Vacuum coating equipment with self-cleaning function

Abstract

The utility model discloses vacuum coating equipment with a self-cleaning function, which relates to the technical field of vacuum coating equipment, and comprises a base, a coating cylinder is arranged at the top of the base, a sealing door is arranged on the front surface of the coating cylinder, a sealing piece is arranged on the side surface of the sealing door, a heat conducting plate is fixedly connected to the inner side of the sealing door, and the heat conducting plate is fixedly connected to the bottom of the base. The outer side of the adjusting screw rod is in threaded connection with the inner side of the threaded groove in the side face of the coating barrel, the rotating wheel is rotated forwards, so that the sealing door can be rapidly closed, the interior of the sealing door is in a vacuum state, the rotating wheel is rotated reversely, the sealing door can be rapidly opened, and sundries on the inner side of the coating barrel are removed; the gas-liquid filter screen is arranged on the inner side of the heat conducting plate and can absorb toxic gas on the inner side of the coating barrel, the cooling plate is installed at the top of the compressor installed on the outer side of the sealing door, the cooling plate discharges heat on the heat conducting plate to the inner side of the compressor, then the heat is discharged through the fan, and a coating workpiece can be rapidly cooled.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, and particularly relates to a vacuum coating equipment with a self-cleaning function. Background Art

[0002] Vacuum coating equipment mainly refers to equipment for coating under a relatively high vacuum degree, including many specific types, such as vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is divided into two types: evaporation and sputtering.

[0003] After retrieval, a vacuum coating equipment with the publication number CN202321377052.1 includes: a coating chamber for accommodating a coating target, and an evaporation source is arranged in the coating chamber; a cleaning chamber, a cleaning element is arranged in the cleaning chamber, a sealing valve is arranged between the cleaning chamber and the coating chamber, and the cleaning chamber and the coating chamber are communicated when the sealing valve is in an open state; a conveying element, the conveying element can convey an object between the cleaning chamber and the coating chamber through the open sealing valve; a pumping element, the pumping port of the pumping element is communicated with the coating chamber, including a coating chamber for accommodating a coating target, and an evaporation source is arranged in the coating chamber; a cleaning chamber, a cleaning element is arranged in the cleaning chamber, a sealing valve is arranged between the cleaning chamber and the coating chamber, and the cleaning chamber and the coating chamber are communicated when the sealing valve is in an open state; a conveying element, the conveying element can convey an object between the cleaning chamber and the coating chamber through the open sealing valve; a pumping element, the pumping port of the pumping element is communicated with the coating chamber. In this application, by setting up a cleaning chamber, before coating, the quantum chip substrate to be coated is placed in the cleaning chamber, and the surface of the quantum chip substrate is cleaned by using the cleaning element to remove impurities such as contaminants on its surface. Then, the coating chamber is used to coat the surface of the quantum chip substrate. By using the cleaning element to clean the impurities on the surface of the quantum chip substrate before coating, it is ensured that during the coating process, impurities on the surface of the quantum chip substrate do not mix into the metal film, thereby greatly reducing the content of impurities in the metal film. Therefore, the vacuum coating equipment proposed in this application can prepare a high-quality superconducting metal film with a low impurity content on the quantum chip substrate. During the working process of the existing vacuum coating machine, its outer surface is prone to generate toxic gases and sundries due to the relatively high internal temperature difference frequency, and it is neither realistic nor cost-effective to frequently clean the vacuum coating machine. Summary of the Utility Model

[0004] The purpose of the present utility model is to provide a vacuum coating device with a self-cleaning function, so as to solve the problem that during the working process of the existing vacuum coating machine, its outer surface is prone to generate toxic gases and sundries due to the relatively high internal temperature difference frequency, and it is neither realistic nor cost-effective in terms of manpower and material resources to frequently clean the vacuum coating machine.

[0005] To achieve the above object, the present utility model provides the following technical solution: A vacuum coating device with a self-cleaning function, including a base, on the top of the base is provided a coating cylinder, on the front of the coating cylinder is provided a sealing door, on the side of the sealing door is provided a sealing member, on the inner side of the sealing door is fixedly connected a heat conducting plate, on the inner side of the heat conducting plate is fixedly connected a gas-liquid filter screen, and on the front of the outer side of the sealing door are respectively fixedly connected a thermometer and a pressure gauge, and at the bottom of the front of the sealing door is fixedly connected a compressor, in front of the compressor is provided a blower, on the inner side of the coating cylinder is fixedly connected a clamping seat, and inside the clamping seat is clamped a coating rack.

[0006] As a preferred technical solution of the present utility model, at the bottom of the base is fixedly connected a support leg, and the number of the support legs is four.

[0007] As a preferred technical solution of the present utility model, on the side of the top of the base is fixedly connected a side plate, and the side plate is located on the side of the coating cylinder.

[0008] As a preferred technical solution of the present utility model, the sealing member includes a runner, an adjusting screw rod and a rotating sleeve. Inside the runner is fixedly connected the adjusting screw rod, and at one end of the adjusting screw rod is movably connected a rotating sleeve located in front of the sealing door; the front of the coating cylinder installs the sealing door through the sealing member, on the side of the sealing door is fixedly connected and the inner side of the rotating sleeve is movably connected with the adjusting screw rod, and the outer side of the adjusting screw rod is threadedly connected inside the thread groove on the side of the coating cylinder. Rotating the runner forward can quickly close the sealing door to make its interior in a vacuum state, and rotating the runner in reverse can quickly open the sealing door to remove sundries inside the coating cylinder.

[0009] As a preferred technical solution of the present utility model, on the side of the coating cylinder is provided a thread groove, and the inner side of the thread groove is threadedly connected with the outer side of the adjusting screw rod.

[0010] As a preferred technical solution of the present utility model, in the middle of the side of the sealing door is provided a through groove, and the inner side of the through groove is movably connected with the outer side of the adjusting screw rod.

[0011] As a preferred technical solution of the present utility model, a cooling plate is fixedly connected to the top of the compressor, and the cooling plate is located inside the sealing door; a heat conducting plate is installed inside the sealing door, and a gas-liquid filter screen is arranged inside the heat conducting plate to absorb the toxic gas inside the coating cylinder. Moreover, a cooling plate is installed on the top of the compressor installed outside the sealing door. The cooling plate discharges the heat on the heat conducting plate to the inside of the compressor and then discharges it through the fan, enabling the coated workpiece to be quickly cooled down.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] 1. In the present utility model, the sealing door is installed on the front of the coating cylinder through a seal. A rotating sleeve is fixedly connected to the side of the sealing door, and an adjusting screw rod is movably connected inside the rotating sleeve. The outer side of the adjusting screw rod is threadedly connected inside the thread groove on the side of the coating cylinder. By rotating the rotating wheel forward, the sealing door can be quickly closed to achieve a vacuum state inside. By rotating the rotating wheel in the reverse direction, the sealing door can be quickly opened to remove the sundries inside the coating cylinder.

[0014] 2. In the present utility model, a heat conducting plate is installed inside the sealing door, and a gas-liquid filter screen is arranged inside the heat conducting plate to absorb the toxic gas inside the coating cylinder. Moreover, a cooling plate is installed on the top of the compressor installed outside the sealing door. The cooling plate discharges the heat on the heat conducting plate to the inside of the compressor and then discharges it through the fan, enabling the coated workpiece to be quickly cooled down. Description of the Drawings

[0015] Figure 1 is the main structural view of the present utility model;

[0016] Figure 2 is the partial main structural view of the present utility model;

[0017] Figure 3 is the internal view of the sealing door of the structure of the present utility model;

[0018] Figure 4 is the combined view of the compressor and the cooling plate of the structure of the present utility model;

[0019] Figure 5 is the seal diagram of the structure of the present utility model.

[0020] In the figure: 1. Base; 2. Support leg; 3. Side plate; 4. Coating cylinder; 5. Sealing door; 6. Seal; 61. Rotating wheel; 62. Adjusting screw rod; 63. Rotating sleeve; 7. Thermometer; 8. Pressure gauge; 9. Compressor; 10. Fan; 11. Cooling plate; 12. Clamp seat; 13. Coating rack; 14. Thread groove; 15. Through groove; 16. Heat conducting plate; 17. Gas-liquid filter screen. Detailed Embodiments

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0022] Please refer to Figures 1-5 , the present utility model provides a vacuum coating device with a self-cleaning function, including a base 1. A coating cylinder 4 is provided on the top of the base 1. A sealing door 5 is provided on the front of the coating cylinder 4. A sealing member 6 is provided on the side of the sealing door 5. A heat conducting plate 16 is fixedly connected to the inner side of the sealing door 5. A gas-liquid filter screen 17 is fixedly connected to the inner side of the heat conducting plate 16. A thermometer 7 and a pressure gauge 8 are respectively fixedly connected to the front of the outer side of the sealing door 5. A compressor 9 is fixedly connected to the bottom of the front of the sealing door 5. A blower 10 is provided on the front of the compressor 9. A clamping seat 12 is fixedly connected to the inner side of the coating cylinder 4. A coating rack 13 is clamped inside the clamping seat 12.

[0023] Support legs 2 are fixedly connected to the bottom of the base 1. The number of the support legs 2 is four. Side plates 3 are fixedly connected to the side of the top of the base 1. The side plates 3 are located on the side of the coating cylinder 4. The sealing member 6 includes a runner 61, an adjusting screw 62 and a rotating sleeve 63. The adjusting screw 62 is fixedly connected to the inner side of the runner 61. One end of the adjusting screw 62 is movably connected to a rotating sleeve 63 located in front of the sealing door 5. The sealing door 5 is installed on the front of the coating cylinder 4 through the sealing member 6. The rotating sleeve 63 is fixedly connected to the side of the sealing door 5 and the adjusting screw 62 is movably connected to the inner side of the rotating sleeve 63. The outer side of the adjusting screw 62 is threadedly connected to the inner side of a thread groove 14 on the side of the coating cylinder 4. Rotating the runner 61 forward can quickly close the sealing door 5 to make the inside reach a vacuum state. Rotating the runner 61 in the reverse direction can quickly open the sealing door 5 to remove the sundries inside the coating cylinder 4.

[0024] A thread groove 14 is provided on the side of the coating cylinder 4. The inner side of the thread groove 14 is threadedly connected to the outer side of the adjusting screw 62. A through groove 15 is provided in the middle of the side of the sealing door 5. The inner side of the through groove 15 is movably connected to the outer side of the adjusting screw 62. A cooling plate 11 is fixedly connected to the top of the compressor 9. The cooling plate 11 is located inside the sealing door 5. The heat conducting plate 16 is installed inside the sealing door 5. The gas-liquid filter screen 17 is provided inside the heat conducting plate 16 to absorb the toxic gas inside the coating cylinder 4. The cooling plate 11 is installed on the top of the compressor 9 installed on the outer side of the sealing door 5. The cooling plate 11 discharges the heat on the heat conducting plate 16 into the compressor 9 and then discharges it through the blower 10, so as to quickly cool the coated workpiece.

[0025] During specific use, first, a sealing door 5 is installed on the front of the coating cylinder 4 through a seal 6. A rotating sleeve 63 is fixedly connected to the side of the sealing door 5, and an adjusting screw 62 is movably connected to the inside of the rotating sleeve 63. The outside of the adjusting screw 62 is threadedly connected to the inside of a threaded groove 14 on the side of the coating cylinder 4. Rotating the rotating wheel 61 in the forward direction can quickly close the sealing door 5, enabling a vacuum state inside. Rotating the rotating wheel 61 in the reverse direction can quickly open the sealing door 5 to remove debris inside the coating cylinder 4. A heat conducting plate 16 is installed inside the sealing door 5, and a gas-liquid filter screen 17 is provided inside the heat conducting plate 16 to absorb toxic gases inside the coating cylinder 4. Moreover, a cooling plate 11 is installed on the top of a compressor 9 installed outside the sealing door 5. The cooling plate 11 discharges the heat on the heat conducting plate 16 to the inside of the compressor 9 and then discharges it through a blower 10, enabling the coated workpiece to be quickly cooled down.

[0026] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating device with a self-cleaning function, comprising a base (1), characterized in that: The top of the base (1) is provided with a coating cylinder (4). A sealing door (5) is arranged on the front of the coating cylinder (4). A seal (6) is arranged on the side of the sealing door (5). A heat conducting plate (16) is fixedly connected to the inner side of the sealing door (5). A gas-liquid filter screen (17) is fixedly connected to the inner side of the heat conducting plate (16). A thermometer (7) and a pressure gauge (8) are respectively fixedly connected to the front side of the outer side of the sealing door (5). A compressor (9) is fixedly connected to the bottom of the front side of the sealing door (5). A blower (10) is arranged on the front of the compressor (9). A clamping seat (12) is fixedly connected to the inner side of the coating cylinder (4). A coating rack (13) is clamped inside the clamping seat (12).

2. The vacuum coating equipment with self-cleaning function according to claim 1, characterized in that: Support legs (2) are fixedly connected to the bottom of the base (1). The number of the support legs (2) is four.

3. A vacuum coating equipment with a self-cleaning function according to claim 1, characterized in that: Side plates (3) are fixedly connected to the side of the top of the base (1). The side plates (3) are located on the side of the coating cylinder (4).

4. A vacuum coating device with a self-cleaning function according to claim 1, characterized in that: The seal (6) includes a rotating wheel (61), an adjusting screw rod (62) and a rotating sleeve (63). The adjusting screw rod (62) is fixedly connected to the inner side of the rotating wheel (61). One end of the adjusting screw rod (62) is movably connected to a rotating sleeve (63) located on the front side of the sealing door (5).

5. A vacuum coating device with a self-cleaning function according to claim 1, characterized in that: A threaded groove (14) is formed in the side of the coating cylinder (4). The inner side of the threaded groove (14) is in threaded connection with the outer side of the adjusting screw rod (62).

6. The vacuum coating equipment with self-cleaning function according to claim 1, characterized in that: A through groove (15) is formed in the middle of the side of the sealing door (5). The inner side of the through groove (15) is movably connected to the outer side of the adjusting screw rod (62).

7. A vacuum coating device with a self-cleaning function according to claim 1, characterized in that: A cooling plate (11) is fixedly connected to the top of the compressor (9). The cooling plate (11) is located inside the sealing door (5).

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