Semiconductor detection system and slit adjusting mechanism thereof
By designing the adjustment unit in the slit adjustment mechanism, continuous adjustment and centering accuracy of the slit width are achieved, and the problems of discontinuous adjustment and inaccurate alignment in the prior art are solved, thereby improving operational convenience.
Patent Information
- Application Number
- CN202421345246.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-13
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-06-13
AI Technical Summary
The existing optical slit adjustment mechanism cannot achieve continuous adjustment, and re-centering is required after each adjustment, resulting in poor centering accuracy and inconvenient operation.
A slit adjustment mechanism is designed to connect the first partition plate and the second partition plate through the adjustment unit to achieve continuous adjustment of the width of the slit slot, and to maintain the center of the slit center and the optical path center through synchronous opposite or opposite movement.
The continuous adjustment of the slit width is achieved, ensuring that the centering position between the slit center and the optical path center remains unchanged, and improving the accuracy and convenience of centering.
Smart Images
Figure CN223065134U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of optical instruments, in particular to a semiconductor detection system and a slit adjusting mechanism thereof. Background Art
[0002] An optical slit refers to a slit formed by a pair of optical partitions (or called optical slit plates) on the optical path. By combining with a cage plate mounting rack, an adjusting base, a lens barrel and a microscope objective, it is used to realize optical experiments such as a tiny star point light source in the optical path and laser beam filtering. Currently, by changing the size of the optical slit in the optical path, the intensity of the outgoing beam can also be changed, which directly affects the image resolution.
[0003] Currently, there are mainly the following two ways to change the size of the optical slit in the optical path: (1) By replacing optical slit plates of different sizes to realize the change of the size of the optical slit. However, since the slit size of the optical slit plate is related to the number of optical slit plates, it cannot achieve continuous adjustment. Each adjustment requires replacing the optical slit plate, and the optical path may be affected during the replacement process; (2) The way of unidirectionally fine-tuning the slit aperture, that is, the optical slit is a pair of optical partitions, one side of the optical partition is fixed, and the other side of the optical partition can be finely adjusted. Each time the slit size changes, the slit aperture has to be readjusted and installed to ensure that the slit center coincides with the optical path center. However, the slit center position is a virtual position without a reference object, and it is very difficult to ensure the precise alignment of the slit center and the optical path center.
[0004] In view of this, the present utility model is specifically proposed. Summary of the Utility Model
[0005] The utility model provides a semiconductor detection system and a slit adjusting mechanism thereof to solve the technical problems that the existing slit adjusting mechanism cannot achieve continuous adjustment and needs to be realigned each time.
[0006] In a first aspect of the utility model, a slit adjusting mechanism is provided, including: a first partition; a second partition, oppositely arranged with the first partition and together forming a slit; and an adjusting unit, connected to the first partition and the second partition, for driving the first partition and the second partition to move synchronously towards or away from each other to adjust the slit width.
[0007] In this solution, the first partition plate and the second partition plate of the slit adjusting structure are oppositely arranged and together form a slit, and the adjusting unit is connected to the first partition plate and the second partition plate to drive the first partition plate and the second partition plate to move synchronously towards or away from each other, so that the slit width of the slit can be continuously contracted or expanded; since the first partition plate and the second partition plate move synchronously towards or away from each other along their centers during the movement process, it is ensured that the center position of the slit remains unchanged when the slit width size changes, and it is ensured that the center of the slit coincides with the center of the optical path all the time during the slit adjustment process. Furthermore, while the slit width can be continuously adjusted, the slit adjusting mechanism does not need to be re-centered after each adjustment of the slit width.
[0008] In a further solution of the present utility model, the adjusting unit includes: a fixed seat; and an adjusting screw rod, which is arranged on the fixed seat and is arranged to be rotatable relative to the fixed seat, and the adjusting screw rod is respectively threadedly connected to the first partition plate and the second partition plate to drive the first partition plate and the second partition plate to move synchronously towards or away from each other through rotational movement, wherein the thread rotation directions of the adjusting screw rod connected to the first partition plate and the second partition plate are opposite.
[0009] In a further solution of the present utility model, the adjusting unit further includes: a locking connecting piece, which is arranged to limit the rotation of the adjusting screw rod after the slit width of the slit is adjusted in place.
[0010] In a further solution of the present utility model, the adjusting screw rod includes: a first screw rod part, which is threadedly connected to the first partition plate; a second screw rod part, which is threadedly connected to the second partition plate; a connecting part, which is movably arranged on the fixed seat and is connected between the first screw rod part and the second screw rod part; a first driving part, which is connected to the connecting part to drive the first screw rod part and the second screw rod part to rotate through the connecting part; and a second driving part, which is connected to the first screw rod part or the second screw rod part to drive the first screw rod part and the second screw rod part to rotate.
[0011] In a further solution of the present utility model, both the first screw rod part and the second screw rod part are single-headed screw rods and are connected into one body through the connecting part; or the first screw rod part, the second screw rod part and the connecting part are integrally formed double-headed screw rods.
[0012] In a further solution of the present utility model, the second driving part is an external hexagonal stud structure.
[0013] In a further solution of the present utility model, the slit adjusting mechanism further includes a guiding component, and the guiding component is slidably connected to the first partition plate and the second partition plate and is used for guiding when the first partition plate and the second partition plate move, so that the first partition plate and the second partition plate can move synchronously towards or away from each other.
[0014] In a further aspect of the present utility model, the guiding assembly includes: a first mounting member; a second mounting member disposed opposite to the first mounting member; and a guiding column disposed between the first mounting member and the second mounting member and connected to the first mounting member and the second mounting member, and the guiding column is slidably connected to the first partition plate and the second partition plate, so that the first partition plate and the second partition plate can move synchronously towards or away from each other along the guiding column.
[0015] In a further aspect of the present utility model, the first mounting member is provided with a first mounting hole; the fixing seat is provided with a second mounting hole, and the extending direction of the second mounting hole is the same as that of the first mounting hole, for mounting the first mounting member and the fixing seat.
[0016] In a further aspect of the present utility model, the first mounting member is provided with a first positioning hole, and the fixing seat is provided with a second positioning hole; the slit adjusting mechanism further includes a positioning member, and the positioning member passes through the first positioning hole and the second positioning hole to limit the relative position between the first mounting member and the fixing seat.
[0017] In a further aspect of the present utility model, both the first partition plate and the second partition plate are made of a light-absorbing material; or a light-absorbing coating is provided on the surfaces of both the first partition plate and the second partition plate.
[0018] The second aspect of the present utility model provides a semiconductor detection system, including an optical module and the slit adjusting mechanism as described above; the optical module is disposed opposite to the slit of the slit adjusting mechanism, and the optical module is used to transmit a light beam to the slit adjusting mechanism; the adjusting unit of the slit adjusting mechanism can adjust the slit width to receive light beams with different light fluxes.
[0019] In summary, the semiconductor detection system and the slit adjusting mechanism provided by the present utility model have at least the following beneficial effects:
[0020] The present utility model optimizes the structure of the slit adjusting mechanism. By adopting the method of driving the first partition plate and the second partition plate to move synchronously towards or away from each other by the adjusting unit to adjust the slit width, continuous adjustment of the slit width is achieved, ensuring that the center of the slit does not change during the process of adjusting the slit width, and the centering position between the center of the slit and the optical path center does not change either. Moreover, after adjusting the slit width each time, there is no need to readjust the installation position of the entire mechanism, effectively ensuring the accuracy of the centering position and improving the convenience of adjusting the slit width. Description of the Drawings
[0021] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0022] Figure 1 Stereogram of the slit adjusting mechanism provided by an embodiment of the present invention;
[0023] Figure 2 Front view of the slit adjusting mechanism provided by an embodiment of the present invention;
[0024] Figure 3 Structural schematic diagram of the adjusting screw provided by an embodiment of the present invention;
[0025] Figure 4 Module schematic diagram of the semiconductor detection system provided by another embodiment of the present invention.
[0026] The reference numerals are as follows:
[0027] 100, slit adjusting mechanism; S, slit;
[0028] 10, first partition;
[0029] 20, second partition;
[0030] 30, adjusting unit; 31, fixed seat; 32, adjusting screw; 321, first screw part; 322, second screw part; 323, connecting part; 324, first driving part; 325, second driving part; 33, locking connecting piece;
[0031] 40, guiding component; 41, first mounting piece; 42, second mounting piece; 43, guiding column;
[0032] 1000, semiconductor detection system; 200, optical module. Specific embodiments
[0033] In the description of the present invention, it should be understood that when terms such as "center", "opposite", "away from", "centered on" are used to indicate the orientation or positional relationship, without special explanation, it is understood as the orientation or positional relationship based on the drawings shown. This is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.
[0034] In addition, features limited by "first" and "second" for descriptive purposes only should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Features limited by "first" and "second" may explicitly or implicitly include at least one of the limited features. When the description "a plurality of" appears, it generally means including at least two, such as two, three, etc., unless otherwise specifically limited.
[0035] In the present utility model, unless otherwise clearly specified and limited, terms such as "installed", "connected", "joined", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection, it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0036] In the description of this specification, terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.
[0037] It should be noted that "alignment" in the embodiments of the present utility model refers to the alignment of the optical axis (optical path center) of the light beam transmitted by the optical module 200 in the semiconductor detection system 1000 with the center position of the slit S of the slit adjustment mechanism 100.
[0038] As described above, considering that in the prior art, when adjusting the size of the optical slit, continuous adjustment cannot be achieved. After each adjustment, the mechanism needs to readjust the installation position to align the slit center with the optical path center, resulting in poor alignment accuracy. In this practical embodiment, the semiconductor detection system 1000 and its slit adjustment mechanism 100 are designed. In particular, in the slit adjustment mechanism 100, opposite first partition 10 and second partition 20 are designed to form slit S. By connecting the adjustment unit 30 to the first partition 10 and the second partition 20, during the process of adjusting the slit width of slit S, the adjustment unit 30 drives the first partition 10 and the second partition 20 to move synchronously towards or away from each other, ensuring that the position of the center of slit S between the first partition 10 and the second partition 20 remains unchanged during the slit width adjustment. Furthermore, while achieving continuous adjustment of the slit width of slit S, it avoids readjusting the alignment after each adjustment, effectively improving the alignment position accuracy and the convenience of adjusting slit S.
[0039] Please refer to Figures 1 to 4 , this embodiment of the present utility model provides a slit adjustment mechanism 100, including: a first partition 10; a second partition 20, which is disposed opposite to the first partition 10 and together forms slit S; and an adjustment unit 30, connected to the first partition 10 and the second partition 20, for driving the first partition 10 and the second partition 20 to move synchronously towards or away from each other to adjust the slit width of slit S.
[0040] It should be noted that, as Figure 1 and Figure 2 shown, the slit S in this embodiment is formed by the opposite surfaces of the first partition 10 and the second partition 20, and the center of slit S (slit center) is the symmetric center of the first partition 10 and the second partition 20. Since both the first partition 10 and the second partition 20 are connected to the adjustment unit 30 and are driven by the adjustment unit 30, the first partition 10 and the second partition 20 move synchronously towards or away from each other along the symmetric center, causing the slit width dimension of slit S to decrease or increase, thereby achieving continuous adjustment of the slit width of slit S. Moreover, during the adjustment process, the center of slit S always remains in the alignment position (the position coinciding with the original optical path center). Therefore, there is no need to perform alignment adjustment after the slit width adjustment, effectively ensuring the alignment accuracy and improving the convenience when adjusting the optical slit S.
[0041] It can be understood that the first partition 10 and the second partition 20 can be symmetrically designed along the centering position, which is beneficial to further improve the centering accuracy after the slit width is adjusted. The specific shapes and sizes of the first partition 10 and the second partition 20 can be flexibly selected according to different application scenarios. The main purpose of the adjustment unit 30 is to drive the first partition 10 and the second partition 20 to move synchronously towards or away from each other. On the basis of being able to achieve this function, the adjustment unit 30 can be directly or indirectly connected to the first partition 10 and the second partition 20, which are all applicable to the present utility model, and this embodiment does not make any restrictions. To avoid confusion for those skilled in the art, the following will further illustrate other features and advantages of the slit adjustment mechanism 100 through some preferred embodiments.
[0042] Please refer to Figure 1 and Figure 2 , in an optional solution of the embodiment of the present utility model, the adjustment unit 30 includes: a fixed seat 31; and an adjustment screw 32, which is arranged on the fixed seat 31 and is set to be rotatable relative to the fixed seat 31, and the adjustment screw 32 is respectively threadedly connected to the first partition 10 and the second partition 20 to drive the first partition 10 and the second partition 20 to move synchronously towards or away from each other through rotational movement. Among them, the thread rotation directions of the adjustment screw 32 connected to the first partition 10 and the second partition 20 are opposite.
[0043] The fixed seat 31 in this embodiment is mainly used to support the adjustment screw 32, so that the adjustment screw 32 can only rotate freely along its own axis during the process of adjusting the slit width. When the adjustment screw 32 rotates, the position of the fixed seat 31 remains fixed. The two sections on the adjustment screw 32 are respectively threadedly connected to the first partition 10 and the second partition 20, and the thread rotation directions of the adjustment screw 32 connected to the first partition 10 and the second partition 20 are opposite. For example, the adjustment screw 32 and the first partition 10 can be connected by a left-handed thread, and at this time, the adjustment screw 32 and the second partition 20 are connected by a right-handed thread, or the adjustment screw 32 and the first partition 10 are connected by a right-handed thread, and at this time, the adjustment screw 32 and the second partition 20 are connected by a left-handed thread. Thus, during the rotational movement of the adjustment screw 32, the first partition 10 and the second partition 20 can move synchronously towards or away from each other along the centering position, so that the slit width dimension decreases or increases, and the centering position remains at the same position before and after the adjustment of the slit S, and there is no need to perform centering adjustment again after the adjustment of the slit S, effectively ensuring the centering accuracy and the convenience of optical slit adjustment.
[0044] It should be noted that the adjusting screw 32 in this embodiment can pass through the fixed seat 31. To achieve the rotational movement function of the adjusting screw 32 during slit width adjustment, the adjusting screw 32 can be threadedly connected to the fixed seat 31 (the thread helix direction of the fixed seat 31 can be the same as that when either the first partition 10 or the second partition 20 is threadedly connected to the adjusting screw 32). When the adjusting screw 32 is rotated, the first partition 10 and the second partition 20 will move synchronously towards or away from each other relative to the adjusting screw 32, while the fixed seat 31 will move axially forward and backward relative to the adjusting screw 32. At this time, based on the threads with opposite helix directions at both ends of the adjusting screw 32, the adjusting screw 32 only rotates without translation. To install the fixed seat 31, a structure such as a mounting seat can be provided below the fixed seat 31 and the fixed seat 31 can be slidably connected to the mounting seat. Of course, a bearing can also be provided on the fixed seat 31 to movably connect the adjusting screw 32 and the fixed seat 31 through the bearing, so that the adjusting screw 32 can rotate during slit width adjustment.
[0045] In an optional solution of the embodiment of the present utility model, to improve the slit width stability of the slit S, the adjusting unit 30 further includes: a locking connector 33, which is arranged to limit the rotation of the adjusting screw 32 after the slit width of the slit S is adjusted in place, so as to prevent the slit width from changing.
[0046] In this embodiment, the adjusting unit 30 further includes a locking connector 33. Due to the diversification of the design of the first partition 10, the second partition 20 and the fixed seat 31, the locking connector 33 can have a variety of different arrangement methods; for example, the locking connector 33 can specifically be a pin shaft, a bolt and other components. When arranging, the first partition 10 or the second partition 20 is provided with a mounting through hole along the radial direction of the adjusting screw 32. After the slit width of the slit S is adjusted in place, the locking connector 33 passes through the first partition 10 or the second partition 20 through this mounting through hole to lock the adjusting screw 32, so that the position of the adjusting screw 32 is fixed; for another example, by providing a mounting through hole on the first partition 10 or the second partition 20 facing the fixed seat 31, after the slit width of the slit S is adjusted in place, the locking connector 33 passes through the first partition 10 or the second partition 20 through this mounting through hole and is fixedly connected to the fixed seat 31, so that the positions of the first partition 10 and the second partition 20 are fixed, and the adjusting screw 32 is locked accordingly; for another example, by providing a mounting through hole on the fixed seat 31 facing the adjusting screw 32, after the slit width of the slit S is adjusted in place, the locking connector 33 passes through the fixed seat 31 through this mounting through hole to lock the adjusting screw 32. The above arrangements of the locking connector 33 can effectively limit the rotation of the adjusting screw 32 after the slit width of the slit S is adjusted in place and improve the stability of the slit width S.
[0047] Such as Figure 2As shown, in a specific embodiment, the locking connecting member 33 is a bolt, and abuts against the adjusting screw 32 through an installation through hole (threaded hole) formed along the adjusting screw 32 on the second partition plate 20 to limit the rotation of the adjusting screw 32 after the slit width of the slit S is adjusted in place.
[0048] Please refer to Figure 3 , in an alternative solution of the embodiment of the present invention, the adjusting screw 32 includes: a first screw portion 321, threadedly connected to the first partition plate 10; a second screw portion 322, threadedly connected to the second partition plate 20; a connecting portion 323, movably disposed in the fixed seat 31 and connected between the first screw portion 321 and the second screw portion 322; a first driving portion 324, connected to the connecting portion 323 for driving the first screw portion 321 and the second screw portion 322 to rotate through the connecting portion 323; and a second driving portion 325, connected to the first screw portion 321 or the second screw portion 322 for driving the first screw portion 321 and the second screw portion 322 to rotate.
[0049] In this embodiment, the first screw portion 321 and the second screw portion 322 are arranged at intervals along the axial direction of the adjusting screw 32, and the surfaces of the first screw portion 321 and the second screw portion 322 are designed with threads having opposite helix directions. The first screw portion 321 is threadedly connected to the first partition plate 10, and the second screw portion 322 is threadedly connected to the second partition plate 20. The connecting portion 323 is designed between the first screw portion 321 and the second screw portion 322, and its two ends are respectively connected to the first screw portion 321 and the second screw portion 322. Specifically, a bearing can be designed on the connecting portion 323 to movably connect with the fixed seat 31 to ensure relative rotation between the connecting portion 323 and the fixed seat 31, and it can make the adjusting screw 32 not displace axially during rotation, avoiding affecting the continuous adjustment of the slit width of the slit S and the position of the slit center, so as to effectively ensure the accuracy of centering.
[0050] To facilitate the adjusting screw 32 to receive an external force for rotation, a first driving portion 324 and a second driving portion 325 are respectively designed on the adjusting screw 32. Both the first driving portion 324 and the second driving portion 325 can independently receive an external force to adjust the slit width of the slit S, making the adjustment of the optical slit S more flexible and convenient.
[0051] The first driving portion 324 in this embodiment can be an annular member (such as Figure 2 and Figure 3As shown, the inner end of the first driving part 324 along the radial direction is fixedly connected to the connecting part 323, and the outer end along the radial direction is used to receive an external acting force to drive the first screw part 321 and the second screw part 322 to rotate, thereby driving the first partition 10 and the second partition 20 to move synchronously towards or away from each other; and the second driving part 325 can be connected to either the first screw part 321 or the second screw part 322, or the second driving part 325 is connected to both the first screw part 321 and the second screw part 322 to drive the first screw part 321 and the second screw part 322 to rotate, thereby driving the first partition 10 and the second partition 20 to move synchronously towards or away from each other. The design of the first driving part 324 and the second driving part 325 is beneficial to the situation where when the optical path layout is compact and it is inconvenient to use the first driving part 324 to adjust the slit S, the second driving part 325 can also be used to adjust the slit S, making the slit adjusting mechanism 100 more convenient when adjusting the optical slit S.
[0052] In an optional solution of the embodiment of the present invention, both the first screw part 321 and the second screw part 322 are single - headed screws and are connected into one body through the connecting part 323. For example, the first screw part 321 and the second screw part 322 can be respectively screwed or clamped to the connecting part 323, so as to facilitate the disassembly and replacement of the first screw part 321, the second screw part 322 or the connecting part 323, and improve the maintenance convenience of the slit adjusting mechanism 100.
[0053] In some embodiments, the first screw part 321, the second screw part 322 and the connecting part 323 can also be an integrally formed double - headed screw as a whole, so as to help reduce the number of parts and improve the convenience during assembly.
[0054] To facilitate the adjustment of the force on the screw 32, in a further solution of the embodiment of the present invention, the first driving part 324 is a hand - adjusted knob to facilitate the manual adjustment of the slit width of the slit S; the second driving part 325 is an external hexagon stud structure to facilitate the adjustment of the slit width of the slit S by using instruments such as an electric wrench.
[0055] To improve the stability when adjusting the slit S, referring to Figure 1 and Figure 2 , in an optional solution of the embodiment of the present invention, the slit adjusting mechanism 100 further includes a guiding component 40. The guiding component 40 is slidably connected to the first partition 10 and the second partition 20 and is used for guiding when the first partition 10 and the second partition 20 move, so that the first partition 10 and the second partition 20 can move synchronously towards or away from each other.
[0056] It can be understood that the first partition plate 10 and the second partition plate 20 are driven by the adjusting screw 32, and there may be displacements along their respective rotation directions, resulting in unexpected changes in the slit S. In this embodiment, by designing the guiding component 40 to be slidably connected to the first partition plate 10 and the second partition plate 20, the guiding component 40 can restrict the rotational degrees of freedom of the first partition plate 10 and the second partition plate 20, and guide them during the movement of the first partition plate 10 and the second partition plate 20, so that the first partition plate 10 and the second partition plate 20 can only perform sliding translations along the guiding component 40, ensuring the synchronous approaching or separating movement of the first partition plate 10 and the second partition plate 20, so that the slit S can only change in the width direction, thereby improving the stability during the adjustment of the slit S.
[0057] To improve the stability during the movement of the first partition plate 10 and the second partition plate 20, in an optional solution of the embodiment of the present utility model, the guiding component 40 includes: a first mounting member 41; a second mounting member 42, which is disposed opposite to the first mounting member 41; and a guiding column 43, which is disposed between the first mounting member 41 and the second mounting member 42 and is connected to the first mounting member 41 and the second mounting member 42, and the guiding column 43 is slidably connected to the first partition plate 10 and the second partition plate 20, so that the first partition plate 10 and the second partition plate 20 can move synchronously approaching or separating along the guiding column 43.
[0058] It can be understood that the first mounting member 41 and the second mounting member 42 are designed oppositely to provide stable support for the guiding column 43. The guiding column 43 is designed between the first mounting member 41 and the second mounting member 42. The first partition plate 10 and the second partition plate 20 can be designed between the first mounting member 41 and the second mounting member 42, and are slidably connected to the guiding column 43 by opening through holes in the opposite directions of the first partition plate 10 and the second partition plate 20. The guiding column 43 is slidably connected to the through holes on the first partition plate 10 and the second partition plate 20, so that when the first partition plate 10 and the second partition plate 20 move synchronously, they can only perform approaching or separating translations along the guiding column 43, and will not have rotational displacements, thereby effectively improving the stability during the movement of the first partition plate 10 and the second partition plate 20 and avoiding unexpected changes in the slit S.
[0059] It should be noted that the number of the guiding columns 43 can be one or multiple, and the embodiment of the present utility model does not make specific restrictions; in some embodiments, two guiding columns 43 are designed, and the two guiding columns 43 are arranged at intervals along the length direction of the slit S, and are simultaneously slidably connected to the first partition plate 10 and the second partition plate 20, and fixedly connected to the first mounting member 41 and the second mounting member 42, so as to further improve the support and stability for the first partition plate 10 and the second partition plate 20, and enable the first partition plate 10 and the second partition plate 20 to move stably synchronously approaching or separating along the guiding column 43.
[0060] Please refer toFigure 2 To further improve the stability during the adjustment of the slit S, in an alternative solution of the embodiment of the present invention, the first mounting member 41 is provided with a first mounting hole T1; the fixed seat 31 is provided with a second mounting hole T2, and the extending direction of the second mounting hole T2 is the same as that of the first mounting hole T1 for mounting the first mounting member 41 and the fixed seat 31.
[0061] In this embodiment, the extending directions of the second mounting hole T2 and the first mounting hole T1 are the same and are respectively designed on the fixed seat 31 and the first mounting member 41, which can enable both the first mounting member 41 and the fixed seat 31 to be mounted on external components outside the slit adjustment mechanism 100 (such as the remaining components in the semiconductor detection system 1000) and form a stable connection with the external components, so that both the first mounting member 41 and the fixed seat 31 of the slit adjustment mechanism 100 can be externally supported, thereby further improving the stability during the adjustment of the slit S and ensuring the accuracy of the centering position.
[0062] Continue to refer to Figure 1 To further improve the stability during the adjustment of the slit S, in an alternative solution of the embodiment of the present invention, the first mounting member 41 is provided with one or more first positioning holes T3, and the fixed seat 31 is correspondingly designed with the same number of second positioning holes (not shown); the slit adjustment mechanism 100 further includes a positioning member (not shown), and the positioning member passes through the corresponding first positioning hole T3 and the second positioning hole to limit the relative positions of the first mounting member 41 and the fixed seat 31, avoiding relative displacement of the first mounting member 41 or the fixed seat 31 during the adjustment of the slit S, thereby further improving the stability during the adjustment of the slit S and ensuring the accuracy of the centering position.
[0063] In an alternative solution of the embodiment of the present invention, both the first partition 10 and the second partition 20 are made of light-absorbing materials (such as black polyester materials) to absorb the incident light during light transmission and reduce the influence of diffuse reflected light on the semiconductor detection system 1000; or by designing light-absorbing coatings on the surfaces of both the first partition 10 and the second partition 20, the incident light can be absorbed and the influence of diffuse reflected light on the semiconductor detection system 1000 can be reduced.
[0064] Please refer to Figure 4, another embodiment of the present utility model provides a semiconductor detection system 1000, which includes an optical module 200 and the slit adjustment mechanism 100 as described above; the optical module 200 is disposed in alignment with the slit S of the slit adjustment mechanism 100, and the optical module 200 is used to transmit a light beam to the slit adjustment mechanism 100; the adjustment unit 30 of the slit adjustment mechanism 100 can adjust the slit width of the slit S to receive light beams with different light fluxes. The optical module 200 being disposed in alignment with the slit S of the slit adjustment mechanism 100 can align the optical axis of the light beam transmitted by the optical module 200 with the center of the slit S. Before and after the adjustment unit 30 of the slit adjustment mechanism 100 adjusts the slit width of the slit S, the alignment position of the slit within the slit adjustment mechanism 100 will not change, so as to improve the accuracy during optical path alignment and the convenience during the adjustment of the slit width of the slit S.
[0065] In summary, for the semiconductor detection system 1000 and its slit adjustment mechanism 100 provided by the embodiments of the present utility model, by adopting the method of driving the first partition 10 and the second partition 20 to move synchronously towards or away from each other by the adjustment unit 30 to adjust the width of the slit S, continuous adjustment of the width of the slit S is achieved, ensuring that the center of the slit S will not change during the process of adjusting the slit width, and the alignment position between the center of the slit S and the optical path center will not change either. Moreover, when the slit adjustment mechanism 100 is initially installed, if the center position of the slit S is accurately aligned with the optical path center position, then this alignment position will not change during subsequent adjustments of the slit S. After each adjustment of the width of the slit S, there is no need to readjust the installation position of the entire mechanism, effectively ensuring the accuracy of the alignment position and improving the convenience during the adjustment of the slit width of the slit S.
[0066] Although the embodiments of the present utility model have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present utility model. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present utility model.
Claims
1. A slit adjusting mechanism (100), characterized in that, Comprising: A first partition plate (10); A second partition plate (20), which is disposed opposite to the first partition plate (10) and together forms a slit (S); And An adjusting unit (30), connected to the first partition plate (10) and the second partition plate (20), for driving the first partition plate (10) and the second partition plate (20) to move synchronously towards or away from each other to adjust the slit width of the slit (S); The adjusting unit (30) includes: a fixed seat (31); An adjusting screw (32), disposed on the fixed seat (31) and configured to be rotatable relative to the fixed seat (31), and the adjusting screw (32) is threadedly connected to the first partition plate (10) and the second partition plate (20) respectively, so as to drive the first partition plate (10) and the second partition plate (20) to move synchronously towards or away from each other through rotational movement; and A locking connection member (33), configured to limit the rotation of the adjusting screw (32) after the slit width of the slit (S) is adjusted in place.
2. The slit adjusting mechanism (100) according to claim 1, wherein The thread rotation directions of the adjusting screw (32) connected to the first partition plate (10) and the second partition plate (20) are opposite.
3. The slit adjusting mechanism (100) according to claim 2, characterized in that, The adjusting screw (32) includes: A first screw portion (321), threadedly connected to the first partition plate (10); A second screw portion (322), threadedly connected to the second partition plate (20); A connecting portion (323), movably disposed on the fixed seat (31) and connected between the first screw portion (321) and the second screw portion (322); A first driving portion (324), connected to the connecting portion (323), for driving the first screw portion (321) and the second screw portion (322) to rotate through the connecting portion (323); and A second driving portion (325), connected to the first screw portion (321) or the second screw portion (322), for driving the first screw portion (321) and the second screw portion (322) to rotate.
4. The slit adjusting mechanism (100) according to claim 3, wherein Both the first screw portion (321) and the second screw portion (322) are single-headed screws and are connected into one body through the connecting portion (323); or The first screw portion (321), the second screw portion (322) and the connecting portion (323) are integrally formed as a double-headed screw.
5. The slit adjusting mechanism (100) according to claim 3, characterized in that, The second driving portion (325) is an external hexagonal stud structure.
6. The slit adjusting mechanism (100) according to any one of claims 2-5, characterized in that, The slit adjusting mechanism (100) further includes a guiding assembly (40), the guiding assembly (40) is slidably connected to the first partition plate (10) and the second partition plate (20), and is used for guiding when the first partition plate (10) and the second partition plate (20) move, so that the first partition plate (10) and the second partition plate (20) can move synchronously towards or away from each other.
7. The slit adjusting mechanism (100) according to claim 6, characterized in that, The guiding assembly (40) includes: A first mounting member (41); A second mounting member (42), disposed opposite to the first mounting member (41); and The guide post (43) is disposed between the first mounting member (41) and the second mounting member (42) and connected to the first mounting member (41) and the second mounting member (42), and the guide post (43) is slidably connected to the first partition plate (10) and the second partition plate (20), so that the first partition plate (10) and the second partition plate (20) can move synchronously towards or away from each other along the guide post (43).
8. The slit adjusting mechanism (100) according to claim 1, wherein both the first partition plate (10) and the second partition plate (20) are made of light-absorbing material; or light-absorbing coatings are provided on the surfaces of both the first partition plate (10) and the second partition plate (20).
9. A semiconductor detection system (1000), characterized in that, comprising an optical module (200) and the slit adjusting mechanism (100) according to any one of claims 1-8; the optical module (200) is disposed in alignment with the slit (S) of the slit adjusting mechanism (100), and the optical module (200) is configured to transmit a light beam to the slit adjusting mechanism (100); the adjusting unit (30) of the slit adjusting mechanism (100) is capable of adjusting the slit width of the slit (S) to receive light beams with different light fluxes.