Temperature thermocouple and double-cavity equipment

Abstract

The utility model discloses a temperature thermocouple and a double-cavity device, and relates to the technical field of semiconductor production, the temperature thermocouple comprises a detector and a buffer, the detector is provided with a detection line, the tail end of the detection line is provided with a contact block, the buffer comprises a mounting seat and a movable pin, and the movable pin is slidably connected to the mounting seat. The detection line is spirally wound around the periphery of the movable pin, a containing groove is formed in the tail end of the movable pin, the end, provided with the contact block, of the detection line is embedded in the containing groove, the contact block is located at the axial tail end of the movable pin, and the movable pin elastically stretches out to enable the contact block to elastically press and touch the surface of equipment. When the equipment deforms due to temperature change, the contact block can still keep pressing contact with the outer wall of the equipment, stable contact between the temperature thermocouple and the equipment is achieved, and temperature detection is not affected by thermal displacement of the equipment. The double-cavity equipment comprises an outer box and an inner box, and the movable pins can make the contact blocks elastically make contact with the outer wall of the inner box.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, and particularly relates to a temperature-measuring thermocouple and a double-chamber device. Background Art

[0002] In the semiconductor coating process, a reaction device with a double-chamber structure is used. The workpiece is placed in the inner chamber. There is a heater and a thermocouple between the outer chamber and the inner chamber. During operation, the heater heats the inner chamber, the thermocouple measures the temperature of the outer wall of the inner chamber, and the outer chamber is cooled by passing cooling water. Therefore, there is a large temperature difference between the outer chamber and the inner chamber during operation, resulting in relative displacement between the outer chamber and the inner chamber. This is mainly reflected in that the inner chamber expands outward due to heat and presses against the detection head of the thermocouple. After the process is completed, the inner chamber will contract when the temperature drops, and at this time, the outer wall of the inner chamber will be separated from the detection head, resulting in equipment failure due to inability to measure temperature. On the other hand, the current thermocouple needs to adjust the distance from the inner chamber after installation, so it is impossible to perform vacuum leak detection before installing the thermocouple, resulting in unreasonable installation. Content of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a temperature-measuring thermocouple and a double-chamber device, so that the thermocouple and the device maintain stable contact, ensure the working stability of the device, and are convenient for installation and debugging.

[0004] A temperature-measuring thermocouple according to an embodiment of the first aspect of the utility model includes:

[0005] A detector is provided with a detection wire, and a contact block is provided at the end of the detection wire;

[0006] A buffer includes a mounting seat and a movable pin. The movable pin is slidably connected to the mounting seat, and the movable pin elastically extends in a direction away from the mounting seat. The detection wire is spirally wound around the outer periphery of the movable pin. A receiving groove is provided at the end of the movable pin, and one end of the detection wire provided with the contact block is embedded in the receiving groove, and the contact block is located at the axial end of the movable pin.

[0007] A temperature-measuring thermocouple according to an embodiment of the first aspect of the present utility model has at least the following beneficial effects: In this embodiment, a detector and a buffer are provided. The detector is provided with a detection wire, and a contact block is provided at the end of the detection wire. The buffer includes a mounting seat and a movable pin. The movable pin is slidably connected to the mounting seat, and the movable pin elastically protrudes in a direction away from the mounting seat. The detection wire is spirally wound around the outer circumference of the movable pin. A receiving groove is provided at the end of the movable pin, and one end of the detection wire provided with the contact block is embedded in the receiving groove. The contact block is located at the axial end of the movable pin. The elastic protrusion of the movable pin enables the contact block to elastically press against the surface of the device. When the device deforms due to temperature changes, the contact block can still maintain pressure contact with the outer wall of the device, realizing stable contact between the temperature-measuring thermocouple and the device, so that temperature detection is not affected by the thermal displacement of the device.

[0008] According to an embodiment of the first aspect of the present utility model, the movable pin includes a telescopic section and a detection section. The telescopic section is slidably connected to the mounting seat, and the detection wire is fixed to the detection section.

[0009] According to an embodiment of the first aspect of the present utility model, the receiving groove is recessed in the radial side wall of the detection section. The receiving groove includes a fixed portion and a movable portion. The detection wire enters the receiving groove from the movable portion and is fixed in the fixed portion.

[0010] According to an embodiment of the first aspect of the present utility model, the mounting seat is provided with a sleeve, and an activity cavity is provided inside the sleeve. The movable pin slides in the activity cavity.

[0011] According to an embodiment of the first aspect of the present utility model, an elastic member is provided in the activity cavity, and the elastic member abuts against the end of the movable pin away from the contact block.

[0012] According to an embodiment of the first aspect of the present utility model, a limiting portion is provided at the end of the sleeve. A convex edge protruding radially outward is provided at the end of the movable pin that abuts against the elastic member. When the convex edge contacts the limiting portion, the protruding length of the movable pin can be limited.

[0013] According to an embodiment of the first aspect of the present utility model, the opening width of the movable portion on the radial side wall of the detection section is at least twice the diameter of the detection wire, and the depth of the receiving groove is at least 2 / 3 of the diameter of the detection wire.

[0014] According to an embodiment of the second aspect of the present utility model, a double-chamber device is provided, including the above-mentioned temperature-measuring thermocouple, including:

[0015] An outer box and an inner box. An outer cavity is formed between the outer box and the inner box. An inner cavity is provided inside the inner box. The mounting seat is hermetically installed on the outer box, and the movable pin enables the contact block to elastically press against the outer wall of the inner box.

[0016] A temperature-measuring thermocouple according to an embodiment of the second aspect of the present invention has at least the following beneficial effects: This embodiment is provided with an outer box and an inner box. An outer cavity is formed between the outer box and the inner box. The inner box has an inner cavity inside. The mounting seat is hermetically installed on the outer box, and the movable pin can elastically press the contact block against the outer wall of the inner box. When the inner box generates thermal displacement due to temperature change, the contact block and the inner box can maintain stable contact to achieve stable temperature detection. Moreover, the mounting seat is hermetically installed on the outer box, and sealing is completed after the mounting seat is installed, which is beneficial to improving the assembly convenience.

[0017] According to an embodiment of the second aspect of the present invention, the outer box is provided with a mounting tube. The mounting seat is fixed to the end of the mounting tube, and the movable pin is inserted into the outer cavity from the mounting tube and presses against the outer wall of the inner box.

[0018] According to an embodiment of the second aspect of the present invention, a sealing assembly is further provided. The sealing assembly includes a sealing member and a locking member. The sealing member is arranged between the end of the mounting tube and the mounting seat, and the locking member covers the radial outer periphery of the mounting seat and the mounting tube.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0020] The following further describes the present invention in conjunction with the drawings and embodiments, where:

[0021] Figure 1 Is an axonometric view of a temperature-measuring thermocouple in an embodiment of the first aspect of the present invention;

[0022] Figure 2 Is a cross-sectional view of a temperature-measuring thermocouple in an embodiment of the first aspect of the present invention;

[0023] Figure 3 Is Figure 1 An enlarged view of A in

[0024] Figure 4 Is an axonometric view of a double-chamber device in an embodiment of the second aspect of the present invention;

[0025] Figure 5 Is a cross-sectional view of a double-chamber device in an embodiment of the second aspect of the present invention;

[0026] Figure 6 Is Figure 5 An enlarged view of B in

[0027] Reference Signs:

[0028] Detector 100; Detection Line 101; Socket 102; Contact Block 103;

[0029] Buffer 110; mounting base 111; movable pin 112; receiving groove 113; sleeve 114; movable cavity 115; elastic member 116; fixing portion 117; movable portion 118; limiting portion 119; convex edge 120; telescopic section 121; detection section 122;

[0030] Outer box 130; inner box 131; outer cavity 132; inner cavity 133; mounting pipe 134; seal 135; locking member 136; positioning ring 137; positioning groove 138; heater 139. Detailed implementation manners

[0031] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0032] In the description of the present invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0033] In the description of the present invention, the meaning of several is one or more, the meaning of multiple is more than two, understand greater than, less than, exceeding, etc. as not including the present number, and understand above, below, within, etc. as including the present number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0034] In the description of the present invention, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meanings of the above words in the present invention in combination with the specific content of the technical solution.

[0035] Refer to Figure 1A temperature measuring thermocouple in an embodiment of the first aspect of the utility model includes a detector 100 and a buffer 110. The detector 100 is provided with a detection line 101. The end of the detection line 101 is provided with a contact block 103. The contact block 103 is used to contact the surface of the device to be tested. It can be understood that the contact block 103 uses copper material, which is conducive to improving thermal conductivity, thereby improving temperature measurement accuracy. The buffer 110 includes a mounting seat 111 and a movable pin 112. The movable pin 112 is slidably connected to the mounting seat 111, and the movable pin 112 elastically extends in a direction away from the mounting seat 111. The detection line 101 is spirally wound around the outer circumference of the movable pin 112. A receiving groove 113 is provided at the end of the movable pin 112. One end of a contact block 103 is provided on the detection line 101 and is embedded in the receiving groove 113. The contact block 103 is located at the axial end of the movable pin 112. It can be understood that when the movable pin 112 is telescoped and moved, the spirally arranged detection line 101 can be telescoped and moved synchronously, thereby preventing the detection line 101 from being pulled when moving and enabling the detection line 101 to be reasonably arranged. It can be understood that the movable pin 112 can elastically extend to press the contact block 103 and push the contact block 103 to press against the surface of the device to be tested. When the device is deformed due to temperature changes, due to the elastic extension of the movable pin 112, the contact block 103 can still maintain pressure contact with the outer wall of the device, thereby achieving stable contact between the temperature measuring thermocouple and the device, so that temperature detection is not affected by the thermal displacement of the device.

[0036] Reference Figure 2 , the end of the detection line 101 away from the movable pin 112 is provided with a socket 102 for connecting a display or a power supply, and the end of the detection line 101 provided with the socket 102 is fixed on the mounting seat 111. Further, the mounting seat 111 is provided with a sleeve 114, and the sleeve 114 has a movable cavity 115, and the movable pin 112 slides in the movable cavity 115. At the same time, the movable pin 112 includes a telescopic section 121 and a detection section 122. The telescopic section 121 is slidably connected to the mounting seat 111 and is located in the movable cavity 115, and the detection line 101 is fixed on the detection section 122. It can be understood that an elastic member 116 is provided in the movable cavity 115, and the elastic member 116 is selected from a coil spring. The elastic member 116 contacts the end of the movable pin 112 away from the contact block 103, so that the movable pin 112 has a tendency to extend outward, and can maintain pressure contact with the outer wall of the device to be tested, thereby ensuring the stability of temperature measurement. Furthermore, a limiting portion 119 is provided at the end of the sleeve 114, and the limiting portion 119 extends radially toward the movable pin 112 along the sleeve 114. The end of the movable pin 112 that contacts the elastic member 116 is provided with a protruding edge 120 protruding radially outward. When the protruding edge 120 contacts the limiting portion 119, the extending length of the movable pin 112 can be limited to prevent the movable pin 112 from escaping from the sleeve 114 under the push of the elastic member 116.

[0037] ReferenceFigure 3 , the receiving groove 113 is recessed in the radial side wall of the detection section 122. The receiving groove 113 penetrates from the radial side wall of the detection section 122 to the axial end face of the detection section 122. The receiving groove 113 includes a fixing portion 117 and a movable portion 118. The detection wire 101 enters the receiving groove 113 from the movable portion 118 and is fixed in the fixing portion 117. Further, the depth of the receiving groove 113 is at least 2 / 3 of the diameter of the detection wire 101, so as to ensure the stable installation of the detection wire 101 and avoid it from coming out. It can be understood that the inner walls on both sides of the fixing portion 117 abut against the outer radial wall of the detection wire 101, and the width of the fixing portion 117 is slightly smaller than the maximum outer diameter of the detection wire 101, so as to ensure the stable installation of the detection wire 101 in the detection section 122. It can be understood that since the detection wire 101 swings relative to the movable pin 112 when the movable pin 112 expands and contracts, the width of the movable portion 118 is greater than the outer diameter of the detection wire 101. Further, the opening width of the movable portion 118 on the radial side wall of the detection section 122 is at least twice the diameter of the detection wire 101, so as to provide a swinging space for the detection wire 101 and avoid damage to the detection wire 101 by the two sides of the opening of the movable portion 118.

[0038] Referring to Figure 4 , according to an embodiment of the second aspect of the present invention, a double-chamber device is provided, including the above-mentioned temperature-measuring thermocouple. Among them, it includes an outer box 130 and an inner box 131. An outer cavity 132 is formed between the outer box 130 and the inner box 131. The inner box 131 has an inner cavity 133 inside. The mounting seat 111 is sealed and installed on the outer box 130, and the movable pin 112 can elastically press the contact block 103 against the outer wall of the inner box 131. It can be understood that a heater 139 is provided in the outer cavity 132. The heater 139 is fixed in the outer wall of the inner box 131 and heats the inner box 131. The workpiece to be processed is placed in the inner box 131. The detection section 122 on the movable pin 112 passes through the heater 139 and presses against the outer wall of the inner box 131 where the heater 139 is provided, so as to monitor the temperature of the inner box 131 in real time.

[0039] Specifically, referring to Figure 5 and Figure 6, an installation pipe 134 is provided on the outer box 130, and the installation seat 111 is fixed to the end of the installation pipe 134 to fix the temperature-measuring thermocouple. It can be understood that a sealing member 135 is provided between the installation seat 111 and the end of the installation pipe 134. The sealing member 135 is annular. At the same time, a positioning ring 137 is provided on the radially inner side of the sealing member 135. The positioning ring 137 extends along the axial direction of the installation pipe 134. A positioning groove 138 for embedding the positioning ring 137 is provided on the inner wall of the installation seat 111, which can quickly position the sealing member 135 during installation. Further, a locking member 136 is provided on the outer periphery of the installation seat 111. The locking member 136 covers the installation seat 111 and the end of the installation pipe 134, and can press the installation seat 111 against the installation pipe 134 to achieve installation fixation and sealing. Therefore, after the temperature-measuring thermocouple is installed, sealing and vacuum pumping can be achieved. The end of the detection line 101 elastically contacts the outer wall of the inner box 131 through the movable pin 112, and there is no need to adjust the installation position of the temperature-measuring thermocouple, thereby effectively improving the installation convenience.

[0040] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art to which the present invention pertains, various changes can be made without departing from the gist of the present invention.

Claims

1. A temperature-measuring thermocouple, characterized in that, Comprising: A detector, provided with a detection wire, and a contact block is provided at the end of the detection wire; A buffer, comprising a mounting seat and a movable pin, the movable pin is slidably connected to the mounting seat, and the movable pin elastically projects in a direction away from the mounting seat, the detection wire is spirally wound around the outer periphery of the movable pin, a receiving groove is provided at the end of the movable pin, and one end of the detection wire provided with the contact block is embedded in the receiving groove, and the contact block is located at the axial end of the movable pin.

2. A temperature-measuring thermocouple according to claim 1, characterized in that, The movable pin includes a telescopic section and a detection section, the telescopic section is slidably connected to the mounting seat, and the detection wire is fixed to the detection section.

3. The thermocouple for temperature measurement according to claim 2, characterized in that, The receiving groove is recessed in the radial side wall of the detection section, the receiving groove includes a fixed portion and a movable portion, and the detection wire enters the receiving groove from the movable portion and is fixed in the fixed portion.

4. A temperature-measuring thermocouple according to claim 1, wherein The mounting seat is provided with a sleeve, and an activity cavity is provided inside the sleeve, and the movable pin slides in the activity cavity.

5. A temperature-measuring thermocouple according to claim 4, characterized in that, An elastic member is provided in the activity cavity, and the elastic member abuts against the end of the movable pin away from the contact block.

6. A temperature-measuring thermocouple according to claim 5, characterized in that, A limiting portion is provided at the end of the sleeve, and a convex edge protruding radially outward is provided at the end of the movable pin that abuts against the elastic member, and the protruding length of the movable pin can be limited when the convex edge contacts the limiting portion.

7. A temperature-measuring thermocouple according to claim 3, characterized in that, The opening width of the movable portion on the radial side wall of the detection section is at least twice the diameter of the detection wire, and the depth of the receiving groove is at least 2 / 3 of the diameter of the detection wire.

8. A double-chamber device, characterized in that, Comprising a temperature-measuring thermocouple as described in any one of claims 1 to 7, the temperature-measuring thermocouple includes a mounting seat, a movable pin and a detection wire, and a contact block connected to the end of the detection wire is provided at the end of the movable pin, wherein, comprising: An outer box and an inner box, an outer cavity is formed between the outer box and the inner box, an inner cavity is provided inside the inner box, the mounting seat is sealed and installed on the outer box, and the movable pin can elastically press the contact block against the outer wall of the inner box.

9. A double-chamber device according to claim 8, characterized in that, An installation pipe is provided on the outer box, the mounting seat is fixed to the end of the installation pipe, and the movable pin is inserted into the outer cavity from the installation pipe and presses against the outer wall of the inner box.

10. A double-chamber device according to claim 9, characterized in that, A sealing assembly is further provided, the sealing assembly includes a sealing member and a locking member, the sealing member is provided between the end of the installation pipe and the mounting seat, and the locking member covers the radial outer periphery of the mounting seat and the installation pipe.

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