Modularized magnetron sputtering vacuum coating machine structure

Abstract

The utility model relates to a modularized magnetron sputtering vacuum coating machine structure which comprises a modularized unit, and the modularized unit comprises a plurality of modularized vacuum coating units which are connected in a lengthened mode. The modularized vacuum coating unit comprises a vacuum cavity shell and a coating mechanism, the vacuum cavity shell is rectangular, channel holes which communicate with an inner cavity and are used for a to-be-coated film to pass through are formed in the two end faces of the vacuum cavity shell correspondingly, and the coating mechanism is located in the vacuum cavity shell and connected to the two side faces of the vacuum cavity shell. The vacuum cavity shells of the adjacent modularized vacuum coating units abut against each other in a sealed mode through the end faces, the channel holes in the end faces are communicated, and detachable fasteners used for keeping the end faces abut against each other in a sealed mode are arranged between the adjacent vacuum cavity shells. One end of the modular unit abuts against a discharging bin unit in a sealed mode. And the other end of the material receiving bin unit abuts against the material receiving bin unit in a sealing manner. According to the structure, the tradition of an integral shell is broken through, the modularized vacuum coating units are used, the size of the vacuum cavity shell is reduced, and the purchase cost of manufacturing and capacity expansion is effectively reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum equipment for continuous plating in chemical metallurgy, and in particular relates to a modular magnetron sputtering vacuum coating machine structure. Background Art

[0002] Vacuum technology is a technology widely used in scientific research and industrial production. It mainly realizes various process by creating and utilizing vacuum environment. Among them, coating technology is a technology that deposits one or more layers of thin film on the surface of substrate (such as the front and back of the film) by physical or chemical methods in vacuum environment. Magnetron sputtering equipment is a commonly used coating equipment. Its working principle is to use the effect of magnetic field to make the atoms or molecules on the surface of target material detach from the target material under the action of electric field and deposit on the surface of substrate to form thin film coating.

[0003] In the existing magnetron sputtering vacuum coating machine, the overall shell design is usually adopted. For example, the coating machine disclosed in CN107245701A can sputter different types of coating targets on one side of the film to be coated (coil), and there is a sputtering coating unit including a winding system, a magnetron sputtering system, and an ion source discharge system in the overall shell. In more application conditions, sputtering coating is required on both sides of the film to be coated. For example, the coating machine disclosed in CN113502459A is provided with a magnetron sputtering system on both sides of the guide roller (including cooling drum) mechanism between the unwinding mechanism and the winding mechanism, which has the functions of the front and back sputtering coating units, but all components are still placed in an overall shell. The overall shell design guarantees the quality and efficiency of the coating to a certain extent, but there are still some problems. First of all, due to the overall shell design, the volume of the entire device is relatively large, which not only increases the manufacturing cost of the equipment, but also limits the capacity expansion of the equipment. Secondly, since both the front and back sputtering units are placed in the overall shell, the speed of the roller and cooling drum cannot be increased, and the speed of the coating cannot be increased, which limits the working efficiency of the equipment. In addition, due to the large volume of the overall shell, high strength requirements and high costs, it is inconvenient to operate when maintenance is required, which affects the efficiency of use.

[0004] The coating machine disclosed in CN113445018A adopts multiple vacuum coating chambers, and mainly performs continuous coating of different target materials through different vacuum coating chambers to reduce intermediate transportation, but the whole is still an independent device. The vacuum coating chambers are connected by independent channels, and a common vacuum pump system is arranged on the channel. The connection is inconvenient to use. When the production capacity of the equipment is to be increased, it is not convenient to simply modify and expand the equipment to meet the production requirements. Summary of the invention

[0005] Aiming at the above deficiencies of the prior art, the technical problem to be solved by the present utility model is to provide a modular magnetron sputtering vacuum coating machine structure, which avoids the inconvenience of the current independent integral coating machine in improving production capacity and output, and the problem that only the whole machine can be purchased, and achieves the effects of facilitating modification and expansion, reducing the volume of the vacuum chamber, and reducing costs.

[0006] To solve the above technical problems, the present utility model adopts the following technical solutions:

[0007] The modular magnetron sputtering vacuum coating machine structure includes a modular vacuum coating unit group, and the modular vacuum coating unit group includes a number of modular vacuum coating units connected in series; the modular vacuum coating unit includes a vacuum chamber housing, a coating mechanism, and a vacuum pumping mechanism. The vacuum chamber housing is rectangular, and through holes communicating with the inner cavity and for the workpiece to be coated to pass through are respectively opened on both end faces of the vacuum chamber housing. The coating mechanism is located inside the vacuum chamber housing and is connected to both side faces of the vacuum chamber housing. The vacuum chamber housings of adjacent modular vacuum coating units are in end-face sealing contact, and the through holes on the end faces are relatively communicated. A detachable fastener for maintaining the end-face sealing contact is provided between adjacent vacuum chamber housings.

[0008] A feeding bin unit is in end-face sealing contact and connected to the end face of the vacuum chamber housing at one end of the number of modular vacuum coating units connected in series.

[0009] A receiving bin unit is in end-face sealing contact and connected to the end face of the vacuum chamber housing at the other end of the number of modular vacuum coating units connected in series.

[0010] To further improve the above technical solution, each modular vacuum coating unit has an independent coating mechanism and a vacuum pumping mechanism. The vacuum pumping mechanism is arranged on the top surface of the vacuum chamber housing and is communicated with the inner cavity of the vacuum chamber housing.

[0011] Further, the modular vacuum coating unit group is arranged on a linear guide rail in the same direction as the direction of the series connection of the modular vacuum coating units, and the vacuum chamber housing of the modular vacuum coating unit is slidably connected to the linear guide rail.

[0012] Further, a guide rail chute is connected to the bottom surface of the vacuum chamber housing and is slidably connected to the linear guide rail through the guide rail chute.

[0013] Further, a telescopic driving unit with a working direction in the same direction as the linear guide rail is provided between adjacent vacuum chamber housings to drive adjacent vacuum chamber housings to move away from or close to each other. The telescopic driving unit forms the fastener.

[0014] Further, the telescopic driving unit is connected to the outer side of the side face of the vacuum chamber housing. There are two telescopic driving units between adjacent vacuum chamber housings, and they are respectively located on both sides of the vacuum chamber housing.

[0015] Furthermore, the telescopic driving unit is located at the lower part of the side surface of the vacuum chamber housing. The telescopic driving unit adopts a telescopic cylinder, and the free ends of the telescopic rod of the telescopic cylinder and the cylinder body are respectively connected to the side surfaces of the adjacent vacuum chamber housings.

[0016] Furthermore, the linear guide rail adopts a structure form of spliced connection.

[0017] Furthermore, each modular vacuum coating unit has an independent single-sided coating mechanism, and the single-sided coating mechanisms in the adjacent vacuum chamber housings respectively coat the front and back sides to be coated.

[0018] Furthermore, a sealing ring installation groove is provided on the end surface of the vacuum chamber housing, and the sealing ring installation groove is arranged in a circle outside the channel hole.

[0019] Optionally, a convex edge is provided around the end surface of the vacuum chamber housing, and a connection hole is opened on the convex edge. The connection holes on the two vacuum chamber housings correspond one by one. The fastener is a bolt, and the connection is implemented by passing the bolt through the connection hole. The connection hole is located outside the sealing ring installation groove in a circle.

[0020] Compared with the prior art, the utility model has the following beneficial effects:

[0021] 1. The modular magnetron sputtering vacuum coating machine structure of the utility model breaks through the tradition of the overall shell, uses modular vacuum coating units, and each vacuum coating unit has an independent vacuum chamber housing, coating mechanism and vacuum pumping mechanism, which can minimize the volume of the vacuum chamber housing, facilitate manufacturing, reduce manufacturing costs, and have better structural strength; when it is necessary to expand production capacity, only modular vacuum coating units need to be purchased and spliced, which can extend the sputtering coating length of the material to be coated. Under the condition that other technical conditions remain unchanged and the coating thickness requirement remains unchanged, the conveying speed of the material to be coated can be increased, so as to expand production capacity, increase output, reduce purchase costs, and be more energy-saving.

[0022] If the conveying speed of the material to be coated remains unchanged, the coating thickness can be increased correspondingly. When the existing equipment needs to increase the coating thickness, only the conveying speed of the material to be coated can be reduced to extend the sputtering coating time.

[0023] 2. The modular magnetron sputtering vacuum coating machine structure of the utility model, the vacuum chamber housing of the modular vacuum coating unit is slidably connected to the linear guide rail, and a telescopic driving unit with the working direction the same as that of the linear guide rail is arranged between adjacent vacuum chamber housings; the telescopic driving unit can drive adjacent vacuum chamber housings to slide away from or close to each other, which is convenient for installation, and also convenient for operators to enter during adjustment and maintenance without lifting and moving, which is convenient for use, greatly saves manpower and time, and is reliable in use. Description of the Drawings

[0024] Figure 1 Front view of the structure of the modular magnetron sputtering vacuum coating machine in a specific embodiment;

[0025] Figure 2 is Figure 1 right view of;

[0026] Figure 3 is Figure 1 top view of;

[0027] Figure 4 Stereogram of the structure of the modular magnetron sputtering vacuum coating machine in a specific embodiment;

[0028] Figure 5 is Figure 4 partial schematic diagram of the modular vacuum coating unit (evacuating mechanism hidden) and the linear guide in;

[0029] Figure 6 is Figure 5 schematic diagram from another angle;

[0030] Figure 7 is Figure 3 A - A cross - sectional view in (evacuating mechanism hidden);

[0031] Among them, the modular vacuum coating unit 100, the modular vacuum coating cell 200, the loading bin unit 300, the unloading bin unit 400, the linear guide 500, the material to be coated 600,

[0032] Vacuum chamber housing 1, end face 11, channel hole 111, sealing ring mounting groove 112, flange 113, connection hole 114, side face 12, top face 13, bottom face 14, guide rail chute 141, coating mechanism 2, evacuating mechanism 3, telescopic drive unit 5, cylinder block 51, telescopic rod 52.

[0033] Conveyor roller 21, cooling drum 22, magnetron sputtering cathode 23, anode 24, ion source discharger 25, Specific embodiments

[0034] The following further elaborates on the specific embodiments of the present utility model in conjunction with the accompanying drawings.

[0035] Please refer to Figures 1-6, Structure of a modular magnetron sputtering vacuum coating machine in a specific embodiment, including a modular vacuum coating unit 100. The modular vacuum coating unit 100 includes a number of modular vacuum coating units 200 connected in series; the modular vacuum coating unit 200 includes a vacuum chamber housing 1, a coating mechanism 2, and a vacuum pumping mechanism 3. The vacuum chamber housing 1 is rectangular, including two end faces 11 and two side faces 12 that enclose a circle, as well as a top face 13 and a bottom face 14. Square channel holes 111 that communicate with the inner cavity and are used for the material to be coated 600 to pass through are respectively opened on the two end faces 11 of the vacuum chamber housing 1. The coating mechanism 2 is located inside the vacuum chamber housing 1 and is installed and connected to the two side faces 12 of the vacuum chamber housing 1. The vacuum chamber housings 1 of adjacent modular vacuum coating units 200 are directly sealed and abutted through the end face 11, and the channel holes 111 on the end face 11 are relatively communicated. A detachable fastener for maintaining the sealed abutment of the end face 11 is provided between adjacent vacuum chamber housings 1.

[0036] The outer end face 11 of the vacuum chamber housing 1 at one end of the number of modular vacuum coating units 200 connected in series is sealed and abutted to a loading bin unit 300; the loading bin unit 300 feeds materials to the coating mechanism 2 inside the vacuum chamber housing 1 through the channel hole 111 on the connected end face 11 of the vacuum chamber housing 1. The outer end face 11 of the vacuum chamber housing 1 at the other end of the number of modular vacuum coating units 200 connected in series is sealed and abutted to a receiving bin unit 400; the receiving bin unit 400 recovers the materials that have passed through the coating mechanism 2 inside the vacuum chamber housing 1 through the channel hole 111 on the connected end face 11 of the vacuum chamber housing 1. Please refer to Figure 7 , During operation, the winding mechanism in the loading bin unit 300 cooperates with the rotation of the conveying roller and the cooling drum of the coating mechanism 2 to continuously release the material to be coated 600. The material to be coated 600 passes through the channel hole 111 and the coating mechanism 2 in sequence, is sputter-coated, and finally is recovered by the winding mechanism in the receiving bin unit 400.

[0037] Each modular vacuum coating unit 200 has an independent coating mechanism 2 and a vacuum pumping mechanism 3. The vacuum pumping mechanism 3 is integrally arranged on the top face 13 of the vacuum chamber housing 1 and communicates with the inner cavity of the vacuum chamber housing 1. The vacuum pumping mechanism 3 generally includes a vacuum pump, a vacuum detection sensor, and other related electrical components.

[0038] The modular magnetron sputtering vacuum coating machine structure of the embodiment breaks through the tradition of the overall housing and uses modular vacuum coating units. Each vacuum coating unit has an independent vacuum chamber housing 1, a coating mechanism 2, and a vacuum pumping mechanism 3, which can reduce the volume of the vacuum chamber housing 1, facilitate manufacturing, reduce manufacturing costs, and have good structural strength. When it is necessary to expand production capacity, only need to purchase additional modular vacuum coating units 200 and connect them in series. The receiving bin unit 400 is correspondingly relocated to the end, which can extend the sputtering coating length of the workpiece to be coated 600. Under the condition that other technical conditions remain unchanged and the coating thickness requirement remains unchanged, the conveying speed of the workpiece to be coated 600 can be increased, thereby expanding production capacity, increasing output, and reducing purchase costs. If the conveying speed of the workpiece to be coated 600 remains unchanged, the coating thickness can be correspondingly increased. When the existing equipment needs to increase the coating thickness, it can only reduce the conveying speed of the workpiece to be coated 600 to extend the sputtering coating time.

[0039] Each modular vacuum coating unit 200 has an independent single-sided coating mechanism 2 to better control the volume of the vacuum chamber housing 1. The single-sided coating mechanisms 2 in adjacent vacuum chamber housings 1 respectively coat the front and back sides of the workpiece to be coated 600 to meet the requirements of double-sided coating of the workpiece to be coated 600. In this embodiment, two modular vacuum coating units 200 are illustrated. The coating mechanism 2 and the vacuum pumping mechanism 3 are both prior arts, integrated on the vacuum chamber housing 1, and respectively have complete single-sided coating functions and vacuum pumping functions. The single-sided coating mechanisms 2 in the two vacuum chamber housings 1 respectively coat the front and back sides of the workpiece to be coated 600. The components of the coating mechanisms 2 in the two vacuum chamber housings 1 are the same, and reference can be made to Figure 7 , the coating mechanism 2 generally includes a set of conveying rollers 21, a cooling drum 22, a magnetron sputtering cathode 23 (including a target and a magnet providing a magnetic field), an anode 24 (electron collector), and an ion source discharger 25. Only need to adaptively adjust the relative position relationship of the components in the coating mechanism 2 to adjust the sputtering coating surface of the workpiece to be coated 600. Both ends of the components of the coating mechanism 2 are connected to the two side surfaces 12 of the vacuum chamber housing 1. Those that need to be externally connected with electricity or coolant are hermetically passed through the side surface 12 for external connection, and reference can be made to Figure 5 , Figure 6 . It can be understood that for the working condition of double-sided coating, when it is necessary to expand production capacity, two modular vacuum coating units 200 that respectively coat the front and back sides of the workpiece to be coated 600 are purchased and connected in series.

[0040] Please continue to refer to Figure 1 、 Figures 4-6, the modular vacuum coating unit 100 is arranged on a linear guide rail 500 in the same direction as the lengthening connection direction of each modular vacuum coating unit 200. The linear guide rail 500 is fixedly laid on the ground, and the vacuum chamber housing 1 of the modular vacuum coating unit 200 is slidably connected to the linear guide rail 500. The length of the linear guide rail 500 is greater than that of the modular vacuum coating unit 100.

[0041] In this way, (after the fasteners are removed), it is convenient to slide the vacuum chamber housing 1 away from each other, so that it is convenient for operators to enter during adjustment and maintenance without lifting and moving, which is convenient to use and greatly saves manpower and time. The length of the linear guide rail 500 is greater than the length of the modular vacuum coating unit 100, that is, it meets the movement stroke of sliding open. The lengthening connection operation during capacity expansion is also more convenient. It can be understood that the linear guide rail 500 also adopts a structure form that can be lengthened and connected. When it is necessary to increase production capacity, only the lengthened linear guide rail 500 and the modular vacuum coating unit 200 need to be purchased. After laying the guide rail, install the vacuum chamber housing 1, slide it close, seal and abut, fasten, and disassemble and assemble the receiving bin unit 400 to the outer end face 11 of the vacuum chamber housing 1 at the end after lengthening. In this embodiment or in the actual working condition, usually the first modular vacuum coating unit 200 is fixed on the linear guide rail 500 as the initial fixed end, and the subsequent modular vacuum coating units 200 are all slidably connected to the linear guide rail 500.

[0042] Please refer to Figure 2 , Figure 6 , wherein, a guide rail chute 141 is connected to the bottom surface 14 of the vacuum chamber housing 1, and is slidably connected to the linear guide rail 500 through the guide rail chute 141.

[0043] In this way, it is convenient to assemble and realize the sliding connection. The structures of the linear guide rail 500 and the guide rail chute 141 are mature and reliable in use.

[0044] Please refer to Figure 4 , wherein, a telescopic driving unit 5 with a working direction in the same direction as the linear guide rail 500 is provided between adjacent vacuum chamber housings 1 to (after the fasteners are removed) facilitate driving adjacent vacuum chamber housings 1 to move away from or close to each other. In this way, the process of operating the vacuum chamber housings 1 to slide away from or close to each other does not require manpower, which is more time-saving and labor-saving.

[0045] Please refer to Figure 3 , wherein, the telescopic driving unit 5 is connected to the outside of the side surface 12 of the vacuum chamber housing 1. There are two telescopic driving units 5 between adjacent vacuum chamber housings 1, and they are respectively located on both sides of the vacuum chamber housing 1.

[0046] In this way, the pushing and pulling forces on both sides are balanced, which is beneficial to the sliding of the vacuum chamber housing 1 relative to the linear guide rail 500, avoiding wedging and making the movement flexible.

[0047] Please refer to Figure 4 , wherein, the telescopic driving unit 5 is located at the lower part of the side surface 12 of the vacuum chamber housing 1. The telescopic driving unit 5 adopts a telescopic cylinder. The free ends of the telescopic cylinder and the telescopic rod 52 of the cylinder block 51 are respectively connected to the side surface 12 of the adjacent vacuum chamber housing 1. Specifically, in the figure, they are connected through the connecting seats protruding on the side surface 12.

[0048] In this way, the force application point is close to the linear guide 500, which is more conducive to the flexibility of sliding during the pushing and pulling process. The telescopic cylinder has a mature structure and reliable use.

[0049] Please refer to Figure 6 , as a feasible structure for lengthening connection, a sealing ring installation groove 112 is provided on the outer side of the end face 11 of the vacuum chamber housing 1. The sealing ring installation groove 112 is arranged in a circle outside the channel hole 111. A convex edge 113 is provided around the end face 11 of the vacuum chamber housing 1. A plurality of connection holes 114 are circumferentially spaced on the convex edge 113. The connection holes 114 on the two vacuum chamber housings 1 correspond one by one. The fastener is a bolt (not shown in the figure). The connection is implemented by passing the bolt through the connection holes 114 on the convex edges 113 of the two vacuum chamber housings 1. The circle of connection holes 114 is located outside the sealing ring installation groove 112. It can be understood that the end face 11 of the vacuum chamber housing 1 is a plane. A sealing ring is installed in the sealing ring installation groove 112 and is squeezed between the two vacuum chamber housings 1 during lengthening connection, and the end faces 11 of the two vacuum chamber housings 1 are abutted; due to the lengthening connection of the vacuum chamber housing 1, the sealing ring installation groove 112 only needs to be provided on the end face 11 of each vacuum chamber housing 1 facing the same direction, which reduces the manufacturing cost; then on the end face 11 of the vacuum chamber housing 1 at the end in the opposite direction, there is no sealing ring installation groove 112. Correspondingly, the sealing ring installation groove 112 can be provided on the end face of the housing of the feeding bin unit 300 or the receiving bin unit 400. The fastening connection structure between the end faces of the housings of the feeding bin unit 300 and the receiving bin unit 400 and the corresponding end face 11 of the vacuum chamber housing 1 is the same as the fastening connection structure between the end faces 11 of the adjacent vacuum chamber housings 1. During implementation, the bolt can be bolted by connecting a nut after passing through the two connection holes 114, or it can be screwed into a connection hole 114 in the form of an internal thread hole by passing through a connection hole 114 as a through hole. The specific method is not limited.

[0050] Please refer to Figure 7, during implementation, the structures of the feeding bin unit 300 and the receiving bin unit 400 are similar, including a rectangular housing. A winding mechanism is provided inside the housing. One end of the housing facing the vacuum chamber housing 1 has a structure similar to the end face 11 of the vacuum chamber housing 1, also having a channel hole and making its inner cavity communicate with the inner cavity of the vacuum chamber housing 1 after being hermetically connected through the channel hole. The housing and the vacuum chamber housing 1 are generally not disassembled and disconnected after being connected by the connection hole 114 and bolts; an openable and closable sealing door is provided on the outer end face of the housing, which is convenient for replacing the film-waiting roll on the winding mechanism. During replacement, no vacuum is pumped, the coating mechanism 2 does not perform magnetron sputtering, and only cooperates with the conveying of the film-waiting. After one roll is coated, the end is bonded to the start end of the next roll, and then it can be continuously sent out and extended to the winding mechanism of the receiving bin unit 400 to complete the initial connection of the new film-waiting roll.

[0051] Special note: As another feasible lengthening connection structure between the vacuum chamber housings 1, the sealing connection method of the sealing ring installation groove 112 is the same as above. The difference from the previous structure is that the fastening connection does not rely on the form of the convex edge 113, the connection hole 114 and the bolts. Instead, the telescopic driving unit 5 is directly used as the fastener. The telescopic driving unit 5 drives the end faces 11 of the adjacent vacuum chamber housings 1 to abut and maintains a certain tension force. After the vacuum is pumped during the working state of the vacuum coating machine, the internal negative pressure can drive the end faces 11 of the vacuum chamber housings 1 to remain tightly attached. The telescopic driving unit 5, as a commonly used "fastener", eliminates the operation of disassembling and installing bolts. The connection hole 114 is used as a backup connection, usually when the telescopic driving unit 5 fails and a certain tension force needs to be provided at the initial stage of vacuum pumping, or when the ultimate vacuum test is carried out. During normal use, after the telescopic driving unit 5 tightens the two vacuum chamber housings 1, they generally do not come apart either. Only during the initial installation of the equipment, when arranging the initial winding connection of the film-waiting inside each unit 200, or during necessary fault repairs, the equipment is stopped. In the non-vacuum pumping state, the telescopic driving unit 5 is used to drive the two vacuum chamber housings 1 to move away from each other by about half a meter, facilitating the operator to enter.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the purpose and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. Structure of a modular magnetron sputtering vacuum coating machine, characterized in that: Comprising a modular vacuum coating unit, the modular vacuum coating unit including a number of modular vacuum coating units connected in series; the modular vacuum coating unit includes a vacuum chamber housing, a coating mechanism and a vacuum pumping mechanism, the vacuum chamber housing is rectangular, and through holes communicating with the inner cavity and for the workpiece to be coated to pass through are respectively provided on both end faces of the vacuum chamber housing, the coating mechanism is located inside the vacuum chamber housing and is connected to both side faces of the vacuum chamber housing, the vacuum chamber housings of adjacent modular vacuum coating units are in end face sealing contact and the through holes on the end faces are relatively communicated, and a detachable fastener for maintaining the end face sealing contact is provided between adjacent vacuum chamber housings. The end face of the vacuum chamber housing at one end of the number of modular vacuum coating units connected in series is in end face sealing contact with a loading bin unit. The end face of the vacuum chamber housing at the other end of the number of modular vacuum coating units connected in series is in end face sealing contact with a receiving bin unit.

2. The structure of the modular magnetron sputtering vacuum coating machine according to claim 1, wherein: Each modular vacuum coating unit has an independent coating mechanism and a vacuum pumping mechanism, and the vacuum pumping mechanism is provided on the top surface of the vacuum chamber housing and communicates with the inner cavity of the vacuum chamber housing.

3. The modular magnetron sputtering vacuum coating machine structure according to claim 1, characterized in that: The modular vacuum coating unit is provided on a linear guide rail in the same direction as the direction of connection in series of each modular vacuum coating unit, and the vacuum chamber housing of the modular vacuum coating unit is slidably connected to the linear guide rail.

4. The structure of the modular magnetron sputtering vacuum coating machine according to claim 3, wherein: A guide rail chute is connected to the bottom surface of the vacuum chamber housing and is slidably connected to the linear guide rail by adapting to the guide rail chute.

5. The structure of the modular magnetron sputtering vacuum coating machine according to claim 3, characterized in that: An expansion drive unit with a working direction in the same direction as the linear guide rail is provided between adjacent vacuum chamber housings to drive adjacent vacuum chamber housings to move away from or close to each other, and the expansion drive unit forms the fastener.

6. The structure of the modular magnetron sputtering vacuum coating machine according to claim 5, characterized in that: The expansion drive unit is connected to the outer side of the side face of the vacuum chamber housing, and there are two expansion drive units between adjacent vacuum chamber housings and are respectively located on both sides of the vacuum chamber housing.

7. The structure of the modular magnetron sputtering vacuum coating machine according to claim 6, wherein: The expansion drive unit is located at the lower part of the side face of the vacuum chamber housing, the expansion drive unit adopts an expansion cylinder, and the free ends of the expansion cylinder and the expansion rod of the cylinder body are respectively connected to the side faces of adjacent vacuum chamber housings.

8. The modular magnetron sputtering vacuum coating machine structure according to any one of claims 3-6, characterized in that: The linear guide rail adopts a structure form of connection in series.

9. The structure of the modular magnetron sputtering vacuum coating machine according to claim 1, wherein: Each modular vacuum coating unit has an independent single-sided coating mechanism, and the single-sided coating mechanisms in adjacent vacuum chamber housings respectively coat the front and back sides of the workpiece to be coated.

10. The structure of the modular magnetron sputtering vacuum coating machine according to claim 1, wherein: A sealing ring installation groove is provided on the end face of the vacuum chamber housing, and the sealing ring installation groove is arranged in a circle outside the through hole. A convex edge is provided around the end face of the vacuum chamber housing, and connection holes are provided on the convex edge. The connection holes on the two vacuum chamber housings correspond one by one. The fastener is a bolt, and the connection is implemented by passing the bolt through the connection hole. The connection hole is located outside the sealing ring installation groove arranged in a circle.

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