Figures 2 to 4, in some alternative embodiments, a first adsorption assembly 13 is provided inside the material feeding assembly 11, and the workpiece can be fixed on the material feeding assembly 11 by means of the first adsorption assembly 13. The material feeding assembly 11 includes a material feeding base 101, and a channel is provided inside the material feeding base 101. Air enters through the first air hole 132 or the second air hole 133 and then exits through the second air hole 133 or the first air hole 132 to form an air path inside the material feeding base 101, and the workpiece is adsorbed and fastened on the material feeding base 101 through a plurality of first adsorption holes 131. The first air hole 132 is for air intake, and the second air hole 133 is for air exhaust; if the second air hole 133 is for air intake, the first air hole 132 is for air exhaust. Wherein, an installation groove 111 is provided on the material feeding assembly 11, and the installation groove 111 is in a ring shape or other suitable shape that is connected end to end. The installation groove 111 is used for installing a seal, and a sealed exposure area 112 can be formed on the material feeding assembly 11 by means of the seal. Inflate the seal ring so that the seal ring protrudes out of the installation groove 111 and can abut against the mechanism above it for placing the film template, so that a sealed exposure area 112 can be formed on the material feeding assembly 11 during exposure, and thus the exposure can be carried out more accurately.
[0041] Please refer to Figures 2 to 4 , in some alternative embodiments, the material feeding assembly 11 includes a material feeding base 101, a lamp board 102 and a lithium board 103 are installed inside the material feeding base 101, a suction board 104 is provided on the lithium board 103, and a plurality of first adsorption holes 131 for sucking materials are provided on the suction board 104. The lamp board 102 can be used for backlighting so that the workpiece on the suction board 104 can be exposed better. Among them, the lithium board 103 can facilitate the conduction and heat dissipation of the lamp board 102. At the same time, since a channel for gas circulation is provided inside the material feeding base 101, the lamp board 102 can dissipate heat better. Moreover, the circulation of the vacuum adsorbed gas inside the material feeding base 101 is also beneficial to the heat dissipation of the workpiece on the suction board 104.
[0042] Please refer to Figures 2 to 7 , in some alternative embodiments, the arc-shaped adjustment assembly 12 includes a base 121 and an arc-shaped adjustment member 122. An arc-shaped groove 1211 is provided on the base 121, the arc-shaped adjustment member 122 is provided with an arc-shaped portion 1221 and an installation portion 1222, the arc-shaped portion 1221 is installed in the arc-shaped groove 1211 and can rotate at multiple angles in the arc-shaped groove 1211. The material feeding assembly 11 is installed on the installation portion 1222 and can move in the arc-shaped groove 1211 along with the arc-shaped portion 1221. That is, the material feeding assembly 11 is installed on the arc-shaped adjustment member 122 and can be adjusted relative to the base 121 along with the arc-shaped adjustment member 122.
[0043] Please refer to Figures 2 to 6, in some alternative embodiments, the positioning mechanism 20 includes a mounting base 201, and the base 121 is slidably mounted on the mounting base 201. A plurality of sliding assemblies 14 are provided around the base 121. Through the sliding assemblies 14, the base 121 can slide on the mounting base 201. That is, when the feeding assembly 11 is stressed, the feeding assembly 11 can act on the arc-shaped adjusting assembly 12, and cause the arc-shaped adjusting assembly 12 to slide relative to the mounting base 201 along the sliding assemblies 14, and act on the elastic adjusting assembly 15. On the other hand, the positioning mechanism 20 further includes a plurality of positioning cylinders 21 mounted on the mounting base 201. The plurality of positioning cylinders 21 act to position the base 121 on the mounting base 201. After the feeding assembly 11 is adjusted to a suitable exposure position, the arc-shaped adjusting assembly 12 is positioned on the mounting base 201 through the plurality of positioning cylinders 21, so that the feeding assembly 11 is positioned on the mounting base 201, thereby enabling better exposure of the workpiece on the feeding assembly 11.
[0044] Please refer to Figures 2 to 6 , in some alternative embodiments, the positioning mechanism 20 further includes a second adsorption assembly 23 disposed in the base 121. By means of the second adsorption assembly 23, the arc-shaped adjusting member 122 is adsorbed and fixed in the arc-shaped groove 1211. A vent hole 232 for ventilation is provided on the base 121, and a plurality of second adsorption holes 231 are provided in the arc-shaped groove 1211 of the base 121. By ventilating in the base 121 through the vent hole 232, the second adsorption holes 231 in the arc-shaped groove 1211 can adsorb and position the arc-shaped adjusting member 122 in the base 121. On the other hand, an elastic adjusting assembly 15 is provided between the base 121 and the mounting base 201. The elastic adjusting assembly 15 includes a plurality of spring members. One end of the spring member is connected to the base 121, and the other end of the spring member is connected to the mounting base 201. When the feeding assembly 11 is stressed and presses the arc-shaped adjusting assembly 12, the base 121 elastically moves on the mounting base 201 by means of the elastic adjusting assembly 15. The base 121 elastically moves on the mounting base 201 to adjust the feeding assembly 11 to a suitable exposure position on the mounting base 201, and then the arc-shaped adjusting assembly 12 and the feeding assembly 11 thereon are positioned on the mounting base 201 through the positioning mechanism 20.
[0045] Please refer to Figures 2 to 6, in some alternative embodiments, the positioning mechanism 20 further includes a plurality of limiting components 22 disposed on the mounting base 201. A plurality of limiting grooves 221 cooperating with the limiting components 22 are formed on the material feeding component 11, and the limiting grooves 221 are V-shaped. The limiting component 22 includes a limiting seat 222 and a limiting member 223. The limiting member 223 is mounted on the limiting seat 222, and one end of the limiting member 223 is located in the limiting groove 221. By the cooperation of the limiting component 22 and the limiting groove 221, the material feeding component 11 is prevented from detaching from the arc-shaped adjusting component 12. It can be understood that after the exposure is completed, the positioning cylinder 21 releases the arc-shaped adjusting component 12. At the same time, the second adsorption component 23 in the arc-shaped groove 1211 releases the arc-shaped adjusting member 122. At this time, the elastic adjusting component 15 can drive the arc-shaped adjusting component 12 and the material feeding component 11 to elastically move. The limiting member 223 is located in the limiting groove 221, which can limit the moving height of the material feeding seat 101 to prevent the material feeding component 11 from moving away from the arc-shaped adjusting component 12.
[0046] Please refer to Figure 1 and Figure 8 , in some alternative embodiments, the horizontal adjustment mechanism 30 includes a support base 301 and a plurality of horizontal adjustment components 31 disposed on the support base 301. The plurality of horizontal adjustment components 31 are all connected to the positioning mechanism 20 through the support base 301. By means of the plurality of horizontal adjustment components 31, the positioning mechanism 20 can move or rotate in the horizontal direction on the support base 301. Among them, the support base 301 includes an upper support plate 3011 and a lower support plate 3012. The upper support plate 3011 and the lower support plate 3012 are connected by a connecting member 3013. The upper support plate 3011 can rotate relative to the lower support plate 3012 within a certain range along the connecting member 3013. The plurality of horizontal adjustment components 31 are installed between the upper support plate 3011 and the lower support plate 3012, and the plurality of horizontal adjustment components 31 are connected to the positioning mechanism 20 through the upper support plate 3011. In this embodiment, the horizontal adjustment component 31 is installed on the lower support plate 3012 and connected to the upper support plate 3011 through a movable connection component 32. The horizontal adjustment component 31 acts to act on the upper support plate 3011 through the movable connection component 32, so that the upper support plate 3011 drives the components thereon to move or rotate relative to the lower support plate 3012.
[0047] Please refer to Figure 1 and Figure 9, in some alternative embodiments, the lifting adjustment mechanism 40 includes a support base plate 401, a lifting assembly 42, and a plurality of guiding assemblies 41. One ends of the plurality of guiding assemblies 41 are all mounted on the support base plate 401, and the other ends are connected to the support seat 301. The lifting assembly 42 is mounted on the support base plate 401 and connected to the support seat 301, and one end of the lifting assembly 42 passes through the support seat 301. Specifically, the lifting assembly 42 acts to drive the horizontal adjustment mechanism 30 and the positioning mechanism 20 and the material feeding mechanism 10 thereon to rise within a first height range, and the lifting assembly 42 continuously acts to drive the positioning mechanism 20 and the material feeding mechanism 10 to rise within a second height range. It can be understood that the lifting adjustment mechanism 40 can drive the horizontal adjustment mechanism 30, the positioning mechanism 20, and the material feeding mechanism 10 to rise to appropriate positions, and then perform fine height adjustment, so that the overall adjustment is more accurate and the exposure accuracy is higher.
[0048] As Figures 1 to 9 As shown, the automatic leveling and material feeding device 100 of the present utility model can adjust the position of the workpiece according to actual needs, so that the workpiece can better perform the lithography process operation. The automatic leveling and material feeding device 100 includes a material feeding mechanism 10, a positioning mechanism 20, a horizontal adjustment mechanism 30, and a lifting adjustment mechanism 40 that are arranged in sequence from top to bottom. Among them, the material feeding mechanism 10 is used for placing the workpiece, and the material feeding mechanism 10 includes a material feeding component 11 and an arc adjustment component 12. The material feeding component 11 is arranged on the arc adjustment component 12 and can adsorb and fix the workpiece. The arc adjustment component 12 acts to drive the material feeding component 11 to move and adjust within a preset range. The arc adjustment component 12 can automatically find the position and adjust to adjust the material feeding component 11 to an appropriate position. The positioning mechanism 20 is connected to the material feeding mechanism 10 and is used to position the material feeding mechanism 10 at an appropriate position. When the position of the material feeding mechanism 10 is adjusted to an appropriate position, the material feeding mechanism 10 is locked by the positioning mechanism 20 to prevent the material feeding mechanism 10 from shifting again. The horizontal adjustment mechanism 30 is connected to the positioning mechanism 20, and the horizontal adjustment mechanism 30 is used to adjust the position of the material feeding mechanism 10 in the horizontal direction. The horizontal adjustment mechanism 30 can move and adjust the position of the material feeding mechanism 10 in the front-back direction and the left-right direction, and the horizontal adjustment mechanism 30 can also rotate and adjust the position of the material feeding mechanism 10 in the circumferential direction. The structural layout is reasonable and the adjustment accuracy is high. The lifting adjustment mechanism 40 is connected to the horizontal adjustment mechanism 30 and the positioning mechanism 20 and is used to adjust the position of the material feeding mechanism 10 in the vertical direction. The lifting adjustment mechanism 40 can drive the horizontal adjustment mechanism 30, the positioning mechanism 20, and the material feeding mechanism 10 thereon to rise to an appropriate height, and then act on the positioning mechanism 20 and the material feeding mechanism 10 to further adjust the lifting height of the material feeding mechanism 10, so that the workpiece on the material feeding mechanism 10 can better perform exposure. The automatic leveling and material feeding device 100 of the present utility model has a simple structure, convenient operation, and high adjustment accuracy, resulting in good exposure effect of the workpiece.
[0049] The above-disclosed are only the preferred examples of the present utility model, and the scope of rights of the present utility model cannot be limited thereby. Therefore, all equivalent changes made according to the claims of the present utility model fall within the scope covered by the present utility model.
Claims
1. An automatic leveling and unloading device, characterized in that: include: The material discharging mechanism is used to place the workpiece, and comprises a material discharging component and an arc adjustment component, wherein the material discharging component is arranged on the arc adjustment component, and the arc adjustment component moves to drive the material discharging component to move and adjust within a preset range; A positioning mechanism, connected to the material discharging mechanism, for positioning the material discharging mechanism at a preset position; A horizontal adjustment mechanism, connected to the positioning mechanism, for adjusting the position of the discharge mechanism in the horizontal direction; The lifting adjustment mechanism is connected to the horizontal adjustment mechanism and the positioning mechanism, and is used to adjust the position of the discharge mechanism in the vertical direction.
2. The automatic leveling and unloading device according to claim 1 is characterized in that: A first adsorption component is arranged in the discharge component, and the workpiece can be fixed on the discharge component by means of the first adsorption component.
3. The automatic leveling and unloading device according to claim 1 is characterized in that: The arc adjustment component includes a base and an arc adjustment piece, the base is provided with an arc groove, the arc adjustment piece is provided with an arc portion and a mounting portion, the arc portion is installed in the arc groove and can rotate at multiple angles in the arc groove, and the discharge component is installed on the mounting portion and can move in the arc groove with the arc portion.
4. The automatic leveling and unloading device according to claim 3 is characterized in that: The positioning mechanism comprises a mounting seat, the base is slidably mounted on the mounting seat, and the positioning mechanism further comprises a plurality of positioning cylinders mounted on the mounting seat, and the plurality of positioning cylinders are actuated to position the base on the mounting seat.
5. The automatic leveling and unloading device according to claim 4 is characterized in that: The positioning mechanism also includes a plurality of limiter components arranged on the mounting seat, and a plurality of limiter grooves cooperating with the limiter components are provided on the discharge component, and one end of the limiter component is located in the limiter groove, so that the discharge component is prevented from being separated from the arc adjustment component by the cooperation between the limiter component and the limiter groove.
6. The automatic leveling and unloading device according to claim 3 is characterized in that: The positioning mechanism further comprises a second adsorption component arranged in the base, and the arc-shaped adjustment member is adsorbed and fixed in the arc-shaped groove by the second adsorption component.
7. The automatic leveling and unloading device according to claim 4 is characterized in that: An elastic adjustment component is arranged between the base and the mounting seat, and the discharge component is pressed against the arc adjustment component so that the base is elastically adjusted on the mounting seat by the elastic adjustment component.
8. The automatic leveling and unloading device according to claim 1 is characterized in that: The material discharging component is provided with an installation groove, and the installation groove is used to install a sealing member, so that a sealed exposure area can be formed on the material discharging component by means of the sealing member.
9. The automatic leveling and unloading device according to claim 1, characterized in that: The horizontal adjustment mechanism includes a support base and a plurality of horizontal adjustment components arranged on the support base, and the plurality of horizontal adjustment components are all connected to the positioning mechanism. The positioning mechanism is moved or rotated in the horizontal direction on the support base by means of the plurality of horizontal adjustment components.
10. The automatic leveling and unloading device according to claim 9, characterized in that: The lifting and adjusting mechanism includes a supporting base plate, a lifting assembly and a plurality of guide assemblies, wherein one end of each of the guide assemblies is mounted on the supporting base plate and the other end is connected to the supporting seat; the lifting assembly is mounted on the supporting base plate and connected to the supporting seat, and one end of the lifting assembly passes through the supporting seat, the lifting assembly moves to drive the horizontal adjustment mechanism and the positioning mechanism and the discharge mechanism thereon to rise within a first height range, and the lifting assembly continues to move to drive the positioning mechanism and the discharge mechanism to rise within a second height range.